JP3639021B2 - Filter unit for tunnel type clean room - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a filter unit used in a tunnel type clean room applied to a dust-free room or a sterilization room such as a semiconductor factory, a precision machine factory, a chemical manufacturing factory and the like.
[0002]
[Prior art]
For example, in semiconductor factories, the need for a super clean space has increased as a response to the sophistication of manufacturing technology associated with the high integration and ultra miniaturization of VLSI, and the cleanliness of class 1 to 100 There is a need for a clean room with
In order to meet this demand, there are a vertical laminar flow type clean room and a tunnel type clean room.
[0003]
By the way, in a vertical laminar flow type clean room, it is necessary to install a high-performance filter on the entire surface of the ceiling and to control the temperature and humidity as a whole room, which may cause imbalance in temperature control for each indoor production device. there were.
On the other hand, the tunnel type clean room has an advantage that there is a possibility that it can be controlled with high accuracy for each working unit by dividing the area into areas.
[0004]
An example of this tunnel type clean room is disclosed in Japanese Patent Application Laid-Open No. 61-282742.
This will be described with reference to FIG.
In the figure, 1 is a tunnel type clean room. This tunnel type clean room 1 is divided by a hanging wall 2 into a high speed basin A, a boundary area C and a low speed basin B that require high cleanliness.
[0005]
In the high speed basin A, a high performance filter 3 is provided. The high-performance filter 3 is attached to an air supply chamber 4 provided on the ceiling side in the tunnel-like room.
Below the high performance filter 3, a production machine 6 disposed on the floor 5 of the tunnel type clean room 1 is located.
An air outlet 8 is provided between the hanging wall 2 on the low-speed basin B side and the ceiling 7. The air outlet 8 includes two high performance filters 9 and 10, an air supply chamber 11 for sending clean air to both the high performance filters 9 and 10, and a high performance filter located in the air supply chamber 11 from the hanging wall 2. 9 and a damper 12 provided at the upper part of 9.
[0006]
The boundary region C is formed by blowing from the high performance filter 9.
According to the tunnel type clean room 1, clean air is blown out in a laminar flow at a speed of about 0.3 to 0.4 m / sec in a substantially vertical downward direction across the high-speed flow area A through the high-performance filter 3. In the low-speed basin B, clean air is blown out through the high-performance filter 10 so as to diffusely reach an indoor average descending wind speed of about 0.05 to 0.2 m / sec.
[0007]
In the boundary region C, clean air is blown out from a horizontally mounted high-performance filter substantially vertically downward at a speed of about 0.3 to 0.4 m / sec.
Since the same air flow as that of the high-speed basin A in the boundary region C is formed by the high-performance filter 9 and the damper 12, it is possible to prevent entrainment of dust generation from workers located on the boundary region C side. it can.
[0008]
FIG. 15 shows a tunnel type clean room described in Japanese Patent Laid-Open No. 61-282742.
In this case, the high-performance filter 13 is installed on the ceiling side, and a boundary outlet 14a and a low-speed basin 14b are provided in one outlet 14.
Also in this tunnel type clean room, it is possible to prevent the occurrence of dust generation from workers located on the boundary region C side as in FIG.
[0009]
[Problems to be solved by the invention]
However, in the tunnel type clean room shown in FIG. 14, since the damper 12 adjusts the wind speed in the boundary region C, it takes time to adjust the damper 12, and the high-performance filters 9, 10 are each formed in a straight line. Since the angle formed by the performance filters 9 and 10 has a considerably large angle, a new boundary region is formed by the air flow blown from each of the high-performance filters 9 and 10. Boundary area by husband C Is the width of the high-performance filter 9 Min There is a high possibility that the position will only shift.
[0010]
Further, in the tunnel type clean room shown in FIG. 15, since dynamic pressure is applied from the high-performance filter 13 into the outlet 14, clean air is more likely to exit from the lower boundary region 14a than the lateral low-speed region 14b. There is a possibility that it will be faster than the flow velocity of the basin A. In that case, it is not possible to prevent entrainment of dust generation from an operator located on the boundary area C side.
[0011]
On the other hand, what is shown in FIG. 16 is known as a conventional tunnel type clean room air conditioning system.
In this system, the air supply chamber 4 in the high-speed basin A, the air supply chamber 11 in the low-speed basin B, and the underfloor space 15 are connected to an air conditioner (not shown) by a pipe 16, and the air in the underfloor space 15 is air-conditioned. After being led to the cold / hot water coil and fan of the machine, the air-conditioned air is supplied to the air supply chamber 4 of the high-speed basin A and the air supply chamber 11 of the low-speed basin B, and the tunnel clean room from the filter 3 and the outlets 9 and 10 The air in the tunnel type clean room 1 is air-conditioned and purified by blowing it into the inside.
[0012]
However, in such a conventional tunnel type clean room air conditioning system, the air conditioning in the tunnel type clean room 1 is performed by a single air conditioner, so that the thermal load partially generated in the tunnel type clean room 1 can be effectively handled. There was a problem that it was difficult to do.
On the other hand, as a clean room, for example, a full-face laminar flow method shown in FIG. 3 of Japanese Utility Model Publication No. 5-38821 and a conventional method shown in FIG. 4 are known.
[0013]
However, the laminar flow method of the entire surface has a laminar flow, but has a drawback that it requires a ceiling chamber and a filter to be installed on the entire surface, and the ceiling is low and expensive.
Further, the conventional system has a drawback that since the blowing of clean air is local in one direction, eddy currents are generated on the side of the filter and cannot circulate and stagnate and cannot be cleaned.
[0014]
In order to solve these problems, a clean room air filter having a substantially semicircular cross-section described in Japanese Utility Model Publication No. 5-38821 and a substantially arc-shaped air filter described in Japanese Utility Model Publication No. 63-43620 are disclosed. As a clean room air filter, an air flow that blows out radially from the clean room air filter surface has been proposed.
[0015]
By the way, as shown in FIGS. 17 and 18, the airflow blown out from the clean room air filter having a substantially semicircular or substantially circular cross section is blown out uniformly in the radial direction from the filter surface 17 as indicated by arrows. . When the velocity is represented by a vector, the absolute length of the vector immediately after leaving the filter surface 1 is the same at any position, and the vector density at the filter surface 17 is the same at any part.
[0016]
17 shows a semi-circular clean room air filter with a quarter cross section, and FIG. 18 shows a clean room air filter with a semi-circular cross section.
Here, as shown in FIG. 19, this filter unit 18 is used in a clean room 19, and the entire surface is provided with a punching panel or the like on the floor 20 for the purpose of improving the air flow distribution, so that the entire surface is uniformly sucked.
[0017]
A filter unit 18 is attached to the ceiling 21 of the clean room 19. In the clean room 19, an air conditioner 23 connects the supply chamber 22 of the filter unit 18 and the underfloor space 24 to circulate clean air.
Further, since the clean room 19 wants to increase the installation pitch of the filter rows of the filter unit 18 for economy, air is sent into a horizontally long room as shown in FIG.
[0018]
Therefore, the distance W between the wall 25 and the center position of the filter unit 18 is set to be larger than the height H of the clean room 19.
FIG. 20 is synonymous with FIG. 19 when the alternate long and short dash line is regarded as the axis of symmetry and the wall condition is eliminated and the mirror surface is developed.
Hereinafter, description will be given based on FIG. 20 in which only the right side of the symmetry axis is displayed.
[0019]
Figure 20 In the vertical direction (−Z direction) below the filter unit 18, the wind speed is 21 As shown in FIG. 5, as the distance from the blowing point 26 increases, the fluid portion (fluid element) 27 expands along with the expansion of the space, and the wind speed decreases according to the continuous equation.
However, if it moves downward to some extent, the adjacent elements also become downward vectors due to the suction of the floor 20, and the fluid element 27 does not expand but reaches a constant speed at the floor 20.
[0020]
On the other hand, the X-axis direction is 22 It becomes as shown in.
First, the fluid element 28 blown out first expands in the horizontal direction (+ X direction) with the expansion of the space, even if the boundary layer is separated, and the wind speed is reduced by the continuous equation.
In addition, the wind speed is further reduced due to the influence of the viscosity from the boundary layer. Adjacent fluid elements 28 receive a force in the −Z direction depending on the suction conditions. When the fluid element 28 advances in the X-axis direction, it strikes the wall 25 and flows in the suction direction and the −Z direction to change the vector direction.
[0021]
As a result, the fluid element 28 moving in the horizontal direction is drawn downward on the surface of the wall 25 and the speed is also greatly reduced, so that a negative pressure 29 is obtained as shown in FIG.
This becomes the core of the vortex 30 and is generated at the corner between the ceiling 21 and the wall 25. As a result, in the fluid element 28A on the horizontal wall 25, as shown in FIG. 24, a vector is generated in the −X direction along the ceiling 21, and further, the growth of the vortex 30 is promoted by reducing the horizontal wind speed. Prompts.
[0022]
Due to these factors, the vortex 30 grows greatly at the corners of the ceiling 21 and the wall 25 and exists constantly.
Due to the vortex 30, the dust that has entered the vortex 30 is not easily discharged and is difficult to clean.
In addition, as the vortex 30 grows, a substantial portion of the X component of the blown wind velocity vector is used as the energy of the vortex motion, and the amount of vector that changes from the X to -Z component hitting the wall 25 also decreases. To do.
[0023]
As a result, as shown in FIG. 25, the −Z direction vector amount in the area close to the wall 25 also decreases, the wind speed in this area decreases, and the −Z direction vector amount distribution up to 1500 mm above the floor necessary for the clean room 19 is the room. It gets worse as a whole.
That is, the wind speed in the region 31 in FIG.
The present invention has been made to solve such a conventional problem, and its purpose is to prevent the dust generated from the workers located in the boundary region from being caught in the high-speed flow region and to provide a good air flow distribution. It is an object to provide a filter unit for a tunnel type clean room that can be provided with a filter.
[0024]
[Means for Solving the Problems]
The invention of claim 1 is attached to the ceiling of a clean room where the entire surface is uniformly sucked on the floor surface. Make a semi-elliptical cross section In the clean room filter unit, the air fluid element that the air filter for the clean room is responsible for the horizontal space of the clean room blown out from each part of the air filter for the clean room is more than the air fluid element that is responsible for the vertical space of the clean room. Increase the curvature of the area that blows out in the horizontal direction of the clean room so that the entire room becomes a laminar flow with the entire surface facing down at a 1500mm level on the floor where a uniform wind speed distribution is required, and the curvature of the area that blows out in the vertical direction of the clean room It is characterized by having a substantially semi-elliptical cross section cut in the minor axis direction, which is made smaller, and by increasing the area of the filter medium that blows out in the minor axis direction.
The invention of claim 2 is attached to the ceiling of a clean room where the entire surface is uniformly sucked on the floor surface. Make a semi-elliptical cross section In the clean room filter unit, the air fluid element that the air filter for the clean room is responsible for the horizontal space of the clean room blown out from each part of the air filter for the clean room is more than the air fluid element that is responsible for the vertical space of the clean room. Increase the curvature of the area that blows out in the horizontal direction of the clean room so that the entire room becomes a laminar flow with the entire surface facing down at a 1500mm level on the floor where a uniform wind speed distribution is required, and the curvature of the area that blows out in the vertical direction of the clean room The vertical cross-sectional shape made smaller is substantially a quarter elliptical shape, and is characterized in that the area of the filter medium blown out in the minor axis direction is increased.
[0025]
Invention of Claim 3 is the filter unit for tunnel type clean rooms of Claim 1 or 2, The curvature of the area | region which blows off in the horizontal direction of the said clean room is the area | region which blows off in the horizontal direction of the said clean room, and the vertical direction of the said clean room. It is smaller than the curvature of the area blown out in the middle of the area to be blown out.
The invention according to claim 4 is attached to the ceiling of the low-speed basin of the clean room which is made of uniform suction on the floor surface and is divided into a high-speed basin and a low-speed basin that require high cleanliness by the hanging wall. Make a semi-elliptical cross section In the clean room filter unit, the air fluid element that the air filter for the clean room blows out from each part of the filter surface is increased from the vertical direction with respect to the horizontal space expansion of the clean room, and up to 1500 mm on the floor where a uniform wind speed downward vector distribution is required. The horizontal curvature of the clean room and the clean room's horizontal curvature can be formed so that the entire room becomes a laminar flow that faces downward and the boundary layer becomes a high-speed flow and a nearly constant-velocity flow as it moves away from the high-speed flow region. It is characterized by a substantially semicircular arc shape with a vertical curvature determined.
[0026]
The invention of claim 5 is the invention of claim 4. In In the clean room filter unit described above, the curvature of the area that blows out in the horizontal direction of the clean room is smaller than the curvature of the area that blows out in the middle between the area that blows out in the horizontal direction of the clean room and the area that blows out in the vertical direction of the clean room. It is characterized by.
The invention of claim 6 is any one of claims 1 to 5. In The clean room filter unit described above is characterized in that a region that is blown out in the horizontal direction of the clean room is a straight line.
The invention of claim 7 is any one of claims 1 to 5. In The clean room filter unit described above is characterized in that the area of the clean room that blows out in the horizontal direction has a high density of the filter medium.
The invention of claim 8 is any one of claims 1 to 5. In The clean room filter unit described above is characterized in that the area of the clean room that blows out in the horizontal direction increases the height of the filter medium and increases the area of the filter medium.
[0027]
(Function)
Claims 1 to 8 In this invention, the fan filter unit flows the high-performance filter into the high-speed basin of the tunnel type clean room.
Claims 1 to 8 In the present invention, a high-speed laminar flow that flows toward the production machine is formed in the high-speed flow area as in the prior art.
[0028]
On the other hand, in the low-speed flow area and the boundary area, the clean room filter unit equipped with the clean room air filter having a semi-elliptical cross section cut in the minor axis direction has a smaller curvature in the horizontal direction than in the vertical direction. It is possible to increase the number of fluid elements that are responsible for the expansion of the space in the direction, thereby reducing the expansion of the fluid elements in the space in the horizontal direction and suppressing the generation of negative pressure with a wind speed considerably far from the blowout.
[0029]
Also, in the vertical direction, the clean room filter unit equipped with a clean room air filter having a substantially semi-elliptical cross-section has a suction from the bottom, so that the space for the fluid element does not expand, and if it advances to some extent, it expands further. Since this is not possible, this part tends to maintain the wind speed and tends to be faster than other parts of the space. Therefore, the curvature of the filter surface of the clean room air filter is increased in order to provide the same space expansion as other parts.
[0030]
As described above, in the low-speed flow region, a uniform low-speed flow can be formed from the clean room filter unit including the clean room air filter having a substantially semi-elliptical cross section cut in the minor axis direction.
In addition, since a large area of the filter medium is assigned to the filter unit short diameter portion, the boundary area can give a larger air volume than other low speed areas. Further, since the filter medium is gradually increased at the short diameter portion and the airflow is blown radially, the blowout air volume in the area adjacent to the high-speed flow area becomes lower as the distance from the high-speed flow area naturally increases in the boundary area.
[0031]
Therefore, no upward airflow occurs in the boundary area, and a downward airflow with a stable interior is obtained.
[0032]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
[0033]
FIG. 1 shows claims 1 to 8 The air-conditioning system to which the filter unit for tunnel type clean rooms which concerns on one embodiment is applied is shown.
In the figure, 41 is a tunnel type clean room. In the tunnel type clean room 41, a high-speed basin A, a boundary region C, and a low-speed basin B that require high cleanliness are partitioned by a hanging wall 42.
[0034]
The tunnel type clean room 41 is provided with a tunnel type clean room filter unit 49 for blowing clean air into the tunnel type clean room 41 on the ceiling 43 side of the low-speed basin B. Yes. The ceiling space 46 and the underfloor space 45 communicate with each other via an air conditioner 47. A production machine 48 is arranged on the floor.
[0035]
As shown in FIG. 1, the tunnel-type clean room filter unit 49 includes a clean room air filter 50 having a substantially semi-elliptical cross section cut in the minor axis direction, and a supplier chamber 51. Further, the air from the air conditioner 47 is supplied to the supplier chamber 51 through a duct 52, or a motor fan 52 is provided.
[0036]
A fan filter unit 53 is disposed in the high-speed basin A. In the fan filter unit 53, a high-performance filter 56 such as a ULPA filter or a HEPA filter is disposed in a lower end opening 55 of a cylindrical unit body 54 having a rectangular cross section.
By driving the air conditioner 47 and supplying clean air to the fan filter unit 53 and the tunnel clean room filter unit 49 via the duct 52, clean air is supplied to the tunnel clean room 41. After being purified by the high-performance filter 56, it is blown into the high-speed basin A at a high speed of 0.3 to 0.4 m / sec.
[0037]
On the other hand, from the filter unit 49 for tunnel type clean room, In low speed basin B 0.05-0.2m / sec So that the indoor average descending wind speed Clean air is blown out at low speed.
Here, the operation of the tunnel-type clean room filter unit 49 will be described in detail with reference to FIGS.
Focusing on the change due to the distance of the fluid element in the X direction in the conventional example shown in FIG. 22, the air is blown out in the minor axis direction of the clean room air filter 50 of the tunnel type clean room filter unit 49 as shown in FIG. By making the curvature of the filter surface 50a in the region 50A smaller than the curvature of the conventional clean room air filter having a semicircular cross section, that is, the −Z component in the vector direction of the fluid elements arranged in the −Z direction is smaller than the semicircular cross section. By gradually increasing, the number of fluid elements 87 responsible for the expansion of the space in the X direction was increased.
[0038]
Thereby, the expansion of the fluid element 87 into the space in the X direction is reduced, and the generation of negative pressure is suppressed with the wind speed considerably far from the blowout.
On the other hand, as shown in FIG. 8, the region 50 </ b> B that blows out in the major axis direction immediately below the clean room air filter 50 of the tunnel clean room filter unit 49 in the −Z direction has suction from the floor 44, There is little expansion of the space, and if it advances to some extent in the -Z direction, it will not expand further.
[0039]
Therefore, this portion tends to maintain the wind speed and tends to be faster than other portions of the space. Therefore, in order to have the same space expansion as the other portions, the curvature of the filter surface 50b of the region 50B that blows out in the major axis direction immediately below the clean room air filter 50 of the tunnel type clean room filter unit 49 is increased.
As shown in FIG. 9, the shape for satisfying these curvatures is a vertically long elliptical shape with a radius of a minor axis a <a radius b of a major axis.
[0040]
The relationship between the magnitudes of the curvatures 1 / ρ will be described with reference to FIGS.
FIG. 9 shows a basic configuration of the clean room air filter 50 of the tunnel clean room filter unit 49 according to the present embodiment. FIG. 10 shows a conventional filter unit for a tunnel type clean room having a semicircular sectional shape.
9 and 10, the radius of the minor axis is a, the radius of the major axis is b, the curvature is 1 / ρ, the intersection of the minor axis and the elliptic curve, that is, the minor axis blows out in the minor axis direction of the clean room air filter 50. The area 50A is (1 / ρ) d, the intersection of the major axis and the elliptic curve, that is, the area 50B blown in the major axis direction immediately below the clean room air filter 50 is (1 / ρ) c, a semicircular clean room air filter Suppose that the radius of 17 is r, the blowout directly below the semicircular clean room air filter 17 is (1 / ρ) a, and the intersection of the ceiling 21 and the semicircular cleanroom air filter 17 is (1 / ρ) b. The vertically long elliptical shape of the clean room air filter 50 of the tunnel clean room filter unit 49 according to the present embodiment is (1 / ρ) c> (1 / ρ) a> (1 / ρ) d and a < b.
[0041]
If the cross section of the clean room air filter 50 of the tunnel clean room filter unit 49 is formed in this shape, a good air flow distribution can be obtained in the low speed region under the conditions of uniform blowing and uniform suction.
Further, as shown in FIGS. 2 to 4, a large air volume is given to the boundary region C by increasing the filter medium area of the region 50 </ b> A that is blown out in the minor axis direction of the clean room air filter 50. By blowing the airflow radially, the wind speed is gradually increased from the low speed region to the high speed region in the boundary region C.
[0042]
In other words, in FIG. 2, the region 50 </ b> A that blows out in the minor axis direction of the clean room air filter 50 is linear. 6 ). In FIG. 3, the density 50A1 of the filter medium in the region 50A blown out in the minor axis direction of the clean room air filter 50 is denser than the density 50A2 of the other filter medium. 7 ). In FIG. 4, the folding height 50A3 of the filter medium in the region 50A blown out in the minor axis direction of the clean room air filter 50 is set higher than the folding height 50A4 of the other filter medium. 8 ).
[0043]
As a result, the blowing speed at the boundary between the high speed flow area and the low speed flow area below the drooping wall becomes substantially constant, and vortices due to turbulence in the boundary area C hardly occur.
As described above, the clean air blown out from the clean room air filter 50 of the tunnel clean room filter unit 49 is substantially equal to the speed of the high-speed basin A when the airflow represented by the fluid element 87 collides with the drooping wall 42. Alternatively, it becomes a slightly slower speed and descends to the boundary region C along the drooping wall 42 as shown in FIG. 7, so that a downward stable airflow is formed between the high-speed flow region A and the boundary region C. No updraft is generated.
[0044]
FIG. 5 shows an embodiment of a filter unit for a tunnel type clean room according to claim 2.
This embodiment is different from the tunnel-type clean room filter unit 50 shown in FIG. 1 in that a tunnel-type clean room filter unit 66 having a substantially elliptical cross section cut in the minor axis direction is used.
[0045]
That is, the clean room air filter 67 of the tunnel type clean room filter unit 66 has a substantially elliptical cross section cut in the short diameter direction.
Along with this, the supplier chamber 68 has become smaller.
Therefore, the clean room 69 is half of the clean room 60 of FIG.
[0046]
Also in this embodiment, the same operational effects as those of the above embodiment can be obtained.
In addition, although the case where the supplier chamber was used was demonstrated in the said embodiment, this invention is not limited to this, You may pump the clean air supplied to a ceiling chamber with a fan.
[0047]
Further, for example, as shown in FIG. 12, the tunnel type clean room air filter connects a clean room air filter 51 having a predetermined length with a frame body 72 through a packing 71, and supports the opening side on a support member 73. Alternatively, the duct 74 may be closed.
The basic structure of this clean room air filter duct is the same as that disclosed in Japanese Patent Laid-Open No. 63-294440 except for the structure of the clean room air filter.
[0048]
Furthermore, as shown in FIG. 13, the outside of the clean room air filter may be covered with a protective cover 75.
Furthermore, the clean room air filter used in the present invention may be one obtained by connecting a plurality of divided air filters as described in, for example, Japanese Utility Model Publication No. 5-38821.
[0049]
【The invention's effect】
As described above, claims 1 to 8 According to the invention described in the above, the clean room air filter has a substantially semi-elliptical section cut in the minor axis direction or a substantially quarter elliptical section cut in the minor axis direction, and is blown out in the minor axis direction. Since the area of the filter medium is large, a good air flow distribution can be given to a normal horizontally long clean room. Moreover, the air flow distribution in the clean room can be made uniform. The vortex area at the corner of the clean room can be reduced, and it can be further cleaned with the same air volume.
[0050]
In addition, by gently changing the flow velocity at the boundary between the high-speed flow area and the low-speed flow area, the generation of vortices is prevented and the cleaning ability is greatly enhanced.
[Brief description of the drawings]
BRIEF DESCRIPTION OF THE DRAWINGS 8 It is explanatory drawing which shows one Embodiment which applied the filter unit for tunnel type clean rooms which concerns to an air-conditioning system.
FIG. 2 is an explanatory view of a clean room air filter having a semi-circular cross section in the air conditioning system of FIG. 1;
FIG. 3 is an explanatory view of a clean room air filter having a semi-circular cross section in the air conditioning system of FIG. 1;
4 is an explanatory view of a clean room air filter having a semi-circular cross section in the air conditioning system of FIG. 1; FIG.
5 is a cross-sectional view showing an embodiment of a filter unit for a tunnel type clean room according to claim 2. FIG.
6 is an explanatory diagram relating to blowout of a filter unit for a tunnel type clean room in the tunnel type clean room of FIG. 1. FIG.
7 is an explanatory diagram relating to blowout in the minor axis direction of the filter unit for a tunnel type clean room in FIG. 6. FIG.
FIG. 8 is an explanatory diagram regarding blowout in the major axis direction of the filter unit for tunnel type clean room in FIG. 6;
9 is an explanatory diagram showing a basic configuration of a filter unit for tunnel type clean room in FIG. 1. FIG.
FIG. 10 is an explanatory diagram showing a basic configuration of a conventional tunnel clean room filter unit having a semicircular cross section.
FIG. 11 is an explanatory diagram showing another embodiment of the tunnel type clean room air conditioning system in FIG. 1;
12 is an explanatory view showing another embodiment of the filter unit for the tunnel type clean room in FIG. 1. FIG.
13 is an explanatory view showing another embodiment of the filter unit for the tunnel type clean room in FIG. 1. FIG.
FIG. 14 is an explanatory view showing a conventional tonel type clean room.
FIG. 15 is an explanatory view showing a conventional tunnel type clean room.
FIG. 16 is an explanatory view showing a conventional tunnel type clean room.
FIG. 17 is an explanatory view of a conventional clean room filter having a semicircular cross section of a quarter.
FIG. 18 is an explanatory view of a conventional clean room filter having a semicircular cross section.
19 is an explanatory diagram of a clean room using the clean room filter having a semicircular cross section in FIG. 18;
20 is an explanatory diagram of a clean room using the clean room air filter having a semicircular cross section in FIG. 19;
FIG. 21 is an explanatory view showing a blowing state in the vertical direction of the clean room air filter of FIG. 17 or FIG. 18;
22 is an explanatory view showing a horizontal blowing state of the clean room air filter of FIG. 17 or FIG. 18;
FIG. 23 is an explanatory view showing a horizontal blowing state of the clean room air filter of FIG. 17 or FIG. 18;
24 is an explanatory diagram showing a horizontal blowing state of the clean room air filter of FIG. 17 or FIG. 18;
25 is an explanatory diagram showing a horizontal blowing state of the clean room air filter of FIG. 17 or FIG. 18;
[Explanation of symbols]
41 Tunnel type clean room
42 Hanging wall
43 Ceiling
44 floors
45 Underfloor space
46 Ceiling space
47 Air conditioner
48 Production machinery
50 Tunnel type clean room filter unit
Area blown out in the minor axis direction of the air filter 50 for 50A clean room
51 Unit body
53 Fan filter unit
55 High performance filter
60 Axial fan
A high speed basin
B Low speed basin
C boundary area

Claims (8)

In the clean room filter unit that has a semi-elliptical cross section that is attached to the ceiling of the clean room, where the entire surface is uniformly sucked,
The air fluid element that the air filter for the clean room is responsible for the space in the horizontal direction of the clean room that blows out from each part of the air filter for the clean room is larger than the air fluid element that is responsible for the space in the vertical direction of the clean room, and the uniform wind speed distribution The curvature of the area blown out in the horizontal direction of the clean room is made smaller than the curvature of the area blown out in the vertical direction of the clean room so that the entire room becomes a laminar flow with the entire surface facing down at the 1500 mm level required for the floor. A clean room filter unit characterized by having a substantially semi-elliptical cross section cut in the radial direction and a large filter medium area blown out in the short diameter direction. In the clean room filter unit that has a semi-elliptical cross section that is attached to the ceiling of the clean room, where the entire surface is uniformly sucked,
The air fluid element that the air filter for the clean room is responsible for the space in the horizontal direction of the clean room that blows out from each part of the air filter for the clean room is larger than the air fluid element that is responsible for the space in the vertical direction of the clean room, and the uniform wind speed distribution A longitudinal section formed by making the curvature of the area blown out in the horizontal direction of the clean room smaller than the curvature of the area blown out in the vertical direction of the clean room so that the entire room becomes a laminar flow with the entire surface facing down at the 1500 mm level required for A clean room filter unit characterized in that the surface shape is approximately ¼ ellipse and the area of the filter medium blown in the minor axis direction is increased. The curvature of the area to be blown in the horizontal direction of the clean room, to claim 1 or 2, characterized in that less than the curvature of the area to be blown into the middle of the area to be blown into a vertical direction of the horizontal direction blown area clean room of the clean room The filter unit for the tunnel type clean room described. Clean room filter with a semi-elliptical cross section that is attached to the ceiling of the low-speed basin of the clean room that is divided into a high-speed basin and a low-speed basin that require high cleanliness due to the hanging wall, and is uniformly sucked on the floor. In the unit
A clean room air filter increases the air fluid elements blown from each part of the filter surface from the vertical direction with respect to the horizontal space expansion of the clean room, and the entire room up to 1500 mm above the floor where a uniform wind speed downward vector distribution is necessary Determine the horizontal curvature of the clean room and the curvature of the clean room in the vertical direction so that a boundary layer that becomes laminar and forms a high-speed flow and a nearly constant-velocity low-velocity flow as the distance from the high-speed basin is reached. Clean room filter unit characterized by having a semicircular arc shape in cross section. The curvature of the area to be blown in the horizontal direction of the clean room, in claim 4, characterized in that less than the curvature of the area to be blown into the middle between the region to be blown into a vertical direction of the horizontal direction blown area clean room of the clean room The clean room filter unit described.   The clean room filter unit according to any one of claims 1 to 5, wherein a region of the clean room which blows out in a horizontal direction is a straight line. The clean room filter unit according to any one of claims 1 to 5, wherein a region of the clean room that is blown out in a horizontal direction has a high density of filter media. The clean room filter unit according to any one of claims 1 to 5, wherein the area of the clean room that blows out horizontally increases the height of the filter medium to increase the area of the filter medium.

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