JPH06112758A - Crystal vibrator - Google Patents

Crystal vibrator

Info

Publication number
JPH06112758A
JPH06112758A JP25515292A JP25515292A JPH06112758A JP H06112758 A JPH06112758 A JP H06112758A JP 25515292 A JP25515292 A JP 25515292A JP 25515292 A JP25515292 A JP 25515292A JP H06112758 A JPH06112758 A JP H06112758A
Authority
JP
Japan
Prior art keywords
container
crystal
electrode layer
layer
piece
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP25515292A
Other languages
Japanese (ja)
Inventor
Kazuyoshi Saito
和好 斉藤
Shinichiro Yagi
慎一郎 矢木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Original Assignee
Meidensha Corp
Meidensha Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Meidensha Corp, Meidensha Electric Manufacturing Co Ltd filed Critical Meidensha Corp
Priority to JP25515292A priority Critical patent/JPH06112758A/en
Publication of JPH06112758A publication Critical patent/JPH06112758A/en
Pending legal-status Critical Current

Links

Landscapes

  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

PURPOSE:To prevent an inconvenient case where Ag of an electrode layer evaporates and reacts to the gas of a conductive adhesive when the upper and lower bodies of a container are sealed and the frequency varies much before and after the sealing process. CONSTITUTION:A crystal vibrator piece 4 contains at least a pair of electrodes and a lead part formed on the surface of a crystal piece 5. Then the piece 4 is stored in a container 3 and at the same time the container is sealed at a high temperature. Then the lead part is connected to an external terminal of the container 3. In such a constitution of a crystal vibrator, the electrodes and the lead part are covered with a foundation metal skin layer 12, a silver or gold electrode layer 16 formed on the layer 12, and a nickel cover layer 17 formed on the layer 16.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、容器の内部に水晶振動
子片を収納して容器を封着した水晶振動子に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a crystal unit in which a crystal unit is housed in a container and the container is sealed.

【0002】[0002]

【従来の技術】プリント基板等の表面にはんだ付けする
水晶振動子においては、プリント基板上での実装高さの
低いことが要求される。
2. Description of the Related Art A crystal resonator to be soldered on the surface of a printed circuit board or the like is required to have a low mounting height on the printed circuit board.

【0003】このようなことから、図3に示す水晶振動
子が用いられる。
For this reason, the crystal unit shown in FIG. 3 is used.

【0004】図のように、上体1と下体2とで構成され
るとともにアルミナ系のセラミックスやガラス,水晶等
で形成される容器3内に水晶振動子片4が収納される。
水晶振動子片4は、図4に示すように円板形の水晶片5
の両主面に電極6a,6bを貼着し、夫々の電極6a,
6bから相互に反対方向へ向かってリード7a,7bを
貼着したものである。水晶振動子片4としては、このほ
か図5(a),(b)に示すように水晶片5を略矩形に
したものもある。水晶振動子片4の両端は、保持具とし
てのリードフレーム8a,8bに支持され、リードフレ
ーム8a,8bは上体1と下体2との間に挟まれて容器
3内に支持される。上体1と下体2とは、容器3内に水
晶振動子片4を収納した状態でシール材9を介して突き
合せ、400℃以上の熱を数分間加えて相互に封着され
る。シール材9としては、低温ガラスが用いられる。リ
ード7aとリードフレーム8aとは導電性接着剤10a
を介して接続され、リード7bとリードフレーム8bと
は導電性接着剤10bを介して接続される。リードフレ
ーム8a,8bの端部は容器3の下面まで導かれ、外部
端子11a,11bを構成する。このほか、リード部7
a,7bが反対方向ではなく同一方向へ導出される場合
もある。
As shown in the figure, a crystal oscillator piece 4 is housed in a container 3 composed of an upper body 1 and a lower body 2 and made of alumina-based ceramics, glass, crystal or the like.
The crystal unit 4 is a disk-shaped crystal unit 5 as shown in FIG.
The electrodes 6a and 6b are attached to both main surfaces of the
Leads 7a and 7b are attached from 6b in opposite directions. As the crystal oscillator piece 4, there is also a crystal piece 5 having a substantially rectangular shape as shown in FIGS. 5 (a) and 5 (b). Both ends of the crystal oscillator piece 4 are supported by lead frames 8a and 8b serving as holders, and the lead frames 8a and 8b are sandwiched between the upper body 1 and the lower body 2 and supported in the container 3. The upper body 1 and the lower body 2 are abutted against each other with the crystal resonator piece 4 housed in the container 3 via the sealing material 9, and heat of 400 ° C. or more is applied for several minutes to be sealed to each other. As the sealing material 9, low temperature glass is used. The lead 7a and the lead frame 8a are made of a conductive adhesive 10a.
The lead 7b and the lead frame 8b are connected via a conductive adhesive 10b. The ends of the lead frames 8a and 8b are guided to the lower surface of the container 3 to form the external terminals 11a and 11b. In addition, the lead part 7
In some cases, a and 7b are led out in the same direction instead of the opposite direction.

【0005】図3,図5(b)のA部の拡大図を図6に
示す。図中、13は水晶片5との接合性が良いニッケル
(Ni)からなる下地メッキ層、14は銀(Ag)から
なる電極層である。なお、リード部7aも同一構成であ
る。
FIG. 6 shows an enlarged view of a portion A in FIGS. 3 and 5 (b). In the figure, 13 is a base plating layer made of nickel (Ni), which has good bonding properties with the crystal piece 5, and 14 is an electrode layer made of silver (Ag). The lead portion 7a has the same structure.

【0006】これらの電極等を形成する方法としては、
例えば真空容器内において、まずNiを加熱して水晶片
の所定の面上に蒸着せしめて下地メッキ層を形成し、次
にAgだけを加熱して蒸着せしめて所定の厚さの電極層
を形成する方法が用いられる。
As a method of forming these electrodes and the like,
For example, in a vacuum container, first, Ni is heated and vapor-deposited on a predetermined surface of a crystal piece to form a base plating layer, and then only Ag is heated and vapor-deposited to form an electrode layer having a predetermined thickness. Method is used.

【0007】[0007]

【発明が解決しようとする課題】ところが、前記のよう
に上体と下体との封着の過程で400℃以上の温度が数
分間以上にわたって加えられるため、この過程で容器内
の水晶振動子片の電極やリード部も封着部と同程度の温
度まで昇温し、導電性接着剤や低融点ガラスに含まれる
ガスが放出し露出している電極表面の銀と反応し封着の
前後で周波数が大きく変化してしまう。また、Agが気
化して電極層が消耗し、電極層が薄くなって通電不良に
よる不発信が生じたり、それ程に電極層が薄くならなく
ても厚さが変わる(薄くなる)ため、水晶振動子片の発
振周波数が大きく変動(高くなる)して、しまうという
問題がある。
However, since the temperature of 400 ° C. or more is applied for several minutes or more in the process of sealing the upper body and the lower body as described above, the crystal oscillator piece in the container is in this process. The temperature of the electrodes and leads of the electrode rises to the same level as the temperature of the sealing part, and the gas contained in the conductive adhesive and low melting point glass is released and reacts with the exposed silver on the electrode surface before and after sealing. The frequency changes greatly. In addition, the vaporization of Ag causes the electrode layer to be consumed, the electrode layer becomes thin, and non-transmission occurs due to improper conduction of electricity. There is a problem that the oscillation frequency of the child piece fluctuates greatly (becomes higher) and ends up.

【0008】一方、電極層の気化消耗を見込んで予めそ
の分だけ厚くAgを蒸着形成しておくこともできるが、
上体と下体とをシール材で封止する際の電極層からのA
gの気化消耗量を一定値とすることが困難であるため、
封着後の水晶振動子ごとの発振周波数の個々の変動差が
大きく、調整可能な範囲を越えたり、または発振周波数
精度の良い水晶振動子を安定して生産するうえで問題が
ある。
On the other hand, in consideration of vaporization and consumption of the electrode layer, it is possible to vapor-deposit and form Ag thicker by that amount,
A from the electrode layer when sealing the upper body and the lower body with a sealing material
Since it is difficult to keep the vaporization consumption of g constant,
There is a large variation difference in the oscillation frequency of each crystal unit after sealing, which exceeds the adjustable range, or there is a problem in stably producing a crystal unit with good oscillation frequency accuracy.

【0009】一方、実開平2−41510に示すよう
に、下地メッキ層にCrを用いるとともに電極層にAg
又はAuを用い、被覆層としてNiを用いてもよいが、
少なくとも3種類の金属膜を形成しなければならず、膜
を形成するための設備が煩雑になる。
On the other hand, as shown in Japanese Utility Model Laid-Open No. 2-41510, Cr is used for the base plating layer and Ag is used for the electrode layer.
Alternatively, Au may be used and Ni may be used as the coating layer,
At least three types of metal films must be formed, and the equipment for forming the films becomes complicated.

【0010】そこで本発明は、斯かる課題を解決した水
晶振動子を提供することを目的とする。
Therefore, an object of the present invention is to provide a crystal resonator that solves the above problems.

【0011】[0011]

【課題を解決するための手段】斯かる目的を達成するた
めの本発明の構成は、水晶片の表面に少なくとも一対の
電極とリード部とを設けた水晶振動子片を、容器内に収
納するとともに容器を高温で封着し、リード部と容器外
に設けた外部端子とを導電性接着剤を介して接続した水
晶振動子において、電極およびリード部を、ニッケルか
らなる下地メッキ層と、該下地メッキ層の上に設けられ
るとともに銀又は金からなる電極層と、電極層の上に設
けられるとともにニッケルよりなる被覆層とで被って形
成したことを特徴とする。
[Means for Solving the Problems] The structure of the present invention for attaining such an object is to store a crystal resonator piece, in which at least a pair of electrodes and lead portions are provided on the surface of the crystal piece, in a container. In a crystal unit in which a container is sealed at a high temperature with a lead portion and an external terminal provided outside the container are connected via a conductive adhesive, an electrode and a lead portion are provided with a base plating layer made of nickel, It is characterized in that it is formed by covering with an electrode layer made of silver or gold provided on the base plating layer and a coating layer made of nickel provided on the electrode layer.

【0012】[0012]

【作用】電極層を被う被覆層を設けたことから、導電性
接着剤のガスが直接に銀又は金と反応することはなく、
封止の前後での周波数の変化が少ない。また、電極層が
蒸発することはないので、電極層が薄くなって通電不良
による不発信を生じることもない。
Since the coating layer covering the electrode layer is provided, the gas of the conductive adhesive does not directly react with silver or gold,
Little change in frequency before and after sealing. In addition, since the electrode layer does not evaporate, the electrode layer does not become thin so that non-transmission due to improper energization does not occur.

【0013】[0013]

【実施例】以下、本発明を図面に示す実施例に基づいて
詳細に説明する。なお、本実施例は従来の水晶振動子の
一部を改良したものなので、従来と同一部分には同一符
号を付して説明を省略し、異なる部分のみを説明する。
DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the embodiments shown in the drawings. Since the present embodiment is an improvement of a part of the conventional crystal resonator, the same parts as those of the conventional one are designated by the same reference numerals, and the description thereof will be omitted.

【0014】本発明による水晶振動子の実施例を、図1
(a),(b)に基づいて説明する。図1は図6と対応
するものである。
An embodiment of the crystal unit according to the present invention is shown in FIG.
A description will be given based on (a) and (b). FIG. 1 corresponds to FIG.

【0015】図のように、水晶片5の主面上の所定の位
置に、従来と同様のニッケルからなる下地メッキ層12
が薄く形成され、その上に銀からなる電極層16が所定
の厚さで形成される。そして、電極層16の上に更にニ
ッケルからなる被覆層17を薄く形成し、電極層16が
被覆層17によって覆われている。本実施例では下地メ
ッキ層12の厚さが50〜500Åとされ、電極層16
の厚さが500〜3000Åとされ、被覆層17の厚さ
が10〜300Åとされる。
As shown in the figure, the base plating layer 12 made of nickel similar to the conventional one is provided at a predetermined position on the main surface of the crystal blank 5.
Is thinly formed, and the electrode layer 16 made of silver is formed thereon with a predetermined thickness. Then, the coating layer 17 made of nickel is further thinly formed on the electrode layer 16, and the electrode layer 16 is covered with the coating layer 17. In this embodiment, the thickness of the base plating layer 12 is 50 to 500Å, and the electrode layer 16 is
Has a thickness of 500 to 3000Å, and the coating layer 17 has a thickness of 10 to 300Å.

【0016】リード部での電極層16とリードフレーム
8aとを接続する部分では、図1(b)に示すように、
電極層16が露出され、接続が可能となっている。
As shown in FIG. 1 (b), in the portion of the lead portion where the electrode layer 16 and the lead frame 8a are connected,
The electrode layer 16 is exposed and connection is possible.

【0017】次に、斯かる水晶振動子の作用を説明す
る。電極層16が被覆層17によって覆われしかも被覆
層17は酸化膜を生じるNiで形成されるので、封着過
程における電極層16中のAgの気化が防止される。こ
のため、導電性接着剤から発生するガスとAgとが反応
することはない。ゆえに、水晶振動子が発生する周波数
の封着の前後での変化が従来よりも少ない。従来の水晶
振動子と本発明による水晶振動子とにおける封止の前後
での周波数の変化を調べてみたところ、従来のNiを下
地メッキ層としてAgを電極層としたものの周波数の変
化は平均して±100ppm以上であり、これに更にN
iからなる被覆層を設けた本発明の水晶振動子の周波数
の変化は平均して±10ppm以下であった。
Next, the operation of such a crystal oscillator will be described. Since the electrode layer 16 is covered with the coating layer 17 and the coating layer 17 is made of Ni that forms an oxide film, vaporization of Ag in the electrode layer 16 during the sealing process is prevented. Therefore, the gas generated from the conductive adhesive does not react with Ag. Therefore, the change in frequency generated by the crystal unit before and after sealing is smaller than before. When the change in frequency before and after the sealing between the conventional crystal unit and the crystal unit according to the present invention was examined, the frequency change of a conventional Ni base plate and Ag electrode layer was averaged. Is ± 100 ppm or more, and further N
The change in frequency of the crystal resonator of the present invention provided with the coating layer made of i was ± 10 ppm or less on average.

【0018】また、このようにAgが蒸発しないことか
ら、従来のように水晶振動子が不発信になるようなこと
はなくなった。Agが蒸発して電極6aとリード部7a
の一部がなくなった従来の水晶振動子片4を図2(b)
に示し、電極層16の上に被覆層17が形成されて電極
層16の蒸発することがない本発明に係る水晶振動子片
4を図2(a)に示す。
Further, since the Ag does not evaporate in this way, the crystal oscillator does not become untransmitted as in the conventional case. Ag evaporates and the electrode 6a and the lead portion 7a
Fig. 2 (b) shows a conventional crystal oscillator piece 4 in which a part of
2A shows the crystal resonator piece 4 according to the present invention in which the coating layer 17 is formed on the electrode layer 16 and the electrode layer 16 does not evaporate.

【0019】なお、本実施例では電極層としてAgを用
いた場合について示したが、Auを用いてもよい。この
ほか、下地メッキ層と電極層との間や電極層と被覆層と
の間にニッケル(Ni)と銀(Ag)又は金(Au)か
らなる混合層を設けても前記と同様の結果を得ることが
できる。
In this embodiment, Ag is used as the electrode layer, but Au may be used instead. In addition, even if a mixed layer made of nickel (Ni) and silver (Ag) or gold (Au) is provided between the base plating layer and the electrode layer or between the electrode layer and the coating layer, the same result as above is obtained. Obtainable.

【0020】[0020]

【発明の効果】以上の説明からわかるように、本発明に
よる水晶振動子によれば電極層を被う被覆層を設けたの
で、電極層としてのAgやAuが上体と下体との封着の
際に蒸発した導電性接着剤のガスと反応するようなこと
はなく、従って封着の前後での水晶振動子の周波数の変
化を小さくすることができる。
As can be seen from the above description, according to the crystal resonator of the present invention, since the coating layer covering the electrode layer is provided, Ag or Au as the electrode layer seals the upper body and the lower body. At this time, it does not react with the vaporized conductive adhesive gas, and therefore the change in the frequency of the crystal resonator before and after sealing can be reduced.

【0021】また、電極層が蒸発することがなくなるの
で、水晶振動子が発信しなくなるというようなことがな
い。
Further, since the electrode layer does not evaporate, the crystal oscillator does not stop transmitting.

【0022】更に、下地メッキ層と被覆層が共にNiで
あることから、3層の構成であっても設備の煩雑化が防
止でき、生産効率が高い。しかも、従来の二種類の金属
層形成用の設備がそのまま使用できる。
Furthermore, since both the base plating layer and the coating layer are made of Ni, the equipment can be prevented from becoming complicated even with a three-layer structure, and the production efficiency is high. Moreover, the conventional equipment for forming two types of metal layers can be used as it is.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明による水晶振動子に係り、図1(a)は
水晶振動子片の部分断面図、図1(b)はリード部とリ
ードフレームとの接続部を示す断面図。
1A and 1B relate to a crystal unit according to the present invention, FIG. 1A is a partial sectional view of a crystal unit, and FIG. 1B is a sectional view showing a connecting portion between a lead portion and a lead frame.

【図2】本発明による水晶振動子に係り、図2(a)は
本発明に係る水晶振動子の作用説明図、図2(b)は従
来の水晶振動子の作用説明図。
2A and 2B relate to a crystal unit according to the present invention, FIG. 2A is an operation explanatory diagram of the crystal unit according to the present invention, and FIG. 2B is an operation explanatory diagram of a conventional crystal unit.

【図3】従来の水晶振動子の構成図。FIG. 3 is a configuration diagram of a conventional crystal unit.

【図4】従来の水晶振動子片の平面図。FIG. 4 is a plan view of a conventional crystal resonator element.

【図5】従来の水晶振動子片に係り、図5(a)は平面
図、図5(b)は正面図。
5A and 5B relate to a conventional crystal unit, FIG. 5A is a plan view, and FIG. 5B is a front view.

【図6】従来の水晶振動子片に係り、図3,図5(b)
におけるA部の拡大断面図。
FIG. 6 relates to a conventional crystal unit, and is shown in FIGS.
The expanded sectional view of the A section in FIG.

【符号の説明】[Explanation of symbols]

1…上体 2…下体 3…容器 4…水晶振動子片 5…水晶片 6a,6b…電極 7a,7b…リード部 10a,10b…導電性接着剤 11a,11b…外部端子 12…下地メッキ層 16…電極層 17…被覆層 DESCRIPTION OF SYMBOLS 1 ... Upper body 2 ... Lower body 3 ... Container 4 ... Crystal oscillator piece 5 ... Crystal piece 6a, 6b ... Electrode 7a, 7b ... Lead part 10a, 10b ... Conductive adhesive 11a, 11b ... External terminal 12 ... Base plating layer 16 ... Electrode layer 17 ... Coating layer

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 水晶片の表面に少なくとも一対の電極と
リード部とを設けた水晶振動子片を、容器内に収納する
とともに容器を高温で封着し、リード部と容器外に設け
た外部端子とを導電性接着剤を介して接続した水晶振動
子において、 電極およびリード部を、ニッケルからなる下地メッキ層
と、該下地メッキ層の上に設けられるとともに銀又は金
からなる電極層と、電極層の上に設けられるとともにニ
ッケルよりなる被覆層とで被って形成したことを特徴と
する水晶振動子。
1. A crystal resonator piece having at least a pair of electrodes and a lead portion provided on the surface of a crystal piece is housed in a container and the container is sealed at a high temperature, and the lead portion and the outside are provided outside the container. In a crystal unit in which a terminal is connected via a conductive adhesive, an electrode and a lead portion are provided with a base plating layer made of nickel, and an electrode layer made of silver or gold and provided on the base plating layer. A crystal unit provided on the electrode layer and covered with a coating layer made of nickel.
JP25515292A 1992-09-25 1992-09-25 Crystal vibrator Pending JPH06112758A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP25515292A JPH06112758A (en) 1992-09-25 1992-09-25 Crystal vibrator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP25515292A JPH06112758A (en) 1992-09-25 1992-09-25 Crystal vibrator

Publications (1)

Publication Number Publication Date
JPH06112758A true JPH06112758A (en) 1994-04-22

Family

ID=17274800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP25515292A Pending JPH06112758A (en) 1992-09-25 1992-09-25 Crystal vibrator

Country Status (1)

Country Link
JP (1) JPH06112758A (en)

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