JPH03113830U - - Google Patents

Info

Publication number
JPH03113830U
JPH03113830U JP2287790U JP2287790U JPH03113830U JP H03113830 U JPH03113830 U JP H03113830U JP 2287790 U JP2287790 U JP 2287790U JP 2287790 U JP2287790 U JP 2287790U JP H03113830 U JPH03113830 U JP H03113830U
Authority
JP
Japan
Prior art keywords
metal film
needles
ion beam
film
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2287790U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2287790U priority Critical patent/JPH03113830U/ja
Publication of JPH03113830U publication Critical patent/JPH03113830U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2287790U 1990-03-06 1990-03-06 Pending JPH03113830U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2287790U JPH03113830U (enrdf_load_stackoverflow) 1990-03-06 1990-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2287790U JPH03113830U (enrdf_load_stackoverflow) 1990-03-06 1990-03-06

Publications (1)

Publication Number Publication Date
JPH03113830U true JPH03113830U (enrdf_load_stackoverflow) 1991-11-21

Family

ID=31525882

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2287790U Pending JPH03113830U (enrdf_load_stackoverflow) 1990-03-06 1990-03-06

Country Status (1)

Country Link
JP (1) JPH03113830U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006352165A (ja) * 2006-09-21 2006-12-28 Hitachi Ltd 不良検査方法および装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006352165A (ja) * 2006-09-21 2006-12-28 Hitachi Ltd 不良検査方法および装置

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