JPH0622982Y2 - 減圧ｃｖｄ用ウエハボート - Google Patents
減圧ｃｖｄ用ウエハボートInfo
- Publication number
- JPH0622982Y2 JPH0622982Y2 JP461389U JP461389U JPH0622982Y2 JP H0622982 Y2 JPH0622982 Y2 JP H0622982Y2 JP 461389 U JP461389 U JP 461389U JP 461389 U JP461389 U JP 461389U JP H0622982 Y2 JPH0622982 Y2 JP H0622982Y2
- Authority
- JP
- Japan
- Prior art keywords
- pressure cvd
- alloy
- low pressure
- boat
- wafer boat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000004518 low pressure chemical vapour deposition Methods 0.000 title claims description 8
- 239000000956 alloy Substances 0.000 claims description 17
- 229910045601 alloy Inorganic materials 0.000 claims description 15
- 235000012431 wafers Nutrition 0.000 description 13
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 239000010935 stainless steel Substances 0.000 description 7
- 229910001220 stainless steel Inorganic materials 0.000 description 7
- 239000000463 material Substances 0.000 description 5
- 229910004298 SiO 2 Inorganic materials 0.000 description 4
- 238000006243 chemical reaction Methods 0.000 description 3
- 239000010453 quartz Substances 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 230000007547 defect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP461389U JPH0622982Y2 (ja) | 1989-01-19 | 1989-01-19 | 減圧ｃｖｄ用ウエハボート |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP461389U JPH0622982Y2 (ja) | 1989-01-19 | 1989-01-19 | 減圧ｃｖｄ用ウエハボート |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0296728U JPH0296728U (enrdf_load_stackoverflow) | 1990-08-01 |
| JPH0622982Y2 true JPH0622982Y2 (ja) | 1994-06-15 |
Family
ID=31207278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP461389U Expired - Lifetime JPH0622982Y2 (ja) | 1989-01-19 | 1989-01-19 | 減圧ｃｖｄ用ウエハボート |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0622982Y2 (enrdf_load_stackoverflow) |
-
1989
- 1989-01-19 JP JP461389U patent/JPH0622982Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0296728U (enrdf_load_stackoverflow) | 1990-08-01 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |