JPS63162536U - - Google Patents
Info
- Publication number
- JPS63162536U JPS63162536U JP5484087U JP5484087U JPS63162536U JP S63162536 U JPS63162536 U JP S63162536U JP 5484087 U JP5484087 U JP 5484087U JP 5484087 U JP5484087 U JP 5484087U JP S63162536 U JPS63162536 U JP S63162536U
- Authority
- JP
- Japan
- Prior art keywords
- transfer machine
- wafer transfer
- wafer
- claws
- safety device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 210000000078 claw Anatomy 0.000 claims description 4
- 230000005540 biological transmission Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Warehouses Or Storage Devices (AREA)
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054840U JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987054840U JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63162536U true JPS63162536U (en, 2012) | 1988-10-24 |
| JPH0610687Y2 JPH0610687Y2 (ja) | 1994-03-16 |
Family
ID=30882203
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987054840U Expired - Lifetime JPH0610687Y2 (ja) | 1987-04-11 | 1987-04-11 | ウエハ移し替え機の安全装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0610687Y2 (en, 2012) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS611099A (ja) * | 1984-06-13 | 1986-01-07 | シャープ株式会社 | ウエハ移載ロボツト |
-
1987
- 1987-04-11 JP JP1987054840U patent/JPH0610687Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS611099A (ja) * | 1984-06-13 | 1986-01-07 | シャープ株式会社 | ウエハ移載ロボツト |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0610687Y2 (ja) | 1994-03-16 |