JPH0632675Y2 - 半導体製造用塗布装置 - Google Patents

半導体製造用塗布装置

Info

Publication number
JPH0632675Y2
JPH0632675Y2 JP1989043124U JP4312489U JPH0632675Y2 JP H0632675 Y2 JPH0632675 Y2 JP H0632675Y2 JP 1989043124 U JP1989043124 U JP 1989043124U JP 4312489 U JP4312489 U JP 4312489U JP H0632675 Y2 JPH0632675 Y2 JP H0632675Y2
Authority
JP
Japan
Prior art keywords
resist
coating
data
nozzle
time
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1989043124U
Other languages
English (en)
Japanese (ja)
Other versions
JPH02137028U (enExample
Inventor
英夫 生津
哲好 石井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NTT Inc
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1989043124U priority Critical patent/JPH0632675Y2/ja
Publication of JPH02137028U publication Critical patent/JPH02137028U/ja
Application granted granted Critical
Publication of JPH0632675Y2 publication Critical patent/JPH0632675Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP1989043124U 1989-04-13 1989-04-13 半導体製造用塗布装置 Expired - Lifetime JPH0632675Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989043124U JPH0632675Y2 (ja) 1989-04-13 1989-04-13 半導体製造用塗布装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989043124U JPH0632675Y2 (ja) 1989-04-13 1989-04-13 半導体製造用塗布装置

Publications (2)

Publication Number Publication Date
JPH02137028U JPH02137028U (enExample) 1990-11-15
JPH0632675Y2 true JPH0632675Y2 (ja) 1994-08-24

Family

ID=31555274

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989043124U Expired - Lifetime JPH0632675Y2 (ja) 1989-04-13 1989-04-13 半導体製造用塗布装置

Country Status (1)

Country Link
JP (1) JPH0632675Y2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3986854B2 (ja) * 2002-03-14 2007-10-03 富士通株式会社 薬液塗布装置及びその薬液管理方法
JP4382569B2 (ja) 2004-05-07 2009-12-16 株式会社東芝 塗膜形成装置、塗膜形成方法および製造管理装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6273715A (ja) * 1985-09-27 1987-04-04 Toshiba Corp レジスト塗布装置

Also Published As

Publication number Publication date
JPH02137028U (enExample) 1990-11-15

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