JPS62126361U - - Google Patents

Info

Publication number
JPS62126361U
JPS62126361U JP1422186U JP1422186U JPS62126361U JP S62126361 U JPS62126361 U JP S62126361U JP 1422186 U JP1422186 U JP 1422186U JP 1422186 U JP1422186 U JP 1422186U JP S62126361 U JPS62126361 U JP S62126361U
Authority
JP
Japan
Prior art keywords
filament
electron beam
resistance
evaporation device
measuring circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1422186U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1422186U priority Critical patent/JPS62126361U/ja
Publication of JPS62126361U publication Critical patent/JPS62126361U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1422186U 1986-02-03 1986-02-03 Pending JPS62126361U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1422186U JPS62126361U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1422186U JPS62126361U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Publications (1)

Publication Number Publication Date
JPS62126361U true JPS62126361U (enrdf_load_stackoverflow) 1987-08-11

Family

ID=30804004

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1422186U Pending JPS62126361U (enrdf_load_stackoverflow) 1986-02-03 1986-02-03

Country Status (1)

Country Link
JP (1) JPS62126361U (enrdf_load_stackoverflow)

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