JPH0617297Y2 - 物品搬送装置 - Google Patents
物品搬送装置Info
- Publication number
- JPH0617297Y2 JPH0617297Y2 JP11456687U JP11456687U JPH0617297Y2 JP H0617297 Y2 JPH0617297 Y2 JP H0617297Y2 JP 11456687 U JP11456687 U JP 11456687U JP 11456687 U JP11456687 U JP 11456687U JP H0617297 Y2 JPH0617297 Y2 JP H0617297Y2
- Authority
- JP
- Japan
- Prior art keywords
- transfer arm
- movable body
- arm
- cylinder
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000035939 shock Effects 0.000 claims description 9
- 239000006096 absorbing agent Substances 0.000 claims description 8
- 238000001514 detection method Methods 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 description 13
- 238000005406 washing Methods 0.000 description 9
- 238000003860 storage Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 6
- 230000001133 acceleration Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- 125000006850 spacer group Chemical group 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11456687U JPH0617297Y2 (ja) | 1987-07-28 | 1987-07-28 | 物品搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11456687U JPH0617297Y2 (ja) | 1987-07-28 | 1987-07-28 | 物品搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6420735U JPS6420735U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-01 |
| JPH0617297Y2 true JPH0617297Y2 (ja) | 1994-05-02 |
Family
ID=31355431
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11456687U Expired - Lifetime JPH0617297Y2 (ja) | 1987-07-28 | 1987-07-28 | 物品搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617297Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1987
- 1987-07-28 JP JP11456687U patent/JPH0617297Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6420735U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-02-01 |
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