JPH06101880A - Air-conditioner for clean room - Google Patents

Abstract

PURPOSE:To prevent air down-flow in a clean room for production of semiconductors, etc., from being disturbed by movements of a human body. CONSTITUTION:Sensors 10 detect a human body existing region in a clean room 1. When the presence of a human body is detected, a fan-filter unit 3 which supplies air to the human body existing region increases its air supply rate to raise the down air flow velocity around the human body existing region.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a clean room for manufacturing semiconductors and the like, and in particular, a function for partially varying the blowing speed of a blower so that the downflow airflow is not disturbed by human movement. Clean room air conditioner with.

[0002]

2. Description of the Related Art In a conventional clean room, the speed of air blown from a fan filter unit is determined so that downflow flows vertically during construction. That is, as shown in FIG. 4, on the ceiling portion 2 of the clean room 1, a plurality of areas (A, B, and B) set in the clean room 1 as shown in FIG.
C) are provided with a plurality of fan filter units 3 for supplying air. The air supplied from these fan filter units 3 is drawn by the exhaust device from the grating 4 that constitutes the floor of the clean room 1, and is discharged to the outside.

Since various types of production equipment are arranged in the clean room 1, the amount of air supplied from each fan filter unit is obtained in order to obtain an ideal vertical downflow regardless of the place (area). Is optimally set in each area. This setting is performed only when the clean room 1 is constructed, and is not reset except in a special case where a large layout change is made.

[0004]

As described above, conventionally, when the fan filter unit 3 is installed during the construction of a clean room, the wind speed from each fan filter unit 3 is determined so that the downflow airflow flows vertically. Was there. In this way, a smooth flow is certainly obtained when there is no human motion, but in reality, the motion of the human operator causes the air flow to be disturbed, which causes dust to scatter. There was a problem of doing. In other words, when a person walks on the grating, the air flow stops flowing straight, and dust from the person contaminates the equipment and the sample in the equipment.

The reason why such a problem occurs is that the wind speed of each region is fixed and set without considering the movement of a person in the clean room 1. The present invention has been made in view of the conventional problems as described above, and increases the amount of air supplied from a fan filter unit that supplies air to a region where a human is present, thereby locally reducing the downflow. It is an object of the present invention to provide an air conditioner for a clean room that raises the wind speed.

[0006]

According to the present invention for achieving the above object, a plurality of air blowers are arranged on a ceiling portion, and the air supply amounts from the plurality of air blowers are optimally adjusted. In a clean room air conditioner in which an ideal downflow is formed in each area between the floor and the ceiling where forced exhaust is performed by exhaust means, a human A detector for recognizing the presence area, and an air supply unit for increasing the air supply amount of the air supply unit for supplying air to the presence area recognized by the detection unit among the plurality of air blowers arranged on the ceiling portion. And an amount adjusting means.

[0007]

In the air conditioner of the present invention, the detection means recognizes the human presence area in the clean room. The air supply amount adjusting unit increases the air supply amount of the air blowing unit that supplies air to the existing region recognized by the detecting unit, out of the plurality of air blowing units arranged on the ceiling of the clean room, and the human air supply unit Increase the downflow wind speed near the existing position. This prevents turbulence of the downflow airflow.

[0008]

Embodiments of the present invention will now be described in detail with reference to the drawings. FIG. 1 shows a clean room in which the device of the present invention is used, FIG. 1 (A) is a sectional view of the clean room, and FIG. 1 (B) is a top view of the clean room. In the clean room 1, a plurality of outlets for clean air called a fan filter unit 3 are provided in the ceiling portion 2, and a vent hole is formed so that the airflow from the fan filter unit 3 may flow vertically downward to the floor surface. A flooring material called grating 4 is laid. The air supplied from the fan filter unit 3 is drawn outside by the exhaust device through the grating 4.

As shown in FIGS. 1A and 1B, a sensor 10 for detecting the presence of a human is provided on the ceiling 2 at the boundary between the respective areas. As for this sensor,
Various things such as optical and electrical can be applied. Further, in the present embodiment, a large number of these sensors are arranged on the ceiling portion 2, but as long as the position of a person can be recognized, they may be provided on the floor portion or on the wall surface of the clean room 1. It may be a camera provided.

FIG. 2 is a block diagram showing a schematic configuration of the device of the present invention. A large number of sensors 10 provided on the ceiling 2 are all connected to a detection area recognition unit 11, and the detection area recognition unit 11 recognizes which sensor 10 senses a human. At the same time, it recognizes in which area human beings exist. The fan speed control unit 12 controls the rotation speed of the fans 14 provided in the fan filter unit 3. Therefore, the fan speed control unit 12 sets the air flow rate (equivalent to the rotation speed and the wind speed) of each fan filter unit 3 which has been conventionally performed at the time of construction.

The air conditioner of the present invention constructed as described above operates as shown in the flow chart of FIG.
The detection area recognition unit 11 constantly monitors the signal detected by the sensor 10. If no human is detected by any of the sensors, the detection region recognition unit 11 causes each fan filter unit 3 to operate at a speed preset in the fan speed control unit 12. The fan 14 provided is rotated (S1 to S3).

On the other hand, when the presence of a person is detected by any of the sensors 10, the detection area recognition section 11 determines in which area of the clean room 1 the sensor 10 detected the person (S4). The rotation speed of the fan 14 of the fan filter unit 3 that supplies air to the area where humans are present is increased to increase the downflow wind speed in this area. As a result, the turbulence of the downflow airflow in the region near the human being is reduced as shown in FIG. (S5).

For example, when a person standing on the grating 4 is detected by the sensor 10A shown in FIG.
Based on the signal, four of the fan filter units 3 that blow air in the shaded area in the figure have their normal wind speeds increased from 0.3 m / sec to 0.5 m / sec. Therefore, the disturbed air flow caused by the human being will also flow down to the floor along the human. In other words, the problem that the turbulence of the air flow is hardly suppressed and the production equipment and the sample in the equipment provided inside are contaminated is solved.

[0014]

As described above, according to the present invention, it is possible to prevent the turbulence of the downflow air flow due to the movement of a person or the like, and consequently improve the quality yield.

[Brief description of drawings]

FIG. 1 is a schematic configuration diagram of an air conditioner for a clean room according to the present invention.

FIG. 2 is a block diagram of a control system of the apparatus of FIG.

FIG. 3 is an operation flowchart of the device shown in FIG.

FIG. 4 is a schematic configuration diagram of a conventional air conditioner for a clean room.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Clean room 2 ... Ceiling part 3 ... Fan filter unit 4 ... Grating 10 ... Sensor (detection means) 11 ... Detection area recognition part (detection means) 12 ... Fan speed control part (supply amount adjustment means) 14 ... Fan (supply) (Volume adjustment means)

Claims (1)

[Claims] 1. A plurality of air blowers are provided on a ceiling portion, and the floor portion forcibly exhausted by the air exhaust means by optimally adjusting the amount of air supplied from each of the plurality of air blowers, and In an air conditioner for a clean room, in which an ideal downflow is formed in each area between the ceiling and the ceiling, a detection unit that recognizes a human presence area in the clean room, and disposed in the ceiling. Air conditioning in a clean room characterized by having an air supply amount adjusting means for increasing the air supply amount of the air blowing means for supplying air to the existing region recognized by the detecting means among the plurality of air blowing means. apparatus.