JPH061258Y2 - 中空基体用チャック - Google Patents
中空基体用チャックInfo
- Publication number
- JPH061258Y2 JPH061258Y2 JP7225689U JP7225689U JPH061258Y2 JP H061258 Y2 JPH061258 Y2 JP H061258Y2 JP 7225689 U JP7225689 U JP 7225689U JP 7225689 U JP7225689 U JP 7225689U JP H061258 Y2 JPH061258 Y2 JP H061258Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- hollow substrate
- hollow
- outer shell
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7225689U JPH061258Y2 (ja) | 1989-06-20 | 1989-06-20 | 中空基体用チャック |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7225689U JPH061258Y2 (ja) | 1989-06-20 | 1989-06-20 | 中空基体用チャック |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH0311462U JPH0311462U (US20080094685A1-20080424-C00004.png) | 1991-02-05 |
JPH061258Y2 true JPH061258Y2 (ja) | 1994-01-12 |
Family
ID=31610035
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7225689U Expired - Lifetime JPH061258Y2 (ja) | 1989-06-20 | 1989-06-20 | 中空基体用チャック |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH061258Y2 (US20080094685A1-20080424-C00004.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001096210A (ja) * | 1999-09-30 | 2001-04-10 | Toray Eng Co Ltd | チャック装置および浸漬型塗布機 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009090409A (ja) * | 2007-10-09 | 2009-04-30 | Smc Corp | チャック装置 |
JP5142222B2 (ja) * | 2009-07-17 | 2013-02-13 | オージー技研株式会社 | マイクロ波治療装置用照射部 |
-
1989
- 1989-06-20 JP JP7225689U patent/JPH061258Y2/ja not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001096210A (ja) * | 1999-09-30 | 2001-04-10 | Toray Eng Co Ltd | チャック装置および浸漬型塗布機 |
Also Published As
Publication number | Publication date |
---|---|
JPH0311462U (US20080094685A1-20080424-C00004.png) | 1991-02-05 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |