JPH0610687Y2 - ウエハ移し替え機の安全装置 - Google Patents
ウエハ移し替え機の安全装置Info
- Publication number
- JPH0610687Y2 JPH0610687Y2 JP1987054840U JP5484087U JPH0610687Y2 JP H0610687 Y2 JPH0610687 Y2 JP H0610687Y2 JP 1987054840 U JP1987054840 U JP 1987054840U JP 5484087 U JP5484087 U JP 5484087U JP H0610687 Y2 JPH0610687 Y2 JP H0610687Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- claws
- transfer machine
- safety device
- wafers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 235000012431 wafers Nutrition 0.000 claims description 79
- 210000000078 claw Anatomy 0.000 claims description 24
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000010453 quartz Substances 0.000 description 16
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054840U JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054840U JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63162536U JPS63162536U (en, 2012) | 1988-10-24 |
| JPH0610687Y2 true JPH0610687Y2 (ja) | 1994-03-16 |
Family
ID=30882203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987054840U Expired - Lifetime JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610687Y2 (en, 2012) |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS611099A (ja) * | 1984-06-13 | 1986-01-07 | シャープ株式会社 | ウエハ移載ロボツト |
-
1987
- 1987-04-11 JP JP1987054840U patent/JPH0610687Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63162536U (en, 2012) | 1988-10-24 |
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