JPH06223317A - Laminate type magnetic head and manufacture thereof - Google Patents

Laminate type magnetic head and manufacture thereof

Info

Publication number
JPH06223317A
JPH06223317A JP1095893A JP1095893A JPH06223317A JP H06223317 A JPH06223317 A JP H06223317A JP 1095893 A JP1095893 A JP 1095893A JP 1095893 A JP1095893 A JP 1095893A JP H06223317 A JPH06223317 A JP H06223317A
Authority
JP
Japan
Prior art keywords
magnetic
head
magnetic head
core
laminated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1095893A
Other languages
Japanese (ja)
Inventor
Shintaro Hara
慎太郎 原
Taiichi Mori
泰一 森
Hiroshi Tomiyasu
弘 冨安
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1095893A priority Critical patent/JPH06223317A/en
Publication of JPH06223317A publication Critical patent/JPH06223317A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To provide a laminate type magnetic head with a suppressed drop in efficiency by providing an auxiliary core at a specified part of a head to prevent a drop in output with respect to a designing of a less thickness. CONSTITUTION:A magnetic core 2 is formed having a metal magnetic film sandwiched between non-magnetic substrates. On the other hand, an auxiliary core 12 is provided between a coil-wound window 7 and the rear surface of a head. The core 12 allows the preventing possible drop in efficiency of a backing cap. Thus, the drop in output is prevented even with a less thickness to check the drop in the efficiency thereby producing a laminate type magnetic head with a higher output.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明はコンピュータの外部記憶
装置に用いられる磁気記録再生装置、主として固定磁気
ディスク装置に使用する積層型磁気ヘッドとその製造方
法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a magnetic recording / reproducing device used for an external storage device of a computer, and more particularly to a laminated magnetic head used for a fixed magnetic disk device and a method for manufacturing the same.

【0002】[0002]

【従来の技術】従来の磁気ヘッドは、フェライトや金属
磁性体等の磁性材料を研削加工やラッピング等の機械加
工により磁気コアの製作を行い、この磁気コアに巻線窓
を施し、磁気空隙を形成しつつ接着し、磁気ヘッドとし
ていた。
2. Description of the Related Art In a conventional magnetic head, a magnetic core is manufactured by grinding or lapping a magnetic material such as ferrite or a metallic magnetic material, and a winding window is formed on the magnetic core to form a magnetic gap. It was formed and adhered to form a magnetic head.

【0003】しかし、近年のコンピュータ用外部記憶装
置やVTRにみられる小型化,高容量化に伴い線記録密
度および面記録密度の向上が要求されている。それを実
現するために記録媒体では高保磁力化が図られ、短波長
での記録,再生信号の出力向上を可能にしている。
However, the linear recording density and the areal recording density are required to be improved with the recent miniaturization and higher capacity of external storage devices for computers and VTRs. In order to achieve this, the recording medium has a high coercive force, which makes it possible to improve the output of recording and reproducing signals at short wavelengths.

【0004】一方、磁気ヘッドには高飽和磁束密度を有
する金属磁性体で磁気コアを形成する技術が提案されて
いる。例えば飽和磁束が十分高い金属磁性体とSiO2
の絶縁体をスパッタリング,蒸着等の方法で薄膜化し交
互に積層して、その両面を非磁性基板で挟み磁気コアブ
ロックを形成し、この磁気コアブロックより磁気コアを
製作する積層型磁気ヘッドがその一例である。以下に、
積層型磁気ヘッドの従来例とその製造方法を図8および
図9に基づき説明する。
On the other hand, there has been proposed a technique for forming a magnetic core of a magnetic head with a metal magnetic material having a high saturation magnetic flux density. For example, a magnetic metal block having a sufficiently high saturation magnetic flux and an insulator such as SiO 2 are formed into thin films by a method such as sputtering or vapor deposition and alternately laminated, and a magnetic core block is formed by sandwiching both surfaces thereof with a non-magnetic substrate. An example is a laminated magnetic head in which a magnetic core is manufactured from blocks. less than,
A conventional example of a laminated magnetic head and a method of manufacturing the same will be described with reference to FIGS.

【0005】図8(a)に示すように非磁性基板1a上に磁
気コア2を形成する。この磁気コアは(a)図の右側に示
した拡大図のように、高飽和磁束密度および高透磁率を
有するセンダスト合金,アモルファス磁性合金,パーマ
ロイ磁性合金等の金属磁性膜3としての金属磁性体第1
層3aと、SiO2,Al23等の絶縁体4としての絶縁体
第1層4aとをスパッタリング法にて順次膜付けし、以
降、金属磁性体第2層3b,絶縁体第2層4b,金属磁性
体第3層3c,絶縁体第3層4cと繰り返し膜付けして磁
気コア2を形成する。
As shown in FIG. 8A, the magnetic core 2 is formed on the non-magnetic substrate 1a. As shown in the enlarged view on the right side of (a), this magnetic core is made of a metal magnetic material such as Sendust alloy, amorphous magnetic alloy, or permalloy magnetic alloy having a high saturation magnetic flux density and a high magnetic permeability. First
The layer 3a and the insulator first layer 4a as the insulator 4 such as SiO 2 and Al 2 O 3 are sequentially deposited by the sputtering method, and thereafter, the metal magnetic second layer 3b and the insulator second layer are formed. 4b, the metallic magnetic third layer 3c, and the insulating third layer 4c are repeatedly deposited to form the magnetic core 2.

【0006】次に図8(b)に示すように、補強材となる
非磁性基板1bを(b)図の右側に示した拡大図のように、
絶縁体第3層4cに接着ガラス5により接着して、磁気
コアブロック6を製作する。次に図8(c)に示すよう
に、磁気コアブロック6を積層膜に直交(矢印A−A)す
るように切断分離し、切断分離された一方のブロック6
a,6bの非磁性基板1a,1bの少なくとも一方のブロッ
クに研削加工によりコイル巻線溝(後でコイル巻線窓を
形成する)7を形成する。その後、対向面8をラッピン
グ加工等により鏡面加工を施す。
Next, as shown in FIG. 8 (b), a non-magnetic substrate 1b as a reinforcing material is formed as shown in the enlarged view on the right side of FIG. 8 (b).
The magnetic core block 6 is manufactured by adhering to the third insulator layer 4c with the adhesive glass 5. Next, as shown in FIG. 8C, the magnetic core block 6 is cut and separated so as to be orthogonal to the laminated film (arrow AA), and one of the cut and separated blocks 6 is cut.
A coil winding groove (which will later form a coil winding window) 7 is formed in at least one block of the non-magnetic substrates 1a and 1b of a and 6b by grinding. After that, the facing surface 8 is mirror-finished by lapping or the like.

【0007】その上に、図9(a)に示すようにSiO2
のギャップ材9をスパッタリング法等により形成する。
その後、図9(b)に示すように、ボンディングガラス10
を溶着しつつ非磁性基板を接着する。その後、用途に応
じた形状やギャップデプスに規制して磁気ヘッドとする
製造方法であった。
A gap material 9 such as SiO 2 is formed thereon by a sputtering method or the like, as shown in FIG. 9 (a).
Then, as shown in FIG. 9 (b), the bonding glass 10
The non-magnetic substrate is adhered while welding. After that, it was a manufacturing method in which the magnetic head was regulated to have a shape and a gap depth according to the application.

【0008】図10は上記製造方法によって作製された一
例としてハードディスクに使用される浮動型の積層型磁
気ヘッドの斜視図である。積層型磁気ヘッドの磁気コア
2は飽和磁束密度および透磁率が高い金属磁性膜3で構
成されるため、従来の磁気ヘッドに比べ高周波領域での
透磁率の変化が少なく、またインダクタンスを小さくで
きる。また、金属磁性膜3の飽和磁束密度を上げること
により、高保磁力媒体の記録に対応できるなど、金属磁
性膜の優れた特性を利用することにより従来の磁気ヘッ
ドに比べて多くの利点が期待できる。
FIG. 10 is a perspective view of a floating type laminated magnetic head used for a hard disk as an example, which is manufactured by the above manufacturing method. Since the magnetic core 2 of the laminated magnetic head is composed of the metal magnetic film 3 having a high saturation magnetic flux density and a high magnetic permeability, it is possible to reduce the change in the magnetic permeability in the high frequency region and reduce the inductance as compared with the conventional magnetic head. Further, by increasing the saturation magnetic flux density of the metal magnetic film 3, it is possible to cope with recording on a high coercive force medium, and by utilizing the excellent characteristics of the metal magnetic film, many advantages can be expected as compared with the conventional magnetic head. .

【0009】[0009]

【発明が解決しようとする課題】前述したように、近年
の高密度化,高容量化の要請により、磁気ヘッドは狭ト
ラック化や小型化が進んでいる。一例としてハードディ
スクドライブ用に使用される浮動型磁気ヘッドの流れと
して、マイクロスライダーと呼ばれる全高0.86mmのサイ
ズから、近年では50%スライダーと呼ばれる全高0.43mm
のサイズへと小さく、薄くなってきている。
As described above, due to the recent demand for higher density and higher capacity, the magnetic head is becoming narrower in track and smaller in size. As an example of the flow of a floating magnetic head used for a hard disk drive, the total height is 0.86 mm called a micro slider, and in recent years, the total height is 0.43 mm called a 50% slider.
The size is getting smaller and thinner.

【0010】磁気ヘッドは薄膜型磁気ヘッドのようなフ
ォトリソグラフィー技術により、コイルを形成するタイ
プと機械加工により巻線窓を形成してコイル線を巻くタ
イプがある。積層型磁気ヘッドは後者の部類に入る。こ
のタイプは巻線を施すのに、ある程度の大きさの巻線窓
が必要となる。その場合、積層型磁気ヘッドを薄型化す
ると、巻線窓の寸法は磁気ヘッドの薄型化に関係なくあ
る程度確保しなければならないので、巻線窓と磁気ヘッ
ドの背面までの長さ(以後、バックギャップと称す)が非
常に短くなる。
The magnetic head is classified into a type in which a coil is formed by a photolithography technique such as a thin film type magnetic head and a type in which a winding window is formed by machining to wind a coil wire. Stacked magnetic heads fall into the latter category. This type requires a winding window of a certain size for winding. In that case, if the laminated magnetic head is made thinner, the dimensions of the winding window must be secured to some extent regardless of the thinning of the magnetic head. The so-called gap) becomes very short.

【0011】バックギャップが小さくなると、巻線窓と
磁気ヘッド背面との間の部分の磁束が通りにくくなり、
磁気コアの効率の低下を招く。図6は積層型磁気ヘッド
の巻線窓の大きさ,コイル巻き数,磁気コアの幅を同一
としてバックギャップの長さを変えたデータを示す。バ
ックデプスが0.3mmのときの出力を1.0として相対出力を
取った。図中、B曲線が従来の積層型磁気ヘッドの出力
特性を示し、フェライト型の磁気ヘッドに比べて磁気コ
アの断面積が大幅に小さく、バックギャップの薄型化は
特に大きな効率低下につながることがわかる。
When the back gap becomes smaller, it becomes difficult for the magnetic flux in the portion between the winding window and the back surface of the magnetic head to pass,
This causes a decrease in the efficiency of the magnetic core. FIG. 6 shows data in which the size of the winding window of the laminated magnetic head, the number of coil windings, and the width of the magnetic core are the same and the length of the back gap is changed. The output when the back depth was 0.3 mm was set to 1.0 and the relative output was taken. In the figure, the B curve shows the output characteristics of the conventional stacked magnetic head, the cross-sectional area of the magnetic core is significantly smaller than that of the ferrite type magnetic head, and thinning the back gap may lead to a particularly large reduction in efficiency. Recognize.

【0012】本発明はこのような従来の問題を解決し、
出力の高い積層型磁気ヘッドの提供を目的とする。
The present invention solves these conventional problems,
An object of the present invention is to provide a laminated magnetic head having high output.

【0013】[0013]

【課題を解決するための手段】本発明の積層型磁気ヘッ
ドは、非磁性基板間に金属磁性膜が挟み込まれて磁気コ
アを形成する積層型磁気ヘッドの巻線窓と、ヘッド背面
との間に補助コアを設けたことを特徴とする。
A laminated magnetic head according to the present invention is provided between a winding window of a laminated magnetic head in which a metal magnetic film is sandwiched between non-magnetic substrates to form a magnetic core, and a head back surface. It is characterized in that an auxiliary core is provided in the.

【0014】また、本発明の積層型磁気ヘッドの製造方
法は、非磁性基板間に金属磁性膜が挟み込まれて磁気コ
アを形成する積層型磁気ヘッドの一対の磁気コアを接着
した後にヘッド背面とヘッド巻線窓との間に溝加工を施
し、その後に金属磁性膜をスパッタリング,蒸着等の方
法で前記溝内部に膜付け充填し、補助コアとして形成す
ることを特徴とする。
Further, according to the method of manufacturing a laminated magnetic head of the present invention, a pair of magnetic cores of a laminated magnetic head in which a metal magnetic film is sandwiched between non-magnetic substrates to form a magnetic core is adhered to the back surface of the head. A groove is formed between the head winding window, and then a metal magnetic film is film-filled and filled inside the groove by a method such as sputtering or vapor deposition to form an auxiliary core.

【0015】[0015]

【作用】本発明の積層型磁気ヘッドはヘッド巻線窓とヘ
ッド背面の間に補助コアを設けることにより、バックギ
ャップの磁気コアの効率低下を防ぎ、出力を高くするこ
とができる。
In the laminated magnetic head of the present invention, the auxiliary core is provided between the head winding window and the back surface of the head, so that the efficiency of the magnetic core in the back gap can be prevented from decreasing and the output can be increased.

【0016】[0016]

【実施例】本発明の一実施例の積層型磁気ヘッドとその
製造方法を、前記従来例の図8ないし図9および図1な
いし図7により説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS A laminated magnetic head according to an embodiment of the present invention and a method of manufacturing the same will be described with reference to FIGS. 8 to 9 and 1 to 7 of the conventional example.

【0017】本実施例の製造工程中、前記従来例で説明
した図8ないし図9までは同じである。
During the manufacturing process of this embodiment, FIGS. 8 to 9 described in the conventional example are the same.

【0018】この後、従来例ではバック,フロント双方
のデプスを規制しつつ、所定のヘッド形状に仕上げる。
例えば浮動型磁気ヘッドの50%スライダーサイズであれ
ば、バックギャップの長さは0.1mm程度になる。
After that, in the conventional example, the head is finished in a predetermined shape while restricting the depths of both the back and the front.
For example, if the slider size is 50% of the floating magnetic head, the back gap length is about 0.1 mm.

【0019】本発明の積層型磁気ヘッドは、バックギャ
ップの効率低下を防ぐために図9(b)の状態から、以下
に示す方法でバックギャップに補助コア12(図2参照)を
設ける。まず図1(a)に示すように、ヘッド裏面から磁
気コア2となる磁性膜と平行に巻線窓7に達しないよう
な深さで溝11の加工を行う。図1(a)の右側にこの巻線
窓7と溝11の拡大図を示す。また、この溝11の幅11aは
ヘッド完成品の全幅よりも狭く、磁気コア2の幅2aよ
りも広くする。また、図1(b)のように磁気コア2と直
交するように溝11を加工してもよい。この場合も、溝の
深さはヘッド背面と巻線窓7の間に形成され、溝の幅は
ヘッド完成品の全長よりも短くする。
In the laminated magnetic head of the present invention, the auxiliary core 12 (see FIG. 2) is provided in the back gap from the state of FIG. 9 (b) by the following method in order to prevent the efficiency of the back gap from decreasing. First, as shown in FIG. 1A, the groove 11 is processed from the back surface of the head in parallel with the magnetic film to be the magnetic core 2 to a depth that does not reach the winding window 7. An enlarged view of the winding window 7 and the groove 11 is shown on the right side of FIG. The width 11a of the groove 11 is narrower than the entire width of the head finished product and wider than the width 2a of the magnetic core 2. Further, the groove 11 may be processed so as to be orthogonal to the magnetic core 2 as shown in FIG. Also in this case, the depth of the groove is formed between the back surface of the head and the winding window 7, and the width of the groove is shorter than the total length of the head finished product.

【0020】次に、溝11の形成後は図2(a)のように、
ヘッド裏面から補助コア12を形成する磁性膜をスパッタ
もしくは蒸着等の方法で膜付け、充填する。磁性膜とし
てアモルファス合金等を用い、膜厚を0.01mm〜0.03mm程
度膜付けする。その後、ヘッド裏面に付いた余分な磁性
膜は研削加工等で落とす。
Next, after forming the groove 11, as shown in FIG.
A magnetic film forming the auxiliary core 12 is formed on the back surface of the head by a method such as sputtering or vapor deposition, and the magnetic film is filled. Amorphous alloy or the like is used as the magnetic film, and the film thickness is about 0.01 mm to 0.03 mm. After that, the excess magnetic film attached to the back surface of the head is removed by grinding or the like.

【0021】この後は、図2(b)のように従来例と同じ
ようにバック,フロント双方のデプスを規制しつつ、所
定の形状とする。一例として浮動型の積層型磁気ヘッド
を示す図3は、図1(a)の溝11の形成方法で、図4は図
1(b)の溝11の形成方法での浮動型の積層型磁気ヘッド
の斜視図を示す。
Thereafter, as shown in FIG. 2B, the depths of both the back and the front are regulated in the same manner as in the conventional example, and a predetermined shape is formed. FIG. 3 shows a floating type stacked magnetic head as an example. FIG. 3 shows a method of forming the groove 11 of FIG. 1A, and FIG. 4 shows a method of forming the groove 11 of FIG. 1B. The perspective view of a head is shown.

【0022】磁気ヘッドの薄型化に対して、バックギャ
ップに補助コア12が形成されていることにより磁気コア
の効率低下が防げ、なおかつバックギャップをさらに薄
くすることも可能となる。
In order to reduce the thickness of the magnetic head, the auxiliary core 12 is formed in the back gap, so that the efficiency of the magnetic core can be prevented from being lowered, and the back gap can be made thinner.

【0023】製造方法上も通常、一対の磁気コアを接着
したときは複数の磁気コアが1本のバー内に存在するの
で、溝11の形成の方法として、図1(a)の場合であると
磁気コア2に平行にマルチ砥石で1回加工を行い、図1
(b)の場合であると磁気コア2に直角に1回、砥石で加
工を行うのみでよく、工数上も大きな増加とならない。
Also in the manufacturing method, usually, when a pair of magnetic cores are bonded together, a plurality of magnetic cores are present in one bar, so that the method of forming the groove 11 is the case of FIG. 1 (a). 1 parallel to the magnetic core 2 and the multi-grinding stone,
In the case of (b), it suffices to carry out processing with a grindstone once at right angles to the magnetic core 2, and the number of steps does not increase significantly.

【0024】また溝11を加工して補助コア12を形成する
磁性膜を埋め込んだ構造となっているので、図5に示す
ようなヘッド背面に直接、磁性膜3′を付けるような構
造に対して機械的強度に優れる。また、ヘッド背面に他
の部品を接着するような場合、図5のような構造では膜
の剥離が起こる場合が考えられるが、本発明の場合であ
ると膜が埋め込まれているので、その心配がない。
Further, since the structure is such that the magnetic film forming the auxiliary core 12 is embedded by processing the groove 11, as compared with the structure in which the magnetic film 3'is directly attached to the back surface of the head as shown in FIG. And has excellent mechanical strength. Further, when other components are adhered to the back surface of the head, peeling of the film may occur in the structure shown in FIG. 5, but in the case of the present invention, the film is embedded, so there is a concern. There is no.

【0025】本実施例による積層型磁気ヘッドと従来例
による積層型磁気ヘッドとの比較を図6に示す。巻線窓
の大きさ,巻き数を同一として、従来例の積層型磁気ヘ
ッドのバックギャップを変化させたときのヘッド出力と
本実施例による出力値を比較した。
FIG. 6 shows a comparison between the laminated magnetic head according to the present embodiment and the laminated magnetic head according to the conventional example. The head output when the back gap of the conventional laminated magnetic head was changed and the output value of this embodiment were compared with each other with the same size of the winding window and the same number of turns.

【0026】ヘッドサイズとして2.3mm×1.6mm、バック
ギャップの長さが0.3mm、トラック幅11μmのときの出力
を1.0として相対的な出力曲線Bを描き、これに本実施
例による積層型磁気ヘッドの値をプロット(A点の丸印)
した。従来例の積層型磁気ヘッドでは出力曲線Bに示す
ように、バックギャップが短くなると(例として0.1m
m)、急激に効率が落ちている。しかし、本実施例の積層
型磁気ヘッドの場合、図7の斜視図(1)およびその巻線
窓の拡大図(2)に示すように、巻線窓7から0.02mmの所
に0.03mmの厚みでアモルファス合金により補助コア12を
形成した。断面積は溝11の幅11a=0.75mm×2.00mm(磁気
コアブロック6の長さ)である。バックギャップの長さ
は実質0.05mmであるが、ヘッドにしたときには0.1mmと
した。
A relative output curve B is drawn with an output of 1.0 when the head size is 2.3 mm × 1.6 mm, the back gap length is 0.3 mm, and the track width is 11 μm, and the laminated magnetic head according to this embodiment is drawn on this. Plot the value of (circle at point A)
did. In the conventional laminated magnetic head, as shown in the output curve B, when the back gap becomes short (for example, 0.1 m
m), the efficiency drops sharply. However, in the case of the laminated magnetic head of the present embodiment, as shown in the perspective view (1) of FIG. 7 and the enlarged view (2) of the winding window thereof, 0.03 mm is provided at a position 0.02 mm from the winding window 7. The auxiliary core 12 was formed with a thickness of an amorphous alloy. The cross-sectional area is the width 11a of the groove 11 = 0.75 mm × 2.00 mm (length of the magnetic core block 6). The length of the back gap was practically 0.05 mm, but when it was used as a head, it was 0.1 mm.

【0027】実際、0.05mmにすることも可能である。従
来例の外挿線に対して同じバックギャップのときに高い
出力を示し、効率の低下を防いでいる。
In fact, it is possible to make it 0.05 mm. High output is shown when the back gap is the same as the extrapolation line of the conventional example, and the decrease in efficiency is prevented.

【0028】[0028]

【発明の効果】以上説明したように、本発明によれば、
積層型磁気ヘッドの巻線窓とヘッド背面の間に補助コア
を設けたことにより、積層型磁気ヘッドを薄型化したと
きに磁気コアの効率低下が防げ、出力の高い積層型磁気
ヘッドを提供できる。
As described above, according to the present invention,
By providing the auxiliary core between the winding window of the laminated magnetic head and the back surface of the head, it is possible to prevent the efficiency of the magnetic core from decreasing when the laminated magnetic head is thinned, and it is possible to provide a laminated magnetic head with high output. .

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の一実施例による積層型磁気ヘッドの各
製造方法を示す斜視図とその一部拡大図である。
FIG. 1 is a perspective view and a partially enlarged view showing a method of manufacturing a laminated magnetic head according to an embodiment of the present invention.

【図2】本発明の一実施例による積層型磁気ヘッドの各
製造方法を示す斜視図とその一部拡大図である。
FIG. 2 is a perspective view showing a method of manufacturing a laminated magnetic head according to an embodiment of the present invention and a partially enlarged view thereof.

【図3】図1(a)の溝形式による製造方法で作製された
浮動型の積層型磁気ヘッドの斜視図である。
FIG. 3 is a perspective view of a floating stacked magnetic head manufactured by the groove-type manufacturing method of FIG.

【図4】図1(b)の溝形式による製造方法で作製された
浮動型の積層型磁気ヘッドの斜視図である。
FIG. 4 is a perspective view of a floating stacked magnetic head manufactured by the groove-type manufacturing method of FIG.

【図5】直接ヘッド背面に膜付けする方法の積層型磁気
ヘッドの斜視図である。
FIG. 5 is a perspective view of a laminated magnetic head in which a film is directly attached to the back surface of the head.

【図6】本発明と従来例の積層型磁気ヘッドの出力値の
比較を示す図である。
FIG. 6 is a diagram showing a comparison of output values of a laminated magnetic head of the present invention and a conventional example.

【図7】本発明の一実施例の積層型磁気ヘッドの各部寸
法を示す斜視図とその一部拡大図である。
7A and 7B are a perspective view and a partially enlarged view showing respective dimensions of the laminated magnetic head according to the embodiment of the invention.

【図8】従来例および本発明による積層型磁気ヘッドの
製造方法を示す図である。
FIG. 8 is a diagram showing a method of manufacturing a laminated magnetic head according to a conventional example and the present invention.

【図9】従来例および本発明による積層型磁気ヘッドの
製造方法を示す図である。
FIG. 9 is a diagram showing a method of manufacturing a laminated magnetic head according to a conventional example and the present invention.

【図10】浮動型磁気ヘッドの斜視図である。FIG. 10 is a perspective view of a floating magnetic head.

【符号の説明】[Explanation of symbols]

1a,1b…非磁性基板、 2…磁気コア、 3…金属磁
性膜、 4…絶縁膜、5…接着ガラス、 6…磁気コア
ブロック、 7…コイル巻線溝(窓)、 8…対向面、
9…ギャップ材、 10…ボンディングガラス、 11…
溝、 12…補助コア。
1a, 1b ... Non-magnetic substrate, 2 ... Magnetic core, 3 ... Metal magnetic film, 4 ... Insulating film, 5 ... Adhesive glass, 6 ... Magnetic core block, 7 ... Coil winding groove (window), 8 ... Opposing surface,
9 ... Gap material, 10 ... Bonding glass, 11 ...
Groove, 12 ... Auxiliary core.

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 非磁性基板間に金属磁性膜が挟み込まれ
て磁気コアを形成する積層型磁気ヘッドの巻線窓と、ヘ
ッド背面との間に補助コアを設けたことを特徴とする積
層型磁気ヘッド。
1. A laminated type in which an auxiliary core is provided between a winding window of a laminated magnetic head in which a metal magnetic film is sandwiched between non-magnetic substrates to form a magnetic core and a head back surface. Magnetic head.
【請求項2】 非磁性基板間に金属磁性膜が挟み込まれ
て磁気コアを形成する積層型磁気ヘッドの一対の磁気コ
アを接着した後にヘッド背面とヘッド巻線窓との間に溝
加工を施し、その後に金属磁性膜をスパッタリング,蒸
着等の方法で前記溝内部に膜付け充填し、補助コアとし
て形成することを特徴とする積層型磁気ヘッドの製造方
法。
2. A pair of magnetic cores of a laminated magnetic head in which a metal magnetic film is sandwiched between non-magnetic substrates to form a magnetic core are bonded together, and then a groove is formed between the head back surface and the head winding window. A method of manufacturing a laminated magnetic head, characterized in that thereafter, a metal magnetic film is film-filled inside the groove by a method such as sputtering or vapor deposition to form an auxiliary core.
JP1095893A 1993-01-26 1993-01-26 Laminate type magnetic head and manufacture thereof Pending JPH06223317A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1095893A JPH06223317A (en) 1993-01-26 1993-01-26 Laminate type magnetic head and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1095893A JPH06223317A (en) 1993-01-26 1993-01-26 Laminate type magnetic head and manufacture thereof

Publications (1)

Publication Number Publication Date
JPH06223317A true JPH06223317A (en) 1994-08-12

Family

ID=11764697

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1095893A Pending JPH06223317A (en) 1993-01-26 1993-01-26 Laminate type magnetic head and manufacture thereof

Country Status (1)

Country Link
JP (1) JPH06223317A (en)

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