JPH0627650Y2 - 基板の搬出入処理装置 - Google Patents

基板の搬出入処理装置

Info

Publication number
JPH0627650Y2
JPH0627650Y2 JP14010489U JP14010489U JPH0627650Y2 JP H0627650 Y2 JPH0627650 Y2 JP H0627650Y2 JP 14010489 U JP14010489 U JP 14010489U JP 14010489 U JP14010489 U JP 14010489U JP H0627650 Y2 JPH0627650 Y2 JP H0627650Y2
Authority
JP
Japan
Prior art keywords
substrate
vacuum chamber
robot
mounting
unloading
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP14010489U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0378060U (enrdf_load_stackoverflow
Inventor
薫 高田
Original Assignee
日本建鐵株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日本建鐵株式会社 filed Critical 日本建鐵株式会社
Priority to JP14010489U priority Critical patent/JPH0627650Y2/ja
Publication of JPH0378060U publication Critical patent/JPH0378060U/ja
Application granted granted Critical
Publication of JPH0627650Y2 publication Critical patent/JPH0627650Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)
JP14010489U 1989-12-01 1989-12-01 基板の搬出入処理装置 Expired - Lifetime JPH0627650Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14010489U JPH0627650Y2 (ja) 1989-12-01 1989-12-01 基板の搬出入処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14010489U JPH0627650Y2 (ja) 1989-12-01 1989-12-01 基板の搬出入処理装置

Publications (2)

Publication Number Publication Date
JPH0378060U JPH0378060U (enrdf_load_stackoverflow) 1991-08-07
JPH0627650Y2 true JPH0627650Y2 (ja) 1994-07-27

Family

ID=31687102

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14010489U Expired - Lifetime JPH0627650Y2 (ja) 1989-12-01 1989-12-01 基板の搬出入処理装置

Country Status (1)

Country Link
JP (1) JPH0627650Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0378060U (enrdf_load_stackoverflow) 1991-08-07

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