JPH064142Y2 - 細長い開口部用真空ゲ−ト弁 - Google Patents

細長い開口部用真空ゲ−ト弁

Info

Publication number
JPH064142Y2
JPH064142Y2 JP1986086748U JP8674886U JPH064142Y2 JP H064142 Y2 JPH064142 Y2 JP H064142Y2 JP 1986086748 U JP1986086748 U JP 1986086748U JP 8674886 U JP8674886 U JP 8674886U JP H064142 Y2 JPH064142 Y2 JP H064142Y2
Authority
JP
Japan
Prior art keywords
vertical moving
moving member
valve
opening
valve plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1986086748U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62199567U (enrdf_load_stackoverflow
Inventor
兵伍 松井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinmaywa Industries Ltd
Original Assignee
Shinmaywa Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinmaywa Industries Ltd filed Critical Shinmaywa Industries Ltd
Priority to JP1986086748U priority Critical patent/JPH064142Y2/ja
Publication of JPS62199567U publication Critical patent/JPS62199567U/ja
Application granted granted Critical
Publication of JPH064142Y2 publication Critical patent/JPH064142Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Sliding Valves (AREA)
  • Details Of Valves (AREA)
JP1986086748U 1986-06-06 1986-06-06 細長い開口部用真空ゲ−ト弁 Expired - Lifetime JPH064142Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986086748U JPH064142Y2 (ja) 1986-06-06 1986-06-06 細長い開口部用真空ゲ−ト弁

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986086748U JPH064142Y2 (ja) 1986-06-06 1986-06-06 細長い開口部用真空ゲ−ト弁

Publications (2)

Publication Number Publication Date
JPS62199567U JPS62199567U (enrdf_load_stackoverflow) 1987-12-18
JPH064142Y2 true JPH064142Y2 (ja) 1994-02-02

Family

ID=30943345

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986086748U Expired - Lifetime JPH064142Y2 (ja) 1986-06-06 1986-06-06 細長い開口部用真空ゲ−ト弁

Country Status (1)

Country Link
JP (1) JPH064142Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4092038B2 (ja) * 1999-03-10 2008-05-28 新明和工業株式会社 真空ゲート弁

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4846925A (enrdf_load_stackoverflow) * 1971-10-14 1973-07-04

Also Published As

Publication number Publication date
JPS62199567U (enrdf_load_stackoverflow) 1987-12-18

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