JPH01124989U - - Google Patents
Info
- Publication number
- JPH01124989U JPH01124989U JP1757788U JP1757788U JPH01124989U JP H01124989 U JPH01124989 U JP H01124989U JP 1757788 U JP1757788 U JP 1757788U JP 1757788 U JP1757788 U JP 1757788U JP H01124989 U JPH01124989 U JP H01124989U
- Authority
- JP
- Japan
- Prior art keywords
- disk
- detected
- chuck
- disc
- detecting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 238000001514 detection method Methods 0.000 description 2
Landscapes
- Cleaning In General (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988017577U JPH0617250Y2 (ja) | 1988-02-15 | 1988-02-15 | ディスクの洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988017577U JPH0617250Y2 (ja) | 1988-02-15 | 1988-02-15 | ディスクの洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01124989U true JPH01124989U (enrdf_load_stackoverflow) | 1989-08-25 |
JPH0617250Y2 JPH0617250Y2 (ja) | 1994-05-02 |
Family
ID=31231484
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988017577U Expired - Lifetime JPH0617250Y2 (ja) | 1988-02-15 | 1988-02-15 | ディスクの洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0617250Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10177977A (ja) * | 1996-12-17 | 1998-06-30 | Shibaura Eng Works Co Ltd | ブラシ洗浄装置 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51100510U (enrdf_load_stackoverflow) * | 1975-02-08 | 1976-08-12 | ||
JPS5532539U (enrdf_load_stackoverflow) * | 1978-08-19 | 1980-03-01 | ||
JPS6286543A (ja) * | 1985-10-11 | 1987-04-21 | Hitachi Electronics Eng Co Ltd | デイスク部材の洗浄装置 |
-
1988
- 1988-02-15 JP JP1988017577U patent/JPH0617250Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51100510U (enrdf_load_stackoverflow) * | 1975-02-08 | 1976-08-12 | ||
JPS5532539U (enrdf_load_stackoverflow) * | 1978-08-19 | 1980-03-01 | ||
JPS6286543A (ja) * | 1985-10-11 | 1987-04-21 | Hitachi Electronics Eng Co Ltd | デイスク部材の洗浄装置 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10177977A (ja) * | 1996-12-17 | 1998-06-30 | Shibaura Eng Works Co Ltd | ブラシ洗浄装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0617250Y2 (ja) | 1994-05-02 |