JPH06196023A - Transparent conductive film and manufacture thereof - Google Patents

Abstract

PURPOSE:To obtain a transparent conductive film and a manufacturing method thereof excellent in steam barrier characteristic, oxygen barrier characteristic, conductivity and transparency further with large sticking force between a film substrate and a transparent barrier thin film. CONSTITUTION:In a transparent conductive film, a transparent barrier thin film of metal oxide, mainly composed of silicon oxide, or metal nitride, mainly composed of silicon nitride, is formed by 20 to 100nm thickness and further a transparent conductive thin film of metal oxide, mainly composed of indium oxide, is formed by 20 to 200nm thickness, on a transparent film substrate. The transparent barrier thin film containing this film substrate has 1ml/m<2>/day or less oxygen permeability, 1g/m<2>/day or less steam permeability and further 100g/cm or more sticking force between the film substrate and the transparent barrier thin film.

Description

Detailed Description of the Invention

[0001]

INDUSTRIAL APPLICABILITY The present invention is excellent in gas barrier properties such as water vapor barrier property and oxygen barrier property, conductivity and transparency, and is transparent enough in adhesiveness between a film substrate and a transparent barrier thin film. The present invention relates to a conductive film and a method for manufacturing the same.

[0002]

2. Description of the Related Art With the rapid progress of electronics technology, transparent electrodes have been applied to liquid crystal display elements, photoelectric conversion elements for solar cells, and the like, and further, the transparent electrodes and the conductivity suitable for other applications. There is an urgent need to improve the properties of thin films.

Generally, such a transparent electrode is obtained by forming a conductive thin film on a glass substrate. Examples of products obtained by forming a conductive thin film on a glass substrate include Nesa glass having a thin film formed of tin oxide, ITO glass having a thin film formed of a mixture of indium oxide and tin oxide (ITO), and gold. -Conductive glass, etc., in which a conductive thin film is formed of silver or the like is known. However, the glass used as the substrate has drawbacks such as weakness against impact, heavy weight, lack of flexibility, and difficulty in increasing the area.

In order to make up for these drawbacks, transparent conductive films having a plastic film as a substrate have been manufactured. The plastic film has advantages such as impact resistance, flexibility, light weight, easy to make large area, and good workability.The transparent conductive film using the plastic film as a substrate takes advantage of these advantages. LCD device,
It is used in touch panels, antistatic films, infrared reflective films, etc.

Currently, transparent conductive films are widely used in the field of electronic display devices, and the transparent conductive thin film used therein is excellent in both conductivity and transparency and is easy to pattern. Therefore, the ITO thin film is the mainstream.

As a method for forming the ITO thin film on a plastic film substrate, a vacuum deposition method, a sputtering method, an ion plating method and the like are known.
Among them, the magnetron sputtering method is often used because of its good adhesion to the film, good uniformity of the film, easy control of film quality, and good productivity.

Generally, when a single plastic film material is used as a substrate, various properties such as oxygen barrier property, water vapor barrier property and solvent resistance cannot be satisfied. Therefore, a composite material obtained by subjecting the film material to undercoating or surface treatment is used. For compounding,
Known methods such as a coating method and a sputtering method are used, but in the past, compounding by the coating method has been widely used. In compounding by coating method,
Eval resin is usually coated to provide an oxygen barrier property, but a paste is required, and the heat resistance of the Eval resin itself is insufficient, so that the heat resistance of the resulting composite material is insufficient. In compounding by the sputtering method, it was usual to deposit SiO _x , but a thickness of about 60 nm is necessary to obtain the necessary barrier property,
With this thickness, there are problems that cracks are likely to occur and coloring is likely to occur. Furthermore, there is no water vapor barrier material having a sufficient oxygen barrier property. In addition, a substrate for a liquid crystal display element requires sufficient adhesion between the film substrate and the thin film layer in the manufacturing process, but problems such as occurrence of troubles such as thin film peeling during pattern processing occur. is there.

[0008]

DISCLOSURE OF THE INVENTION The present invention is intended to solve the above-mentioned drawbacks, and an object thereof is to provide a gas barrier property such as water vapor barrier property, oxygen barrier property, etc., which has good conductivity and transparency. It is to provide a conductive film. Another object of the present invention is to provide a transparent film substrate,
It is an object of the present invention to provide a transparent conductive film in which a barrier thin film and a conductive thin film are laminated and which has the above-mentioned performance and which is excellent in adhesiveness between the film substrate and the transparent barrier thin film.

Another object of the present invention is to provide a method for producing such a transparent conductive film.

[0010]

As a result of intensive studies to solve the above problems, the present inventors have found that when forming a transparent barrier thin film and a transparent conductive thin film on a film substrate by a sputtering method. By controlling the film forming conditions, it was found that a gas barrier property, conductivity and transparency are good, and a transparent conductive film having sufficient adhesion between the film substrate and the transparent barrier thin film can be obtained, The present invention has been completed.

The transparent conductive film of the present invention comprises a metal oxide mainly composed of silicon oxide on a transparent film substrate,
Alternatively, a transparent barrier thin film of metal nitride mainly composed of silicon nitride is formed with a thickness of 20 to 100 nm, and a transparent conductive thin film of metal oxide mainly composed of indium oxide is formed with a thickness of 20 to 200 nm. The transparent conductive thin film containing the film substrate has an oxygen permeability of 1 ml / m ² / day or less and a water vapor permeability of 1 g / m ² / day or less, and a film substrate. Adhesion with transparent barrier thin film is 100g / cm
That is all; the above-mentioned object is achieved thereby.

The method for producing a transparent conductive film of the present invention is a method for producing a transparent metal oxide mainly composed of silicon oxide or a metal nitride mainly composed of silicon nitride on a transparent film substrate by magnetron sputtering. It includes a step of forming a barrier thin film and a step of forming a transparent conductive thin film of a metal oxide mainly containing indium oxide on the transparent barrier thin film by a magnetron sputtering method. Is achieved.

The transparent film substrate used for the transparent conductive film of the present invention is formed of a transparent plastic film and has a thickness of 20 to 200 μm, preferably 75 to
It is a substrate having a range of 125 μm, a light transmittance of 85% or more, preferably 90% or more, and a film having good surface smoothness.

When the thickness of the substrate is 20 to 200 μm, the light transmittance is 85% or more, the surface smoothness is good, and a transparent conductive film having a uniform film thickness is easily obtained. When the light transmittance of the substrate is 90% or more, the transparency of the formed transparent conductive film is also good, and the smoothness of the surface of the transparent conductive film is good, so that fine processing such as etching is performed. The property is also improved. In addition, when the light transmittance of the substrate is less than 85%, the transparency of the produced transparent conductive film becomes low,
Generally not preferred.

As the plastic material forming the plastic film, polyarylate (PAR), polyethylene terephthalate (PET), polycarbonate (PC), polyether sulfone (PES), polysulfone, polyamide, cellulose triacetate (TAC), etc. Examples include, but are not limited to: Among the above-mentioned plastic materials, polyarylate having high transparency and excellent heat resistance is preferable, and is particularly suitable for use in the application of liquid crystal display elements.

The above-mentioned plastic film is not limited to a film formed of a single material, and has the purpose of improving the adhesion strength between the film substrate and the transparent barrier thin film, improving the gas barrier property, improving the solvent resistance and the like. Then, a composite film having various undercoats or surface treatments may be used. A known method such as a coating method or a sputtering method is used for forming the composite.

The transparent barrier thin film formed on the transparent film substrate is formed of a metal oxide mainly composed of silicon oxide or a metal nitride mainly composed of silicon nitride and has a thickness of 20 to 100 nm. , Preferably 25-
The range is 60 nm, the oxygen permeability is 5 ml / m ² / day or less, preferably 1 ml / m ² / day or less, and the water vapor permeability is 5 g / m ² / day or less, preferably 1 g / m ² / day. It is the following. If the thickness is less than 20 nm, the gas barrier property is insufficient, which is not preferable, and if it exceeds 100 nm, cracks are likely to occur, which is not preferable.

The metal oxide containing silicon oxide as a main component is silicon dioxide or a mixture containing silicon dioxide as a main component, and in the mixture, a metal oxide such as silicon monoxide or aluminum oxide. Can be included. The metal nitride containing silicon nitride as a main component is silicon nitride or a mixture containing silicon nitride as a main component, and the mixture contains at least one kind of metal nitride such as aluminum nitride. obtain.

These compounds include SiO _x and Si.
AlN etc. are mentioned. Of these compounds, Si
O _x , especially the value of x is 1.3 to 1.8, preferably 1.5
In the transparent barrier thin film using the compound of
Sufficient oxygen and water vapor barrier properties,
It is preferable because the transparent barrier thin film exhibits the adhesive force to the transparent film substrate.

The transparent conductive thin film formed on the transparent barrier thin film is made of a metal oxide mainly composed of indium oxide and has a thickness of 20 to 200 nm, preferably 50 to 150 nm. This thin film preferably has a light transmittance of 80% or more, more preferably 85%.
% Or more, preferably 100 Ω / □ or less, more preferably 50 Ω / □ or less. When the thickness of the transparent conductive thin film is in the range of 60 to 150 nm, it is easy to adjust both the light transmittance and the sheet resistance to suitable ranges (80% or more and 100Ω / □ or less).
When the thickness is less than 20 nm, the sheet resistance is 1
It is not preferable because it is not less than 00 Ω / □, which is not preferable, and when it exceeds 200 nm, the light transmittance is not more than 80% and cracks are easily generated. When the light transmittance is about 85% or more, the transparency of the formed transparent conductive film is good, which is particularly preferable.

The metal oxide mainly composed of indium oxide is indium oxide or a mixture containing indium oxide as a main component, and in the mixture, indium oxide is 80% by weight or more, preferably It is contained in a proportion of 90 to 95% by weight, and 20% by weight or less, preferably 5 to 1 of one or more metal oxides such as tin oxide and cadmium oxide.
It may be contained in a proportion of 0% by weight.

Examples of these compounds include ITO (a mixture of indium oxide and tin oxide), CdIn ₂ O _{4 and the} like. Among these compounds, when a compound containing 10% by weight or less of tin, preferably 5 to 10% by weight in terms of metal, is used, the obtained transparent conductive thin film has high transparency and sheet resistance. Is low, which is preferable. The transparent conductive film of the present invention is produced, for example, by forming a transparent barrier thin film and a transparent conductive thin film on the transparent film substrate by a magnetron sputtering method.

The target used when the transparent barrier thin film is formed on the film substrate is a mixed sintered body of the above-mentioned metal oxides mainly containing silicon oxide or a metal mainly containing silicon nitride. A mixed sintered body of nitride is used. In particular, it is preferable to use a composite oxide sintered body of silicon dioxide and silicon monoxide. The gas composition during sputtering is an inert gas such as argon,
Alternatively, a material containing oxygen, hydrogen, etc. as a main component is used. The total gas pressure is 1 × 10 ^{−3 to} 3 × 1
The range of 0 ^-3 Torr is preferred. When it is less than 1 × 10 ⁻³ Torr, the discharge becomes unstable, which is not preferable and 3 ×
If it exceeds 10 ^-3 Torr, the transparent barrier thin film does not exhibit sufficient gas barrier properties, which is not preferable. The power source used is preferably a high frequency power source (hereinafter referred to as RF) because the target of the barrier material is an insulating material.
It is preferable to form a film with an electric power density of RF 1.0 to 4.0 W / cm ² . If the RF is less than 1.0 W / cm ^{2, the} adhesion of the formed transparent barrier thin film to the film substrate becomes insufficient, which is not preferable, and RF 4.0 is not preferable.
If it exceeds W / cm ² , insufficient cooling of the target may occur and the target may be damaged, which is not preferable. The thickness of the transparent barrier thin film thus formed is 20 to 100 nm, preferably 25 to 60 n.
m.

As a target used when forming a transparent conductive thin film on a transparent barrier thin film, a complex oxide sintered body of a metal oxide mainly containing indium oxide is used. In particular, it is preferable to use a sintered body of ITO. As described above, as a ratio of indium oxide and tin oxide in ITO, tin is preferably contained in a ratio of 10% by weight or less in terms of metal. The gas composition during sputtering is the same as in the case of the transparent barrier thin film. The total gas pressure is 3 × 10 ^{−3 to} 9 × 10 ⁻³ To.
A range of rr is preferred. When it is less than 3 × 10 ⁻³ Torr, the internal stress of the transparent conductive thin film increases, so that the warp of the transparent conductive thin film becomes large, and the adhesive force of the transparent conductive thin film and the transparent barrier thin film to the film substrate is increased. Is less likely to be peeled off, which is not preferable. On the other hand, if it exceeds 9 × 10 ⁻³ Torr, the sheet resistance becomes extremely large, which is not practical and is not preferable. As an additive gas, for example, in the case of an ITO thin film,
It is preferable to control the oxygen partial pressure within the range of 0 to 5.0% of the total gas pressure. When the oxygen partial pressure exceeds 5.0%, the sheet resistance becomes 100Ω / □ or more, which is not preferable. The power supply used is preferably a DC power supply (hereinafter referred to as DC) from the viewpoint of productivity. DC 0.1-2.0
The film is preferably formed at a power density of W / cm ² , and more preferably less than 1.2 W / cm ² . If the power density is less than 0.1 W / cm ² , productivity may be reduced, which is not preferable, and if the power density exceeds 2.0 W / cm ² , internal stress of the ITO thin film increases. In addition, the ITO thin film is greatly warped, and the adhesion of the transparent conductive thin film and the transparent barrier thin film to the film substrate is reduced, so that peeling may occur, which is not preferable. The thickness of the transparent conductive thin film is 20 to 200 nm, preferably 50 to 150 n.
m. A thicker layer is preferable because it lowers electric resistance, but cracks are likely to occur during bending.

The transparent conductive film thus obtained has good gas barrier properties such as water vapor barrier property, oxygen barrier property, etc., conductivity and transparency, and the adhesion between the film substrate and the transparent barrier thin film. Since the adhesive force is sufficient, it can be suitably used for applications such as liquid crystal cell substrates and liquid crystal display devices.

[0026]

EXAMPLES The present invention will be described below based on examples, but the present invention is not limited thereto. The evaluation of the obtained transparent conductive film in the evaluations in the examples was carried out by the following methods. (1) Oxygen barrier property The oxygen barrier property of the transparent barrier thin film formed on the film substrate is measured by OX-TR manufactured by Modern Control Co.
It was measured using AN100 and displayed in units of ml / m ² / day.

(2) Water vapor barrier property The water vapor barrier property of the transparent barrier thin film formed on the film substrate was measured according to the moisture permeability test method (cup method) JIS-Z-0208 of the moisture-proof packaging material.

(3) Sheet resistance The sheet resistance of the transparent conductive film was measured according to the four-probe resistivity measuring method.

(4) Light transmittance The light transmittance of the transparent conductive film at a wavelength of 550 nm was expressed as a percentage with air as a reference.

(5) Adhesion force According to JIS-C-2107 and Z-0237, the 90-degree peeling adhesion force of the transparent conductive film was measured.

Example 1 A substrate having a thickness of 125 μm
The transparent barrier thin film and the transparent conductive thin film are sequentially formed on the film substrate by using a magnetron sputtering machine (HSM-720 manufactured by Shimadzu Corporation) equipped with two 6-inch diameter targets using the polyarylate transparent film of Formed on. When forming a transparent barrier thin film,
SiO _1.5 was used as the target, and only argon was used as the sputtering gas. Total gas pressure 1.0 × 10 ^-3 To
rr and gas flow rate of 10 sccm, power conditions are:
When a film was formed under the conditions of RF 400 W (2.35 W / cm ² ) and a sputtering time of 1.5 minutes, a transparent barrier thin film having a thickness of 30 nm was obtained. Using the transparent barrier thin film formed on the film substrate in this manner, the tests (1) and (2) were conducted.

Next, a transparent conductive thin film was formed on this transparent barrier thin film. The conditions at that time are as follows. IT with a tin oxide ratio of 10% by weight as a target
O was used, and as the sputtering gas, argon plus 1% oxygen was used. The total gas pressure is 7.0 × 10 ⁻³ Torr, the gas flow rate is 20 sccm, and the power condition is DC 0.
6A 250V (0.88W / cm ² ), sputtering time 3
Film formation was carried out under the condition of minutes, and a transparent conductive thin film having a thickness of 100 nm was obtained. The transparent conductive film thus obtained was subjected to the tests of the above (3) to (5). Table 1 shows the sputtering conditions and the test results. The same test was performed on Comparative Examples 1 and 2 described below. The results are also shown in Table 1.

The film forming power of the transparent barrier thin film is 2.3.
When the film is formed at 5 W / cm ² , the sheet resistance is 74 Ω /
□, light transmittance 79%, oxygen barrier property 0.5 ml
/ M ² / day, the water vapor barrier properties 0.5 g / m ² / day, and adhesion was obtained transparent conductive film is 150 g / cm.

Comparative Example 1 A transparent conductive film was prepared in the same manner as in Example 1 except that the film-forming power of the transparent conductive thin film was set to DC 1.6A250V (2.35 W / cm ² ). The results are shown in Table 1. When the film formation power of the transparent conductive thin film was increased from 0.88 W / cm ² to 2.35 W / cm ² , the adhesion was insufficient at 20 g / cm and the thin film layer was peeled off.

Comparative Example 2 A transparent conductive film was prepared in the same manner as in Example 1 except that the process pressure during film formation of the transparent conductive thin film was 1.0 × 10 ⁻³ Torr. The results are shown in Table 1. The process pressure for forming the transparent conductive thin film is from 7.0 × 10 ^-3 Torr to 1.0 × 10 ^-3.
Sheet resistance is 35Ω / □ when the film is formed by lowering to Torr.
Although a transparent conductive thin film having low electric resistance was obtained, peeling occurred due to insufficient adhesion.

[0036]

[Table 1]

Example 2 Using a magnetron sputtering apparatus (SLC-15S type manufactured by Shimadzu Corporation) equipped with ^two 200 × 700 mm ² targets, a transparent conductive film was prepared as follows. A 125 μm thick polyarylate transparent film was used as the substrate. When forming the transparent barrier thin film, SiO _1.5 was used as the target and only argon was used as the sputtering gas. The total gas pressure of 1.4 × 10 ^{- 3} Torr, and the gas flow rate 100 sccm, a power condition, RF
1000 W (1.11 W / cm ² ), sputtering time 7.
When the film formation was performed for 5 minutes, a transparent barrier thin film having a thickness of 40 nm was obtained. Using the transparent barrier thin film formed on the film substrate in this manner, the tests (1) and (2) were conducted. Then, a transparent conductive thin film was formed on this transparent barrier thin film. The conditions at that time are as follows. ITO having a tin oxide ratio of 10% by weight was used as a target, and argon was added 1% of oxygen as a sputtering gas. The total gas pressure was 5.0 × 10 ⁻³ Torr and the gas flow rate was 50 sccm.
As power condition, DC 0.5A 300V (0.17W
/ Cm ² ) and the sputtering time was 30 minutes to form a film, and a transparent conductive thin film having a thickness of 100 nm was obtained. Regarding the obtained transparent conductive film, the above (3) to
The test of item (5) was performed. Table 2 shows the sputtering conditions and the test results. The same test was performed for Comparative Example 3 described later. The results are also shown in Table 2.

The film forming power of the transparent barrier thin film is set to 1.1.
When the film is formed at 1 W / cm ² , the sheet resistance is 50 Ω /
□, light transmittance is 80%, oxygen barrier property is 1.0 ml
/ M ² / day, the water vapor barrier properties 0.5 g / m ² / day, and adhesion was obtained transparent conductive film is 150 g / cm.

Comparative Example 3 A transparent conductive film was prepared in the same manner as in Example 2 except that the process pressure at the time of forming the transparent conductive thin film was 1.0 × 10 ⁻³ Torr. Process pressure at the time of film formation of transparent conductive thin film is 5.0 ×
When it is lowered from 10 ⁻³ Torr to 1.0 × 10 ⁻³ Torr, the sheet resistance is 45 Ω / □, the light transmittance is 80%, the oxygen barrier property is 1.0 ml / m ² / day, and the water vapor barrier property is 0.5 g. Although a transparent conductive film having an adhesive strength of / m ² / day was obtained, the adhesive strength was reduced to 20 g / cm, and peeling occurred due to insufficient adhesive strength.

[0040]

[Table 2]

[0041]

According to the present invention, various properties such as oxygen barrier property, water vapor barrier property, conductivity and transparency are satisfied,
In addition, it is possible to provide a transparent conductive film having an adhesive property of 100 g / cm or more between the film substrate and the transparent barrier thin film, which has not been obtained until now. This film can be prepared by appropriately controlling the film forming conditions of the transparent barrier thin film and the transparent conductive thin film. Due to the use of a transparent film substrate, this transparent conductive film has features such as impact resistance, light weight, flexibility, ease of large area, and good workability. Especially, it is preferably used as a film for a liquid crystal display device.

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification number Internal reference number FI Technical indication location H01B 13/00 503 B 7244-5G (72) Inventor Koji Saiki 4-6 Hojocho, Toyonaka City, Osaka Prefecture -1 Rene Toyonaka 121

Claims (5)

[Claims] 1. A transparent barrier thin film of a metal oxide mainly composed of silicon oxide or a metal nitride mainly composed of silicon nitride and having a thickness of 20 to 100 nm is formed on a transparent film substrate. A transparent conductive film having a thickness of 20 to 200 nm formed of a transparent conductive thin film of a metal oxide mainly composed of an oxide, wherein the transparent barrier thin film including the film substrate has an oxygen permeability of 1 ml / m ^2. / Day or less and water vapor permeability of 1 g / m ²
/ Day or less, and the adhesive force between the film substrate and the transparent barrier thin film is 100 g / cm or more, a transparent conductive film. 2. The sheet resistance of the transparent conductive film is 100.
The transparent conductive film according to claim 1, which has an Ω / □ or less and a light transmittance of 75% or more. 3. The transparent conductive film according to claim 1, wherein the transparent film substrate is a polyarylate film substrate. 4. A step of forming a transparent barrier thin film of a metal oxide mainly composed of silicon oxide or a metal nitride mainly composed of silicon nitride on a transparent film substrate by a magnetron sputtering method, and By a magnetron sputtering method on a transparent barrier thin film,
A method for producing a transparent conductive film, which comprises a step of forming a transparent conductive thin film of a metal oxide mainly composed of indium oxide. 5. In the magnetron sputtering method for forming the transparent barrier thin film, the film formation power density on the target is 1.0 to 4.0 W / cm ² , and the film formation process pressure is 1 × 10 ^−3. In the magnetron sputtering method for forming the transparent conductive thin film, the film forming power density on the target is 0.1 to 2.0 W / cm ² , and the film forming process pressure is 3 to 10 × 10 ⁻³ Torr. 3 × 10 ^- a ³ ~9 × 10 ^-3 Torr, claim 4
The method for producing a transparent conductive film according to.