JPH02132654U - - Google Patents

Info

Publication number
JPH02132654U
JPH02132654U JP3981989U JP3981989U JPH02132654U JP H02132654 U JPH02132654 U JP H02132654U JP 3981989 U JP3981989 U JP 3981989U JP 3981989 U JP3981989 U JP 3981989U JP H02132654 U JPH02132654 U JP H02132654U
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JP
Japan
Prior art keywords
carbon
sample
large current
rod
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3981989U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0730674Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1989039819U priority Critical patent/JPH0730674Y2/ja
Publication of JPH02132654U publication Critical patent/JPH02132654U/ja
Application granted granted Critical
Publication of JPH0730674Y2 publication Critical patent/JPH0730674Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)
JP1989039819U 1989-04-04 1989-04-04 カーボン蒸着装置 Expired - Lifetime JPH0730674Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1989039819U JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1989039819U JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Publications (2)

Publication Number Publication Date
JPH02132654U true JPH02132654U (enrdf_load_stackoverflow) 1990-11-05
JPH0730674Y2 JPH0730674Y2 (ja) 1995-07-12

Family

ID=31549057

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1989039819U Expired - Lifetime JPH0730674Y2 (ja) 1989-04-04 1989-04-04 カーボン蒸着装置

Country Status (1)

Country Link
JP (1) JPH0730674Y2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489544U (enrdf_load_stackoverflow) * 1990-12-12 1992-08-05
JPH05757U (ja) * 1991-02-19 1993-01-08 サンユー電子株式会社 カーボン自動膜厚蒸着装置
JP2009068084A (ja) * 2007-09-14 2009-04-02 Ritsumeikan 炭素被覆金属微粒子の製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS612447A (ja) * 1984-06-15 1986-01-08 Hitachi Ltd ル−プ伝送系の迂回路構成方式
JPS612447U (ja) * 1984-06-06 1986-01-09 三菱電機株式会社 真空蒸着装置
JPS61142862A (ja) * 1984-12-17 1986-06-30 Fujitsu Ltd 撮像装置
JPS61186472A (ja) * 1985-02-15 1986-08-20 Hironobu Sato 蒸着非結晶膜製造装置
JPS61142862U (enrdf_load_stackoverflow) * 1985-02-22 1986-09-03

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS612447U (ja) * 1984-06-06 1986-01-09 三菱電機株式会社 真空蒸着装置
JPS612447A (ja) * 1984-06-15 1986-01-08 Hitachi Ltd ル−プ伝送系の迂回路構成方式
JPS61142862A (ja) * 1984-12-17 1986-06-30 Fujitsu Ltd 撮像装置
JPS61186472A (ja) * 1985-02-15 1986-08-20 Hironobu Sato 蒸着非結晶膜製造装置
JPS61142862U (enrdf_load_stackoverflow) * 1985-02-22 1986-09-03

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0489544U (enrdf_load_stackoverflow) * 1990-12-12 1992-08-05
JPH05757U (ja) * 1991-02-19 1993-01-08 サンユー電子株式会社 カーボン自動膜厚蒸着装置
JP2009068084A (ja) * 2007-09-14 2009-04-02 Ritsumeikan 炭素被覆金属微粒子の製造方法

Also Published As

Publication number Publication date
JPH0730674Y2 (ja) 1995-07-12

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term