JPH0616433A - 光学素子のプレス成形用金型 - Google Patents
光学素子のプレス成形用金型Info
- Publication number
- JPH0616433A JPH0616433A JP17034792A JP17034792A JPH0616433A JP H0616433 A JPH0616433 A JP H0616433A JP 17034792 A JP17034792 A JP 17034792A JP 17034792 A JP17034792 A JP 17034792A JP H0616433 A JPH0616433 A JP H0616433A
- Authority
- JP
- Japan
- Prior art keywords
- base material
- alloy
- press
- optical element
- mold
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B11/00—Pressing molten glass or performed glass reheated to equivalent low viscosity without blowing
- C03B11/06—Construction of plunger or mould
- C03B11/08—Construction of plunger or mould for making solid articles, e.g. lenses
- C03B11/084—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor
- C03B11/086—Construction of plunger or mould for making solid articles, e.g. lenses material composition or material properties of press dies therefor of coated dies
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/10—Die base materials
- C03B2215/12—Ceramics or cermets, e.g. cemented WC, Al2O3 or TiC
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/14—Die top coat materials, e.g. materials for the glass-contacting layers
- C03B2215/16—Metals or alloys, e.g. Ni-P, Ni-B, amorphous metals
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B2215/00—Press-moulding glass
- C03B2215/02—Press-mould materials
- C03B2215/08—Coated press-mould dies
- C03B2215/30—Intermediate layers, e.g. graded zone of base/top material
- C03B2215/32—Intermediate layers, e.g. graded zone of base/top material of metallic or silicon material
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
Abstract
(57)【要約】
【目的】 精密加工性、機械的強度に優れ、高温下での
耐酸化性、耐熱性、耐熱衝撃性に優れ、ガラスに対して
化学的に不活性な光学素子のプレス成形用金型を提供す
ることを目的とする。 【構成】 母材１ｂ（タングステンカーバイト）を研削
加工により所望する形状に近似した形状に加工する。次
に母材１ｂ上にＰＶＤ、ＣＶＤ等により合金層３（少な
くとも表層部がＳｉ−Ｔａ、ＳｉーＷ、ＳｉーＣｒ、Ｓ
ｉーＮｂ、ＳｉーＶ、Ｓｉ−Ｍｏ、ＳｉーＰｂのいずれ
かからなる合金層）を形成する。合金層３をダイヤモン
ドバイトによる切削加工により高精度に所望の形状に仕
上げ、最後に合金層４上にＰＶＤ、ＣＶＤ等により保護
膜２を形成した構成とする。
耐酸化性、耐熱性、耐熱衝撃性に優れ、ガラスに対して
化学的に不活性な光学素子のプレス成形用金型を提供す
ることを目的とする。 【構成】 母材１ｂ（タングステンカーバイト）を研削
加工により所望する形状に近似した形状に加工する。次
に母材１ｂ上にＰＶＤ、ＣＶＤ等により合金層３（少な
くとも表層部がＳｉ−Ｔａ、ＳｉーＷ、ＳｉーＣｒ、Ｓ
ｉーＮｂ、ＳｉーＶ、Ｓｉ−Ｍｏ、ＳｉーＰｂのいずれ
かからなる合金層）を形成する。合金層３をダイヤモン
ドバイトによる切削加工により高精度に所望の形状に仕
上げ、最後に合金層４上にＰＶＤ、ＣＶＤ等により保護
膜２を形成した構成とする。
Description
【０００１】
【産業上の利用分野】本発明は研磨によらず、プレス成
形により光学素子を製造するための金型に関するもので
ある。
形により光学素子を製造するための金型に関するもので
ある。
【０００２】
【従来の技術】近年、高精度な光学レンズの製造方法と
して、従来のような研磨方法を用いて製造するのではな
く、レンズ形状に加工された金型を用いたプレス加工に
より一発成形されている。ところで、この成形で用いら
れる光学素子のプレス成形用金型は、高温度下でも安定
で耐酸化性、耐熱性、耐熱衝撃性に優れていること、ガ
ラスにたいして化学的に不活性であること、プレス時に
プレス面の形状精度が崩れないよう機械的強度に優れい
ること、さらに、高精度に加工する必要があるため、加
工性に優れ精密加工が可能なことが必要である。
して、従来のような研磨方法を用いて製造するのではな
く、レンズ形状に加工された金型を用いたプレス加工に
より一発成形されている。ところで、この成形で用いら
れる光学素子のプレス成形用金型は、高温度下でも安定
で耐酸化性、耐熱性、耐熱衝撃性に優れていること、ガ
ラスにたいして化学的に不活性であること、プレス時に
プレス面の形状精度が崩れないよう機械的強度に優れい
ること、さらに、高精度に加工する必要があるため、加
工性に優れ精密加工が可能なことが必要である。
【０００３】この目的を達成するために、例えば、タン
グステンカーバイド、サーメット、セラミックスを母材
としこの母材上に貴金属合金膜を形成したもの光学素子
のプレス成形用金型等が提案されており、種々の検討が
行われている。
グステンカーバイド、サーメット、セラミックスを母材
としこの母材上に貴金属合金膜を形成したもの光学素子
のプレス成形用金型等が提案されており、種々の検討が
行われている。
【０００４】
【発明が解決しようとする課題】しかしながら前記のよ
うな金型母材および貴金属合金膜を所望の形状に加工す
るためには、ダイヤモンド砥石による研削加工により精
密加工することになるが、このような材料は極めて硬度
が大きく、そのために、ダイヤモンド砥石の摩耗が激し
く高精度な加工が困難なうえに、一個のダイヤモンド砥
石で加工できる金型面数が少ない。また、加工時の切込
み量が大きく出来ず、加工に非常に長時間を要する。さ
らに、小口径レンズ用の金型の加工では、加工可能なダ
イヤモンド砥石がないといった問題がある。
うな金型母材および貴金属合金膜を所望の形状に加工す
るためには、ダイヤモンド砥石による研削加工により精
密加工することになるが、このような材料は極めて硬度
が大きく、そのために、ダイヤモンド砥石の摩耗が激し
く高精度な加工が困難なうえに、一個のダイヤモンド砥
石で加工できる金型面数が少ない。また、加工時の切込
み量が大きく出来ず、加工に非常に長時間を要する。さ
らに、小口径レンズ用の金型の加工では、加工可能なダ
イヤモンド砥石がないといった問題がある。
【０００５】このように、従来の金型は、高精度なもの
は望めず、そのために得られたレンズも光学性能を充分
に満たすものではなく、高価格で、しかも、形状に大き
な制限があった。
は望めず、そのために得られたレンズも光学性能を充分
に満たすものではなく、高価格で、しかも、形状に大き
な制限があった。
【０００６】また、上記問題点を解決するために、精密
加工性の良好なシリコンを母材としたものが提案されて
いる（例えば、特開昭６４−４２３３３号公報）が、機
械的強度の点で問題がある。
加工性の良好なシリコンを母材としたものが提案されて
いる（例えば、特開昭６４−４２３３３号公報）が、機
械的強度の点で問題がある。
【０００７】本発明は上記従来の問題点を解決するもの
で、精密加工性、機械的強度に優れ、高温下での耐酸化
性、耐熱性、耐熱衝撃性に優れ、ガラスに対して化学的
に不活性な光学素子のプレス成形用金型を提供すること
を目的とする。
で、精密加工性、機械的強度に優れ、高温下での耐酸化
性、耐熱性、耐熱衝撃性に優れ、ガラスに対して化学的
に不活性な光学素子のプレス成形用金型を提供すること
を目的とする。
【０００８】
【課題を解決するための手段】この目的を達成するため
に本発明の光学素子のプレス成形用金型は、母材の少な
くとも表層部を、高融点で精密加工性、機械的強度に優
れた、シリコンを主成分としＴａ、Ｗ、Ｃｒ、Ｎｂ、
Ｖ、Ｍｏ、Ｐｂのうち少なくとも１種類以上を含む合金
とし、母材表層部を所望の形状に精密加工した後、保護
膜として耐酸化性、耐熱性、機械的強度に優れ、ガラス
に対して化学的に不活性な貴金属合金（白金（Ｐｔ）、
パラジウム（Ｐｄ）、イリジウム（Ｉｒ）、ロジウム
（Ｒｈ）、オスミウム（Ｏｓ）、ルテニウム（Ｒｕ）、
レニウム（Ｒｅ、タングステン（Ｗ）、タンタル（Ｔ
ａ）のうち、少なくとも一種類以上の金属を含む合金）
膜を母材上に形成するものである。貴金属膜の形成に
は、蒸着法、スパッタリング法、イオンプレーティング
法などのＰＶＤやＣＶＤ等が使用可能である。
に本発明の光学素子のプレス成形用金型は、母材の少な
くとも表層部を、高融点で精密加工性、機械的強度に優
れた、シリコンを主成分としＴａ、Ｗ、Ｃｒ、Ｎｂ、
Ｖ、Ｍｏ、Ｐｂのうち少なくとも１種類以上を含む合金
とし、母材表層部を所望の形状に精密加工した後、保護
膜として耐酸化性、耐熱性、機械的強度に優れ、ガラス
に対して化学的に不活性な貴金属合金（白金（Ｐｔ）、
パラジウム（Ｐｄ）、イリジウム（Ｉｒ）、ロジウム
（Ｒｈ）、オスミウム（Ｏｓ）、ルテニウム（Ｒｕ）、
レニウム（Ｒｅ、タングステン（Ｗ）、タンタル（Ｔ
ａ）のうち、少なくとも一種類以上の金属を含む合金）
膜を母材上に形成するものである。貴金属膜の形成に
は、蒸着法、スパッタリング法、イオンプレーティング
法などのＰＶＤやＣＶＤ等が使用可能である。
【０００９】この場合、母材と保護膜との間に、母材、
保護膜に対して密着性がよく、かつ、熱膨張係数が両者
と近似した値で、耐熱性、機械的強度に優れた材料から
なる中間層を形成すれば、一層、好ましい。
保護膜に対して密着性がよく、かつ、熱膨張係数が両者
と近似した値で、耐熱性、機械的強度に優れた材料から
なる中間層を形成すれば、一層、好ましい。
【００１０】あるいは、光学素子のプレス成形用金型母
材として、耐熱性、耐食性に優れ、高温強度を有するタ
ングステンカーバイド等の超硬合金、セラミックス、サ
ーメットなどを母材として、これを所望する形状に近似
した形状に加工した後、少なくとも表層が、高融点で精
密加工性、機械的強度に優れた、シリコンを主成分とし
Ｔａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍｏ、Ｐｂのうち少なくと
も１種類以上を含む合金膜を形成するか、もしくは、シ
リコン単体膜を形成した後、少なくとも前記膜の表層を
イオン注入法等により、Ｔａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍ
ｏ、Ｐｂのうち少なくとも１種類以上を含む合金膜と
し、これらの合金膜を切削加工により所望の形状に精密
加工した後、保護膜として耐酸化性、耐熱性、機械的強
度に優れ、ガラスに対して化学的に不活性な貴金属合金
（白金（Ｐｔ）、パラジウム（Ｐｄ）、イリジウム（Ｉ
ｒ）、ロジウム（Ｒｈ）、オスミウム（Ｏｓ）、ルテニ
ウム（Ｒｕ）、レニウム（Ｒｅ、タングステン（Ｗ）、
タンタル（Ｔａ）のうち、少なくとも一種類以上の金属
を含む合金）膜を形成したものである。
材として、耐熱性、耐食性に優れ、高温強度を有するタ
ングステンカーバイド等の超硬合金、セラミックス、サ
ーメットなどを母材として、これを所望する形状に近似
した形状に加工した後、少なくとも表層が、高融点で精
密加工性、機械的強度に優れた、シリコンを主成分とし
Ｔａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍｏ、Ｐｂのうち少なくと
も１種類以上を含む合金膜を形成するか、もしくは、シ
リコン単体膜を形成した後、少なくとも前記膜の表層を
イオン注入法等により、Ｔａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍ
ｏ、Ｐｂのうち少なくとも１種類以上を含む合金膜と
し、これらの合金膜を切削加工により所望の形状に精密
加工した後、保護膜として耐酸化性、耐熱性、機械的強
度に優れ、ガラスに対して化学的に不活性な貴金属合金
（白金（Ｐｔ）、パラジウム（Ｐｄ）、イリジウム（Ｉ
ｒ）、ロジウム（Ｒｈ）、オスミウム（Ｏｓ）、ルテニ
ウム（Ｒｕ）、レニウム（Ｒｅ、タングステン（Ｗ）、
タンタル（Ｔａ）のうち、少なくとも一種類以上の金属
を含む合金）膜を形成したものである。
【００１１】この場合、シリコン合金膜と保護膜との
間、あるいは、前記母材と前記合金膜の間、または、そ
の両方に、シリコン合金膜と保護膜、前記母材と前記シ
リコン合金膜に対してともに密着性がよく、かつ、熱膨
張係数が両者に近似した値で、耐熱性、機械的強度に優
れた材料からなる中間層を形成すれば、一層好ましい。
間、あるいは、前記母材と前記合金膜の間、または、そ
の両方に、シリコン合金膜と保護膜、前記母材と前記シ
リコン合金膜に対してともに密着性がよく、かつ、熱膨
張係数が両者に近似した値で、耐熱性、機械的強度に優
れた材料からなる中間層を形成すれば、一層好ましい。
【００１２】
【作用】本発明は上述したように、加工性、機械的強
度、両方を兼ね備えた母材、あるいは膜を用いて金型を
構成したため、それらの母材、あるいは膜を切削加工す
ることにより高精度な面形状を短時間で、容易に得るこ
とが出来るとともに、成形時のプレス圧力にも十分に耐
えることが出来る。
度、両方を兼ね備えた母材、あるいは膜を用いて金型を
構成したため、それらの母材、あるいは膜を切削加工す
ることにより高精度な面形状を短時間で、容易に得るこ
とが出来るとともに、成形時のプレス圧力にも十分に耐
えることが出来る。
【００１３】そして、加工に際しては、ダイヤモンドバ
イトの摩耗がほとんどないため、工具の寿命が伸び、金
型製作のコストを削減することが出来る。また、ダイヤ
モンドバイトによる切削加工が可能となるため小曲率半
径の成形型の加工も出来、加工範囲も広がる。
イトの摩耗がほとんどないため、工具の寿命が伸び、金
型製作のコストを削減することが出来る。また、ダイヤ
モンドバイトによる切削加工が可能となるため小曲率半
径の成形型の加工も出来、加工範囲も広がる。
【００１４】さらに、母材保護膜は、面品質、耐熱、耐
衝撃性が優れた材質を用いていることから、良好な加工
性と成形型寿命を兼ね備えた成形型が容易に出来、その
型でプレス成形すると高精度な面形状を有した安価な光
学ガラス素子を得ることが可能となる。
衝撃性が優れた材質を用いていることから、良好な加工
性と成形型寿命を兼ね備えた成形型が容易に出来、その
型でプレス成形すると高精度な面形状を有した安価な光
学ガラス素子を得ることが可能となる。
【００１５】
【実施例】以下本発明の実施例について図面を参照しな
がら説明する。
がら説明する。
【００１６】（第一実施例）図１において１ａは母材
（少なくとも表層部がＳｉ−Ｍｏ系合金）、２は保護膜
である。まず、母材１ａのプレス成形面をダイヤモンド
バイトを用いて高精密（表面粗度Ｒmax:０．０５ミクロ
ン）に切削加工する。そして、この母材１ａ上にスパッ
タ法により白金（Ｐｔ）−ロジウム（Ｒｈ）合金の保護
膜２を膜厚５ミクロンで成膜した。
（少なくとも表層部がＳｉ−Ｍｏ系合金）、２は保護膜
である。まず、母材１ａのプレス成形面をダイヤモンド
バイトを用いて高精密（表面粗度Ｒmax:０．０５ミクロ
ン）に切削加工する。そして、この母材１ａ上にスパッ
タ法により白金（Ｐｔ）−ロジウム（Ｒｈ）合金の保護
膜２を膜厚５ミクロンで成膜した。
【００１７】（第二実施例）図２において１ｂは母材
（タングステンカーバイト）、３は合金層（少なくとも
表層部がＳｉーＷ系合金）である。まず、母材１ｂを研
削加工により所望する形状に近似した形状に加工する。
このときの形状は最終形状からのズレ量１０ミクロン以
下にした。
（タングステンカーバイト）、３は合金層（少なくとも
表層部がＳｉーＷ系合金）である。まず、母材１ｂを研
削加工により所望する形状に近似した形状に加工する。
このときの形状は最終形状からのズレ量１０ミクロン以
下にした。
【００１８】次にこれらの母材１ｂ上にイオンプレーテ
ィング法により合金層４（少なくとも表層部がＳｉ−Ｗ
系合金）を膜厚２０ミクロンで形成した。その後、この
合金層３をダイヤモンドバイトによる切削加工により高
精度に所望の形状に仕上げた。最後に合金層４上に第一
実施例と同様に保護膜を形成した。
ィング法により合金層４（少なくとも表層部がＳｉ−Ｗ
系合金）を膜厚２０ミクロンで形成した。その後、この
合金層３をダイヤモンドバイトによる切削加工により高
精度に所望の形状に仕上げた。最後に合金層４上に第一
実施例と同様に保護膜を形成した。
【００１９】以上の各実施例では、切削加工の容易な母
材あるいは加工層を形成することにより、加工時間が大
幅に短縮され、かつ高精度な面形状を有したプレス成形
用金型が安価に作製できた。また、この金型を用いてガ
ラスを加熱、プレス成形したところ、プレス圧力による
金型の変形もなく、１００００回の成形後も金型品質の
劣化が認められなかった。
材あるいは加工層を形成することにより、加工時間が大
幅に短縮され、かつ高精度な面形状を有したプレス成形
用金型が安価に作製できた。また、この金型を用いてガ
ラスを加熱、プレス成形したところ、プレス圧力による
金型の変形もなく、１００００回の成形後も金型品質の
劣化が認められなかった。
【００２０】ここで、加工層、中間層、保護膜の形成方
法は、蒸着法やスパッタリング法、イオンプレーティン
グ法以外の方法で形成しても問題ない。
法は、蒸着法やスパッタリング法、イオンプレーティン
グ法以外の方法で形成しても問題ない。
【００２１】
【発明の効果】以上のように本発明の光学素子のプレス
成形用型は、加工性の良い母材、加工層を設けることで
ダイヤモンドバイトによる切削加工により従来の金型に
比べ短時間で、しかも、高精度に製作が出来、ダイヤモ
ンドバイトの加工寿命が長く、加工コストを低減するこ
とが出来た。そして、切削加工が可能であるため曲率半
径の小さな成形型の作製が可能であり、ダイヤモンドバ
イトの摩耗がほとんど生じないので大口径の金型の製作
も容易で多種多様の形状を持った成形用型が作製でき
る。また、母材、加工層、合金層には、機械的強度、耐
熱性、耐熱衝撃性に優れた材質を用いたため、プレス時
の金型の変形もなく、その結果、型寿命も長く、連続し
た成形にも充分対応できる。
成形用型は、加工性の良い母材、加工層を設けることで
ダイヤモンドバイトによる切削加工により従来の金型に
比べ短時間で、しかも、高精度に製作が出来、ダイヤモ
ンドバイトの加工寿命が長く、加工コストを低減するこ
とが出来た。そして、切削加工が可能であるため曲率半
径の小さな成形型の作製が可能であり、ダイヤモンドバ
イトの摩耗がほとんど生じないので大口径の金型の製作
も容易で多種多様の形状を持った成形用型が作製でき
る。また、母材、加工層、合金層には、機械的強度、耐
熱性、耐熱衝撃性に優れた材質を用いたため、プレス時
の金型の変形もなく、その結果、型寿命も長く、連続し
た成形にも充分対応できる。
【図１】本発明の光学素子のプレス成形用金型の第一実
施例の構成を示す断面図
施例の構成を示す断面図
【図２】本発明の光学素子のプレス成形用金型の第二実
施例の構成を示す断面図
施例の構成を示す断面図
１ａ 母材 １ｂ 母材 ２ 保護膜 ３ 合金層
───────────────────────────────────────────────────── フロントページの続き (72)発明者 梅谷 誠 大阪府門真市大字門真1006番地 松下電器 産業株式会社内
Claims (4)
- 【請求項１】少なくとも表層部が、シリコンを主成分と
しＴａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍｏ、Ｐｂのうち少なく
とも１種類以上含む合金からなる母材とし、前記母材を
所望の形状に加工した後、前記母材上に耐熱性、耐食性
に優れた保護膜を形成することを特徴とする光学素子の
プレス成形用金型。 - 【請求項２】母材と保護膜の間に中間層を形成すること
を特徴とする請求項１記載の光学素子のプレス成形用金
型。 - 【請求項３】母材を超硬合金、セラミックス、サーメッ
ト等の耐熱性、耐食性に優れ、耐高温強度を有するもの
を用い、前記母材を所望の形状に近似した形状に加工し
た後、前記母材上に少なくとも表層部が、シリコンを主
成分としＴａ、Ｗ、Ｃｒ、Ｎｂ、Ｖ、Ｍｏ、Ｐｂのうち
少なくとも１種類以上を含む合金からなる合金膜を形成
し、前記合金膜を所望の形状に高精度に加工した後、前
記合金膜上に耐熱性、耐食性に優れた保護膜を形成する
ことを特徴とする光学素子のプレス成形用金型。 - 【請求項４】シリコンを主成分とする合金膜と保護膜の
間、あるいは、母材と前記合金膜の間、または、その両
方に中間層を形成することを特徴とする請求項３記載の
光学素子のプレス成形用金型。
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4170347A JP2964779B2 (ja) | 1992-06-29 | 1992-06-29 | 光学素子のプレス成形用金型 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4170347A JP2964779B2 (ja) | 1992-06-29 | 1992-06-29 | 光学素子のプレス成形用金型 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0616433A true JPH0616433A (ja) | 1994-01-25 |
| JP2964779B2 JP2964779B2 (ja) | 1999-10-18 |
Family
ID=15903247
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4170347A Expired - Lifetime JP2964779B2 (ja) | 1992-06-29 | 1992-06-29 | 光学素子のプレス成形用金型 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2964779B2 (ja) |
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