JPH0616400Y2 - 電子線照射装置 - Google Patents
電子線照射装置Info
- Publication number
- JPH0616400Y2 JPH0616400Y2 JP650488U JP650488U JPH0616400Y2 JP H0616400 Y2 JPH0616400 Y2 JP H0616400Y2 JP 650488 U JP650488 U JP 650488U JP 650488 U JP650488 U JP 650488U JP H0616400 Y2 JPH0616400 Y2 JP H0616400Y2
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- grid
- discharge
- irradiation
- window
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010894 electron beam technology Methods 0.000 title claims description 33
- 239000010949 copper Substances 0.000 claims description 15
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 11
- 239000011888 foil Substances 0.000 claims description 11
- 238000007747 plating Methods 0.000 claims description 10
- 229910052802 copper Inorganic materials 0.000 claims description 8
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 230000001133 acceleration Effects 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims 1
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 12
- 239000007789 gas Substances 0.000 description 8
- 239000000498 cooling water Substances 0.000 description 7
- 239000011651 chromium Substances 0.000 description 6
- 229910052759 nickel Inorganic materials 0.000 description 5
- 230000005684 electric field Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 238000004132 cross linking Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002040 relaxant effect Effects 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP650488U JPH0616400Y2 (ja) | 1988-01-20 | 1988-01-20 | 電子線照射装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP650488U JPH0616400Y2 (ja) | 1988-01-20 | 1988-01-20 | 電子線照射装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01110400U JPH01110400U (en, 2012) | 1989-07-25 |
| JPH0616400Y2 true JPH0616400Y2 (ja) | 1994-04-27 |
Family
ID=31210740
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP650488U Expired - Lifetime JPH0616400Y2 (ja) | 1988-01-20 | 1988-01-20 | 電子線照射装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0616400Y2 (en, 2012) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5797037B2 (ja) * | 2011-07-14 | 2015-10-21 | 浜松ホトニクス株式会社 | 電子線照射装置 |
-
1988
- 1988-01-20 JP JP650488U patent/JPH0616400Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01110400U (en, 2012) | 1989-07-25 |
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