JPH0626824Y2 - 静電容量による荷重センサ - Google Patents

静電容量による荷重センサ

Info

Publication number
JPH0626824Y2
JPH0626824Y2 JP3767388U JP3767388U JPH0626824Y2 JP H0626824 Y2 JPH0626824 Y2 JP H0626824Y2 JP 3767388 U JP3767388 U JP 3767388U JP 3767388 U JP3767388 U JP 3767388U JP H0626824 Y2 JPH0626824 Y2 JP H0626824Y2
Authority
JP
Japan
Prior art keywords
capacitance
load sensor
sealing member
movable substrate
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3767388U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01141436U (https=
Inventor
道夫 根本
光之 武田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokin Corp
Original Assignee
Tokin Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokin Corp filed Critical Tokin Corp
Priority to JP3767388U priority Critical patent/JPH0626824Y2/ja
Publication of JPH01141436U publication Critical patent/JPH01141436U/ja
Application granted granted Critical
Publication of JPH0626824Y2 publication Critical patent/JPH0626824Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP3767388U 1988-03-24 1988-03-24 静電容量による荷重センサ Expired - Lifetime JPH0626824Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3767388U JPH0626824Y2 (ja) 1988-03-24 1988-03-24 静電容量による荷重センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3767388U JPH0626824Y2 (ja) 1988-03-24 1988-03-24 静電容量による荷重センサ

Publications (2)

Publication Number Publication Date
JPH01141436U JPH01141436U (https=) 1989-09-28
JPH0626824Y2 true JPH0626824Y2 (ja) 1994-07-20

Family

ID=31264250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3767388U Expired - Lifetime JPH0626824Y2 (ja) 1988-03-24 1988-03-24 静電容量による荷重センサ

Country Status (1)

Country Link
JP (1) JPH0626824Y2 (https=)

Also Published As

Publication number Publication date
JPH01141436U (https=) 1989-09-28

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