JPH0630323B2 - Capacitor array - Google Patents

Capacitor array

Info

Publication number
JPH0630323B2
JPH0630323B2 JP63011578A JP1157888A JPH0630323B2 JP H0630323 B2 JPH0630323 B2 JP H0630323B2 JP 63011578 A JP63011578 A JP 63011578A JP 1157888 A JP1157888 A JP 1157888A JP H0630323 B2 JPH0630323 B2 JP H0630323B2
Authority
JP
Japan
Prior art keywords
capacitor
dielectric substrate
dielectric constant
substrate
capacitor electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP63011578A
Other languages
Japanese (ja)
Other versions
JPH01185913A (en
Inventor
克己 西山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP63011578A priority Critical patent/JPH0630323B2/en
Publication of JPH01185913A publication Critical patent/JPH01185913A/en
Publication of JPH0630323B2 publication Critical patent/JPH0630323B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Fixed Capacitors And Capacitor Manufacturing Machines (AREA)

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、1つの誘電体基板の複数のコンデンサを構成
してなるコンデンサアレイに関し、特に隣接するコンデ
ンサ電極の間隔を浮遊容量を増大させることなく狭める
ことにより、部品の小型化,コスト低減を実現できるよ
うにしたコンデンサアレイの構造に関する。
Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a capacitor array including a plurality of capacitors on one dielectric substrate, and more particularly to increasing the stray capacitance by spacing the adjacent capacitor electrodes. The present invention relates to the structure of a capacitor array that can be made smaller and the cost can be reduced by narrowing it.

〔従来の技術〕[Conventional technology]

従来から、コンデンサは、抵抗やコイル等と組み合わせ
て、電子回路のなかで基本的な機能を果たす部品として
多用されている。このようなコンデンサの一例として、
従来、第4図に示すコンデンサアレイがある。このコン
デンサアレイ1は、セラミックス製誘電体基板2の上面
に所定間隔をあけて3個の第1コンデンサ電極3を形成
し、上記誘電体基板2の下面の略全面に上記第1コンデ
ンサ電極3と該基板2を挟んで対向する共通電極として
の第2コンデンサ電極4を形成するとともに、上記それ
ぞれの第1,第2コンデンサ電極3,4にリード端子5
を半田付け接続して構成されている。これにより1つの
部品素子内に3個のコンデンサが構成されている。
2. Description of the Related Art Conventionally, a capacitor is often used as a component that performs a basic function in an electronic circuit in combination with a resistor, a coil and the like. As an example of such a capacitor,
Conventionally, there is a capacitor array shown in FIG. In this capacitor array 1, three first capacitor electrodes 3 are formed on a top surface of a ceramic dielectric substrate 2 at predetermined intervals, and the first capacitor electrode 3 and the first capacitor electrode 3 are formed on substantially the entire bottom surface of the dielectric substrate 2. A second capacitor electrode 4 is formed as a common electrode facing each other with the substrate 2 interposed therebetween, and a lead terminal 5 is formed on each of the first and second capacitor electrodes 3 and 4.
Are connected by soldering. As a result, three capacitors are formed in one component element.

また、上記コンデンサアレイ1は、誘電体基板2上に複
数のコンデンサ電極3を並列させることから、できるだ
け該電極膜3間の距離lを接近させることにより誘電体
基板2の面積を小さくして、部品の小型化の要請に応え
るようにしている。
In the capacitor array 1, the plurality of capacitor electrodes 3 are arranged in parallel on the dielectric substrate 2, so that the distance l between the electrode films 3 is made as close as possible to reduce the area of the dielectric substrate 2. We are trying to meet the demand for miniaturization of parts.

〔発明が解決しようとする問題点〕[Problems to be solved by the invention]

しかしながら、上記従来のコンデンサアレイ1において
は、一般的に静電容量を大きくするために上記誘電体基
板2に誘電率の高いBaTiO系セラミックスを採用
しており、上記隣合うコンデンサ電極3間が高誘電率の
物質で充填された構造となることから、上記コンデンサ
電極3間の距離lが近づくほど該電極膜3間の浮遊容量
Cが増大し、その結果コンデンサ同士を交流的に分離で
きなくなるという問題点がある。即ち、上記コンデンサ
アレイ1の理想の等価回路(第5図(a)参照)に対し
て、実際の等価回路(第5図(b)参照)には余分の浮遊
容量Cが存在していることになり、特性に悪影響を与え
る場合がある。従って、上記コンデンサ同士の分離をは
かるために浮遊容量Cの発生を抑えられる距離lを確保
する必要があることから、それだけ上記誘電体基板2の
面積が大きくなり、結局、部品の小型化の要請に十分応
えられていない。また、上記誘電体基板は面積が増大し
た分割れ易くなるとともに、部品コストが上昇するとい
う問題点もある。
However, in the conventional capacitor array 1 described above, BaTiO 3 ceramics having a high dielectric constant is generally used for the dielectric substrate 2 in order to increase the capacitance, and the space between the adjacent capacitor electrodes 3 is increased. Since the structure is filled with a material having a high dielectric constant, the stray capacitance C between the electrode films 3 increases as the distance 1 between the capacitor electrodes 3 decreases, and as a result, the capacitors cannot be separated in an AC manner. There is a problem. That is, there is an extra stray capacitance C in the actual equivalent circuit (see FIG. 5 (b)) in comparison with the ideal equivalent circuit of the capacitor array 1 (see FIG. 5 (a)). And may adversely affect the characteristics. Therefore, in order to separate the capacitors from each other, it is necessary to secure a distance l capable of suppressing the generation of the stray capacitance C, so that the area of the dielectric substrate 2 is increased correspondingly, and eventually, the miniaturization of parts is required. Is not fully answered. In addition, the above-mentioned dielectric substrate has a problem that the area is increased and it is easy to be divided, and the component cost is increased.

本発明の目的は、上記浮遊容量を増大させることなくコ
ンデンサ電極を近接して配置でき、ひいては部品の小型
化を実現できるとともに、部品コストを低減できるコン
デンサアレイを提供することにある。
An object of the present invention is to provide a capacitor array in which the capacitor electrodes can be arranged close to each other without increasing the above-mentioned stray capacitance, and eventually the size of parts can be reduced, and the cost of parts can be reduced.

〔問題点を解決するための手段〕[Means for solving problems]

そこで本発明は、誘電体基板の表面に所定の間隔をあけ
て複数の第1コンデンサ電極が、裏面に上記第1コンデ
ンサ電極と上記基板を挟んで対向する第2コンデンサ電
極がそれぞれ形成されたコンデンサアレイにおいて、上
記誘電体基板の上記隣合う第1コンデンサ電極の間の部
分に、酸化性雰囲気中でレーザー照射することにより、
誘電体基板を溶融させてなる空隙部と、誘電体基板から
低誘電体を溶融析出させてなり上記空隙部を充填する該
誘電体基板より誘電率の低い低誘電率部とを同時形成し
たことを特徴としている。ここで、レーザー照射によ
り、例えば基板を構成するBaTiOがTiOとな
り、この部分の誘電率が大幅に低下することから低誘電
率部を実現できるものである。
Therefore, the present invention is a capacitor in which a plurality of first capacitor electrodes are formed on the front surface of a dielectric substrate at predetermined intervals, and a second capacitor electrode is formed on the back surface so as to face the first capacitor electrode with the substrate sandwiched therebetween. In the array, by irradiating the portion of the dielectric substrate between the adjacent first capacitor electrodes with a laser in an oxidizing atmosphere,
Simultaneous formation of a void portion formed by melting the dielectric substrate and a low dielectric constant portion having a lower dielectric constant than the dielectric substrate formed by melting and depositing a low dielectric material from the dielectric substrate and filling the void portion. Is characterized by. Here, by laser irradiation, for example, BaTiO 3 forming the substrate becomes TiO 2 , and the dielectric constant of this portion is significantly reduced, so that a low dielectric constant portion can be realized.

〔作用〕[Action]

本発明に係るコンデンサアレイによれば、誘電体基板の
隣合う第1コンデンサ電極間に、誘電体基板より誘電率
の低い低誘電率部を形成したので、誘電体基板の上記隣
合うコンデンサ電極の間の部分が低誘電率となり、その
結果上記コンデンサ電極同士を近接させても浮遊容量の
増大を回避でき、コンデンサ同士の分離ができる。従っ
て、従来のものよりコンデンサ電極間の距離を狭めるこ
とができ、それだけ誘電体基板の面積を小さくでき、ひ
いては部品の小型化を実現できるとともに、割れの発生
を回避でき、しかも部品コストを低減できる。
According to the capacitor array of the present invention, the low dielectric constant portion having a lower dielectric constant than that of the dielectric substrate is formed between the adjacent first capacitor electrodes of the dielectric substrate. The portion between them has a low dielectric constant, and as a result, even if the capacitor electrodes are brought close to each other, an increase in stray capacitance can be avoided, and capacitors can be separated from each other. Therefore, the distance between the capacitor electrodes can be made smaller than that of the conventional one, the area of the dielectric substrate can be made smaller accordingly, and the miniaturization of parts can be realized, the occurrence of cracks can be avoided, and the cost of parts can be reduced. .

また、誘電体基板の第1コンデンサ電極間部分に、酸化
性雰囲気中でレーザーを照射して空隙部とこれを充填す
る低誘電率部とを同時に形成したので誘電体基板の第1
コンデンサ電極間部分に浮遊容量の増大を回避できるシ
ールドを容易確実に形成できる。
In addition, the gap between the first capacitor electrodes of the dielectric substrate is irradiated with the laser in the oxidizing atmosphere to simultaneously form the void portion and the low dielectric constant portion filling the void portion.
A shield that can avoid an increase in stray capacitance can be easily and reliably formed between the capacitor electrodes.

〔実施例〕〔Example〕

以下、本発明の実施例について説明する。 Examples of the present invention will be described below.

第1図は本発明の第1実施例によるコンデンサアレイを
説明するための図であり、図中、第4図と同一符号は同
一又は相当部分を示す。
FIG. 1 is a diagram for explaining a capacitor array according to a first embodiment of the present invention. In the figure, the same symbols as those in FIG. 4 indicate the same or corresponding parts.

本実施例のコンデンサアレイ1は、例えばBaTiO
系セラミックスを主成分とする誘電体基板2の上面,下
面に、それぞれAg厚膜ペースト等をスクリーン印刷し
て複数の第1コンデンサ電極3,共通電極としての第2
コンデンサ電極4を形成するとともに、これらの第1,
第2コンデンサ電極3,4にリード端子(図示せず)を
半田付け接続して構成されており、基本的構造は従来と
同様である。なお、必要により、上記誘電体基板2の外
表面を絶縁性樹脂等により被覆してもよい。
The capacitor array 1 of this embodiment is made of, for example, BaTiO 3.
A plurality of first capacitor electrodes 3 and a second common electrode 2 are formed by screen-printing Ag thick film paste or the like on the upper surface and the lower surface of the dielectric substrate 2 containing ceramics as a main component.
While forming the capacitor electrode 4, the first of these
A lead terminal (not shown) is connected to the second capacitor electrodes 3 and 4 by soldering, and the basic structure is the same as the conventional one. If necessary, the outer surface of the dielectric substrate 2 may be coated with an insulating resin or the like.

そして、本実施例の上記隣合う第1コンデンサ電極3の
間には低誘電率部6が形成されている。この低誘電率部
6は、上記誘電体基板2に、幅方向に延びる第1コンデ
ンサ電極3の縁部3aに沿って等間隔ごとに形成された
ミシン目状の孔部7により構成されており、該孔部7は
上記基板2を貫通して形成されている。ここで、上記孔
部7は、酸化性雰囲気中でレーザー照射することによっ
て形成されたものであり、該孔部7の周縁部分は上記レ
ーザー照射によって他の部分より誘電率が低くなってい
る。また、この孔部7の深さは貫通させないで途中まで
形成した場合も、その深さに応じた効果が得られる。
The low dielectric constant portion 6 is formed between the adjacent first capacitor electrodes 3 of this embodiment. The low dielectric constant portion 6 is composed of perforated holes 7 formed in the dielectric substrate 2 at equal intervals along the edge 3a of the first capacitor electrode 3 extending in the width direction. The hole 7 is formed so as to penetrate the substrate 2. Here, the hole 7 is formed by laser irradiation in an oxidizing atmosphere, and the peripheral portion of the hole 7 has a lower dielectric constant than other portions due to the laser irradiation. Further, even when the depth of the hole 7 is formed halfway without penetrating, the effect corresponding to the depth can be obtained.

次に本実施例の作用効果について説明する。Next, the function and effect of this embodiment will be described.

本実施例のコンデンサアレイ1によれば、隣接する第1
コンデンサ電極3間に、レーザー照射によって低誘電率
部6を形成したので、上記各孔部7内には誘電率が1の
空気が存在し、また孔部7の周囲の誘電体の誘電率が低
下していることから、誘電体基板2の上記隣合うコンデ
ンサ電極3の間の部分だけは、低誘電率となり、これに
より浮遊容量を減少できる。従って、上記コンデンサ電
極3同士を近接させてもコンデンサ同士の分離ができ、
チャンネルセパレーションを良好にできる。その結果、
従来のものよりコンデンサ電極間の距離を狭めることが
できる分、誘電体基板2の面積を小さくできるから、ひ
いては部品の小型化の要請に応じられるとともに、割れ
にくく、しかも部品コストを低減できる。しかもこの場
合、上記第1,第2コンデンサ電極3,4間は、高誘電
率の誘電体基板2により大きな静電容量が確保されてお
り、コンデンサ機能を損なうことはない。
According to the capacitor array 1 of this embodiment, the adjacent first
Since the low dielectric constant portion 6 was formed between the capacitor electrodes 3 by laser irradiation, air having a dielectric constant of 1 was present in each of the hole portions 7, and the dielectric constant of the dielectric material around the hole portion 7 was Since it is lowered, only the portion between the adjacent capacitor electrodes 3 of the dielectric substrate 2 has a low dielectric constant, which can reduce the stray capacitance. Therefore, even if the capacitor electrodes 3 are brought close to each other, the capacitors can be separated from each other,
Good channel separation. as a result,
Since the distance between the capacitor electrodes can be made smaller than that of the conventional one, the area of the dielectric substrate 2 can be made smaller, so that it is possible to meet the demand for miniaturization of parts, and it is hard to break and the cost of parts can be reduced. Moreover, in this case, a large capacitance is secured between the first and second capacitor electrodes 3 and 4 by the dielectric substrate 2 having a high dielectric constant, and the capacitor function is not impaired.

第2図は上記第1実施例の変形例を示し、これは上記誘
電体基板2に幅方向に延びる溝部8を、酸化性雰囲気中
でのレーザー照射により形成して、上記低誘電率部6を
構成した例である。この溝部8を形成した場合において
も、隣合うコンデンサ電極3間の誘電率を下げることが
できるので、上記実施例と同様の効果が得られる。
FIG. 2 shows a modification of the first embodiment, in which a groove portion 8 extending in the width direction is formed in the dielectric substrate 2 by laser irradiation in an oxidizing atmosphere, and the low dielectric constant portion 6 is formed. It is an example of configuring. Even when the groove portion 8 is formed, the dielectric constant between the adjacent capacitor electrodes 3 can be lowered, so that the same effect as in the above embodiment can be obtained.

次に第2実施例について説明する。Next, a second embodiment will be described.

本実施例は、酸化雰囲気中、例えば大気中、あるいは大
気中にさらに酸素を加えて誘電体基板の焼成時より酸素
分圧を高く設定した酸化雰囲気中において、レーザー1
0を照射することにより、誘電体基板2に幅方向に延び
る溝部9を溶融形成する(第3図(a)参照)と同時に、
上記誘電体基板2のBaTiOよりはるかに誘電率の
低いTiO等の低誘電体11を析出させて低誘電率部
6を構成した例である。
In this example, the laser 1 is used in an oxidizing atmosphere, for example, in the atmosphere or in an oxidizing atmosphere in which oxygen is further added to the atmosphere to set the oxygen partial pressure higher than that at the time of firing the dielectric substrate.
By irradiating 0, the groove portion 9 extending in the width direction is melted and formed in the dielectric substrate 2 (see FIG. 3 (a)), and at the same time,
This is an example in which the low dielectric constant portion 6 is formed by depositing a low dielectric constant 11 such as TiO 2 having a dielectric constant much lower than that of BaTiO 3 of the dielectric substrate 2.

本実施例によれば、レーザー10の照射により形成され
た溝部9内に、誘電体基板2よりはるかに低い誘電率の
低誘電体11を析出させたので、隣合うコンデンサ電極
3の間の部分が低誘電率の物質で充填されることとな
り、その結果上記コンデンサ電極3同士を近接させても
浮遊容量の増大を回避でき、上述した第1実施例と同様
の効果が得られる。
According to the present embodiment, since the low dielectric material 11 having a dielectric constant much lower than that of the dielectric substrate 2 is deposited in the groove portion 9 formed by the irradiation of the laser 10, the portion between the adjacent capacitor electrodes 3 is deposited. Will be filled with a substance having a low dielectric constant, and as a result, even if the capacitor electrodes 3 are brought close to each other, an increase in stray capacitance can be avoided, and the same effect as in the first embodiment described above can be obtained.

また、上記低誘電率部6は、レーザー照射により誘電体
基板2の幅方向にミシン目状に形成して構成してもよ
い。
Further, the low dielectric constant portion 6 may be formed by perforating in the width direction of the dielectric substrate 2 by laser irradiation.

さらに、上記レーザー10の照射時間は、誘電体基板2
上に第1コンデンサ電極3を形成した後、又は該電極膜
3を形成する前のどちらでもよい。
Further, the irradiation time of the laser 10 is the dielectric substrate 2
It may be either after forming the first capacitor electrode 3 on the upper side or before forming the electrode film 3.

さらにまた、上記コンデンサ電極3を蒸発し易い、例え
ばAlで形成する場合は、上記基板2の上面に連続して
コンデンサ電極3を形成し、しかる後、レーザー照射に
より電極膜3の分離と溝部9の形成とを同時に行なうこ
とができる。また、低誘電率物質を形成し易いように、
上記照射する部分に予め所定の添加物を塗布しておいて
もよい また、上記第1,第2実施例では、BaTiOからな
る誘電体基板を例にとって説明したが、本発明は勿論、
SrTiOを主成分とするもの等他のセラミックス製
基板にも採用できる。
Furthermore, when the capacitor electrode 3 is easily evaporated, for example, when it is formed of Al, the capacitor electrode 3 is continuously formed on the upper surface of the substrate 2, and then the electrode film 3 is separated by laser irradiation and the groove portion 9 is formed. Can be formed simultaneously. Further, in order to easily form a low dielectric constant material,
A predetermined additive may be applied in advance to the portion to be irradiated. In the first and second embodiments, the dielectric substrate made of BaTiO 3 has been described as an example.
It can also be applied to other ceramic substrates such as those containing SrTiO 3 as a main component.

〔発明の効果〕〔The invention's effect〕

以上のように本発明に係るコンデンサアレイによれば、
隣合う第1コンデンサ電極間に、誘電体基板より誘電率
の低い低誘電率部を形成したので、隣接するコンデンサ
電極間の浮遊容量を増大させることなく該電極膜間を狭
めることができ、ひいては部品の小型化を実現できると
ともに、部品コストを低減できる効果がある。また上記
低誘電率部のレーザー照射によって形成したので、この
低誘電率部の形状が容易である。
As described above, according to the capacitor array of the present invention,
Since the low dielectric constant portion having a lower dielectric constant than the dielectric substrate is formed between the adjacent first capacitor electrodes, it is possible to narrow the space between the electrode films without increasing the stray capacitance between the adjacent capacitor electrodes. It is possible to reduce the size of parts and reduce the cost of parts. Further, since the low dielectric constant portion is formed by laser irradiation, the shape of the low dielectric constant portion is easy.

【図面の簡単な説明】[Brief description of drawings]

第1図は本発明の第1実施例によるコンデンサアレイを
説明するための図であり、第1図(a)はその平面図、第
1図(b)はその断面図、第2図は上記実施例の変形例を
示す断面図、第3図(a),(b)は本発明の第2実施例によ
るコンデンサアレイを示す断面図、第4図(a),(b)はそ
れぞれ従来のコンデンサアレイを示す平面図,正面図、
第5図(a),(b)はそれぞれ上記コンデンサアレイの等価
回路図である。 図において、1はコンデンサアレイ、2は誘電体基板、
3は第1コンデンサ電極、4は第2コンデンサ電極、6
は低誘電率部、7は孔部、8,9は溝部、11は低誘電
体である。
FIG. 1 is a diagram for explaining a capacitor array according to a first embodiment of the present invention. FIG. 1 (a) is a plan view thereof, FIG. 1 (b) is a sectional view thereof, and FIG. FIG. 3 (a) and FIG. 3 (b) are sectional views showing a capacitor array according to a second embodiment of the present invention, and FIGS. 4 (a) and 4 (b) are conventional sectional views, respectively. Plan view, front view, showing the capacitor array
5 (a) and 5 (b) are equivalent circuit diagrams of the above-mentioned capacitor array, respectively. In the figure, 1 is a capacitor array, 2 is a dielectric substrate,
3 is the first capacitor electrode, 4 is the second capacitor electrode, 6
Is a low dielectric constant portion, 7 is a hole portion, 8 and 9 are groove portions, and 11 is a low dielectric material.

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】セラミクス製誘電体基板の一主面に所定の
間隔をあけて複数の第1コンデンサ電極を形成し、他主
面に上記第1コンデンサ電極と上記基板を挟んで対向す
る第2コンデンサ電極を形成してなるコンデンサアレイ
において、上記誘電体基板の上記隣合う第1コンデンサ
電極の間の部分に、酸化性雰囲気中でレーザー照射する
ことにより、誘電体基板を溶融させてなる空隙部と、誘
電体基板から低誘電体を溶融析出させてなり上記空隙部
を充填する該誘電体基板より誘電率の低い低誘電率部と
を同時形成したことを特徴とするコンデンサアレイ。
1. A plurality of first capacitor electrodes are formed on a main surface of a ceramics substrate made of ceramics at predetermined intervals, and a second main surface is opposed to the first capacitor electrode with the substrate interposed therebetween. In a capacitor array in which capacitor electrodes are formed, a space formed by melting the dielectric substrate by irradiating a laser between the adjacent first capacitor electrodes of the dielectric substrate in an oxidizing atmosphere. And a low dielectric constant portion having a lower dielectric constant than the dielectric substrate, which is formed by melting and depositing a low dielectric material from the dielectric substrate and fills the void portion, at the same time.
JP63011578A 1988-01-21 1988-01-21 Capacitor array Expired - Fee Related JPH0630323B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63011578A JPH0630323B2 (en) 1988-01-21 1988-01-21 Capacitor array

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63011578A JPH0630323B2 (en) 1988-01-21 1988-01-21 Capacitor array

Publications (2)

Publication Number Publication Date
JPH01185913A JPH01185913A (en) 1989-07-25
JPH0630323B2 true JPH0630323B2 (en) 1994-04-20

Family

ID=11781796

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63011578A Expired - Fee Related JPH0630323B2 (en) 1988-01-21 1988-01-21 Capacitor array

Country Status (1)

Country Link
JP (1) JPH0630323B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5583738A (en) * 1993-03-29 1996-12-10 Murata Manufacturing Co., Ltd. Capacitor array
JP6862668B2 (en) * 2016-03-25 2021-04-21 ヤマハ株式会社 Board and position detector
WO2017170389A1 (en) * 2016-03-30 2017-10-05 京セラ株式会社 High frequency substrate, high frequency package and high frequency module

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5842223A (en) * 1981-09-04 1983-03-11 松下電器産業株式会社 Composite electronic part unit
JPS5840813A (en) * 1981-09-04 1983-03-09 ティーディーケイ株式会社 Thick film composite part
JPS6020925U (en) * 1983-07-21 1985-02-13 株式会社クボタ Engine cover structure for agricultural machinery
JPS614420U (en) * 1984-06-12 1986-01-11 株式会社村田製作所 composite feedthrough capacitor

Also Published As

Publication number Publication date
JPH01185913A (en) 1989-07-25

Similar Documents

Publication Publication Date Title
JP3088021B2 (en) Voltage controlled oscillator
JPH0897070A (en) Ceramic capacitor
US5040093A (en) Capacitor and method of manufacturing same
JPH0630323B2 (en) Capacitor array
JPH06105800B2 (en) Electrostrictive effect element
JP3158794B2 (en) Capacitor array
JP2009170599A (en) Method for producing electronic component
JP3426988B2 (en) Multi-cavity wiring board
JPH081875B2 (en) Multilayer capacitor
JPH06204075A (en) Stacked ceramic electronic component for high frequency and its manufacture
JPH0630322B2 (en) Capacitor array
JP2000049037A (en) Laminated ceramic capacitor
JPH08241827A (en) Multilayer electronic part and manufacture thereof
JP2982916B2 (en) Multilayer ceramic electronic component and method of manufacturing the same
JP2000049035A (en) Laminated ceramic capacitor
JPS6214669Y2 (en)
JPH08130161A (en) Chip rc network
JPH09120933A (en) Thick-film capacitor
JPH07183163A (en) Trimming capacitor
JPH09246006A (en) Rectangular chip resistor and its manufacture
JPH0229712Y2 (en)
JPH0670938B2 (en) Manufacturing method of laminated electronic component with fuse
JPH11204374A (en) Thick film printed capacitor
JPH01114210A (en) Delay line
JPH11340073A (en) Laminated ceramic capacitor

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees