JPH0631253A - Method and device for washing disk-shaped object - Google Patents

Abstract

PURPOSE:To improve degree of surface cleanliness of an object to be washed by concentrating the main stream of washing liquid on a disk-shaped object to be washed having a center hole therein and utilizing the center hole which causes residual particle to improve use efficiency and washing efficiency. CONSTITUTION:Objects to be washed 1 such as substrates for magnetic recording medium are arranged parallelly with their centers aligned and stored in a supporting device 2. After the device 2 is placed in a washing tank 12, a water feed pipe 4 is inserted into a center hole 1a of the object 1 through a hole provided in the tank 12. The pipe 4 has thereon a large number of jet holes 4a and a rotation device 5 for rotation and a reciprocating device 6 for reciprocation in axial direction are provided, which are connected to a feed pipe 7. During the washing, the washing liquid is allowed to overflow from the tank 12 and during discharging water, the amount of feed water is made smaller to discharge water from the bottom.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a cleaning apparatus and a cleaning method for cleaning a disk-shaped object such as a magnetic recording medium substrate with a cleaning liquid such as pure water.

[0002]

2. Description of the Related Art A conventional apparatus and method for cleaning a disk-shaped object such as a substrate for a magnetic recording medium uses a support device also called a cassette in which several tens of objects to be cleaned are aligned in parallel with their centers aligned. It is housed, immersed in a cleaning tank and cleaned by showering from above or by supplying a cleaning liquid from the bottom, and when cleaning is completed, the object to be cleaned is pulled up or the cleaning liquid is drained from the bottom.

[0003]

According to the above-mentioned conventional technique, since the object to be cleaned and the supporting device for accommodating the object to be cleaned have a fluid resistance, the main flow of the cleaning liquid supplied is to the wall surface of the cleaning tank having a small fluid resistance. Therefore, not all of the cleaning liquid contributes to cleaning. Further, since the magnetic recording medium substrate is a disk with a hole in the center thereof, the hole portion becomes a pool of water flow and particles are likely to stay, so when the object to be cleaned is pulled up after cleaning or from the bottom. At the time of the drainage, the accumulated particles are reattached to the vicinity of the inner circumference of the object to be cleaned, and the cleaning is not completely performed. The residual particles become a product defect of an object to be cleaned such as a magnetic recording medium substrate in a later process.

An object of the present invention is to concentrate the main stream of the cleaning liquid on the disk-shaped object of the cleaning object, and improve the use efficiency and cleaning efficiency of the cleaning solution by utilizing the central hole which causes the residual particles. An object of the present invention is to provide a cleaning device and a cleaning method for a disk-shaped object that can improve the surface cleanliness of an object.

[0005]

SUMMARY OF THE INVENTION A cleaning device according to a first aspect of the present invention is a support device for supporting an object to be cleaned having a center hole, and a water supply having an injection port for a cleaning liquid which is inserted through the center hole of the object to be cleaned. And a tube. At this time, the invention 2 includes a rotation device for rotating the water supply pipe.

The invention 3 comprises a reciprocating device for reciprocating the water supply pipe in the axial direction. A cleaning device according to a fourth aspect of the invention arranges the support device and the water supply pipe in a cleaning tank having an openable / closable drain port at the bottom. A cleaning method according to a fifth aspect of the invention is to eject a cleaning liquid from a central portion of a disk-shaped object to be cleaned having a central hole toward an outer peripheral direction. At this time, the sixth aspect of the invention is to rotate the jet direction of the cleaning liquid in the circumferential direction.

A cleaning method according to a seventh aspect of the present invention is the cleaning method according to the fifth or sixth aspect, in which the object to be cleaned is placed in a cleaning tank having a drain port that can be opened and closed at the bottom, and the cleaning liquid is sprayed in an amount larger than the amount discharged from the drain port. Thus, the cleaning liquid is washed while overflowing from the cleaning tank, and then the cleaning liquid is sprayed in an amount smaller than the amount of waste water discharged from the drain port to complete the cleaning. At this time,
The eighth aspect of the invention is to close the drain port when the cleaning liquid is injected in a larger amount than the drainage amount from the drain port.

[0008]

According to the invention 1, the object to be cleaned 1 is supported by the supporting device 2, and the method of the invention 5 can be used. According to the invention 2,
The injection port of the water supply pipe rotates in the circumferential direction, and the method of the invention 6 can be used.

According to the third aspect of the invention, the water supply pipe is inserted into and removed from the center hole of the object to be cleaned at the start and end of cleaning. According to invention 4, the method of invention 7 can be used. According to the invention 5, the article to be cleaned 1
The main stream of the cleaning liquid radially ejected from the central portion of the center hole 1a of the cleaning liquid always intensively cleans the particles on the surface of the object to be cleaned 1, and the discharged liquid of the cleaning liquid once cleaned is mixed with the new cleaning liquid again. It does not flow on the surface of the object to be cleaned 1. Therefore, the use efficiency of the cleaning liquid and the cleaning efficiency are improved, and the surface cleanliness of the object to be cleaned 1 is improved.

According to the sixth aspect, the uniformity of the cleaning action on the surface of the object to be cleaned 1 in the circumferential direction is improved. According to the invention 7, at the time of cleaning, the cleaning liquid for cleaning the object to be cleaned 1 rises along the wall surface of the cleaning tank 12 and overflows with the particles to be reliably discharged, and when draining, the inside of the cleaning tank 12 lowers. The particles floating on the liquid surface will not be washed away by the new cleaning liquid flowing on the surface of the object to be cleaned 1 and reattached to the object to be cleaned 1. The drainage port 11 may be opened slightly and the washing liquid may overflow from the washing tank 12 for washing, and heavy particles are discharged from the drainage port 11.

At this time, according to the eighth aspect, when there are no heavy particles, the floating light particles efficiently overflow.

[0012]

FIG. 1 is a perspective front view of a cleaning apparatus according to a first embodiment, FIG. 2 is a perspective side view of FIG. 1, FIG. 3 is a plan view of FIG. 1, and FIG. 4 is an enlarged view of a main part of a water supply pipe of FIG. 5, FIG. 5 is a side view of a main part showing a flow at the time of cleaning in FIG. 1, FIG. 6 is a side view of a main part showing a flow at the time of draining of FIG. 1, and FIG. 7 is a perspective front view of the cleaning apparatus of the second embodiment. FIG. 8 is a perspective front view of the cleaning apparatus according to the third embodiment. In each figure, components having the same reference numeral have approximately the same function, and duplicate explanation may be omitted. Further, the hook 2d and the hanger 3 are not shown in FIG. 2, and the hanger 3 is not shown in FIG.

In FIGS. 1 to 4, an object to be cleaned 1 which is an annular disk, such as a magnetic recording medium substrate, has a unit of several tens of sheets and is arranged in parallel with their axes aligned and is also called a cassette. It is stored in 2. The supporting device 2 has various shapes, but here, the four corners of the pair of supporting frames 2a are joined by the frame rods 2b, and the outer periphery of the object to be cleaned 1 is supported by the groove 3
More than one support rod 2c is fixed to the support frame 2a. 3
One of the supporting rods 2c of the book may be on the upper side and urged downward by a spring or the like. The support device 2 has its hook 2d
Is hooked on the hanger 3 and conveyed. A water supply pipe 4 having a plurality of injection ports 4a for cleaning liquid on the outer periphery is inserted into the center hole 1a of the object to be cleaned 1. The water supply pipe 4 is provided with a rotation device 5 that rotates the water supply pipe 4 and a reciprocating device 6 that reciprocates in the axial direction, and is connected to a supply pipe 7 that supplies a cleaning liquid such as pure water.

The support device 2 and the water supply pipe 4 are arranged so as to be able to be transported in a cleaning tank 12 having a drain port 11 which can be opened and closed at the bottom. The support device 2 accommodating the object to be cleaned 1 is placed on the stand 12a of the cleaning tank 12, and then the water supply pipe 4 is provided in the cleaning tank 12 through a hole (not shown) and the central hole 1 of the object to be cleaned 1.
Insert into a. A labyrinth seal or the like may be provided in the gap between the hole and the water supply pipe 4.

The cleaning method using such a cleaning device is as follows. The support device 2 accommodating the object to be cleaned 1 and the water supply pipe 4 are arranged in the cleaning tank 12. The cleaning liquid is sprayed in the radial direction from the spray port 4a of the water supply pipe 4 in the vicinity of the axis of the center hole 1a of the object 1 to be cleaned which is an annular disk. At the same time, the water supply pipe 4 is rotated by the rotation device 5, so that the cleaning liquid injection port 4a is rotated in the circumferential direction. Further, by reciprocating the water supply pipe 4 by the reciprocating device 6, the cleaning liquid injection port 4a is reciprocated in the axial direction. At the time of cleaning, the amount of water supplied that is greater than the amount of drainage is supplied to continue cleaning, and when draining, the amount of water supplied that is less than the amount of drainage is supplied to complete the cleaning. Drainage port 11 for cleaning
Is closed and the cleaning liquid may overflow from the cleaning tank 12 together with the particles to continue the cleaning.
The drainage port 11 may be opened slightly and the washing liquid may overflow from the washing tank 12 for washing, and heavy particles are discharged from the drainage port 11.

According to such a cleaning method, as shown in FIG. 5, at the time of cleaning, the main flow of the cleaning liquid radially injected radially from the injection port 4a near the axis of the central hole 1a of the object to be cleaned 1 is performed. The particles of the surface of the object to be cleaned 1 are always intensively washed, and the discharged liquid of the cleaning liquid once cleaned does not mix with the new cleaning liquid and flow again on the surface of the object to be cleaned 1. Therefore, the use efficiency of the cleaning liquid and the cleaning efficiency are improved, and the cleaning target 1
The surface cleanliness of is improved. Incidentally, it is preferable that the cleaning liquid sprayed by the conventional method has an appropriate spread of the angle θ as shown in FIG. Further, since the cleaning liquid jet port 4a is rotated in the circumferential direction, the uniformity of the cleaning action on the surface of the object to be cleaned 1 in the circumferential direction is improved. And the cleaning liquid injection port 4a
Is reciprocated in the axial direction, the surface of the object to be cleaned 1 is reliably exposed to the cleaning liquid, and the cleaning action is secured.

During cleaning, since the amount of water supplied is greater than the amount of waste water to continue the cleaning, the cleaning liquid for cleaning the object to be cleaned 1 rises along the wall surface of the cleaning tank 12 and overflows with particles to be reliably discharged. As shown in FIG. 6, when the water is drained, the amount of water supplied is smaller than the amount of the water drained to complete the cleaning. Therefore, the particles floating on the surface of the cleaning tank 12 that are descending are new cleaning liquid flowing on the surface of the object to be cleaned 1. It will not be washed away and will not adhere to the object to be cleaned 1 again.

The second embodiment shown in FIG. 7 is different from the first embodiment in that it does not have the cleaning tank 12 and is used by opening it in a clean room or the like, and an inverted U-shaped cover if necessary. May be covered with. The third embodiment shown in FIG. 8 differs from the first embodiment in that the cleaning tank 12, the rotation device 5, and the reciprocating device 6 are not provided, and the injection port 4a of the water supply pipe 4 may be made fine.

[0019]

According to the above-described cleaning apparatus and cleaning method of the present invention, the main flow of the cleaning liquid is concentrated on the object to be cleaned, and the use efficiency and cleaning efficiency of the cleaning liquid are improved by utilizing the central hole that causes residual particles. This has the effect of improving the surface cleanliness of the object to be cleaned.

[Brief description of drawings]

FIG. 1 is a perspective front view of a cleaning device according to a first embodiment.

FIG. 2 is a perspective side view of FIG.

FIG. 3 is a plan view of FIG.

FIG. 4 is an enlarged view of a main part of the water supply pipe of FIG.

FIG. 5 is a side view of a main part showing a flow at the time of cleaning in FIG.

FIG. 6 is a side view of a main part showing a flow at the time of draining in FIG.

FIG. 7 is a transparent front view of the cleaning apparatus according to the second embodiment.

FIG. 8 is a transparent front view of the cleaning apparatus according to the third embodiment.

[Explanation of symbols]

 1 Object to be washed 1a Center hole 2 Support device 3 Hanger 4 Water supply pipe 4a Injection port 5 Rotating device 6 Reciprocating device 7 Supply pipe 11 Drainage port 12 Cleaning tank

Claims (8)

[Claims] 1. A support device for supporting a disk-shaped object to be cleaned having a central hole, and a water supply pipe which is inserted into the central hole of the object to be cleaned and has an injection port for the cleaning liquid on the outer periphery. Cleaning device for disk-shaped objects. 2. The disk-shaped object cleaning apparatus according to claim 1, further comprising a rotation device for rotating the water supply pipe. 3. The cleaning apparatus according to claim 1 or 2,
A disk-shaped object cleaning device comprising a reciprocating device that reciprocates the water supply pipe in the axial direction. 4. The disk-shaped cleaning device according to claim 1, 2 or 3, wherein the support device and the water supply pipe are arranged in a cleaning tank having an openable / closable drain port at the bottom. Equipment for cleaning objects. 5. A method of cleaning a disk-shaped object, which comprises spraying a cleaning liquid from a central portion of a disk-shaped object to be cleaned having a central hole to an outer peripheral direction. 6. The cleaning method according to claim 5, wherein the jetting direction of the cleaning liquid is rotated in the circumferential direction. 7. The cleaning method according to claim 5 or 6,
The object to be cleaned is placed in a cleaning tank having a drain port that can be opened and closed at the bottom, and the cleaning liquid is sprayed more than the amount discharged from the drain port for cleaning while overflowing from the cleaning tank, and then the cleaning liquid is A method for cleaning a disk-shaped object, characterized in that the cleaning is completed by injecting less than the amount of drainage from the drain port. 8. The cleaning method according to claim 7, wherein the drain port is closed when the cleaning liquid is jetted in a larger amount than the drainage amount from the drain port.