JPH06177028A - Support for circuit board for photoresist application and photoresist application using same - Google Patents

Support for circuit board for photoresist application and photoresist application using same

Info

Publication number
JPH06177028A
JPH06177028A JP4329289A JP32928992A JPH06177028A JP H06177028 A JPH06177028 A JP H06177028A JP 4329289 A JP4329289 A JP 4329289A JP 32928992 A JP32928992 A JP 32928992A JP H06177028 A JPH06177028 A JP H06177028A
Authority
JP
Japan
Prior art keywords
circuit board
photoresist
support
supporting
support member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4329289A
Other languages
Japanese (ja)
Inventor
Michio Fukumi
進男 福見
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHIROSHIKA DENSHI KOGYO KK
Original Assignee
SHIROSHIKA DENSHI KOGYO KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHIROSHIKA DENSHI KOGYO KK filed Critical SHIROSHIKA DENSHI KOGYO KK
Priority to JP4329289A priority Critical patent/JPH06177028A/en
Publication of JPH06177028A publication Critical patent/JPH06177028A/en
Pending legal-status Critical Current

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  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Coating Apparatus (AREA)

Abstract

PURPOSE:To provide a circuit board support for applying a photoresist that allows shorter time in forming photoresist film on both sides of the circuit board. CONSTITUTION:Four sides of a circuit board bearing a circuit pattern are, with an L-shape member consisting of the first and second supporting members 1 and 2 and the third and fourth supporting members 3 and 4, supported from under to keep the circuit board at a specified level. The third supporting member 3 consists of a rod 9 having one end that slides along a slide channel 9 of the second supporting member 2, and a slide member 6 that slides along the rod 5. The fourth supporting member 4 comprises, at one end, a projecting part 4b that slides along a slide channel 8 of the first supporting member 1, and a slide hole 12, for the other end of the third supporting member to slide through. Inside of respective supporting members 1-4, an intermediate supporting material 7 that supports the center of the circuit board is assigned. With this, a circuit board of arbitrary size is supported, and while the bottom surface of circuit board is floating the photoresist is applied.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、回路基板上の回路パタ
ーンを保護し絶縁するためのホトレジストを塗布するに
際して用いられる支持具、及び該支持具を用いたホトレ
ジストの塗布方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a support used for applying a photoresist for protecting and insulating a circuit pattern on a circuit board, and a method for applying a photoresist using the support.

【0002】[0002]

【従来の技術】従来より、電気機器類に用いられる電気
回路は、基板上に形成された回路パターンに各種集積回
路、素子等を取り付けることにより形成されることが多
い。このような回路パターンは基板上に1又は複数形成
され、半田付けを行う部分を除いてホトレジスト等から
なる絶縁保護膜で保護される。その後、回路基板は各回
路パターン毎に分割され、プリント基板として使用され
る。このホトレジスト膜は、エポキシガラス等からなる
基板に液状のホトレジストをスクリーン印刷などにより
塗布し乾燥させ、更に露光及び現像を経て形成される。
2. Description of the Related Art Conventionally, electric circuits used in electric devices are often formed by attaching various integrated circuits, elements, etc. to a circuit pattern formed on a substrate. One or a plurality of such circuit patterns are formed on the substrate, and are protected by an insulating protective film made of photoresist or the like except for the portion to be soldered. After that, the circuit board is divided for each circuit pattern and used as a printed board. This photoresist film is formed by applying a liquid photoresist to a substrate made of epoxy glass or the like by screen printing, drying, and further exposing and developing.

【0003】このようなホトレジスト膜は、以下の工程
を経て形成される。まず、回路パターンを形成した基板
を作業台の平坦面に置き、この基板の一方の面にホトレ
ジストを塗布する。作業台の平坦面上でホトレジストを
塗布すると、均一な厚さのホトレジスト膜が得られる。
ホトレジスト膜が均一であることは回路パターンを絶縁
保護する上で重要な要素である。次に、この基板をオー
ブン等に入れ、約20分乾燥(セミキュア)させる。そ
の後、オーブンから基板を取り出し、15分間放置して
冷却する。冷却後、基板のもう一方の面にホトレジスト
を塗布し、再びオーブンに入れて約20分乾燥後、15
分間放置して冷却する。このようにして基板の両面に形
成されたホトレジスト膜のうち、半田付けを行うラウン
ド部分を露光及び現像して除去する。
Such a photoresist film is formed through the following steps. First, a substrate on which a circuit pattern is formed is placed on a flat surface of a work table, and a photoresist is applied to one surface of this substrate. When the photoresist is applied on the flat surface of the work table, a photoresist film having a uniform thickness can be obtained.
The uniformity of the photoresist film is an important factor in insulating and protecting the circuit pattern. Next, this substrate is put in an oven or the like and dried (semi-cure) for about 20 minutes. Then, the substrate is taken out of the oven and left for 15 minutes to cool. After cooling, apply photoresist to the other side of the substrate, put it in the oven again and dry for about 20 minutes, then
Leave to cool for a minute. Of the photoresist film thus formed on both surfaces of the substrate, the round portion for soldering is exposed and developed to be removed.

【0004】[0004]

【発明が解決しようとする課題】上述のように、従来で
はホトレジスト膜は基板の一方の面に形成され、乾燥及
び冷却された後、更にもう一方の面にも同じ工程を経て
ホトレジスト膜が形成されるため、2度の乾燥及び冷却
工程を経なければならない。この乾燥及び冷却の工程は
特に作業を行う必要のない単なる待ち時間であるにもか
かわらず、比較的長時間を費やさなければならない。こ
の乾燥及び冷却の工程に要する時間により、作業効率を
向上させることができない。
As described above, conventionally, the photoresist film is formed on one surface of the substrate, dried and cooled, and then the photoresist film is formed on the other surface through the same steps. Therefore, it has to undergo two drying and cooling steps. This drying and cooling process has to be relatively long, even though it is merely a waiting time that requires no special work. Due to the time required for the drying and cooling steps, work efficiency cannot be improved.

【0005】本発明はこのような問題点を解決するもの
であり、本発明の目的は、ホトレジスト膜の形成に要す
る時間を短縮することができるホトレジスト塗布用回路
基板支持具を提供することである。本発明の他の目的
は、この支持具を用いたホトレジストの塗布方法を提供
することである。
The present invention solves such a problem, and an object of the present invention is to provide a circuit board support for photoresist coating which can shorten the time required for forming a photoresist film. . Another object of the present invention is to provide a method for coating a photoresist using this support.

【0006】[0006]

【課題を解決するための手段】本発明に係るホトレジス
ト塗布用回路基板支持具は、1又は2以上の回路パター
ンを形成した回路基板の周縁部を浮かせて支持する複数
の支持部材を有し、該支持部材には前記回路基板の少な
くとも2辺を保持するための切欠が形成されていること
を特徴とする。
A circuit board support for photoresist application according to the present invention has a plurality of support members for floating and supporting a peripheral portion of a circuit board on which one or more circuit patterns are formed, The supporting member is formed with a notch for holding at least two sides of the circuit board.

【0007】また、前記複数の支持部材が、前記回路基
板の隣接する第1及び第2の辺をそれぞれ支持し前記切
欠に並行するスライド溝をそれぞれ有する互いにL字状
に固定された第1及び第2の支持部材を有するL字型部
材と、該L字型部材の第2の支持部材の前記スライド溝
に沿ってスライドし得る一端を有するロッド、及び前記
回路基板の第3の辺を支持し前記ロッドに沿ってスライ
ドし得るスライド部材を有する第3の支持部材と、前記
回路基板の第4の辺を支持し前記L字型部材の第1の支
持部材の前記スライド溝に沿ってスライドし得る一端を
有すると共に、前記ロッドの他端を貫通させ該他端を前
記回路基板の第4の辺に沿ってスライドさせるスライド
穴を有する第4の支持部材とを備えた構成とすることが
できる。
Further, the plurality of supporting members are fixed to each other in an L-shape so as to respectively support adjacent first and second sides of the circuit board and have slide grooves parallel to the cutouts. An L-shaped member having a second supporting member, a rod having one end slidable along the slide groove of the second supporting member of the L-shaped member, and a third side of the circuit board are supported. And a third support member having a slide member capable of sliding along the rod, and a third support member supporting the fourth side of the circuit board and sliding along the slide groove of the first support member of the L-shaped member. And a fourth support member having a slide hole that penetrates the other end of the rod and slides the other end along the fourth side of the circuit board. it can.

【0008】更に、上記構成に加え、前記回路基板の周
縁部以外の部分で前記回路基板の下面を前記支持部材と
同じ高さに支持して前記回路基板の撓みを防止する中間
支持材を更に有する構成とすることができる。
Further, in addition to the above structure, an intermediate support member for supporting the lower surface of the circuit board at the same height as the support member at a portion other than the peripheral portion of the circuit board to prevent the circuit board from bending is further provided. It can be configured to have.

【0009】本発明のホトレジストの塗布方法は、上記
ホトレジスト塗布用回路基板支持具を用いた塗布方法で
あって、前記支持部材の前記切欠に回路基板の各辺を固
定した後、前記回路基板の一方の面にホトレジストを塗
布し、その後に前記回路基板を裏返して前記ホトレジス
ト塗布用回路基板支持具の前記支持部材の前記切欠に前
記回路基板の各辺を固定した後、更に前記回路基板の他
方の面にホトレジストを塗布することを特徴とする。
A photoresist coating method of the present invention is a coating method using the above-mentioned photoresist coating circuit board support, wherein after fixing each side of the circuit board to the notch of the support member, the circuit board of the circuit board is fixed. After coating the photoresist on one surface, after turning over the circuit board and fixing each side of the circuit board to the notch of the supporting member of the circuit board support for photoresist coating, the other side of the circuit board is further fixed. It is characterized in that a photoresist is applied to the surface of.

【0010】尚、本明細書に於いて回路基板の辺とは、
回路基板の側端面から所定の幅だけ内側の部分をいう。
In this specification, the side of the circuit board means
The part that is inside by a predetermined width from the side end surface of the circuit board.

【0011】[0011]

【作用】上記の構成よりなるホトレジスト塗布用回路基
板支持具は、例えば平らな作業台上に置いて使用され
る。回路基板は、その各辺が各支持部材の切欠に沿うよ
うに置かれる。このように回路基板を置くことにより、
回路基板は作業台から所定の距離だけ隔てて保持され、
その下面は作業台に接することはない。この状態で回路
基板の上面にホトレジストを例えばシルクスクリーン印
刷により塗布すれば、回路基板は各支持部材の切欠に固
定されているので、印刷に際しても回路基板は動かな
い。また、本発明の支持具では回路基板の裏面の周縁部
のみを支持するので、一方の面にホトレジストを塗布し
た後、乾燥及び冷却工程を経ることなく、回路基板を裏
返し、引き続いてもう一方の面にホトレジストを塗布す
ることができる。
The circuit board support for photoresist application having the above construction is used, for example, placed on a flat workbench. The circuit board is placed so that each side thereof is along the notch of each supporting member. By placing the circuit board in this way,
The circuit board is held a predetermined distance from the workbench,
Its lower surface does not contact the workbench. In this state, if a photoresist is applied to the upper surface of the circuit board by, for example, silk screen printing, the circuit board is fixed to the notches of the respective supporting members, so that the circuit board does not move during printing. Moreover, since the support of the present invention supports only the peripheral portion of the back surface of the circuit board, after applying the photoresist to one surface, the circuit board is turned over without the drying and cooling steps, and then the other surface The surface can be coated with photoresist.

【0012】また、支持部材が第1及び第2の支持部材
を有するL字型部材と、ロッド及びスライド部材を有す
る第3の支持部材と、スライド穴を有する第4の支持部
材とを備えた構成では、L字型部材の第2の支持部材の
スライド溝に沿って第3の支持部材のロッドの一端をス
ライドさせると共に、このロッドの他端を第4の支持部
材のスライド穴に貫通させてスライドさせることによ
り、第1及び第3の支持部材の間の距離を変化させるこ
とができる。同様に、L字型部材の第1の支持部材のス
ライド溝に沿って第4の支持部材の一端をスライドさせ
ると共に、第4の支持部材のスライド穴を第3の支持部
材のロッドに対してスライドさせることにより、L字型
部材の第2の支持部材と第4の支持部材との間の距離を
変えることができる。このように、第1及び第3の支持
部材の間の距離並びに第2及び第4の支持部材の間の距
離を任意に変化させることができるので、任意の大きさ
の回路基板を支持し固定することができる。
The support member includes an L-shaped member having first and second support members, a third support member having a rod and a slide member, and a fourth support member having a slide hole. In the configuration, one end of the rod of the third support member is slid along the slide groove of the second support member of the L-shaped member, and the other end of the rod is penetrated into the slide hole of the fourth support member. The distance between the first and third support members can be changed by sliding the first support member and the third support member. Similarly, one end of the fourth support member is slid along the slide groove of the first support member of the L-shaped member, and the slide hole of the fourth support member is inserted into the rod of the third support member. By sliding, the distance between the second support member and the fourth support member of the L-shaped member can be changed. In this way, the distance between the first and third support members and the distance between the second and fourth support members can be arbitrarily changed, so that a circuit board of an arbitrary size is supported and fixed. can do.

【0013】更に、中間支持材を有する構成では、回路
基板の面積が大きく或いは回路基板が薄い場合に於いて
も、ホトレジストの塗布に際して中間支持材が基板の周
縁部以外の部分を裏面から支持するので、回路基板の撓
みが防止され、ホトレジストを均一に塗布することがで
きる。
Further, in the structure having the intermediate support material, even when the area of the circuit board is large or the circuit board is thin, the intermediate support material supports the portion other than the peripheral portion of the substrate from the back surface when the photoresist is applied. Therefore, the circuit board is prevented from bending, and the photoresist can be applied uniformly.

【0014】また、本発明のホトレジストの塗布方法
は、上記ホトレジスト塗布用支持台を用いるものであ
る。即ち、この方法は、各支持部材の切欠に回路基板の
各辺を置いて固定した後、前記回路基板の一方の面にホ
トレジストを塗布し、更に引き続いて、回路基板を裏返
して再び各支持部材の切欠に回路基板の各辺を置いて固
定した後、回路基板の他方の面にホトレジストを塗布す
るものである。このように本発明の塗布方法では、乾燥
に先立って両面にホトレジストが塗布されるため、1回
の乾燥工程で両面にホトレジスト膜を形成することがで
きる。
The photoresist coating method of the present invention uses the photoresist coating support. That is, in this method, after placing each side of the circuit board in the notch of each support member and fixing it, a photoresist is applied to one surface of the circuit board, and then the circuit board is turned over again and each support member is again turned on. After each side of the circuit board is placed and fixed in the notch, a photoresist is applied to the other surface of the circuit board. As described above, in the coating method of the present invention, the photoresist is coated on both surfaces before drying, so that the photoresist film can be formed on both surfaces by one drying step.

【0015】[0015]

【実施例】以下、本発明の実施例を図面に基づいて詳細
に説明する。図1に本発明のホトレジスト塗布用回路基
板支持具の斜視図を、図2にその平面図を示す。また、
図3は図1及び図2のA−A線断面図である。本実施例
のホトレジスト塗布用回路基板支持具は、複数の回路パ
ターンを形成した回路基板20(図2)の4辺を下方よ
り所定の高さに支持する第1の支持部材1、第2の支持
部材2、第3の支持部材3及び第4の支持部材4を有し
ている。第1の支持部材1及び第2の支持部材2は、互
いに直角に固定されてL字型部材10を構成している。
第1の支持部材1及び第2の支持部材2には、回路基板
20を支持し固定するための切欠1a及び2aがそれぞ
れ設けられている。また、第1の支持部材1及び第2の
支持部材2の側面には、スライド溝8及び9がそれぞれ
設けられている。これらのスライド溝8及び9は、それ
ぞれ後述する第4の支持部材4の凸部4b及び第3の支
持部材3のロッド5の端部5aをスライドさせるために
設けられている。
Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 is a perspective view of a photoresist coating circuit board support of the present invention, and FIG. 2 is a plan view thereof. Also,
FIG. 3 is a sectional view taken along the line AA of FIGS. 1 and 2. The circuit board support for photoresist application of the present embodiment supports first and second support members 1 and 2 for supporting four sides of a circuit board 20 (FIG. 2) having a plurality of circuit patterns at a predetermined height from below. It has a support member 2, a third support member 3 and a fourth support member 4. The first support member 1 and the second support member 2 are fixed at right angles to each other to form an L-shaped member 10.
The first support member 1 and the second support member 2 are provided with notches 1a and 2a for supporting and fixing the circuit board 20, respectively. Further, slide grooves 8 and 9 are provided on the side surfaces of the first support member 1 and the second support member 2, respectively. These slide grooves 8 and 9 are provided to slide the convex portion 4b of the fourth support member 4 and the end portion 5a of the rod 5 of the third support member 3, which will be described later, respectively.

【0016】第3の支持部材3はロッド5とスライド部
材6とを有し、スライド部材6には回路基板20の一辺
を支持する切欠6aが設けられている。また、スライド
部材6にはロッド5を貫通させる貫通穴6bが設けら
れ、スライド部材6は、図1の矢印21に示すように、
ロッド5の長手方向に沿ってスライド可能である。ロッ
ド5の端部5aは第2の支持部材2のスライド溝9内に
スライド可能に挿入されている。従って、ロッド5は図
1の矢印22に示す方向に平行移動可能である。
The third support member 3 has a rod 5 and a slide member 6, and the slide member 6 is provided with a notch 6a for supporting one side of the circuit board 20. In addition, the slide member 6 is provided with a through hole 6b for penetrating the rod 5, and the slide member 6 is, as shown by an arrow 21 in FIG.
It is slidable along the longitudinal direction of the rod 5. The end 5a of the rod 5 is slidably inserted into the slide groove 9 of the second support member 2. Therefore, the rod 5 can be translated in the direction shown by the arrow 22 in FIG.

【0017】また、第4の支持部材4には回路基板20
の一辺を支持する切欠4aが設けられ、第4の支持部材
4の端部には凸部4bが設けられている。この凸部4b
は、前述のように第1の支持部材1のスライド溝1a内
に摺動可能に挿入されている。従って、第4の支持部材
4は図1の矢印23に示す方向に平行移動可能である。
また、第4の支持部材4にはスライド穴12が設けら
れ、スライド穴12には前述のロッド5の端部5bが貫
通している。この端部5bは、前述のように、図1の矢
印22に示す方向に平行移動が可能である。
The circuit board 20 is provided on the fourth support member 4.
A notch 4a that supports one side is provided, and a convex portion 4b is provided at the end of the fourth support member 4. This convex portion 4b
Is slidably inserted into the slide groove 1a of the first support member 1 as described above. Therefore, the fourth support member 4 can move in parallel in the direction indicated by the arrow 23 in FIG.
A slide hole 12 is provided in the fourth support member 4, and the end 5b of the rod 5 described above penetrates through the slide hole 12. As described above, this end portion 5b can be translated in the direction shown by the arrow 22 in FIG.

【0018】更に、本実施例では、第1〜第4の支持部
材1,2,3及び4に囲まれた領域の内部に中間支持材
7が配されている。この中間支持材7は回路基板20を
支持するための尖端部7aを有している。中間支持材7
の尖端部7aは、回路基板上の回路パターンが形成され
ている領域以外の領域を支持するように置かれて使用さ
れる。回路基板上に複数の回路パターンが形成されてい
る場合には、通常、各回路パターンの間にパターンが形
成されていない5〜7mm程度の間隙が設けられているの
で、中間支持材7はこの間隙の部分を支持するように配
される。
Further, in the present embodiment, the intermediate supporting member 7 is arranged inside the region surrounded by the first to fourth supporting members 1, 2, 3 and 4. The intermediate support member 7 has a tip portion 7 a for supporting the circuit board 20. Intermediate support material 7
The pointed end portion 7a is placed and used so as to support an area other than the area where the circuit pattern is formed on the circuit board. When a plurality of circuit patterns are formed on the circuit board, a gap of about 5 to 7 mm where no pattern is formed is usually provided between the circuit patterns. It is arranged to support a portion of the gap.

【0019】以上の構成を有する本実施例のホトレジス
ト塗布用回路基板支持具を用いたホトレジストの塗布方
法について説明する。まず、第1〜第4の支持部材1,
2,3及び4を作業台上に置き、これらの支持部材1,
2,3及び4に囲まれた領域のほぼ中央に、中間支持材
7を配置する。中間支持材7は、前述のように、後に回
路基板20が各支持部材1,2,3及び4上に置かれた
場合に回路パターンの間の間隙に位置するように置かれ
る。
A method of applying a photoresist using the circuit board support for photoresist application of the present embodiment having the above-mentioned structure will be described. First, the first to fourth support members 1,
2, 3, and 4 are placed on a workbench, and these support members 1,
The intermediate support material 7 is arranged in the approximate center of the area surrounded by 2, 3, and 4. The intermediate support material 7 is placed so as to be positioned in the gap between the circuit patterns when the circuit board 20 is placed on each of the support members 1, 2, 3 and 4 as described above.

【0020】次に、回路基板20の隣接する2辺がL字
型部材10の第1及び第2の支持部材1,2の切欠1
a,2aに隙間なく載るように回路基板20が置かれ
る。通常、回路基板20の回路パターンが形成されてい
る領域の外側には10〜30mm程度の外枠部が設けられ
ていので、この外枠部が上記切欠1a,2aによって支
持され固定されるように回路基板20が置かれる。
Next, two adjacent sides of the circuit board 20 are provided with the notches 1 of the first and second supporting members 1 and 2 of the L-shaped member 10.
The circuit board 20 is placed so as to be placed on the a and 2a without a gap. Usually, an outer frame portion of about 10 to 30 mm is provided outside the area where the circuit pattern of the circuit board 20 is formed, so that the outer frame portion is supported and fixed by the notches 1a and 2a. The circuit board 20 is placed.

【0021】次に、第4の支持部材4をその切欠4aが
回路基板20の一辺を支持する位置まで移動させ、それ
と共に第3の支持部材3をスライド部材6の切欠6aが
回路基板20の他の一辺を支持する位置まで移動させ
る。これにより、回路基板20の4辺の全てが第1〜第
4の支持部材1,2,3及び4によって支持されると共
に、回路基板20の中央の部分で中間支持材7によって
支持されることになる。
Next, the fourth support member 4 is moved to a position where the notch 4a supports one side of the circuit board 20, and at the same time, the notch 6a of the slide member 6 causes the notch 6a of the circuit board 20 to move. Move to a position that supports the other side. As a result, all four sides of the circuit board 20 are supported by the first to fourth support members 1, 2, 3 and 4 and also supported by the intermediate support member 7 in the central portion of the circuit board 20. become.

【0022】次に、この状態でホトレジストをシルクス
クリーン印刷により塗布する。その後、ホトレジストを
塗布した回路基板20をその辺を把持して裏返し、上記
と同様の手順で回路基板20を本実施例のホトレジスト
塗布用回路基板支持具に固定する。その際、本実施例の
支持具は回路基板の周縁部のみを支持するので、既に塗
布されたホトレジストに触れることなく回路基板を支持
することができる。更に、基板20のもう一方の面に更
にホトレジストを塗布し、次に、上述のように両面にホ
トレジストを塗布した回路基板20をオートクレーブで
乾燥し冷却し、更に露光及び現像の各工程を経て回路基
板20が完成する。
Next, in this state, a photoresist is applied by silk screen printing. After that, the side of the circuit board 20 coated with the photoresist is gripped and turned upside down, and the circuit board 20 is fixed to the circuit board support for photoresist application of this embodiment by the same procedure as described above. At that time, since the supporting member of this embodiment supports only the peripheral portion of the circuit board, the circuit board can be supported without touching the already-applied photoresist. Further, a photoresist is further applied to the other surface of the substrate 20, and then the circuit board 20 having the photoresist applied to both surfaces as described above is dried by an autoclave and cooled, and then the circuit is passed through each step of exposure and development. The substrate 20 is completed.

【0023】本実施例では回路基板20の4辺が第1〜
第4の支持部材1,2,3及び4の切欠1a,2a,6
a及び4aに支持され固定されるので、回路基板20の
下面を作業台に接触させることなく基板20の上面にホ
トレジストを塗布することができる。従って、回路基板
20の一方の面にホトレジストを塗布した後、引き続い
てもう一方の面にホトレジストを塗布することができ
る。このように、本実施例のホトレジスト塗布用支持台
を用いると、乾燥及び冷却の工程が1回で済み、作業時
間を従来の約3分の1に短縮することができる。このよ
うな作業時間の短縮は、特に小ロット多品種の回路基板
の製造に特に効果が大きい。
In this embodiment, the four sides of the circuit board 20 are
Notches 1a, 2a, 6 of the fourth support members 1, 2, 3 and 4
Since it is supported and fixed by a and 4a, the photoresist can be applied to the upper surface of the circuit board 20 without contacting the lower surface of the circuit board 20 with the workbench. Therefore, after applying the photoresist to one surface of the circuit board 20, the photoresist can be subsequently applied to the other surface. Thus, when the photoresist coating support of this embodiment is used, the drying and cooling steps are only required once, and the working time can be shortened to about one-third that of the conventional method. Such shortening of the working time is particularly effective for manufacturing circuit boards of various kinds in small lots.

【0024】また、本実施例のホトレジスト塗布用回路
基板支持具は、第2及び第4の支持部材2,4の長手方
向に沿ってスライド可能な第3の支持部材3と、第1及
び第3の支持部材1,3の長手方向に沿ってスライド可
能な第4の支持部材4とを有しているので、任意の大き
さの回路基板のホトレジストの塗布を行うことができ
る。
In addition, the circuit board support for photoresist application according to the present embodiment includes a third support member 3 slidable along the longitudinal direction of the second and fourth support members 2 and 4, and a first and a first support member 3. Since the third support member 1 and the third support member 4 are slidable along the longitudinal direction of the third support member 3, it is possible to apply the photoresist of the circuit board of an arbitrary size.

【0025】更に、中間支持材7を設けたことにより、
回路基板20が大きい場合や回路基板20の厚さが厚い
場合にも、回路基板20の撓みを防止してホトレジスト
を回路基板20上に均一に塗布することができる。
Further, by providing the intermediate support member 7,
Even when the circuit board 20 is large or the circuit board 20 is thick, it is possible to prevent the circuit board 20 from bending and evenly apply the photoresist onto the circuit board 20.

【0026】なお、上記実施例では中間支持材7を使用
した場合について説明したが、回路基板20が小さい場
合や厚い場合には回路基板20は撓まないので、中間部
材7を使用する必要がない。また、回路基板20が大き
い場合や薄い場合には中間支持材7の数を適宜増やすこ
とができる。また、中間支持材として、図4に示すよう
に、回路基板20に形成された穴13の部分を支持する
中間支持材17を用いることもできる。
In the above embodiment, the case where the intermediate support member 7 is used has been described. However, when the circuit board 20 is small or thick, the circuit board 20 does not bend, so it is necessary to use the intermediate member 7. Absent. Further, when the circuit board 20 is large or thin, the number of the intermediate support materials 7 can be appropriately increased. Further, as the intermediate support member, as shown in FIG. 4, it is also possible to use the intermediate support member 17 that supports the portion of the hole 13 formed in the circuit board 20.

【0027】更に、本実施例では4つの支持部材1,
2,3及び4を設けたが、回路基板20が小さい場合や
厚さが厚い場合には、2つの支持部材を用いて回路基板
20の互いに対向する2辺を支持する構成、或いは3つ
の支持部材を用いて回路基板20の3辺を支持する構成
とすることも可能である。
Further, in this embodiment, four support members 1,
Although 2, 3, and 4 are provided, when the circuit board 20 is small or has a large thickness, two supporting members are used to support two sides of the circuit board 20 which face each other, or three support members. It is also possible to use a member to support the three sides of the circuit board 20.

【0028】[0028]

【発明の効果】本発明に係るホトレジスト塗布用回路基
板支持具を用いれば、回路基板の両面にホトレジストを
塗布した後、1回の乾燥及び冷却工程で次の露光及び現
像工程に移行することができる。従って、回路基板の製
作に要する時間を大幅に短縮することができる。また、
本発明のホトレジスト塗布用回路基板支持具は任意の大
きさの回路基板を支持することができるので、小ロット
多品種の回路基板を効率よく製作することができる。更
に、中間支持材を用いれば回路基板の撓みを防止するこ
とができるので、大きな回路基板或いは厚さの薄い回路
基板上にも均一な厚さのホトレジスト膜を形成すること
ができる。
EFFECTS OF THE INVENTION By using the circuit board support for photoresist application according to the present invention, after applying the photoresist on both sides of the circuit board, it is possible to shift to the next exposure and development step in one drying and cooling step. it can. Therefore, the time required to manufacture the circuit board can be significantly reduced. Also,
Since the photoresist coating circuit board support of the present invention can support a circuit board of any size, it is possible to efficiently manufacture a large number of small lots of circuit boards. Furthermore, since the circuit board can be prevented from being bent by using the intermediate support material, a photoresist film having a uniform thickness can be formed even on a large circuit board or a thin circuit board.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明のホトレジスト塗布用回路基板支持具の
斜視図である。
FIG. 1 is a perspective view of a photoresist coating circuit board support of the present invention.

【図2】図1のホトレジスト塗布用回路基板支持具の平
面図である。
2 is a plan view of the photoresist coating circuit board support of FIG. 1. FIG.

【図3】図1及び図2のA−A線断面図である。FIG. 3 is a sectional view taken along the line AA of FIGS. 1 and 2.

【図4】中間支持材の他の実施例を示す側面図である。FIG. 4 is a side view showing another embodiment of the intermediate support material.

【符号の説明】[Explanation of symbols]

1…第1の支持部材 1a,2a,4a,6a…切欠 2…第2の支持部材 3…第3の支持部材 4…第4の支持部材 5…ロッド 6…スライド部材 6b…貫通穴 7…中間支持材 8…スライド溝 9…スライド溝 10…L字型部材 12…スライド穴 20…回路基板 DESCRIPTION OF SYMBOLS 1 ... 1st supporting member 1a, 2a, 4a, 6a ... Notch 2 ... 2nd supporting member 3 ... 3rd supporting member 4 ... 4th supporting member 5 ... Rod 6 ... Sliding member 6b ... Through hole 7 ... Intermediate support material 8 ... Slide groove 9 ... Slide groove 10 ... L-shaped member 12 ... Slide hole 20 ... Circuit board

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 1又は2以上の回路パターンを形成した
回路基板の周縁部を浮かせて支持する複数の支持部材を
有し、該支持部材には前記回路基板の少なくとも2辺を
保持するための切欠が形成されていることを特徴とする
ホトレジスト塗布用回路基板支持具。
1. A plurality of supporting members for floating and supporting a peripheral portion of a circuit board on which one or more circuit patterns are formed, the supporting member for holding at least two sides of the circuit board. A circuit board support for photoresist application, wherein a notch is formed.
【請求項2】 前記複数の支持部材は、 前記回路基板の隣接する第1及び第2の辺をそれぞれ支
持し前記切欠に並行するスライド溝をそれぞれ有する互
いにL字状に固定された第1及び第2の支持部材を備え
たL字型部材と、 該L字型部材の第2の支持部材の前記スライド溝に沿っ
てスライドし得る一端を有するロッド、及び前記回路基
板の第3の辺を支持し前記ロッドに沿ってスライドし得
るスライド部材を有する第3の支持部材と、 前記回路基板の第4の辺を支持し前記L字型部材の第1
の支持部材の前記スライド溝に沿ってスライドし得る一
端を有すると共に、前記ロッドの他端を貫通させ該他端
を前記回路基板の第4の辺に沿ってスライドさせるスラ
イド穴を有する第4の支持部材とを備えたことを特徴と
する請求項1記載のホトレジスト塗布用回路基板支持
具。
2. The plurality of supporting members are fixed to each other in an L-shape, each supporting a first side and a second side of the circuit board adjacent to each other, and each having a slide groove parallel to the cutout. An L-shaped member having a second supporting member, a rod having one end slidable along the slide groove of the second supporting member of the L-shaped member, and a third side of the circuit board. A third support member having a slide member that supports and slides along the rod; and a first L-shaped member that supports a fourth side of the circuit board.
And a slide hole having one end slidable along the slide groove of the support member and having the other end penetrating the rod and sliding the other end along the fourth side of the circuit board. A circuit board support for photoresist application according to claim 1, further comprising a support member.
【請求項3】 前記回路基板の周縁部以外の部分で前記
回路基板の下面を前記支持部材と同じ高さに支持して前
記回路基板の撓みを防止する中間支持材を更に有するこ
とを特徴とする請求項1又は2記載のホトレジスト塗布
用回路基板支持具。
3. An intermediate support member for supporting the lower surface of the circuit board at the same height as the support member at a portion other than the peripheral portion of the circuit board to prevent the circuit board from bending. The circuit board support for photoresist coating according to claim 1 or 2.
【請求項4】 請求項1から3の何れかのホトレジスト
塗布用回路基板支持具の前記支持部材の前記切欠に回路
基板の各辺を固定した後、前記回路基板の一方の面にホ
トレジストを塗布し、その後に前記回路基板を裏返して
前記ホトレジスト塗布用回路基板支持具の前記支持部材
の前記切欠に前記回路基板の各辺を固定した後、更に前
記回路基板の他方の面にホトレジストを塗布することを
特徴とするホトレジストの塗布方法。
4. A circuit board support for photoresist application according to claim 1, wherein each side of the circuit board is fixed to the notch of the support member, and then a photoresist is applied to one surface of the circuit board. Then, after turning over the circuit board and fixing each side of the circuit board to the notch of the support member of the circuit board support for photoresist application, further apply photoresist to the other surface of the circuit board. A method for applying a photoresist, which comprises:
JP4329289A 1992-12-09 1992-12-09 Support for circuit board for photoresist application and photoresist application using same Pending JPH06177028A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4329289A JPH06177028A (en) 1992-12-09 1992-12-09 Support for circuit board for photoresist application and photoresist application using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4329289A JPH06177028A (en) 1992-12-09 1992-12-09 Support for circuit board for photoresist application and photoresist application using same

Publications (1)

Publication Number Publication Date
JPH06177028A true JPH06177028A (en) 1994-06-24

Family

ID=18219794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4329289A Pending JPH06177028A (en) 1992-12-09 1992-12-09 Support for circuit board for photoresist application and photoresist application using same

Country Status (1)

Country Link
JP (1) JPH06177028A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100619A (en) * 2001-09-27 2003-04-04 Nikon Corp Mask holding apparatus and method, and exposing apparatus
KR101275604B1 (en) * 2011-09-07 2013-06-17 참엔지니어링(주) Substrate supporting unit and substrate processing apparatus using the same

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246295A (en) * 1989-03-20 1990-10-02 Fujitsu Ltd Coating of polyimide film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02246295A (en) * 1989-03-20 1990-10-02 Fujitsu Ltd Coating of polyimide film

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003100619A (en) * 2001-09-27 2003-04-04 Nikon Corp Mask holding apparatus and method, and exposing apparatus
KR101275604B1 (en) * 2011-09-07 2013-06-17 참엔지니어링(주) Substrate supporting unit and substrate processing apparatus using the same

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