JPH0610615Y2 - 電子線照射装置 - Google Patents

電子線照射装置

Info

Publication number
JPH0610615Y2
JPH0610615Y2 JP1987108701U JP10870187U JPH0610615Y2 JP H0610615 Y2 JPH0610615 Y2 JP H0610615Y2 JP 1987108701 U JP1987108701 U JP 1987108701U JP 10870187 U JP10870187 U JP 10870187U JP H0610615 Y2 JPH0610615 Y2 JP H0610615Y2
Authority
JP
Japan
Prior art keywords
electron beam
flange
vacuum chamber
periphery
extraction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1987108701U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6413660U (cs
Inventor
弘道 江尻
寿男 木村
隆裕 寺沢
Original Assignee
日新ハイボルテ−ジ株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 日新ハイボルテ−ジ株式会社 filed Critical 日新ハイボルテ−ジ株式会社
Priority to JP1987108701U priority Critical patent/JPH0610615Y2/ja
Publication of JPS6413660U publication Critical patent/JPS6413660U/ja
Application granted granted Critical
Publication of JPH0610615Y2 publication Critical patent/JPH0610615Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)
JP1987108701U 1987-07-14 1987-07-14 電子線照射装置 Expired - Lifetime JPH0610615Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987108701U JPH0610615Y2 (ja) 1987-07-14 1987-07-14 電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987108701U JPH0610615Y2 (ja) 1987-07-14 1987-07-14 電子線照射装置

Publications (2)

Publication Number Publication Date
JPS6413660U JPS6413660U (cs) 1989-01-24
JPH0610615Y2 true JPH0610615Y2 (ja) 1994-03-16

Family

ID=31344282

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987108701U Expired - Lifetime JPH0610615Y2 (ja) 1987-07-14 1987-07-14 電子線照射装置

Country Status (1)

Country Link
JP (1) JPH0610615Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5333120Y2 (cs) * 1975-12-17 1978-08-15

Also Published As

Publication number Publication date
JPS6413660U (cs) 1989-01-24

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