JPH0628773Y2 - 非走査形の電子線照射装置 - Google Patents
非走査形の電子線照射装置Info
- Publication number
- JPH0628773Y2 JPH0628773Y2 JP6348989U JP6348989U JPH0628773Y2 JP H0628773 Y2 JPH0628773 Y2 JP H0628773Y2 JP 6348989 U JP6348989 U JP 6348989U JP 6348989 U JP6348989 U JP 6348989U JP H0628773 Y2 JPH0628773 Y2 JP H0628773Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- shield electrode
- irradiation
- vacuum chamber
- beam irradiation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 31
- 239000012212 insulator Substances 0.000 claims description 8
- 230000005484 gravity Effects 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 238000005452 bending Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 239000011888 foil Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 239000012141 concentrate Substances 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000717 retained effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348989U JPH0628773Y2 (ja) | 1989-05-31 | 1989-05-31 | 非走査形の電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6348989U JPH0628773Y2 (ja) | 1989-05-31 | 1989-05-31 | 非走査形の電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH034454U JPH034454U (enrdf_load_stackoverflow) | 1991-01-17 |
| JPH0628773Y2 true JPH0628773Y2 (ja) | 1994-08-03 |
Family
ID=31593583
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6348989U Expired - Lifetime JPH0628773Y2 (ja) | 1989-05-31 | 1989-05-31 | 非走査形の電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0628773Y2 (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005300327A (ja) * | 2004-04-12 | 2005-10-27 | Iwasaki Electric Co Ltd | 電子線照射装置 |
| JP5918571B2 (ja) * | 2012-03-02 | 2016-05-18 | 浜松ホトニクス株式会社 | Ｘ線照射源 |
| CN114649204A (zh) * | 2022-03-15 | 2022-06-21 | 南京大学 | 一种亚10nm间隙电极对的制备方法 |
-
1989
- 1989-05-31 JP JP6348989U patent/JPH0628773Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH034454U (enrdf_load_stackoverflow) | 1991-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |