JPH0627649Y2 - イオン処理装置 - Google Patents
イオン処理装置Info
- Publication number
- JPH0627649Y2 JPH0627649Y2 JP5643488U JP5643488U JPH0627649Y2 JP H0627649 Y2 JPH0627649 Y2 JP H0627649Y2 JP 5643488 U JP5643488 U JP 5643488U JP 5643488 U JP5643488 U JP 5643488U JP H0627649 Y2 JPH0627649 Y2 JP H0627649Y2
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- measuring device
- ion
- current
- target part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 23
- 230000007935 neutral effect Effects 0.000 claims description 20
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000009413 insulation Methods 0.000 description 6
- 238000005468 ion implantation Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000002950 deficient Effects 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 101100327917 Caenorhabditis elegans chup-1 gene Proteins 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5643488U JPH0627649Y2 (ja) | 1988-04-26 | 1988-04-26 | イオン処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5643488U JPH0627649Y2 (ja) | 1988-04-26 | 1988-04-26 | イオン処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01161261U JPH01161261U (enrdf_load_stackoverflow) | 1989-11-09 |
| JPH0627649Y2 true JPH0627649Y2 (ja) | 1994-07-27 |
Family
ID=31282312
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5643488U Expired - Lifetime JPH0627649Y2 (ja) | 1988-04-26 | 1988-04-26 | イオン処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0627649Y2 (enrdf_load_stackoverflow) |
-
1988
- 1988-04-26 JP JP5643488U patent/JPH0627649Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01161261U (enrdf_load_stackoverflow) | 1989-11-09 |
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