JPH0632683Y2 - 半導体ウエハ保持ボート位置監視装置 - Google Patents

半導体ウエハ保持ボート位置監視装置

Info

Publication number
JPH0632683Y2
JPH0632683Y2 JP1987143115U JP14311587U JPH0632683Y2 JP H0632683 Y2 JPH0632683 Y2 JP H0632683Y2 JP 1987143115 U JP1987143115 U JP 1987143115U JP 14311587 U JP14311587 U JP 14311587U JP H0632683 Y2 JPH0632683 Y2 JP H0632683Y2
Authority
JP
Japan
Prior art keywords
boat
semiconductor wafer
switch
monitoring device
wafer holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987143115U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6448031U (OSRAM
Inventor
進 杉野
和良 小林
宏幸 成田
瑞樹 内田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP1987143115U priority Critical patent/JPH0632683Y2/ja
Publication of JPS6448031U publication Critical patent/JPS6448031U/ja
Application granted granted Critical
Publication of JPH0632683Y2 publication Critical patent/JPH0632683Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
JP1987143115U 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置 Expired - Lifetime JPH0632683Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987143115U JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987143115U JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Publications (2)

Publication Number Publication Date
JPS6448031U JPS6448031U (OSRAM) 1989-03-24
JPH0632683Y2 true JPH0632683Y2 (ja) 1994-08-24

Family

ID=31409648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987143115U Expired - Lifetime JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Country Status (1)

Country Link
JP (1) JPH0632683Y2 (OSRAM)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6127324Y2 (OSRAM) * 1980-05-23 1986-08-14
JPS6168444U (OSRAM) * 1984-10-12 1986-05-10

Also Published As

Publication number Publication date
JPS6448031U (OSRAM) 1989-03-24

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