JPH0620973Y2 - 感熱式流量センサ - Google Patents

感熱式流量センサ

Info

Publication number
JPH0620973Y2
JPH0620973Y2 JP19781387U JP19781387U JPH0620973Y2 JP H0620973 Y2 JPH0620973 Y2 JP H0620973Y2 JP 19781387 U JP19781387 U JP 19781387U JP 19781387 U JP19781387 U JP 19781387U JP H0620973 Y2 JPH0620973 Y2 JP H0620973Y2
Authority
JP
Japan
Prior art keywords
heat
sensitive resistor
support member
resistor
flow rate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP19781387U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01102723U (uk
Inventor
雅憲 稲田
七郎 大谷
智也 山川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19781387U priority Critical patent/JPH0620973Y2/ja
Priority to KR1019880015744A priority patent/KR890010539A/ko
Priority to DE3841057A priority patent/DE3841057A1/de
Priority to US07/280,921 priority patent/US4912974A/en
Publication of JPH01102723U publication Critical patent/JPH01102723U/ja
Application granted granted Critical
Publication of JPH0620973Y2 publication Critical patent/JPH0620973Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP19781387U 1987-12-08 1987-12-26 感熱式流量センサ Expired - Lifetime JPH0620973Y2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP19781387U JPH0620973Y2 (ja) 1987-12-26 1987-12-26 感熱式流量センサ
KR1019880015744A KR890010539A (ko) 1987-12-08 1988-11-29 감열식 유량센서
DE3841057A DE3841057A1 (de) 1987-12-08 1988-12-06 Stroemungsmessgeraet
US07/280,921 US4912974A (en) 1987-12-08 1988-12-07 Thermal flow sensor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19781387U JPH0620973Y2 (ja) 1987-12-26 1987-12-26 感熱式流量センサ

Publications (2)

Publication Number Publication Date
JPH01102723U JPH01102723U (uk) 1989-07-11
JPH0620973Y2 true JPH0620973Y2 (ja) 1994-06-01

Family

ID=31488347

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19781387U Expired - Lifetime JPH0620973Y2 (ja) 1987-12-08 1987-12-26 感熱式流量センサ

Country Status (1)

Country Link
JP (1) JPH0620973Y2 (uk)

Also Published As

Publication number Publication date
JPH01102723U (uk) 1989-07-11

Similar Documents

Publication Publication Date Title
JPH0620974Y2 (ja) 感熱式流量センサ
JP4157034B2 (ja) 熱式流量計測装置
US4471655A (en) Gas flow rate measuring apparatus
US4912974A (en) Thermal flow sensor
JPH08313318A (ja) 感熱式流量検出装置
JPH0620973Y2 (ja) 感熱式流量センサ
JPH0625684B2 (ja) 流体の流量検出センサー
US5148707A (en) Heat-sensitive flow sensor
JPH0631374Y2 (ja) 感熱式流量センサ
JPH0612277B2 (ja) 感熱式流量センサ
JP3345695B2 (ja) 加速度センサ
JPH11153466A (ja) 流量センサー
JPH0743340B2 (ja) 酸素濃度検出装置
JPH0742105Y2 (ja) 熱線式流量センサ
JPH0682286A (ja) 熱式流量計
JPS63210666A (ja) 流速センサ及びそれを用いた流速測定装置
JPH034568A (ja) 半導体圧力センサー
JPH0422268Y2 (uk)
JPH0422266Y2 (uk)
JP2774100B2 (ja) 酸素濃度検知装置
JP2646846B2 (ja) 感温抵抗素子
JPH01314922A (ja) 感熱式流量センサ
JPH032848Y2 (uk)
JPH02147916A (ja) センサの発熱部構造
JP3167549B2 (ja) ガス検出装置