JPH0641360Y2 - 導波管 - Google Patents

導波管

Info

Publication number
JPH0641360Y2
JPH0641360Y2 JP367588U JP367588U JPH0641360Y2 JP H0641360 Y2 JPH0641360 Y2 JP H0641360Y2 JP 367588 U JP367588 U JP 367588U JP 367588 U JP367588 U JP 367588U JP H0641360 Y2 JPH0641360 Y2 JP H0641360Y2
Authority
JP
Japan
Prior art keywords
waveguide
slit
present
air
rectangular waveguide
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP367588U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01109200U (enrdf_load_stackoverflow
Inventor
勇二 石田
道夫 谷口
正一郎 蓑毛
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP367588U priority Critical patent/JPH0641360Y2/ja
Publication of JPH01109200U publication Critical patent/JPH01109200U/ja
Application granted granted Critical
Publication of JPH0641360Y2 publication Critical patent/JPH0641360Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
  • Non-Reversible Transmitting Devices (AREA)
JP367588U 1988-01-14 1988-01-14 導波管 Expired - Lifetime JPH0641360Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP367588U JPH0641360Y2 (ja) 1988-01-14 1988-01-14 導波管

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP367588U JPH0641360Y2 (ja) 1988-01-14 1988-01-14 導波管

Publications (2)

Publication Number Publication Date
JPH01109200U JPH01109200U (enrdf_load_stackoverflow) 1989-07-24
JPH0641360Y2 true JPH0641360Y2 (ja) 1994-10-26

Family

ID=31205521

Family Applications (1)

Application Number Title Priority Date Filing Date
JP367588U Expired - Lifetime JPH0641360Y2 (ja) 1988-01-14 1988-01-14 導波管

Country Status (1)

Country Link
JP (1) JPH0641360Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008066159A (ja) * 2006-09-08 2008-03-21 Noritsu Koki Co Ltd プラズマ発生装置およびそれを用いるワーク処理装置
JP2008071500A (ja) * 2006-09-12 2008-03-27 Noritsu Koki Co Ltd プラズマ発生装置およびそれを用いるワーク処理装置

Also Published As

Publication number Publication date
JPH01109200U (enrdf_load_stackoverflow) 1989-07-24

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