JPH06135504A - Chip supply device - Google Patents

Abstract

PURPOSE:To provide a compact chip supply device which occupies small installation space. CONSTITUTION:A standby stage B and a recovery stage C are provided linearly on both sides of an in and out stage A to a pick-up stage Q. Also, the movement of a holder H from the standby stage B to the in and out stage A and from the in and out stage A to the recovery stage C is done in a batch. Consequently, it is possible to make a chip supply device compact because the installation space is small.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a chip feeding device,
More specifically, the present invention relates to a chip supply device used in a die bonder that mounts various types of chips on a substrate or the like.

[0002]

2. Description of the Related Art As a chip supply device used in a die bonder for mounting various kinds of chips on a substrate such as a lead frame, there is known a multi-table type device as disclosed in, for example, Japanese Patent Laid-Open No. 61-264793. Has been. The disclosed chip supply device is composed of a turntable rotating in a horizontal plane and a plurality of tables radially mounted in the horizontal plane. The turntable is rotated to pick up a table having chips of a desired type. The chips placed on the table after being positioned on the stage are picked up by the nozzles of the transfer head and mounted on the substrate. Hereinafter, such a conventional multi-table type chip supply device will be described with reference to the drawings.

FIG. 11 is a plan view of a conventional chip supply device. Reference numeral 101 is a conveyer that conveys the substrate S on which the chip P is mounted, and 102 is a positioning unit that is disposed on the conveyer 101 and clamps and positions the substrate S. Reference numeral 103 denotes a chip supply device, which includes a turntable 104 rotating along a horizontal plane and a plurality of tables 105.
Are mounted radially. On each table 105, a wafer 106 composed of a large number of chips and a tray 107 accommodating relatively large chips are placed. Reference numeral 108 denotes an XY table on which the turntable 104 is placed, which is composed of an X table 109 that moves in the X direction by driving the X direction motor MX and a Y table 110 that moves by driving the Y direction motor MY. Reference numeral 112 denotes a transfer head equipped with a nozzle 113 that sucks the chip P.

The operation of the above-mentioned conventional chip supply apparatus will be described. First, the turntable 104 is rotated along a horizontal plane to place a table 105 on which a desired chip P is placed.
To the pickup stage b, and then the nozzle 11 of the transfer head 112 is moved onto the pickup stage b.
3 is moved up and down to pick up the chip P, and the chip P is transferred and mounted on the substrate S positioned by the positioning unit 102. When changing the type of the chip P mounted on the substrate S, the turntable 104 is driven to rotate the table 105 on which the desired chip P is mounted to the pickup stage b, and then the transfer head 112 is similarly moved. By driving, the chip P on the table 105 is transferred and mounted on the substrate S.

[0005]

However, in such a turntable type chip supply device, since the plurality of tables 105 are radially mounted around the turntable 104, the rotation of the table 105 in the horizontal plane is achieved. There is a problem that the floor area of the device is increased to secure the space and a large installation space is required. In particular, a die bonder equipped with this type of chip supply device is often installed in a clean room,
Since a clean room is extremely expensive to install, providing a large installation space for the chip supply device has been a big cost problem.

Therefore, an object of the present invention is to provide a small and compact multi-table type chip supply device which can save the installation space.

[0007]

In a chip supply apparatus of the present invention, a standby stage and a recovery stage are linearly arranged on both sides of an in / out stage, and a holder of the standby stage is moved to / from the in / out stage. It is provided with holder feeding means for collectively moving the holder of the stage to the recovery stage.

[0008]

With the above structure, in the chip supply device of the present invention, the holder holding the chip to be supplied next to the pickup stage is on standby at the standby stage beside the entrance / exit stage, and the holder from the pickup stage side As soon as the holder returned to the stage after picking up,
It is possible to collectively perform the operation of driving the holder feeding means to newly send the holder waiting in the waiting stage to the in / out stage and the operation of sending the holder returned to the in / out stage to the recovery stage.

[0009]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 is a perspective view of a chip supply apparatus according to an embodiment of the present invention, FIG. 2 is a perspective view showing a holder feeding means of the apparatus, and FIGS. 3 to 10 are operation explanatory views of the apparatus. .

In FIG. 1, H is a holder for holding the chip P. In this embodiment, the holder H holds the die (chip P) diced from the wafer. But,
The holder H may be a tray type holder.
Q is a pickup stage, and when the holder H reaches this stage Q, it is picked up by the ejector E, adsorbed by the nozzle N held by the transfer head HD, and positioned on the substrate transport conveyor LC. It is mounted on such a substrate LF.

A is a stage for loading / unloading the holder H, B is a standby stage, and C is a recovery stage. As shown in the figure, a standby stage B and a recovery stage C are arranged at the same level (height) on both sides of the entrance / exit stage A and are linearly arranged.

GA is a holder H at the entrance / exit stage A.
Is a first guide for supporting the first guide GA
Is provided on the XY table XT as a conveying means. Then, the XY table XT is guided by the table guide GX to move between the entrance / exit stage A and the pickup stage Q, whereby the first guide G
The holder H supported by A moves in and out between the stages A and Q. Incidentally, SX is a feed screw, M, which is screwed into the feed nut NX in the XY table XT.
X is a motor that drives this feed screw SX. Also,
Although not shown, similar feeding means are provided also in the Y direction.

GB is a second guide for supporting a holder H delivered from a supply unit 10 described later in the standby stage B. This second guide GB is immovable in the XYZ directions. Further, GC is a third guide that supports the holder H in the recovery stage C. This third
In the recovery stage C (at the same level as the in / out stage A), the guide GC receives the unnecessary holder H from the in / out stage A side and descends in the Z direction to the same level as the later-described recovery conveyor 23.

Each of these guides GA, GB, and GC is a pair of square bars provided with a step portion slidably engaged with the side edge portion of the holder H so as to face each other.
Of these, only the third holder GC is, as shown in an enlarged manner, the end portion on the opposite side of the entrance / exit stage A, which is bent into a key shape,
It has a stopper CS that regulates the position of the holder H in the Y direction.

Reference numeral 10 denotes a supply unit which holds a plurality of holders H and supplies a desired one of these holders to the standby stage B (second guide GB). this house,
11 is a magazine that is moved up and down by a Z table ZT,
A large number of horizontal groove portions are formed inside the magazine 11 at equal pitches in the Z direction. The side edges of the holder H are slidably engaged with these groove portions 11, whereby the holder H is stored in the magazine 10 so as to be freely inserted and removed. Further, 12 is a horizontal first cylinder, the rod 12a of which is the second cylinder.
It is supported so that it can be projected and retracted at the same level as the guide GB. Further, NZ as the Z table ZT is a feed nut provided in the magazine 11, and SZ is a feed screw screwed to the feed nut NZ and axially attached to the output shaft of the motor MZ. When the motor MZ is driven, magazine 1
1 moves up and down in the Z direction, and the desired holder H can be brought to the same level as the standby stage B (second guide GB). Then, the first cylinder 12 is driven to drive the rod 1
By projecting 2a, this desired holder H can be delivered to the second guide GB.

RA is a recovery unit provided at the bottom of the magazine 11. This recovery part RA is provided with as many groove parts 11a as there are holders H to be recovered.

Next, the recovery means for sending the holder H of the recovery stage C to the recovery unit RA will be described. Reference numeral 21 is a cylinder whose rod 21a is connected to the third guide GC, and the third guide GC is at the same level as the first guide GA at the upper limit position where the rod 21a projects. At the lower limit position (chain line position) where the rod 21a is retracted, the level is the same as that of the recovery conveyor 23 (which is provided in parallel below the standby stage B and the in / out stage A). The right end of the recovery conveyor 23 in the drawing faces the third guide GC at the lower limit position, and the left end thereof faces the recovery section RA of the magazine 11. 24 is a drive motor for the recovery conveyor 23, and 23a is an endless belt. Further, 22 is a second cylinder provided at the same level as this recovery conveyor 23, and 22 a is a rod of the second cylinder 22.

Therefore, when the cylinder 21 is driven to immerse the rod 21a, the holder H (unnecessary holder) supported by the third guide GC is moved from the recovery stage C to the lower limit position (chain line position). To descend. Next, when the second cylinder 22 is driven to project the rod 22a, the tip of the rod 22a presses against the edge of the holder H, and the rod 22a further pushes the holder H, so that the holder H It is delivered to the collection conveyor 23.

Reference numeral 25 is a Y table provided between the collecting conveyors 23, 26 is a cylinder provided on the Y table 25, and 26a is a rod of the cylinder 26.
Then, with the rod 26a protruding, the Y table 2
5 is moved in the direction of arrow N5, the rod 26a is pressed against the edge of the holder H, and the magazine 1
This holder H can be delivered to the recovery unit RA of No. 1.

Next, the holder feeding means will be described with reference to FIG. Reference numerals 31 and 32 denote a pair of claw portions provided with a space slightly wider than the width of the holder H. Reference numeral 33 denotes a claw portion at the upper end of the U-shaped member, and the claw portions 3 are provided at both tip portions.
The frame 1 and 32 are attached. Reference numeral 34 is a second Y table, and 35 is a second Y table 3 having a base end portion.
4, a pair of elevating guides for vertically elevating and guiding the frame 33, a cylinder 36 erectly mounted on the second Y table 34, and a rod 36a thereof is fixed to the frame 33. Reference numeral 37 is a feed nut provided on the second Y table 34, and 38 is a feed screw screwed onto the nut 37 and axially attached to the output shaft of the drive motor 39 of the table 34. Then, the claw portions 31 and 32 are moved up and down by the cylinder 36 or moved in the Y direction by the second Y table 34, and the holder H is appropriately moved to the standby stage B, the loading / unloading stage A, and the recovery stage C. .

The chip supplying apparatus of this embodiment has the above-mentioned structure, and its operation will be described below with reference to FIGS. 3 to 10.

First, it is assumed that all the holders H are stored in the magazine 11 of the supply section 10. As shown in FIG. 3, the Z table ZT is driven to move the magazine 11 up and down, and the holder H3 to be first sent to the pickup stage Q is adjusted to the same level as the second guide GB of the standby stage B. Then, the first cylinder 12 is driven so that the rod 12a is pressed against the holder H3 to be projected. Then, the holder H3 is delivered to the second guide GB (see the broken line). At this time, the claw portion 32 is descending, and the holder H3 moves further from the second guide GB to the position shown in FIG.
When trying to move to the right, the claw portion 32 causes the holder H3 to move.
Press on the edge of. That is, the claw portion 32 also plays the role of a stopper that regulates the movement of the holder H3.

Next, as shown in FIG.
(See also FIG. 2) to move the claw portions 31 and 32 to the arrow N1.
Direction, the Y table 34 is driven, and the claw portions 31,
While raising 32, reach above the standby stage B.
Then, the cylinder 36 is driven to lower the claw portions 31 and 32 in the direction of the arrow N3, and the claw portions 31 and 32 are engaged with both edge portions of the holder H3. Next, as shown in FIG. 5, the Y table 34 is driven to move in the direction of the arrow N4 while the claw portions 31 and 32 are engaged with the holder H3, and the holder H3 is moved to the second position.
Transfer from the guide GB to the first guide GA. Then, the XY table XT is driven in the X direction to move the holder H3.
To the pickup stage Q from the entrance / exit stage A to prepare for the pickup operation by the nozzle N (chain line in FIG. 1).

Further, the Z table ZT is driven to move the holder H4 to be sent to the standby stage B next to the second guide GB.
And reach the same level as.

Then, in the same manner as above, the next holder H4 is
It reaches the second guide GB (FIG. 6). Further, after the rod 12a is retracted, the claw portions 31 and 32 are lowered to be engaged with both edge portions of the next holder H4, and while keeping this state, the pickup operation for the previous holder H3 is completed, Wait for this holder H3 to return to the entrance / exit stage A.

Then, as shown in FIG. 7, the front holder H
When 3 becomes an unnecessary holder and returns to the entrance / exit stage A, the claw portions 31 and 32 are immediately moved in the direction of arrow N4. Here, the left claw portion 32 shown in FIG.
4 and the right claw portion 31 is pressed against the edge portion of the unnecessary holder H3.
By collectively moving in the direction of the arrow N4, the holder H4 of the standby stage B is moved to the in / out stage A, and the holder H3 of the in / out stage A is collectively moved to the recovery stage C, and the state as shown in FIG. become. The recovery stage C
As described above, since the third guide GC has the stopper CS as described above, the holders H3 and H4 do not overshoot the predetermined position even when moved at a high speed.

Next, the XY table XT is driven in the X direction to move the holder H4, which has newly reached the loading / unloading stage A, to the pickup stage Q. Further, as shown in FIG. 9, by driving the cylinder 21 to immerse the rod 21a, the third guide GC (recovery stage C)
The unnecessary holder H3 that has reached the position is lowered to the same level as the recovery conveyor 23. Then, the second cylinder 22 is driven to move the unnecessary holder H3 from the third guide GC to the recovery conveyor 23 that has started driving, and this conveyor 23
To approach the recovery section RA of the magazine 11. Further, as shown in FIG. 10, the cylinder 26 is driven to project the rod 26a, and the rod 26a is held by the holder H3.
The Y table 25 is moved in the direction of the arrow N5 while being pressed against the edge portion of the predetermined groove portion 11a of the recovery unit RA.
Push in and store.

In the present embodiment, not only can a holder for holding many kinds of chips and a holder having a large number of chips of the same kind can be prepared in multiple stages in the vertical direction by a magazine, but the holders can also pass through a U-shaped path. Since it is possible to stand by and collect, the installation space can be made compact. It should be noted that one stage and a magazine may be provided symmetrically with respect to the loading / unloading stage, and the operation of sending the holders from both magazines to the loading / unloading stage and the operation of collecting the holders in the magazine may be alternately performed.

[0030]

According to the present invention, the standby stage and the recovery stage are linearly arranged on both sides of the input / output stage, and the holder of the standby stage is set to the input / output stage and the holder of the input / output stage is set to the collection stage at once. Since the holder feeding means for moving is provided, the holder moving range is narrow, and the installation space is required only for the space of three holders arranged linearly and the additional space. In addition, the operations of sending to the in / out stage and collecting to the collecting stage can be performed collectively, and the loss time at the time of holder switching can be minimized.

[Brief description of drawings]

FIG. 1 is a perspective view of a chip supply device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a holder feeding means of a chip supply device according to an embodiment of the present invention.

FIG. 3 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 4 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 5 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 6 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 7 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 8 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 9 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 10 is an operation explanatory diagram of the chip supply device according to the embodiment of the present invention.

FIG. 11 is a plan view of a conventional chip supply device.

[Explanation of symbols]

 P chip H holder A in / out stage B standby stage C recovery stage Q pickup stage XT XY table 10 holder supply unit RA recovery unit 23 recovery conveyor 31, 32 claws

─────────────────────────────────────────────────── ─── Continuation of the front page (51) Int.Cl. ⁵ Identification code Office reference number FI technical display location H05K 13/04 A 8509-4E

Claims (1)

[Claims] 1. A transfer means for moving a holder holding a chip between a loading / unloading stage and a pickup stage side, and a standby stage and a recovery stage linearly arranged on both sides of the loading / unloading stage. A holder supply unit that holds a plurality of holders and supplies a desired holder from the plurality of holders to the standby stage; a recovery unit that sends the holder of the recovery stage to a recovery unit; A chip feeding device comprising: a stage; and holder feeding means for collectively moving the holder of the loading / unloading stage to the collecting stage.