JPH034454U - - Google Patents

Info

Publication number
JPH034454U
JPH034454U JP6348989U JP6348989U JPH034454U JP H034454 U JPH034454 U JP H034454U JP 6348989 U JP6348989 U JP 6348989U JP 6348989 U JP6348989 U JP 6348989U JP H034454 U JPH034454 U JP H034454U
Authority
JP
Japan
Prior art keywords
electron beam
vacuum chamber
irradiation device
shield electrode
irradiation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6348989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0628773Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6348989U priority Critical patent/JPH0628773Y2/ja
Publication of JPH034454U publication Critical patent/JPH034454U/ja
Application granted granted Critical
Publication of JPH0628773Y2 publication Critical patent/JPH0628773Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP6348989U 1989-05-31 1989-05-31 非走査形の電子線照射装置 Expired - Lifetime JPH0628773Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6348989U JPH0628773Y2 (ja) 1989-05-31 1989-05-31 非走査形の電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6348989U JPH0628773Y2 (ja) 1989-05-31 1989-05-31 非走査形の電子線照射装置

Publications (2)

Publication Number Publication Date
JPH034454U true JPH034454U (enrdf_load_stackoverflow) 1991-01-17
JPH0628773Y2 JPH0628773Y2 (ja) 1994-08-03

Family

ID=31593583

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6348989U Expired - Lifetime JPH0628773Y2 (ja) 1989-05-31 1989-05-31 非走査形の電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0628773Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005300327A (ja) * 2004-04-12 2005-10-27 Iwasaki Electric Co Ltd 電子線照射装置
WO2013129072A1 (ja) * 2012-03-02 2013-09-06 浜松ホトニクス株式会社 Ｘ線照射源
CN114649204A (zh) * 2022-03-15 2022-06-21 南京大学 一种亚10nm间隙电极对的制备方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005300327A (ja) * 2004-04-12 2005-10-27 Iwasaki Electric Co Ltd 電子線照射装置
WO2013129072A1 (ja) * 2012-03-02 2013-09-06 浜松ホトニクス株式会社 Ｘ線照射源
JP2013182814A (ja) * 2012-03-02 2013-09-12 Hamamatsu Photonics Kk Ｘ線照射源
CN114649204A (zh) * 2022-03-15 2022-06-21 南京大学 一种亚10nm间隙电极对的制备方法

Also Published As

Publication number Publication date
JPH0628773Y2 (ja) 1994-08-03

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term