JPH0628776Y2 - 試料ステージ - Google Patents

試料ステージ

Info

Publication number
JPH0628776Y2
JPH0628776Y2 JP1987139540U JP13954087U JPH0628776Y2 JP H0628776 Y2 JPH0628776 Y2 JP H0628776Y2 JP 1987139540 U JP1987139540 U JP 1987139540U JP 13954087 U JP13954087 U JP 13954087U JP H0628776 Y2 JPH0628776 Y2 JP H0628776Y2
Authority
JP
Japan
Prior art keywords
sample
vacuum chamber
mounting member
moving mechanism
joint
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987139540U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6444555U (cs
Inventor
和夫 小柳
晃 寺本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP1987139540U priority Critical patent/JPH0628776Y2/ja
Publication of JPS6444555U publication Critical patent/JPS6444555U/ja
Application granted granted Critical
Publication of JPH0628776Y2 publication Critical patent/JPH0628776Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP1987139540U 1987-09-11 1987-09-11 試料ステージ Expired - Lifetime JPH0628776Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987139540U JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Publications (2)

Publication Number Publication Date
JPS6444555U JPS6444555U (cs) 1989-03-16
JPH0628776Y2 true JPH0628776Y2 (ja) 1994-08-03

Family

ID=31402892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987139540U Expired - Lifetime JPH0628776Y2 (ja) 1987-09-11 1987-09-11 試料ステージ

Country Status (1)

Country Link
JP (1) JPH0628776Y2 (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9159527B2 (en) 2003-10-16 2015-10-13 Carl Zeiss Microscopy, Llc Systems and methods for a gas field ionization source

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60227347A (ja) * 1984-04-25 1985-11-12 Hitachi Ltd 走査形電子顕微鏡
JPS6119042A (ja) * 1984-07-04 1986-01-27 Hitachi Ltd 荷電粒子線装置の試料室

Also Published As

Publication number Publication date
JPS6444555U (cs) 1989-03-16

Similar Documents

Publication Publication Date Title
JP2004176851A (ja) 除振台
JP3726207B2 (ja) アクティブ除振装置
JPH0628776Y2 (ja) 試料ステージ
JP2007537411A (ja) 振動減衰器又は絶縁器
JPH11150062A (ja) 除振装置及び露光装置並びに除振台の除振方法
EP0244470B1 (en) Ruggedized compact interferometer requiring minimum isolation from mechanical vibrations
JPH066444Y2 (ja) 試料ステージ
US20030197134A1 (en) Electron beam drawing apparatus
JPH0215008B2 (cs)
JP3398186B2 (ja) 真空内駆動装置
JPH0128686Y2 (cs)
JP2913064B2 (ja) 能動制振台
JPH0973872A (ja) 荷電粒子ビーム装置
JPH06176729A (ja) 走査型電子顕微鏡およびその類似装置
JP2004138523A (ja) アクティブ防振システムの加速度検出装置
JP2001093456A (ja) 荷電粒子ビーム装置
JP2546365Y2 (ja) 荷電粒子ビーム装置
EP1500983A3 (en) Isolation mounts for use with vacuum chambers and their application in lithographic projection apparatus
JPH06163668A (ja) 真空用移動装置
US6969854B1 (en) Arrangement for holding a particle beam apparatus
JPH11144658A (ja) 走査形電子顕微鏡及びウエハ位置決め装置
JPH0143897B2 (cs)
JPS618479A (ja) 真空装置
JPH09155725A (ja) 防振機構付き片面研磨装置
JP2601425Y2 (ja) 空気ばね装置