JPH0610660B2 - Method for measuring film thickness and composition of alloy film - Google Patents

Description

Detailed Description of the Invention [Industrial applications]

The present invention relates to a method for measuring the film thickness and composition of an alloy film, and particularly to a film thickness of an alloy film containing the same metal as a base metal, which is suitable for use in online analysis of a Zn—Fe alloy plated steel sheet, and It relates to a method of measuring composition.

[Prior art]

Various plated steel sheets having excellent corrosion resistance, workability, paintability, weldability, etc. have been developed and widely used for automobile bodies, household electric appliances and building materials. In order to stabilize the quality of these plated steel sheets in production, it is indispensable to analyze the thickness (adhesion amount) and composition (content ratio) of the plated coating to control the process. As a method of analyzing a plated steel sheet, Zn-plated steel sheet or Zn
-For Ni alloy plated steel sheets and the like, in which the plated coating is composed of a component other than Fe which is the base steel sheet, the thickness and composition of the plated coating can be relatively easily analyzed by the fluorescent X-ray analysis method. A kind of analyzer has already been put to practical use. However, with regard to Zn-Fe alloy plated steel sheets, which have recently been attracting attention for their particularly excellent characteristics, ordinary fluorescent X
In the X-ray method, the fluorescent X-ray intensity of Zn changes depending on the Zn or Fe content in the plating film and the thickness of the plating film. Occurs, and it is the fluorescence X of Fe in the plating film.
Analysis was not possible due to indistinguishability from the line. Therefore, the following method has been conventionally proposed as a method for analyzing a Zn-Fe alloy plated steel sheet. The first is a method proposed in JP-A-55-24680, which is a metal other than Fe of the base steel sheet, that is, a Zn-plated steel sheet subjected to an alloying treatment of Zn-Fe, that is,
The fluorescent X-ray intensity of Zn was measured at two different extraction angles,
A predetermined simultaneous equation is solved based on both measured values, and the plating thickness and alloying degree (Fe content rate) of the plated steel sheet are obtained. In this method, the fluorescent X-ray intensities of Zn of pure zinc samples with two sufficiently different take-off angles are measured in advance, and then the Zn-plated steel sheet alloyed with the same X-ray spectrometer is used. The fluorescent X-ray intensity of Zn is measured, and each extraction angle is analyzed by the ratio to the previously obtained fluorescent X-ray intensity of pure zinc. This fluorescent X-ray quantification method by changing the extraction angle is a basic logic of the fluorescent X-ray analysis method that has been published in textbooks for a long time, and is a publicly known method. The second method is a method proposed in Japanese Patent Laid-Open No. 58-223047, which is a first excitation line for Zn-Fe alloy-plated steel sheet in which the fluorescent X-rays of Fe from the base steel sheet are not substantially detected. The Fe content in the plating film is determined from the fluorescent X-ray intensity of Fe according to the incident angle and the fluorescent X-ray extraction angle,
Further, the thickness of the plating film is obtained from the intensity of the fluorescent X-rays of Fe based on the second incident angle of excitation rays at which the fluorescent X-rays of Fe from the base steel plate are detected and the angle of extraction of the fluorescent X-rays. .

[Problems to be Solved by the Invention]

However, in the production line, the plated steel sheet is, for example, 1
Since the steel sheet flows at a high speed of 00 m / min, the plated steel sheet always flutters if it is large or small.
The former method proposed in 680 naturally results in poor analysis accuracy. In addition, the thickness of the plating film of the alloy-plated steel sheet is generally 20 to
Since it is very thin at 30 g / m ² (about 3 to 4 μm), the latter method proposed in Japanese Patent Laid-Open No. 58-223047 has a strong intensity enough to accurately measure the fluorescent X-ray of the metal in the plating film. In order to obtain the above, it is practically impossible to excite only the thin plating film layer, and the metal of the base steel sheet is inevitably excited. Therefore, in this case, the fluorescent X-ray intensities of both Fe in the plating film and Fe in the base steel sheet are measured, and accurate analysis cannot be performed. Further, considering online, at a low incident angle = extraction angle = 5 ° in the first X-ray optical system, the size of the X-ray tube and the structure of the X-ray analysis system protect the analyzer. It was impossible to actually manufacture such a device even from a cover or the like. Therefore, there are problems in any of the methods that have been proposed in the past, so in the end, as is the case, only the plating film layer is dissolved and removed by electrolysis or a suitable acid, and the thickness of the plating film is determined from the amount removed. Moreover, it is unavoidable to rely on the chemical analysis method of chemically analyzing the iron content of the solution to obtain the Fe content in the plating film. However, since this chemical analysis method is very difficult to dissolve only the plating film layer without melting the base steel sheet, it requires a great deal of skill and time, and is a destructive analysis in which a sample is taken from the product. Since it cannot be brought online, there is a problem that the measurement results are reflected in the process control very slowly. On the other hand, in Japanese Unexamined Patent Publication No. 50-17695, means for irradiating a continuously moving steel plate with characteristic X-rays and white X-rays at a low angle, and diffracted X-rays having a wavelength satisfying the Bragg condition from this irradiation point. And a continuous quality inspection apparatus for steel plates, characterized by comprising means for detecting fluorescent X-rays and means for analyzing the detection signals of these and detecting the intensity values of the respective textures, elements, etc. However, the purpose is to measure the content of the texture and additive alloy elements of the steel sheet itself, the steel sheet targeted by the present invention is different, not only the purpose and configuration is different, it is not possible to detect the film thickness. Was not done.

[Object of the Invention]

The present invention has been made to solve the above conventional problems, and an alloy coating film capable of simultaneously and nondestructively measuring the film thickness and composition of an alloy coating film containing the same metal as a base metal online. An object is to provide a film thickness and composition measuring method.

[Means for solving problems]

The present invention, when measuring the film thickness and composition of an alloy coating containing the same metal as the underlying metal, covers the range of change in the composition of the target alloy coating in advance, as shown in FIG. In addition, the composition diffraction angle relationship between the diffraction angle θ and the composition of the alloy coating in the case of irradiating with the predetermined characteristic X-ray under the predetermined irradiation condition is obtained, and further, the film thickness of the target alloy coating is further calculated in advance. Intensity of fluorescent X-rays from a metal different from the base metal when the white X-rays are irradiated under predetermined irradiation conditions so as to cover the range of change and the range of change in composition,
The film thickness composition fluorescence intensity relationship with the film thickness and composition of the alloy film is obtained, and when measuring the film thickness and composition of the alloy film of the actual measured object, the composition diffraction angle is measured with respect to the measured object. The characteristic X-rays are irradiated under the same conditions as the predetermined irradiation conditions when the relationship is obtained, and the diffraction angle θ at this time is measured by a diffraction X-ray detector, and further, with respect to the measured object, The white X-rays are irradiated under the same conditions as the predetermined irradiation conditions for obtaining the film thickness composition fluorescence intensity relationship, and the intensity of the fluorescence X-rays from a metal different from the base metal at this time is determined. , The diffraction X
Measured by a fluorescent X-ray detector installed separately from the line detector, based on the measured diffraction angle θ and the composition diffraction angle relationship, determine the composition of the alloy coating of the measured object,
Further, based on the composition of the alloy coating obtained for the object to be measured and the intensity of the fluorescent X-ray measured, and the film thickness composition fluorescence intensity relationship, the film of the alloy coating of the object to be measured. The above object was achieved by determining the thickness. Further, in the embodiment of the present invention, the characteristic X-rays and the white X-rays are generated from a single X-ray source so that the structure of the measuring device can be simplified. In another embodiment of the present invention, the alloy coating film is an alloy coating film containing Fe as one of the main components.

[Action]

As described above, there are various problems in online measurement of the film thickness and composition of an alloy film such as a plating film, and in particular, an alloy film containing the same metal as the base metal becomes more difficult. . In order to measure the film thickness and composition of an alloy coating film containing the same metal as the base metal online, the X-ray diffraction method and the fluorescent X-ray analysis method are used in combination in the present invention. There is. Also, various ideas peculiar to the present invention have been made for the X-ray diffraction method and the fluorescent X-ray analysis method used together as described above. For example, in the X-ray diffraction method performed in the present invention, attention is paid to the relationship between the crystal lattice plane spacing and the X-ray diffraction angle shown in the formula (1) described later according to the content ratio of the metal component of the alloy coating to be targeted. In addition, as described later in the description of the embodiments, the lattice spacing d (lattice constant) of the crystal is further increased.
Has been found to change as the content of metal in the alloy changes. Therefore, in the present invention, in advance, so as to cover the range of change in the composition of the alloy coating as the composition measurement target, that is, to cover the range of change in the content rate of the metal component of the alloy coating as the target, The compositional diffraction angle relationship between the diffraction angle θ and the composition of the alloy coating when a predetermined characteristic X-ray is irradiated under the irradiation conditions is obtained. For example, in FIG. 3 of the embodiment described later, Zn and F
Fe content of the alloy plating film consisting of e and 10
% To 25%, the X-ray diffraction angle 2θ
Is previously obtained as the composition diffraction angle relationship as described above. On the other hand, the fluorescent X-ray analysis method performed in the present invention has also been devised unique to the present invention. That is, in the present invention, when the film thickness of the alloy coating film is measured by the fluorescent X-ray analysis method, the composition measurement result obtained by the X-ray diffraction method is used as described above. In this respect, the compositional diffraction angle relationship described above and the film thickness composition fluorescence intensity relationship described later are used in pairs, and are considered to be ones that contribute to the improvement of measurement accuracy. Further, in such a fluorescent X-ray analysis method, particularly in the present invention, the fluorescent X-ray intensity from a metal different from the base metal is measured. For example, in the examples described below, Z made on a steel plate
Regarding the n-Fe alloy plating, the fluorescent X-ray intensity from the metal of Zn different from the base metal of Fe is first measured. For example, in Examples described later, focusing on the point that the wavelength of the fluorescent X-ray of Zn is different from the wavelength of the fluorescent X-ray of Fe,
Disperses only the fluorescent X-rays of Zn by the dispersive crystal 26,
I try to measure its strength. FIG. 1 is a flowchart showing the gist of the present invention. In step 102 of FIG. 1, first, a “composition diffraction angle relationship” covering the composition change range of the target alloy film is obtained, and the film thickness change range and composition change range of the alloy film are determined. Coverage "Film thickness composition Fluorescence intensity relationship"
Ask for. This is to obtain, for example, the composition diffraction angle relationship as shown in FIG. 3 of the embodiment described later, the film thickness composition fluorescence intensity relationship as shown in FIG. The composition diffraction angle relationship is a correlation between the diffraction angle θ and the composition of the alloy film. For example, in FIG. 3 described above, Zn
Regarding Fe alloy plating, the Fe content is 10% to 2
For the range up to 5%, a unique relationship between the diffraction angle θ and the Fe content (or Zn content) in the composition of the alloy coating is obtained in advance. On the other hand, the film thickness composition fluorescence intensity relationship is such that it covers the change range of the film thickness and the change range of the composition of the target alloy film, that is, for example, the change range of the film thickness of the target alloy film and its To cover the change range of the content rate of metal components,
This is a relationship between the intensity of fluorescent X-rays from a metal different from the base metal and the film thickness and composition of the alloy coating when a predetermined white X-ray is irradiated under a predetermined irradiation condition. For example, as shown in FIG. 5, the relationship between the film thickness composition fluorescence intensity and the Zn fluorescence X-ray intensity for each Fe content of 10% to 25% and the plating adhesion amount is shown in FIG. Has become. The present invention is not particularly limited to the characteristic X-rays for obtaining the composition diffraction angle relationship and the irradiation conditions of the characteristic X-rays. For example, these may be obtained experimentally. For example, in the embodiment described later, the wavelength λ is 2.291.
By irradiating the CrKα ray which is Å with the incident angle ψ≈33.5 degrees, good results as shown in the graph of FIG. 3 are obtained. That is, the difference in the Fe content can be detected as the difference in the X-ray diffraction angle 2θ. Further, in the present invention, there is no particular limitation on the white X-rays and the irradiation conditions of the white X-rays when obtaining the above-mentioned film thickness composition fluorescence intensity relationship. For example, in Examples described later, by using the white X-rays that are secondarily emitted when the specific X-rays are emitted, good results as shown in FIG. 5 are obtained. That is, in the white X-rays and the irradiation conditions of Examples described later, if the Fe content of the alloy coating is known in advance, the amount of plating adhered to the Zn fluorescent X-rays can be effectively determined according to the measured Zn fluorescent X-ray intensity. It has good characteristics that can be obtained. Next, in step 104, characteristic X-ray irradiation and white X-ray irradiation are performed when the film thickness and composition of the actual alloy coating of the object to be measured are measured. This is
The same characteristic X-ray is irradiated under the same conditions as the predetermined irradiation conditions when the composition diffraction angle relationship is obtained. When the characteristic X-ray is irradiated, the diffraction angle θ is measured by the diffraction X-ray detector. Further, the same white X-ray is irradiated to the object to be measured under the same conditions as the predetermined irradiation conditions when the relationship of the film thickness composition fluorescence intensity is obtained. At the time of this white X-ray irradiation, the intensity of fluorescent X-rays from a metal different from the base metal is measured by a fluorescent X-ray detector installed separately from the diffractive X-ray detector. Either the characteristic X-ray irradiation and the diffraction angle θ measurement or the white X-ray irradiation and the fluorescent X-ray intensity measurement may be performed first or simultaneously. In step 106, the composition of the alloy coating of the object to be measured is determined based on the diffraction angle θ measured in step 104 and the composition diffraction angle relationship obtained in step 102. For example, in Examples described later, when the measured X-ray diffraction angle 2θ is in the range of 66 degrees to 68 degrees, the Fe content (%) of the Zn—Fe alloy plating is uniquely determined as shown in FIG. Can be asked to. Then, in step 108, the composition of the alloy coating of the object to be measured obtained in step 106, the intensity of the fluorescent X-ray measured in step 104, and the step 102 are obtained. The film thickness of the alloy film of the object to be measured is determined based on the film thickness composition fluorescence intensity relationship. For example, in Examples described later, by using the film thickness composition fluorescence intensity relationship as shown in FIG. 5, it is possible to obtain a plating adhesion amount of 0 to about 25 (g / m ² ). ing. As described above, in the present invention, the X-ray diffraction method and the fluorescent X-ray analysis method are used in combination, and each of the X-ray diffraction method and the fluorescent X-ray analysis method has its own features. By doing so, it is possible to simultaneously and nondestructively measure the film thickness and composition of the alloy coating film online, which was conventionally difficult to measure.

【Example】

Embodiments of the present invention will be described in detail below with reference to the drawings. In the present example, a Z-plated Zn-Fe alloy on a steel plate was used.
The present invention is applied to the measurement of the film thickness and composition of the alloy plating film of an n-Fe alloy-plated steel sheet, and an embodiment of the measuring device is configured as shown in FIG. In this example, Zn plated in the plating tank 10
The —Fe alloy plated steel sheet 12 is conveyed in the direction of arrow A. A strong X-ray tube 14 for generating a characteristic X-ray having an appropriate wavelength such as a Cr target is provided at an appropriate position of the horizontal conveyance section (or vertical conveyance section) of the Zn-Fe alloy plated steel sheet 12.
The X-rays emitted from the X-ray tube 14 are incident on the Zn—Fe alloy-plated steel sheet 12 through the solar slit 16 at an incident angle ψ. Then Zn
By the respective crystal lattice planes of the phase of the Zn-Fe intermetallic compound formed in the plating film layer of the -Fe alloy plated steel sheet 12,
X-rays are diffracted by the Bragg equation shown below. λ = 2 dsin θ (1) where λ is the wavelength, θ is the angle, and d is the crystal lattice spacing of the Zn-Fe intermetallic compound. Specifically, as shown in FIG. 4, the characteristic X-ray used in the X-ray diffraction method of this embodiment is the CrKα ray included in the radiation spectrum of the X-ray tube 14, and its wavelength λ is 2.291.
It is Å. In this example, a Zn—Fe alloy plated steel sheet 1
Of the Zn-Fe alloy formed in the plating film layer of No. 2
The diffraction line from the x-phase (100) plane is used for the composition analysis, and the X-ray irradiation is performed at an incident angle ψ≈ = 33.5 degrees. Further, as will be described later, the X-ray diffraction angle 2θ that changes depending on the Fe (or Zn) content is around 67 degrees. At this time, in the crystal of the Zn-Fe intermetallic compound, the lattice constant changes depending on the Fe (or Zn) content, so X
The line diffraction angle 2θ deviates. That is, the X-ray diffraction angle 2θ changes depending on the Fe (or Zn) content. Here (1
Although the example of the (00) plane is shown, it goes without saying that the same can be done for the (110) plane. FIG. 3 is a diagram showing a previously obtained composition diffraction relationship used in this example. In this embodiment, the solar slit 17 and the goniometer 1
8, the diffraction X-ray detector 20 and the counting circuit 22
As shown in the example of the figure, for any crystal lattice plane, Fe
The relationship between the (or Zn) content (%) and the X-ray diffraction angle 2θ is determined. This composition diffraction relationship is obtained from the measured X-ray diffraction angle 2θ and the Fe content (%) in the Zn—Fe alloy plating film at this time, as shown in FIG. When the X-ray diffraction angle 2θ from the same crystal lattice plane from the plating layer is measured, the Fe content rate (%) in the plating film of the Zn—Fe alloy plated steel sheet 12 (or the Zn content rate (%) = 100−Fe content). The rate (%) is required. For example, it is obvious that the composition diffraction relationship as shown in FIG. 3 can be stored as a regression equation or a data table. Therefore, if the X-ray diffraction angle 2θ (degrees) is measured, the Fe content rate (%) can be obtained by a process using such a regression equation or a data table. On the other hand, white X-rays are also normally generated from the X-ray tube 14 that generates the characteristic X-rays, as shown in FIG. 4, so in the present embodiment, the white X-rays are effectively used. . That is,
The white X-rays excite the metal contained in the Zn-Fe alloy plated steel sheet 12 to generate fluorescent X-rays having a wavelength corresponding to the metal, so that the fluorescent X of Zn at that time is generated. Perform the analysis using lines. Specifically, the fluorescent X-rays of the metal contained in the Zn—Fe alloy plated steel sheet 12 excited by the white X-rays are only the fluorescent X-rays of Zn by the dispersive crystal 26 via the solar slit 24. Is dispersed, and its intensity is measured by the fluorescent X-ray detector 30 and the counting circuit 32 through the solar slit 28. Since the fluorescent X-ray intensity of Zn detected by the fluorescent X-ray detector 30 changes depending on the Zn (Fe) content and the thickness in the Zn-Fe alloy plating film as described above. , Which cannot be analyzed by the usual method, but as described above, X
Since the Zn content in the plated coating can be analyzed by the line diffraction method, the thickness of the plated coating can be determined from the fluorescent X-ray intensity of Zn. FIG. 5 is a diagram showing the relationship between the film thickness composition and the fluorescence intensity, which is obtained in advance and is used in this example. FIG. 5 shows an example of investigating the relationship between the fluorescent X-ray intensity of Zn and the thickness of the plating film (plating adhesion amount).
If the content (%) is known, it can be seen that the thickness of the plating film can be easily obtained from the fluorescent X-ray intensity of Zn. At this time, the amount of influence of Fe on the fluorescent X-ray intensity of Zn may be obtained, and the thickness of the plating film may be obtained by correcting with the Fe content. For example, as shown in FIG. 5, Fe content (%)
It is clear that the relationship between the fluorescent X-ray intensity of Zn and the plating adhesion amount for each can be stored as a regression equation or a data table. Therefore, the Fe content (%) is obtained by the X-ray diffraction method using FIG.
Further, if the fluorescent X-ray intensity of Zn is measured, the regression formula, data table, or the like shows that the Fe content in the alloy is 10% to 25% regardless of the ratio between Fe and Zn in the alloy.
In the range of%, the plating adhesion amount can be obtained. A series of X-ray diffraction intensities by scanning for obtaining the diffraction angle 2θ of an arbitrary crystal lattice plane of the X-ray diffraction method and the fluorescence X-ray intensity are measured at the same time.
Entered in. The computer 34 performs various calculations to obtain the Fe content in the alloy plating film and the plating thickness. In this embodiment, the composition diffraction relationship as shown in FIG. 3 is stored as a data table in the memory of the computer 34. Further, when the X-ray diffraction angle 2θ (degree) is measured, the Fe content (%) can be obtained by the program in the computer 34 while using such a data table. This program mainly performs a data table reference process. Further, in the present embodiment, the relationship between the fluorescent X-ray intensity of Zn and the plating adhesion amount for each Fe content (%) is stored as a data table in the memory of the computer 34 as shown in FIG. Has been done. Further, when the Fe content (%) is obtained by the X-ray diffraction method as described above, and the fluorescent X-ray intensity of Zn is measured, the data in the computer 34 is stored in the computer 34 using such a data table. In the alloy, F in the program
Regardless of the ratio of e to Zn (Fe content ratio is in the range of 10% to 25%), the amount of deposited plating can be obtained. This program mainly performs the data table reference process. The series of processing results of the computer 34 are displayed on the field line display 36 and also input to the process computer 38, and the plating conditions and the like of the plating tank 10 are controlled based on the analyzed values. . In this embodiment, the characteristic X-rays and the white X-rays are combined into a single X-ray.
Since it is generated from the filament tube 14, the structure of the measuring device is simple. The method of generating the characteristic X-rays and the white X-rays is not limited to this, and the characteristic X-rays are generated, for example, an X-ray tube of a Cr target and a strong white X-ray generation intensity, for example, an X-ray of a tungsten target. It is also possible to use two types of X-ray tube, namely, a X-ray tube, or another X-ray source. In addition, in the said Example, this invention was applied to the measurement of the film thickness and composition of the alloy plating film of a Zn-Fe alloy plating steel plate, However, the application range of this invention is not limited to this, and it is a base metal. Obviously, it can be applied to all measurements of film thickness and composition of alloy coatings containing the same metal.

As described above, according to the present invention, the film thickness and composition of an alloy coating film containing the same metal as a base metal, such as a Zn—Fe alloy plated steel sheet, which has been very difficult to measure conventionally, can be obtained. At the same time, it is possible to perform nondestructive, high-accuracy online measurement. Therefore, it becomes possible to measure the film thickness and composition of the alloy coating film online and immediately feed back the analysis result to the line, which greatly contributes to stable operation and quality improvement of Zn-Fe alloy plated steel sheet and the like. It has excellent effects such as

[Brief description of drawings]

FIG. 1 is a flow chart showing the summary of the method for measuring the film thickness and composition of an alloy film according to the present invention, and FIG. 2 is the film thickness and composition of an alloy plating film of a Zn—Fe alloy plated steel sheet to which the present invention is adopted. Block diagram showing a configuration of an embodiment of a measuring device, the third
The figure is a diagram showing an example of the composition diffraction angle relationship based on the relationship between the X-ray diffraction angle and the Fe content, which is used in the above Examples,
FIG. 4 is a diagram showing the wavelength distribution of X-rays generated from the X-ray tube of the Cr target used in the above embodiment, and FIG. 5 is the fluorescence X of Zn used in the above embodiment. It is a diagram which shows an example of the film thickness composition fluorescence intensity relationship based on the relationship between the line strength and the Fe content and the plating adhesion amount (film thickness). 12 ... Zn-Fe alloy plated steel sheet, 14 ... X-ray tube, 2θ ... X-ray diffraction angle, 18 ... Goniometer, 20 ... Diffraction X-ray detector, 26 ... Spectroscopic crystal, 30 ... Quartz Optical X-ray detector, 34 ... Computer.

Claims (3)

[Claims] 1. When measuring the film thickness and composition of an alloy coating film containing the same metal as the base metal, a predetermined characteristic is given under a predetermined irradiation condition so as to cover the range of change in the composition of the alloy coating film in advance. The composition diffraction angle relationship between the diffraction angle θ and the composition of the alloy coating when X-rays are radiated is calculated, and the change range of the film thickness and the change range of the composition of the target alloy coating are determined in advance. To cover the above, the intensity of fluorescent X-rays from a metal different from the base metal and the film thickness and composition of the alloy coating when the predetermined white X-rays are irradiated under predetermined irradiation conditions The strength relationship is obtained in advance, and at the time of actually measuring the film thickness and the composition of the alloy film of the measured object, the measured condition is the same as the predetermined irradiation condition when the composition diffraction angle relationship is calculated. And irradiate the characteristic X-ray with the diffraction angle θ at this time. Measurement with a line detector, and further irradiating the object to be measured with the white X-rays under the same conditions as the predetermined irradiation conditions when the relationship of the film thickness composition fluorescence intensity is obtained, The intensity of fluorescent X-rays from a metal different from the underlying metal is measured by a fluorescent X-ray detector installed separately from the diffraction X-ray detector, and the measured diffraction angle θ and On the basis of the composition diffraction angle relationship, the composition of the alloy coating of the object to be measured is determined, and the composition of the alloy coating determined on the object to be measured and the intensity of the fluorescent X-ray measured, and A film thickness and composition measuring method of the alloy film, wherein the film thickness of the alloy film of the object to be measured is obtained based on the film thickness composition fluorescence intensity relationship. 2. The method for measuring the film thickness and composition of an alloy coating according to claim 1, wherein the characteristic X-rays and the white X-rays are generated from a single X-ray source. 3. The alloy coating according to claim 1, wherein the alloy coating contains Fe as one of the main components.
The method for measuring the film thickness and composition of the alloy film according to the item.