JPH01161261U - - Google Patents

Info

Publication number
JPH01161261U
JPH01161261U JP5643488U JP5643488U JPH01161261U JP H01161261 U JPH01161261 U JP H01161261U JP 5643488 U JP5643488 U JP 5643488U JP 5643488 U JP5643488 U JP 5643488U JP H01161261 U JPH01161261 U JP H01161261U
Authority
JP
Japan
Prior art keywords
measuring device
shutter
target section
resistance measuring
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5643488U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0627649Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5643488U priority Critical patent/JPH0627649Y2/ja
Publication of JPH01161261U publication Critical patent/JPH01161261U/ja
Application granted granted Critical
Publication of JPH0627649Y2 publication Critical patent/JPH0627649Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5643488U 1988-04-26 1988-04-26 イオン処理装置 Expired - Lifetime JPH0627649Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5643488U JPH0627649Y2 (ja) 1988-04-26 1988-04-26 イオン処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5643488U JPH0627649Y2 (ja) 1988-04-26 1988-04-26 イオン処理装置

Publications (2)

Publication Number Publication Date
JPH01161261U true JPH01161261U (enrdf_load_stackoverflow) 1989-11-09
JPH0627649Y2 JPH0627649Y2 (ja) 1994-07-27

Family

ID=31282312

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5643488U Expired - Lifetime JPH0627649Y2 (ja) 1988-04-26 1988-04-26 イオン処理装置

Country Status (1)

Country Link
JP (1) JPH0627649Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0627649Y2 (ja) 1994-07-27

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