JPH0635467Y2 - 縦型ｃｖｄ装置用石英製ウェ−ハホルダ - Google Patents

縦型ｃｖｄ装置用石英製ウェ−ハホルダ

Info

Publication number
JPH0635467Y2
JPH0635467Y2 JP6652787U JP6652787U JPH0635467Y2 JP H0635467 Y2 JPH0635467 Y2 JP H0635467Y2 JP 6652787 U JP6652787 U JP 6652787U JP 6652787 U JP6652787 U JP 6652787U JP H0635467 Y2 JPH0635467 Y2 JP H0635467Y2
Authority
JP
Japan
Prior art keywords
wafer
holder
film
wafer holder
quartz
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP6652787U
Other languages
English (en)
Japanese (ja)
Other versions
JPS63177035U (un
Inventor
博信 宮
昭生 清水
Original Assignee
国際電気株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 国際電気株式会社 filed Critical 国際電気株式会社
Priority to JP6652787U priority Critical patent/JPH0635467Y2/ja
Publication of JPS63177035U publication Critical patent/JPS63177035U/ja
Application granted granted Critical
Publication of JPH0635467Y2 publication Critical patent/JPH0635467Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP6652787U 1987-04-30 1987-04-30 縦型ｃｖｄ装置用石英製ウェ−ハホルダ Expired - Lifetime JPH0635467Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6652787U JPH0635467Y2 (ja) 1987-04-30 1987-04-30 縦型ｃｖｄ装置用石英製ウェ−ハホルダ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6652787U JPH0635467Y2 (ja) 1987-04-30 1987-04-30 縦型ｃｖｄ装置用石英製ウェ−ハホルダ

Publications (2)

Publication Number Publication Date
JPS63177035U JPS63177035U (un) 1988-11-16
JPH0635467Y2 true JPH0635467Y2 (ja) 1994-09-14

Family

ID=30904615

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6652787U Expired - Lifetime JPH0635467Y2 (ja) 1987-04-30 1987-04-30 縦型ｃｖｄ装置用石英製ウェ−ハホルダ

Country Status (1)

Country Link
JP (1) JPH0635467Y2 (un)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5584936A (en) * 1995-12-14 1996-12-17 Cvd, Incorporated Susceptor for semiconductor wafer processing
TWI327339B (en) * 2005-07-29 2010-07-11 Nuflare Technology Inc Vapor phase growing apparatus and vapor phase growing method
JP2010258288A (ja) * 2009-04-27 2010-11-11 Sanyo Electric Co Ltd 固定治具およびそれを用いた半導体装置の製造方法
JP2014060403A (ja) * 2013-09-24 2014-04-03 Kokusai Electric Semiconductor Service Inc 基板保持具及びウェーハ支持方法

Also Published As

Publication number Publication date
JPS63177035U (un) 1988-11-16

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