JP3555792B2 - Tunnel type clean room - Google Patents

Description

[0001]
TECHNICAL FIELD OF THE INVENTION
The present invention relates to a tunnel-type clean room applied to a dust-free room or a sterile room of a semiconductor factory, a precision machine factory, a chemical manufacturing factory, and the like.
[0002]
[Prior art]
For example, in semiconductor factories, the necessity of ultra-cleanliness space has increased in response to the advancement of manufacturing technology accompanying the high integration and ultra-miniaturization of ultra-large LSI, and the cleanliness of class 1 to 100 Is required.
To meet this demand, there are a vertical laminar flow type clean room and a tunnel type clean room.
[0003]
In a vertical laminar flow clean room, it is necessary to install a high-performance filter on the entire ceiling and control the temperature difference as a whole room, which may cause imbalance in temperature control of each production device in the room. there were.
On the other hand, a tunnel-type clean room has the advantage that it can be controlled with high accuracy for each work unit.
[0004]
Japanese Patent Laid-Open Publication No. Sho 61-282742 discloses this tunnel type clean room.
This will be described with reference to FIG.
In the figure, reference numeral 1 denotes a tunnel-type clean room. The tunnel-type clean room 1 is divided into a high-speed basin A, a boundary region C, and a low-speed basin B, which require high cleanliness, by the hanging wall 2.
[0005]
In the high-speed basin A, a high-performance filter 3 is provided. This high-performance filter 3 is attached to an air supply chamber 4 provided on the ceiling side in a tunnel-shaped room.
Below the high-performance filter 3, a production machine 6 arranged on the floor 5 of the clean room 1 is located.
An outlet 8 is provided between the hanging wall 2 and the ceiling 7 on the low-speed flow area B side. The outlet 8 includes two high-performance filters 9 and 10, an air supply chamber 11 that sends clean air to the two high-performance filters 9 and 10, and a high-performance filter located in the air supply chamber 11 and extending from the hanging wall 2. 9 and a damper 12 provided on the upper part of the motor.
[0006]
The boundary area C is formed by blowing from the high-performance filter 9.
According to the tunnel-type clean room 1, the clean air is blown out almost vertically downward at a speed of about 0.3 to 0.4 m / sec through the high-performance filter 3 in a laminar flow at a speed of about 0.3 to 0.4 m / sec. In the low-speed basin B, clean air is diffusely blown out through the high-performance filter 10 so as to have a room average descending wind speed of about 0.05 to 0.2 m / sec.
[0007]
In the boundary area C, clean air is blown from the high-performance filter 9 mounted horizontally at a speed of about 0.3 to 0.4 m / sec almost vertically downward.
Since the high-speed filter 9 and the damper 12 form the same airflow as the airflow in the high-speed flow area A in the boundary area C, it is possible to prevent dust from being caught by an operator located on the boundary area C side. it can.
[0008]
FIG. 19 shows a tunnel-type clean room which is also described in JP-A-61-282742.
In this case, a high-performance filter 13 is provided on the ceiling side, and one outlet 14 is provided with a boundary area 14a and a low-speed flow area 14b.
In this tunnel-type clean room as well, it is possible to prevent dust from being caught by an operator located on the boundary area C side as in FIG.
[0009]
[Problems to be solved by the invention]
However, in the tunnel-type clean room shown in FIG. 18, since the wind speed in the boundary area C is adjusted by the damper 12, it takes time to adjust the damper 12.
Further, since the high-performance filters 9 and 10 are formed in a straight line, and the angle formed by the high-performance filters 9 and 10 has a considerably large angle, the airflow blown out from each of the high-performance filters 9 and 10 causes a new flow. A new boundary layer. Accordingly, there is a high possibility that the boundary layer C is shifted only by the width of the high-performance filter 9.
[0010]
Also, in the tunnel type clean room shown in FIG. 19, since the dynamic pressure is applied from the high-performance filter 13 to the inside of the air outlet 14, the clean air is more likely to exit from the downward boundary area 14a than the horizontal low-speed flow area 14b. It may be faster than the flow velocity in the high-speed basin A. In that case, it is not possible to prevent dust from being caught by an operator located on the boundary area C side.
[0011]
On the other hand, as a clean room, for example, an entire laminar flow system shown in FIG. 3 of Japanese Utility Model Publication No. 5-38821 and a conventional system shown in FIG. 4 are known.
However, in the case of the full-surface laminar flow method, a well-defined laminar flow is obtained, but there is a drawback that the ceiling chamber and the filter must be installed on the entire surface, and the ceiling is low and expensive.
[0012]
Further, the conventional type has a drawback that since the blowing of the clean air is local in one direction, a vortex is generated on the side of the filter and stagnates and cannot be circulated, so that the filter cannot be cleaned.
[0013]
In order to solve these problems, an air filter for a clean room having a substantially semicircular cross section described in Japanese Utility Model Publication No. 5-38821 or a substantially arc-shaped air filter described in Japanese Utility Model Publication No. 63-43620 is disclosed. 2. Description of the Related Art There has been proposed an air filter that radially blows air from a clean room air filter surface, such as an air filter for a clean room.
[0014]
Here, the airflow blown out from the clean room air filter having a substantially semicircular cross section or a substantially circular cross section is, as shown by arrows from the filter surface 15 as shown in FIGS.LawIt is blown out evenly in the line direction. When the velocity is represented by a vector, the absolute length of the vector immediately after exiting the filter surface 15 is the same at any position, and the vector density on the filter surface 15 is the same at all parts.
[0015]
20 shows an air filter for a clean room having a quarter-circle cross section, and FIG. 21 shows an air filter for a clean room having a substantially semi-circular cross section.
Here, as shown in FIG. 22, this filter system 16 is used in a clean room 17 and a floor 18 is provided with a punching panel or the like on the entire surface for the purpose of improving the airflow distribution, so that the entire surface is uniformly sucked.
[0016]
A filter system 16 is attached to the ceiling 19 of the clean room 17. In the clean room 17, an air conditioner 20 connects the supply chamber 21 of the filter system 17 and the under-floor space 22, and circulates clean air.
The distance W between the wall 23 and the center position of the filter unit 16 is set to be larger than the height H of the clean room 17.
[0017]
Further, in the clean room 17, the installation pitch of the filter rows of the filter unit 16 is set large so that air can be sent into a horizontally long room as shown in FIG.
[0018]
FIG. 23 is the same as FIG. 22 when the dot-dash line is regarded as the axis of symmetry and the mirror surface is developed without the condition of the wall.
Hereinafter, a description will be given based on FIG. 23 in which only the right side of the symmetry axis is displayed.
In FIG. 23, in the vertical direction (−Z direction) below the filter system 16, the wind speed is as shown in FIG.4As shown in (2), as the distance from the blowing point 24 increases, the fluid portion (fluid element) 25 expands with the expansion of the space, and the wind speed decreases due to the continuous expression.
[0019]
However, when the floor 18 moves downward to some extent, the elements adjacent to each other due to the suction of the floor 18 also become downward vectors, and the fluid element 25 does not expand and reaches the floor 18 at a constant speed.
On the other hand, the X-axis direction is as shown in FIG.
First, the fluid element 25 blown out first expands in the horizontal direction (+ X direction) with the expansion of the space apart from the boundary layer, and the wind speed decreases by the continuous equation. In addition, the influence of the viscosity from the boundary layer is not so small, and the wind speed is further reduced.
[0020]
Adjacent fluid elements 25 receive a force in the −Z direction depending on the suction condition, and when they move in the X-axis direction, they hit the wall 23 and flow in the suction direction and the −Z direction, changing the vector direction.
As a result, the fluid element 25 traveling in the horizontal direction is pulled downward at the wall 23, and the velocity is also greatly reduced.6As shown in FIG.
[0021]
This becomes a nucleus of the vortex 27 and is generated at the corner between the ceiling 19 and the wall 23. As a result, in the fluid element 25A at the edge of the horizontal wall 23, a vector is generated in the −X direction along the ceiling 19 as shown in FIG. Is urging.
Due to these factors, the vortex 27 grows greatly at the corners of the ceiling 19 and the wall 23, and is constantly present.
[0022]
Due to the vortex 27, the dust that has entered the vortex is not easily discharged, and it is difficult to clean the dust.
Further, along with the growth of the vortex 27, the X component of a considerable part of the blown wind velocity vector is used as the energy of the vortex motion, and the amount of the vector that changes to the X → −Z component hitting the wall 23 also decreases. I do.
[0023]
As a result, as shown in FIG. 28, the -Z direction vector amount in the area close to the wall 23 also decreases, the wind speed in this area decreases, and the -Z direction vector amount distribution up to 1500 mm above the floor required in the clean room 17 is reduced to the room. It gets worse as a whole.
That is, the wind speed in the region 28 in FIG. 28 decreases.
The present invention has been made to solve such a conventional problem, and an object of the present invention is to provide a tunnel type that can prevent dust from an operator located in a boundary region from being involved in a high-speed basin. To provide a clean room.
[0024]
[Means for Solving the Problems]
The invention of claim 1 isThe entire floor is uniformly suctioned, partitioned into a high-speed basin, a boundary region, and a low-speed basin that require high cleanliness by the hanging wall, a fan filter unit is provided in the high-speed basin, and a clean room filter unit is provided in the low-speed basin. A clean room filter unit, wherein the clean room filter unit has a uniform wind velocity downward vector distribution by increasing the number of air fluid elements blown out from each part of the filter surface from the vertical direction to the horizontal spatial expansion. Horizontal curvature such that the entire room up to 1500 mm above the required floor becomes a downwardly laminar flow over the entire surface, and a boundary region is formed near the high-speed basin where a high-speed flow and a substantially constant-speed to low-speed flow are formed as the distance from the high-speed basin increases. Equipped with a clean room air filter with a substantially semi-elliptical arc cross section with a fixed vertical curvature AreThings.
[0025]
The invention of claim 2 isThe entire floor is uniformly suctioned, partitioned into a high-speed basin, a boundary region, and a low-speed basin that require high cleanliness by the hanging wall, a fan filter unit is provided in the high-speed basin, and a clean room filter unit is provided in the low-speed basin. A clean room filter unit, wherein the clean room filter unit has a uniform wind velocity downward vector distribution by increasing the number of air fluid elements blown out from each part of the filter surface from the vertical direction to the horizontal spatial expansion. A horizontal filter is formed so that the entire room up to 1500 mm above the floor becomes a laminar flow downward in the entire surface, and a boundary region near the high-speed basin where a high-speed flow becomes almost constant speed to low-speed flow as the distance from the high-speed basin increases. Cleanle with approximately semi-elliptical arc cross-section that determines filter media density and filter media density in the vertical direction It is equipped with an air filter for the beamThings.
According to a third aspect of the present invention, in the tunnel type clean room according to the first or second aspect, the fan filter unit provided in the high-speed basin has a filter disposed at a lower end opening of a cylindrical unit main body, and An axial flow fan is disposed at an intake opening formed at the center of the upper surface of the unit main body, and a square sound insulating plate that is recessed downward from the fan is disposed below the fan; And a plurality of rectifying plates which protrude inward and suppress the swirling of the swirling flow generated by the rotation of the fan.
[0026]
(Action)
Claim 1To 3According to the invention, a high-speed laminar flow flowing toward the production machine is formed in the high-speed basin as in the related art.
[0027]
On the other hand, in the low-speed basin and the boundary region, the clean room filter unit having the clean room air filter having a substantially semi-elliptical cross-section cut in the minor diameter direction has a horizontal curvature smaller than the vertical curvature, so It is possible to increase the number of fluid elements responsible for the expansion of the space in the direction, thereby reducing the expansion of the fluid element in the space in the horizontal direction and generating a negative pressure with a wind speed close to the initial speed far from the blowout. Can be suppressed. Further, by further reducing the curvature of the filter unit in the horizontal direction, it is possible to form a boundary region near the high-speed flow formed by the fan filter unit, which becomes a low-speed flow as the distance from the high-speed flow region increases. This can be achieved by increasing the density of the filter medium instead of reducing the curvature of the filter unit.
[0028]
In the vertical direction, a clean room filter unit having a clean room air filter having a substantially semi-elliptical cross section draws in air from below, so that the space for the fluid element is small. This portion tends to maintain the wind speed, and tends to be faster than other portions of the space. Therefore, the curvature of the filter surface of the air filter for a clean room is increased in order to provide the same space expansion as the other parts.
[0029]
As described above, a uniform low-speed flow can be formed from the clean-room filter unit including the clean-room air filter having a substantially semi-elliptical cross section cut in the minor diameter direction in the low-speed flow region and the boundary region.
Also, since a large area of the filter medium is allocated to the short diameter portion of the filter unit, the boundary area can provide a larger air volume than other low speed areas. In addition, since the filter medium is gradually increased at the short diameter portion and radially blows out the air, the amount of air blown off in the area adjacent to the high-speed basin in the boundary region becomes lower as the distance from the high-speed basin naturally increases.
[0030]
Therefore, no upward airflow occurs in the boundary area, and a stable downward airflow in the room can be obtained.
[0031]
BEST MODE FOR CARRYING OUT THE INVENTION
Hereinafter, the present invention will be described based on embodiments shown in the drawings.
[0032]
FIG.To 31 shows an embodiment of a tunnel type clean room according to the present invention.
In the figure, reference numeral 31 denotes a tunnel-type clean room. In the tunnel-type clean room 31, a hanging area 32 separates a high-speed basin A, a boundary area C, and a low-speed basin B requiring high cleanliness.
[0033]
In the tunnel-type clean room 31, a clean room air filter unit 39 for blowing clean air into the tunnel-type clean room 31 is attached to the ceiling 33 side of the low-speed basin B, and a floor 34 is provided with punched metal perforated on the entire surface. ing. The ceiling space 36 and the underfloor space 35 communicate with each other via an air conditioner 37. The production machine 38 is arranged on the floor.
[0034]
As shown in FIG. 4, the clean room air filter unit 39 includes a clean room air filter 40 having a substantially semi-elliptical cross section cut in the minor diameter direction, and a supplier chamber 41. A motor fan 42 is provided in the supplier chamber 41.
The fan filter unit 43 is disposed in the high-speed basin A. In this fan filter unit 43, as shown in FIGS. 5 and 6, a high-performance filter 46 such as an ULPA filter or a HEPA filter is disposed in a lower end opening 45 of a cylindrical unit body 44 having a square cross section. ing.
[0035]
An intake opening 49 is formed in the center of the upper surface 47 of the unit main body 44, and an axial fan 50 is arranged in the intake opening 49.
The axial flow fan 50 has a bell mouth 51 that is inserted into the intake opening 49.
A boss 52 is disposed at the center of the bell mouth 51, and a blade 53 is fixed to the outer periphery of the boss 52.
[0036]
A motor 54 is connected to the boss 52, and the motor 54 is fixed to the bell mouth 51 via a bracket 55.
The boss portion 52 is provided with an airflow guide cover 56 having a tapered tip projecting in the suction direction.
A plurality of rectifying plates 57 projecting inward and suppressing the swirling of the swirling flow generated by the rotation of the axial fan 50 are fixed to the upper part of the inner periphery of the unit body 44.
[0037]
A sound absorbing member 58 made of glass wool is mounted on the current plate 57.
A sound insulating plate 59 is arranged below the axial flow fan 50 of the unit body 44.
The sound insulating plate 59 has a square shape, and its center is located below the axial flow fan 50.
[0038]
A sound absorbing member 60 made of glass wool is mounted on the sound insulating plate 59, and the sound insulating plate 59 is fixed to an inner surface of the unit main body 44 by a bracket 62.
At the center of the sound insulating plate 59, a square concave portion 63 that is depressed downward is formed.
The inner peripheral surface of the recess 63 is an inclined surface 64 inclined toward the bottom surface.
[0039]
Below the sound insulating plate 59 of the unit main body 44, a rectangular annular outer sound insulating plate 65 is arranged.
The outer sound insulating plate 65 is arranged so that the inner peripheral portion thereof overlaps the sound insulating plate 59.
A sound absorbing member 66 made of glass wool is mounted on the outer sound insulating plate 65.
[0040]
Next, the operation of the present embodiment will be described.
By driving the air conditioner 37 to supply the clean air to the fan filter duct 43 and the clean room air filter unit 39, the clean air is supplied to the tunnel type clean room 31.
[0041]
At this time, in the fan filter unit 43, after the air sucked from the intake opening 49 by the axial flow fan 50 is turned into a swirling flow, the swirling flow collides with the rectifying plate 57 at the outer peripheral portion. After being suppressed and having a downward flow, passing between the sound insulating plate 59 and the outer sound insulating plate 65, reaching the high-performance filter 46, and being purified by the high-performance filter 46, the flow rate of 0. It is blown at a high speed of 3 to 0.35 m / sec.
[0042]
On the other hand, clean air is blown out of the clean room air filter unit 39 at a low indoor average descending wind speed of about 0.05 to 0.2 m / sec.
Here, the operation of the clean room air filter unit 39 will be described in detail with reference to FIGS.
Paying attention to the change due to the distance of the fluid element in the X direction in the above-described conventional example shown in FIG. 25, as shown in FIG. 8, the area of the clean room air filter unit 39 which blows out in the short diameter direction of the clean room air filter 40. By making the curvature of the filter surface 70a of 70A smaller than the curvature of the conventional clean room air filter having a semicircular cross section, that is, the -Z component in the vector direction of the fluid elements arranged in the -Z direction is slightly smaller than the semicircular cross section. By increasing the number of fluid elements 71 each time, the number of fluid elements 71 responsible for expansion of the space in the X direction was increased.
[0043]
Thus, the expansion of the fluid element 71 in the space in the X direction is reduced, and the generation of the negative pressure is suppressed at a wind speed far from the blowout.
On the other hand, as shown in FIG. 9, a region 70 </ b> B that blows out in the long diameter direction immediately below the clean room air filter 40 of the clean room air filter unit 39 in the −Z direction has a suction from the floor 34, and thus has a space for the fluid element 72. Is small, and if it progresses to some extent in the −Z direction, it will not spread any more.
[0044]
Therefore, this portion tends to maintain the wind speed, and tends to be faster than other portions of the space. Therefore, in order to provide the same space expansion as the other parts, the curvature of the filter surface 70b in the region 70B of the clean room air filter unit 39 that blows out in the long diameter direction immediately below the clean room air filter 40 is increased.
As a shape for satisfying these curvatures, as shown in FIG. 10, a vertically long elliptical shape with a minor radius a <a major radius b applies.
[0045]
The relationship between the magnitudes of the curvatures 1 / ρ will be described with reference to FIGS.
FIG. 10 shows a basic configuration of a clean room air filter 40 of the clean room air filter unit 39 according to the present embodiment. FIG. 11 shows a conventional air filter unit for a clean room having a semicircular cross section.
In FIGS. 10 and 11, the radius of the minor axis is a, the radius of the major axis is b, the curvature is 1 / ρ, and the intersection of the minor axis and the elliptic curve, that is, in the minor axis direction of the clean room air filter 40. The area 70A is (1 / ρ) d, the intersection of the major axis and the elliptic curve, that is, the area 70B that blows out in the major axis direction immediately below the clean room air filter 40 is (1 / ρ) c, a semicircular clean room air filter. Assuming that the radius of 73 is r, the blowout just below the semicircular clean room air filter 73 is (1 / ρ) a, and the intersection of the ceiling 74 and the semicircular cleanroom air filter 73 is (1 / ρ) b, The vertically elliptical shape of the clean room air filter 40 of the clean room air filter unit 39 according to the fourth embodiment is (1 / ρ) c> (1 / ρ) a> (1 / ρ) d, and a <b. .
[0046]
If the cross section of the clean room air filter 40 of the clean room air filter unit 39 is formed in this shape, a good airflow distribution can be obtained under the conditions of uniform blowing and uniform suction.
The good airflow distribution here means a high-speed uniform flow in the high-speed basin A shown in FIG. 12, and a high-speed flow velocity (a part adjacent to the high-speed basin A) → a low-speed flow velocity (a part adjacent to the low-speed basin B) in the boundary area C. Means that the low-speed flow region B forms a low-speed uniform flow.
[0047]
Also, as shown in FIGS.4Area blowing out in the minor axis direction of 04By increasing the filter medium area of 0A, a large amount of air is given to the boundary area C. By blowing the air flow radially, the wind speed is gradually increased in the boundary area C from the low-speed area to the high-speed area.
That is, in FIG. 15, an air filter for a clean room is used.4Area blowing out in the minor axis direction of 040A is linear. FIG.6Now, clean room air filters4Area blowing out in the minor axis direction of 040A filter media density40A1 is the density of other filter media4It is denser than 0A2. FIG.7Now, clean room air filters4Area blowing out in the minor axis direction of 04Folding height of 0A filter media40A3 is the folding height of other filter media4It is higher than 0A4.
[0048]
As a result, the blowing speed at the boundary between the high-speed flow area and the low-speed flow area below the hanging wall becomes substantially constant, and turbulence due to turbulence in the boundary area C hardly occurs.
As described above, the clean air blown out from the clean room air filter 40 of the clean room air filter unit 39 is substantially equal to the speed of the high-speed basin A when the airflow represented by the fluid element 71 collides with the hanging wall 32. At a slightly slower speed, as shown in FIG. 8, it descends along the hanging wall 32 to the boundary area C, so that a stable downward airflow is formed between the high-speed basin a and the boundary area 4, No updraft occurs.
[0049]
That is, compared to the turbulent flow method in which the filter unit and the ceiling are arranged at a predetermined interval or the local method shown in FIGS. 18 and 19, no vortex is generated near the ceiling 33, and the cleaning function can be improved.
Therefore, dust generated by the worker in the boundary area C is not involved in the high-speed flow area A.
In addition, since the complicated operation of operating the damper is not required unlike the related art, the management of the tunnel type clean room is easy.
[0050]
Further, in the above-described fan filter unit 43, a swirl flow is generated toward the outside of the axial flow fan 50 by using the axial flow fan 50, and the swirl flow is generated by the unit body 44 at the outer peripheral portion. Since it collides with a plurality of rectifying plates 57 arranged at the upper part of the inner periphery and is suppressed, the flow becomes downward, and is blown into the room through the high-performance filter 46, the distribution of the discharge wind speed from the high-performance filter 46 is reduced. It can be uniform.
[0051]
Further, since there is no need to perform rectification by a rectifying perforated plate or the like, an increase in discharge resistance can be prevented.
Furthermore, the noise generated from the axial fan 50 can be reliably shielded by the sound insulating plate 59 disposed between the axial fan 50 and the high-performance filter 46.
In the fan filter unit 43 described above, the unit main body 44 has a square cross section and the center of the axial flow fan 50 and the square sound insulating plate 59 is disposed at the center thereof. The air is discharged under the conditions, and the distribution of the discharge air velocity from the high-performance filter 46 can be made more uniform.
[0052]
Further, a square-shaped concave portion 63 that is recessed downward is formed at the center of the sound insulating plate 59, and the inner peripheral surface of the concave portion 63 is inclined toward the bottom surface side, so that the air that collides with the bottom surface of the concave portion 63, The air flow is not disturbed smoothly outward by being guided by the inclined surface 64, and the distribution of the wind velocity discharged from the high-performance filter 46 can be made more uniform.
Further, in the above-described fan filter unit 43, since the inner periphery of the outer sound insulation plate 65 is arranged below the sound insulation plate 59 of the unit body 44 so as to overlap with each other, the noise generated from the axial flow fan 50 is directly transmitted to the high performance filter. 46 is prevented, and the silencing effect can be improved.
[0053]
Further, since the airflow guide cover 56 is arranged on the boss portion 52 of the axial fan 50, the air flow is smooth, the noise of the axial fan 50 is reduced, and the efficiency of the axial fan 50 is improved. Can be improved.
It should be noted that the fan filter unit is not limited to the illustrated one, but may be any unit as long as it is a combination of a fan and a high-performance filter.
[0054]
FIG. 12 shows a modification of the tunnel-type clean room shown in FIG.
In the above embodiment, the case where the supplier chamber is used has been described. However, the present invention is not limited to this, and the clean air supplied to the ceiling chamber may be pressure-fed by a fan.
Further, as shown in FIG. 13, for example, a clean room air filter connects a clean room air filter 40 having a predetermined length with a frame 81 via a packing 80 and closes an opening side with a support member 82. Duct 83 may be used.
[0055]
The basic configuration of the air filter duct for a clean room is the same as that disclosed in JP-A-63-294440 except for the structure of the air filter for a clean room.
Further, as shown in FIG. 14, the outside of the clean room air filter may be covered with a protective cover 84.
[0056]
Furthermore, the air filter for a clean room used in the present invention may be one in which a plurality of divided filters are connected or one as described in Japanese Utility Model Publication No. 5-38821.
[0057]
【The invention's effect】
As described above, claim 1To 3In the tunnel-type clean room, the complicated operation of providing a damper in the boundary region and adjusting the flow velocity with the low-speed flow region as in the conventional tunnel-type clean room is unnecessary.
[0058]
Further, since a switching device using a damper is not required, the device is simplified.
Further, unlike the conventional tunnel type clean room, there is no need to provide an air outlet adjacent to the high-speed basin, so that complicated operation is not required and the apparatus is simplified.
Furthermore, since the fan filter unit is provided at a position close to the production device, the dust decay time is short, that is, the region of high dust concentration in the vortex region generated in the production device is small, and the purification ability is large. Become.
[0059]
In addition, since the clean room air filter has a substantially elliptical cross-section cut in the minor diameter direction, a good airflow distribution can be given to an ordinary horizontally long clean room.
Further, the airflow distribution in the clean room can be made uniform. The vortex area at the corner of the clean room can be reduced, and the air volume can be further improved with the same air volume.
[Brief description of the drawings]
FIG. 1To 3It is an explanatory view showing one embodiment of a tunnel-type clean room concerning.
FIG. 2 is an explanatory view showing a flow of clean air in a tunnel-type clean room of FIG.
FIG. 3 is a perspective view of the tunnel-type clean room of FIG. 1;
FIG. 4 is a perspective view showing a clean room air filter duct of the tunnel type clean room of FIG. 1;
FIG. 5 is a sectional view showing a fan filter unit used in the tunnel type clean room of FIG. 1;
FIG. 6 is a sectional view of FIG. 5;
FIG. 7 is an explanatory diagram relating to blowing of a clean room air filter unit in the tunnel type clean room of FIG. 1;
FIG. 8 is an explanatory diagram relating to blowing in a short diameter direction of the air filter unit for a clean room in FIG. 1;
FIG. 9 is an explanatory diagram relating to blow-out in the major diameter direction of the air filter unit for a clean room in FIG. 1;
FIG. 10 is an explanatory diagram showing a basic configuration of an air filter unit for a clean room in FIG. 1;
FIG. 11 is an explanatory diagram showing a basic configuration of a conventional air filter unit for a clean room having a semicircular cross section.
FIG. 12To 3It is an explanatory view showing another embodiment of the tunnel type clean room.
FIG. 13 is an explanatory view showing another embodiment of the air filter unit for a clean room in FIG. 1;
FIG. 14 is an explanatory diagram showing another embodiment of the air filter unit for a clean room in FIG. 1;
FIG. 15 is an explanatory view of an air filter for a clean room having a quarter-circle cross section in the air conditioning system of FIG. 1;
16 is an explanatory view of a clean room air filter having a quarter-circle cross section in the air conditioning system of FIG. 1;
FIG. 17 is an explanatory view of a clean room air filter having a quarter-circle cross section in the air conditioning system of FIG. 1;
FIG. 18 is an explanatory view showing a conventional tunnel-type clean room.
FIG. 19 is an explanatory view showing a conventional tunnel-type clean room.
FIG. 20 is an explanatory view of a conventional air filter for a clean room having a quarter-circle cross section.
FIG. 21 is an explanatory view of a conventional clean room air filter having a semicircular cross section.
22 is an explanatory diagram of a clean room using the air filter for a clean room having a semicircular cross section in FIG. 21;
FIG. 23 is an explanatory diagram of a clean room using the air filter for a clean room having a semicircular cross section in FIG. 21;
FIG. 24 is an explanatory view showing a state in which a clean room air filter shown in FIG. 22 or 23 is blown out in a vertical direction.
FIG. 25 is an explanatory view showing a state in which the clean room air filter of FIG. 22 or 23 is blown out in the horizontal direction.
FIG. 26 is an explanatory view showing a state in which a clean room air filter of FIG. 22 or 23 is blown out in a horizontal direction.
FIG. 27 is an explanatory view showing a state in which the clean room air filter shown in FIG. 22 or 23 is blown out in the horizontal direction.
FIG. 28 is an explanatory diagram showing the flow of air in the clean room in FIG. 22.
[Explanation of symbols]
31 Tunnel type clean room
32 Hanging wall
33 ceiling
34 floors
35 Underfloor space
36 Ceiling space
37 air conditioner
38 Production Machine
39 Clean room air filter unit
40 Clean room air filter
43 Fan filter unit
46 High Performance Filter
50 axial flow fan
A high-speed basin
B Low-speed basin
C boundary area

Claims (3)

The entire floor is uniformly suctioned, partitioned into a high-speed basin, a boundary region, and a low-speed basin that require high cleanliness by the hanging wall, a fan filter unit is provided in the high-speed basin, and a clean room filter unit is provided in the low-speed basin. A tunnel-type clean room
The filter unit for the clean room is configured such that the entire room up to 1500 mm above the floor, which requires a uniform wind velocity downward vector distribution, faces downward by increasing the amount of air fluid elements blown out from each part of the filter surface from the vertical direction to the horizontal spatial expansion. A cross-section having a horizontal curvature and a vertical curvature determined in the vicinity of the high-speed basin so as to form a boundary region near the high-speed basin where the high-speed flow becomes substantially constant-speed to low-speed flow as the distance from the high-speed basin increases. A tunnel-type clean room comprising an elliptic arc-shaped clean room air filter . The entire floor is uniformly suctioned, partitioned into a high-speed basin, a boundary region, and a low-speed basin that require high cleanliness by the hanging wall, a fan filter unit is provided in the high-speed basin, and a clean room filter unit is provided in the low-speed basin. A tunnel-type clean room
The clean room filter unit is configured such that the entire room up to 1500 mm above the floor, which requires a uniform wind velocity downward vector distribution, faces down entirely by increasing the amount of air fluid elements blown out from each part of the filter surface from the vertical direction to the horizontal spatial expansion. The filter medium density in the horizontal direction and the filter medium density in the vertical direction are determined so that a laminar flow of the high-speed flow area and a boundary area where the high-speed flow becomes almost constant-speed to the low-speed flow as the distance from the high-speed flow area increases are increased. A clean room of a tunnel type, comprising a clean room air filter having a substantially semi-elliptical arc cross section . In the fan filter unit provided in the high-speed flow area, a filter is disposed at a lower end opening of a cylindrical unit main body, and an axial flow fan is disposed at an intake opening formed at the center of the upper surface of the unit main body. A square-shaped sound insulating plate that is depressed downward from the fan is disposed below the fan, and a swirling flow generated by the rotation of the fan protrudes inward at an upper portion of an inner periphery of the unit body. The tunnel-type clean room according to claim 1 or 2, wherein a plurality of straightening plates for suppressing turning are arranged.

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