JPH0629423A - Sealing glass molded substrate - Google Patents

Abstract

PURPOSE:To ensure sealing with good accuracy at a low temperature by previously preventing sealing glass and a jig from being joinned with each other by disposing an insulating member not softened and melted upon a sealing heating processing at a location where the sealing glass makes contact with the jig. CONSTITUTION:Sealing glass is disposed and an insulating member 2 not softened and melted upon a sealing/heating processing is disposed on the lower portion of the sealing glass 1 to form a cylindrical sealing glass molded structure 3. The sealing glass 1 is prevented from being brought into contact with a jig 5 through the insulating member 2 by performing the sealing/heating processing using such a sealing molded structure 3, so that a pedestal 4 and the jig 5 may be constructed with the same material and highly accurate sealing may be ensured, keeping a set position. Further, even if low-melting point glass, which is impossible to be used convenationally when graphite is used for the jig 5, is employed at the sealing glass 1, the sealing glass 1 is prevented from making contact with the jig 5 through the insulating material 2, so that a sealing/heating processing at a low temperature is ensured to restrict any chemical change in the jig 5.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a glass molding for sealing which is used, for example, in hermetic sealing.

[0002]

2. Description of the Related Art For example, as described in Japanese Patent Laid-Open No. 3-106077, a sealing glass is used when performing a hermetic seal. Examples of the sealing glass include soda lime type and soda barium. It is a high melting point glass that is made by adding a small amount of a binder to glass powder of borosilicate, borosilicate, etc. to make a granular powder, press-molding the binder, then heat-treating it to form a tablet, and its softening point is 800.
It is about 1200 ℃.

[0003]

When a hermetic seal is performed using the sealing glass, the member to be sealed and the sealing glass are set on a sealing jig and the whole is heat treated for sealing up to the softening point. However, it is necessary to design the jig in consideration of the difference in elongation due to the thermal expansion of each material, and it is difficult to design the jig so that the positional accuracy is actually adjusted accurately.
That is, it is desirable to manufacture a jig with the same material as the material to be sealed in order to adjust the positional precision most accurately, but naturally this jig and the sealing glass cannot be used because they are also joined. Therefore, as a material for jigs, we have focused on the fact that the bonding between normal oxide glass and other materials is caused by the diffusion of oxygen. Carbon is widely used from the viewpoint of ease and price.

Further, since the sealing glass made of high melting point glass requires high-temperature sealing heat treatment, the sealing member is susceptible to chemical change (especially oxidation), and scale (heat rust) is generated after sealing. The work was complicated because it was necessary to perform a chemical treatment for dropping or to make the atmosphere of the sealing heat treatment remarkably reducing. As a means for suppressing the chemical change, it is conceivable to use a low melting point glass used for joining a cathode ray tube panel and a funnel, sealing an alumina IC package, or the like.
Since it contains O 2 as a main component, it is easily reduced, and PbO 2 is reduced to Pb in a reducing atmosphere considering the above-mentioned chemical change, and it cannot be used because it is easily bonded to the carbon jig.

[0005]

According to the present invention, in order to widen the selection range of materials used for jigs and to enable the use of low melting point glass, at least a part of the sealing glass is subjected to sealing heat treatment. An insulating member that does not soften and melt is arranged.

[0006]

By the molded glass for sealing in which an insulating member that does not soften and melt during the heat treatment for sealing is arranged in a portion of the glass for sealing that is in contact with the jig, the bonding of the glass for sealing and the jig can be prevented.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS An example of hermetically sealing the present invention will be described with reference to the embodiments shown in the accompanying drawings. In the following, an example of joining a pedestal (sealed member) and a pin in a pressure sensor or an acceleration sensor is shown.

A sealed glass molding 3 comprising a sealing glass 1 and an insulating member 2 arranged below the sealing glass 1 has an outer diameter of 2.9 mm,
It is made into a cylinder with an inner diameter of 1.4 mm and a thickness of 2.2 mm.

The pedestal 4 has a thickness of 2.0 mm and a pin (described later).
4a with a hole diameter of 3.0 mm for sealing the glass with sealing glass 1
And the center of each of the holes 4a, 5a is set in a jig 5 having a hole 5a having a hole diameter of 1.4 mm and a depth of 7 mm for inserting and positioning the pin.

The glass molding 3 for sealing is inserted into the hole 4a of the pedestal 4, and the pin 6 made of 50Ni-Fe alloy material having a length of 15 mm and a thickness of 1.25 mm is inserted into the hole 3a of the glass molding for sealing 3 at its tip. Is inserted so as to be positioned by the hole 5a of the jig 5, and these are subjected to a sealing heat treatment under a predetermined sealing condition, and the pedestal 4 and the pin 6 are sealed with the sealing glass 1.

By using the sealing glass molding 3 as described above, the sealing glass 1 does not come into contact with the jig 5 by the insulating member 2, so that the base 4 and the jig 5 can be made of the same material and set. It is possible to perform accurate sealing while maintaining the position. Further, even if a low melting point glass which cannot be used conventionally when graphite is used for the jig 5 is used as the sealing glass 1, the insulating material 2 prevents the sealing glass 1 from coming into contact with the jig 5. It can be used and therefore can perform heat treatment for sealing at low temperature.
Since the chemical change (particularly oxidation) can be suppressed and post-treatment such as scale removal can be omitted, the whole process can be simplified.

Next, a concrete example actually manufactured by the present inventor will be described.

[0013]

[Table 1]

Table 1 shows the results of the conventional example, some examples of the present invention, and comparative examples in which the insulating member 2 is not used for these examples. Glass for sealing 1 in each example
Is formed by pressing glass powder into a cylindrical shape and then removing the organic binder such as nitrocellulose or aromatic organic compound added for press molding to give strength, so that the glass is baked near the softening point of the sealing glass 1. A bonded glass tablet was used (conventional example, example and comparative example). Further, as the insulating member 2, those obtained by slicing a ceramic tube (Examples 1 and 6) and those obtained by molding and sintering glass powder as in the sealing glass 1 (Examples 2 to 5) were used.

In the conventional example in which the insulating member 2 is not used in the sealing glass 1 of high melting point glass that is generally used in the hermetic seal, the positional accuracy of the pedestal 4 and the jig 5 is poor, and scale is generated on the pedestal 4. It was observed.

In Examples 1 to 6, by using the insulating member 2, the sealing glass 1 was not joined to the jig 5,
The pedestal 4 and the pin 6 could be sealed. Particularly, when the base 4 and the jig 5 are made of the same material (Examples 1 and 3)
6), the thermal expansion coefficient is the same, so that the positional accuracy is good. In the second embodiment, the pedestal 4 and the jig 5 are different in material, but a low melting point glass is used as the sealing glass 1 and the temperature during the sealing heat treatment is low. It was possible to obtain the position accuracy almost the same as the above. In Comparative Example 1 in which the insulating member 2 is not used, the sealing glass 1 is the jig 5
Joined to.

Further, a low melting point glass which could not be used conventionally can be used as the glass 1 for sealing (Examples 2 to 6), and sealing with almost no generation of scale is possible, and chemical treatment after sealing is possible. Could be omitted. Moreover, it was found that when the low melting point glass was used, the pull-out strength of the pin 6 after sealing was higher than when the high melting point glass was used (Example 1). As a result of investigating the joint cross-section between the sealing glass 1 and the pin 6, in the latter case, the Ni-plated surface of the pin 6 and the sealing glass 1 were bonded.
In the former, it was found that the sealing glass 1 was highly corrosive to the Ni plating of the pin 6 and penetrated into the inside of the pin 6 to directly bond the 50Ni alloy and the sealing glass 1 to each other, thereby enhancing the strength. It is believed that Insulation member 2
In Comparative Examples 2 and 3 in which no glass is used, the sealing glass 1 is the jig 5
Joined to.

The present invention can be variously modified within the scope of the invention. For example, the shape of the insulating member 2 is not limited to a cylindrical shape, but is a concave shape that partially abuts the sealing glass 1 and the jig 5. The jig 5 can be eliminated by adopting a configuration in which the pedestal 4 and the pin 6 are supported by the lower end of the insulating member 2 as well as various shapes such as a convex shape.

Further, the materials for the sealing glass 1, the insulating member 2, the pedestal 4, the jig 5 and the pin 6 are not limited to those in the above-mentioned embodiment, and various combinations suitable for the use situation are possible. When giving priority, the borosilicate glass as the sealing glass 1, the mullite ceramics as the insulating member 2, the base 4,
When Kovar metal is used for the jig 5 and the pin 6, or when importance is placed on simplification of the entire process except chemical treatment after sealing, as the glass molded body 3 for sealing, low expansion glass and low expansion ceramics are added. It is also possible to configure the sealing glass 1 and the insulating member 2 using borosilicate glass, and perform low-temperature sealing heat treatment at about 450 to 500 ° C.

[0020]

INDUSTRIAL APPLICABILITY According to the present invention, at least a part of the sealing glass is provided with an insulating member which is not softened and melted during the sealing heat treatment, and prevents the sealing glass and the jig from being joined during the sealing heat treatment. Therefore, the jig can be made of the same material as the member to be sealed, and accurate sealing can be performed while maintaining the position where the member to be sealed is set on the jig.

Further, since the sealing glass and the jig are not in contact with each other, it is possible to use a low melting point glass which has been difficult to use in the past, and it is possible to perform sealing at a lower temperature than in the past. , The sealed members are less susceptible to chemical changes,
If the temperature at the time of heat treatment for sealing is up to about 550 ° C, almost no scale is generated and the post-treatment can be omitted, so that the whole process can be simplified.

[Brief description of drawings]

FIG. 1 is a perspective view of an embodiment of the present invention.

FIG. 2 is a cross-sectional view of a main part when sealing is performed using the above embodiment.

FIG. 3 is an exploded perspective view of FIG.

[Explanation of symbols]

 1 Glass for sealing 2 Insulation member 3 Molded glass for sealing 4 Pedestal 5 Jig 6 pins

Claims (2)

[Claims] 1. A molded glass body for sealing, wherein an insulating member which does not soften and melt during heat treatment for sealing is arranged on at least a part of the glass for sealing. 2. The molded glass for sealing according to claim 1, wherein the glass for sealing is a low melting point glass having a softening point of 550 ° C. or lower.