JPH09119689A - Clean room - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enable a supplying amount of clean air to be substantially reduced as compared with that of the prior art and further to enable a transporting fee for the clean air to be reduced. SOLUTION: A clean room 1 is partitioned into some small rooms in response to a degree of cleanliness and either an operating state of a device or the number of occupant persons in a room is detected for every room. As the device in each of the partitioned small rooms is operated or the number of occupant persons in a room is increased, a controller 12 increases the number of rotation of a fan 10 of each of the fan filter devices 3, 4 and 5 and in turn when the device in each of the partitioned small rooms is turned off or when the number of occupant persons is decreased, the controller 12 decreases the number of rotation of the fan 10 of each of the fan filter devices 3, 4 and 5 and keeps a desired degree of cleanliness.

Description

Detailed Description of the Invention

[0001]

[0001] The present invention relates to a clean room.

[0002]

2. Description of the Related Art Conventionally, in this type of clean room, clean air supplied from an air conditioner to a ceiling room of the clean room is pressurized by fans of a plurality of fan filter units arranged all over the ceiling surface, and a semiconductor is used. It is blown out vertically toward a clean room in which manufacturing equipment and the like are installed. The clean air blown into the clean room is sucked into the underfloor chamber from the floor grating. Part of the sucked clean air is returned to the ceiling room through the circulation area. The remaining clean air is discharged to the atmosphere by a suction fan or circulated and supplied to the air conditioner.

[0003]

However, in the conventional clean room, not only is the entire clean room made to have a high cleanliness of, for example, class 1, but the fan of the fan filter unit is operated by the manufacturing device and the predetermined number of times. The number of rotations is set to a certain number of revolutions so that the degree of cleanliness is maintained in a state where there are people. For this reason, the cleanliness of the clean room is
The fan of the fan filter unit was operated continuously throughout the day (24 hours) to blow clean air. Therefore, useless clean air is supplied to the clean room,
There was a drawback that the cost of transporting clean air would be enormous.

An object of the present invention is to provide a clean room capable of efficiently blowing the clean air into the clean room and reducing the transportation cost of the clean air.

[0005]

In order to achieve the above object, the present invention applies clean air supplied from an air conditioner to a ceiling room of a clean room by a plurality of fan filter units arranged on the ceiling surface. In a clean room where pressure is blown into the clean room and exhausted from the floor of the clean room, the clean room is divided into rooms according to the cleanliness and the rotation speed of the fan filter unit fan installed on the ceiling surface of each room Is automatically controlled according to the operating state of the apparatus or the number of persons entering the room.

According to the present invention, since the clean room is divided into rooms according to the cleanliness level, the supply amount of clean air can be greatly reduced as compared with the case where the clean room as a whole is made highly clean. Further, the number of rotations of the fan of the fan filter unit is automatically controlled according to the operating state of the apparatus or the number of personnel entering the clean room. For this reason, when the manufacturing equipment is stopped or the number of people entering the room decreases, the rotation speed of the fan of the fan filter unit is automatically lowered, which allows the clean air to be efficiently blown into the clean room. it can.

[0007]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the clean room of the present invention will be described below with reference to the drawings.

FIG. 1 shows an embodiment of a clean room 1 of the present invention. This clean room 1 is composed of a room of a device area 1a partitioned by a wall or an air shower and a work area 1b including a transfer area. The cleanliness of the device area 1a is class 1,
The cleanliness of the working area 1b is set to class 1 in 000. In the ceiling room 2 of this clean room 1, fan filter units 3 and 5 are installed on the floor grating 7 of the device area 1a.
The fan filter unit 4 is installed above the floor grating 7 of the work area 1b so that its clean air blowing surface is flush with the ceiling surface 6. Each of the fan filter units 3, 4, and 5 has a fan 10 provided inside a fan casing 9 and a dust removal filter.
11 is connected to the fan 10 on the downstream side of the fan 10. A controller 12 for adjusting the rotation speed of the fan 10 is connected to the fans 10 of the fan filter units 3, 4, and 5.
This controller 12 is connected via a cable 13 to a sensor 20 indicating the operating state of the device or an ID card gate 21 using a magnet or an IC installed at a clean room entrance / exit opening (not shown) for counting the number of people entering and leaving the room. It The sensor 20 is built in the semiconductor manufacturing apparatus 8 and detects the ON or OFF state of the semiconductor manufacturing apparatus 8 and outputs the detection signal to the controller 12 via the cable 13. Further, the ID card gate 21 counts the number of persons entering and leaving the room and outputs a detection signal to the controller 12 via the cable 13. An air conditioner 15 is connected to the ceiling room 2 via a duct 14. This air conditioner 15
A suction fan (not shown) for sucking outside air into the air conditioner 15 is connected to this. Further, an underfloor chamber 16 is formed below the floor grating 7. This underfloor chamber 16
The exhaust fan 18 is connected to the left side of the figure via a duct 17, and the right side of the underfloor chamber is connected to the air conditioner 15 via a duct 19. A circulation area 22 is formed on both side surfaces of the clean room 1, and the circulation area 22 connects the ceiling chamber 2 and the underfloor chamber 16 to each other. Next, the operation of the embodiment of the clean room 1 configured as described above will be described. First, the outside air sucked by the suction fan is supplied to the air conditioner 15
After being air-conditioned at, the air is supplied to the ceiling room 2 through the duct 14.
The conditioned air supplied to the ceiling chamber 2 is pressurized by the fan filter units 3, 4, and 5 and is cleaned by passing through the dust removal filters 11 of the fan filter units 3, 4, and 5, It is blown out to each device area 1a and work area 1b of the clean room 1. The clean air blown into each room is introduced into the underfloor chamber 16 through the floor grating 7, a part of this is returned to the ceiling room 2 through the circulation area 22, and the rest is passed through the duct 17. Exhaust fan 1
It is exhausted to the outside at 8, or introduced into the air conditioner 15 through the duct 19 and circulated and supplied to the ceiling room 2.

Next, the fan filter units 3, 4, 5
A control method of each controller 12 attached to the will be described. For example, when the operating state of the semiconductor manufacturing apparatus in the apparatus area 1a is ON, the fan filter units 3 and 5
When the number of persons entering the work area 1b increases, the rotation speed of the fan 10 of the fan filter unit 4 is increased to a predetermined cleanliness of each room (the rotation speed of the fan 10 that achieves a predetermined cleanliness). Will be confirmed by experiments in advance).
As a result, clean air with a high airflow velocity is blown into each room. Similarly, when the operating condition of the semiconductor manufacturing equipment in the equipment area 1a is off, the rotation speed of the fan filter units 3 and 5 is changed, and when the number of persons entering the work area 1b is decreased, the rotation speed of the fan 10 of the fan filter unit 4 is changed. Decrease until the minimum acceptable level of cleanliness is maintained (the number of rotations of fan 10 that can maintain the minimum acceptable level of cleanliness should also be confirmed in advance by experiments). As a result, clean air having a low airflow velocity is blown into each room.

As described above, in the embodiment, since the cleanliness is different for each room, not only can the clean room as a whole be made highly clean, but the amount of clean air supplied can be reduced, and the operating state of the apparatus can be reduced. Alternatively, since the air velocity of the clean air blown from the fan filter units 3, 4, 5 is automatically changed according to the number of persons entering the room, the clean air can be blown efficiently. Therefore, the transportation cost of clean air can be significantly reduced as compared with the conventional clean room.

[0011]

According to the clean room of the present invention, the amount of clean air supplied can be reduced as compared with the case where the entire clean room is made highly clean, and the operating state of the device or the number of people entering the room can be improved. Accordingly, the rotational speed of the fan filter unit is controlled and the required amount of clean air is efficiently blown into the clean room, so that the cost of transporting the clean air can be reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory view showing an embodiment of a clean room of the present invention.

[Explanation of symbols]

 1 ... Clean room, 3, 4, 5 ... Fan filter unit, 10 ... Fan, 12 ... Controller.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Akira Okamoto 292 Yoshida-cho, Totsuka-ku, Yokohama-shi, Kanagawa Stock Engineering, Hitachi, Ltd.

Claims (1)

[Claims] 1. A clean room in which clean air supplied from an air conditioner to a ceiling room of the clean room is pressurized by a plurality of fan filter units arranged on the ceiling surface, blown out into the clean room, and exhausted from the floor surface of the clean room. In the above, the clean room is divided into rooms according to the cleanliness, and the number of rotations of the fan of the fan filter unit installed on the ceiling surface of each room depends on the operating state of the device or the number of persons entering the room. A clean room characterized by automatic control according to the requirements.