JPH0617250Y2 - ディスクの洗浄装置 - Google Patents

ディスクの洗浄装置

Info

Publication number
JPH0617250Y2
JPH0617250Y2 JP1988017577U JP1757788U JPH0617250Y2 JP H0617250 Y2 JPH0617250 Y2 JP H0617250Y2 JP 1988017577 U JP1988017577 U JP 1988017577U JP 1757788 U JP1757788 U JP 1757788U JP H0617250 Y2 JPH0617250 Y2 JP H0617250Y2
Authority
JP
Japan
Prior art keywords
disk
cleaning
cleaning tool
rotation
chuck
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1988017577U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01124989U (enrdf_load_stackoverflow
Inventor
俊英 宮島
宜夫 森田
Original Assignee
日立電子エンジニアリング株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日立電子エンジニアリング株式会社 filed Critical 日立電子エンジニアリング株式会社
Priority to JP1988017577U priority Critical patent/JPH0617250Y2/ja
Publication of JPH01124989U publication Critical patent/JPH01124989U/ja
Application granted granted Critical
Publication of JPH0617250Y2 publication Critical patent/JPH0617250Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP1988017577U 1988-02-15 1988-02-15 ディスクの洗浄装置 Expired - Lifetime JPH0617250Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988017577U JPH0617250Y2 (ja) 1988-02-15 1988-02-15 ディスクの洗浄装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988017577U JPH0617250Y2 (ja) 1988-02-15 1988-02-15 ディスクの洗浄装置

Publications (2)

Publication Number Publication Date
JPH01124989U JPH01124989U (enrdf_load_stackoverflow) 1989-08-25
JPH0617250Y2 true JPH0617250Y2 (ja) 1994-05-02

Family

ID=31231484

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988017577U Expired - Lifetime JPH0617250Y2 (ja) 1988-02-15 1988-02-15 ディスクの洗浄装置

Country Status (1)

Country Link
JP (1) JPH0617250Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3764228B2 (ja) * 1996-12-17 2006-04-05 芝浦メカトロニクス株式会社 ブラシ洗浄装置

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51100510U (enrdf_load_stackoverflow) * 1975-02-08 1976-08-12
JPS5532539U (enrdf_load_stackoverflow) * 1978-08-19 1980-03-01
JPH0616325B2 (ja) * 1985-10-11 1994-03-02 日立電子エンジニアリング株式会社 デイスク部材の洗浄装置

Also Published As

Publication number Publication date
JPH01124989U (enrdf_load_stackoverflow) 1989-08-25

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