JPH06101099B2 - Thin film heads - Google Patents
Thin film headsInfo
- Publication number
- JPH06101099B2 JPH06101099B2 JP59268561A JP26856184A JPH06101099B2 JP H06101099 B2 JPH06101099 B2 JP H06101099B2 JP 59268561 A JP59268561 A JP 59268561A JP 26856184 A JP26856184 A JP 26856184A JP H06101099 B2 JPH06101099 B2 JP H06101099B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- substrate
- head
- slider
- electrode portion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/3116—Shaping of layers, poles or gaps for improving the form of the electrical signal transduced, e.g. for shielding, contour effect, equalizing, side flux fringing, cross talk reduction between heads or between heads and information tracks
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 ［発明の技術分野］ この発明は、例えば磁気ディスク装置等で使用される薄
膜ヘッドに関する。Description: TECHNICAL FIELD OF THE INVENTION The present invention relates to a thin film head used in, for example, a magnetic disk device or the like.
［従来技術］ 第３図は従来の薄膜ヘッドの斜視図で、この薄膜ヘッド
は、図外の記憶媒体例えば磁気ディスクに対し微小隙間
を形成して浮上した状態で走行することで記憶媒体に対
し記憶あるいは再生を行う。[Prior Art] FIG. 3 is a perspective view of a conventional thin-film head. The thin-film head forms a minute gap with respect to a storage medium (not shown) such as a magnetic disk, and runs in a floating state with respect to the storage medium. Store or play.
このような薄膜ヘッドにおいて、スライダを構成する基
板101の図中で下面には、図外の記憶媒体に対し浮上す
るスライダ面101aを有し、基板101の側面には電極部103
と、この電極部103に電気的に接続された導電部105と、
第３図のIV−IV断面図である、第４図に示すように導電
部105の一部を両面から挾むようにして設けられた磁極
部107とがそれぞれ形成されている。そして、磁極部107
のギャップ部109はスライダ面101a側すなわち図外の記
憶媒体の記憶媒体面側に対向して形成されている。In such a thin film head, a slider surface 101a that floats with respect to a storage medium (not shown) is provided on the lower surface of the substrate 101 constituting the slider in the figure, and an electrode portion 103 is provided on the side surface of the substrate 101.
And a conductive portion 105 electrically connected to the electrode portion 103,
As shown in FIG. 4, which is a cross-sectional view taken along the line IV-IV in FIG. 3, a magnetic pole portion 107 is provided so as to sandwich a part of the conductive portion 105 from both sides. Then, the magnetic pole portion 107
The gap portion 109 is formed so as to face the slider surface 101a side, that is, the storage medium surface side of the storage medium (not shown).
このような薄膜ヘッドは、電極部103が基板101の極めて
面積の狭い側面すなわち導体部105が形成された面に形
成されているため、導体部105の電極部103との接続等の
処理が難しく、このため基板101の高さｈは高くなりが
ちで、このヘッドを支持するジンバルをも含めて装置の
小型軽量化を図る上で障害となっていた。In such a thin film head, since the electrode portion 103 is formed on the side surface of the substrate 101 having an extremely small area, that is, the surface on which the conductor portion 105 is formed, it is difficult to perform processing such as connecting the conductor portion 105 to the electrode portion 103. For this reason, the height h of the substrate 101 tends to be high, which is an obstacle in reducing the size and weight of the apparatus including the gimbal that supports the head.
また、前記基板101の高さｈは、高くなりがちと言って
も、薄膜ヘッドと記憶媒体との間の浮上隙間およびこの
ヘッドが浮上する際の安定性等から制限されているた
め、導体部105の巻数を少なくせざるを得ず、このため
高い再生出力を得ることは難しい状況となっている。Although the height h of the substrate 101 tends to be high, the height h of the substrate 101 is limited by the floating gap between the thin film head and the storage medium and the stability when the head floats. There is no choice but to reduce the number of turns of 105, which makes it difficult to obtain high playback output.
また、第５図のように電極部103を基板101の上面に形成
させることで、薄膜ヘッドの高さｈを低くして小型軽量
化を図り、かつ導体部105の処理を容易にすることが考
えられる。Further, by forming the electrode portion 103 on the upper surface of the substrate 101 as shown in FIG. 5, it is possible to reduce the height h of the thin film head to reduce the size and weight, and to easily process the conductor portion 105. Conceivable.
しかし、これとて前述の例と同様に基板101の側面の面
積を広くとれないので、高い再生出力を得ることができ
ないばかりか、上面の電極部103と側面の電極部103aお
よび導体部105とを形成する工程が別となるため、工程
数が増加することとなり、また、両電極部103と103aと
が互いに接する基板101の角部101bにおける電気的接触
の信頼性が低下してしまうという問題が発生することと
なる。However, since the area of the side surface of the substrate 101 cannot be widened like this in the above example, not only a high reproduction output cannot be obtained, but also the electrode portion 103 on the upper surface and the electrode portion 103a and the conductor portion 105 on the side surface. Therefore, the number of steps is increased, and the reliability of electrical contact at the corner portion 101b of the substrate 101 where the two electrode portions 103 and 103a are in contact with each other is reduced. Will occur.
［発明の目的］ この発明は、このような従来の問題点に鑑み創案された
もので、小型軽量化を図ると同時に、高い再生出力を得
ることが可能な薄膜ヘッドの提供を目的とする。[Object of the Invention] The present invention has been conceived in view of such problems of the related art, and an object thereof is to provide a thin film head capable of attaining high reproduction output while achieving reduction in size and weight.
［発明の構成］ この目的を達成させるためにこの発明の薄膜ヘッドは、
記憶媒体面に対向して浮上するスライダ面を下面に有す
る基板と、この基板の上面に形成された電極部と、前記
基板のヘッド形成面に形成され、前記電極部と電気的に
接続された導体部と、同じく前記導体部が巻き回された
薄膜磁性材料からなる磁極部とからなる薄膜ヘッドにお
いて、前記基板のスライダ面と、前記ヘッド形成面との
なす角度を鋭角とし、前記ヘッド形成面を傾斜させたこ
とを特徴とする。[Structure of the Invention] In order to achieve this object, the thin film head of the present invention is
A substrate having a slider surface on the lower surface, which faces the storage medium surface and floats, an electrode portion formed on the upper surface of the substrate, and a head forming surface of the substrate, and electrically connected to the electrode portion. In a thin film head comprising a conductor part and a magnetic pole part made of a thin film magnetic material around which the conductor part is wound, an angle formed by the slider surface of the substrate and the head forming surface is an acute angle, and the head forming surface is formed. It is characterized by tilting.
［実施例］ 以下、図面に基づきこの発明の一実施例を詳細に説明す
る。Embodiment An embodiment of the present invention will be described in detail below with reference to the drawings.
第１図は薄膜ヘッドの斜視図で、この薄膜ヘッドは、従
来例で説明したものと同様に、図外の記憶媒体に対し微
小隙間をもって浮上し、記憶媒体に対し記録あるいは再
生を行なう。このような薄膜ヘッドにおいて、スライダ
を構成する基板１の図中で下面は、記憶媒体に対向する
スライダ面1aとなっており、このスライダ面1aと反対側
の基板１の上面1bには電極部３が形成されている。FIG. 1 is a perspective view of a thin film head. This thin film head floats above a storage medium (not shown) with a minute gap and performs recording or reproduction on the storage medium, as in the conventional example. In such a thin film head, the lower surface of the substrate 1 constituting the slider in the drawing is a slider surface 1a facing the storage medium, and the upper surface 1b of the substrate 1 opposite to the slider surface 1a has an electrode portion. 3 is formed.
電極部３に電気的に接続される導体部５およびこの導体
部５が巻き回された磁極部７が形成されるヘッド形成面
1cと、スライダ面1aとのなす角度を鋭角とすることによ
り、ヘッド形成面1cを傾斜させている。このようにヘッ
ド形成面1cを傾斜させることで導体部５を形成させる面
すなわちヘッド形成面1cの面積を大きくしている。これ
により、導体部５を構成するリード線5aの巻数を多くす
ることができ、高い再生出力が得られる。また、電極部
３が基板１の上面1bに形成されていることから、リード
線5aとヘッド形成面1c側の電極部3aとの電気的および機
械的接続をするための十分な電極面積を得ることがで
き、リード線5aと電極部３との接続に通常用いられるハ
ンダ付が容易にできる。更に、電極部３は、薄膜ヘッド
を支持するジンバル材に燐青銅やステンレス鋼等の電気
伝導度の高い金属を使うことにより、ジンバルとスライ
ダとの電気的、機械的接続点ともなり得る。A head forming surface on which a conductor portion 5 electrically connected to the electrode portion 3 and a magnetic pole portion 7 around which the conductor portion 5 is wound are formed.
The head forming surface 1c is inclined by making an acute angle between the slider 1a and the slider surface 1a. By thus inclining the head forming surface 1c, the area of the surface on which the conductor portion 5 is formed, that is, the head forming surface 1c is increased. As a result, the number of turns of the lead wire 5a forming the conductor portion 5 can be increased, and a high reproduction output can be obtained. Further, since the electrode portion 3 is formed on the upper surface 1b of the substrate 1, a sufficient electrode area for electrically and mechanically connecting the lead wire 5a and the electrode portion 3a on the head forming surface 1c side is obtained. Therefore, soldering which is usually used for connecting the lead wire 5a and the electrode portion 3 can be easily performed. Further, the electrode part 3 can also serve as an electrical or mechanical connection point between the gimbal and the slider by using a metal having high electric conductivity such as phosphor bronze or stainless steel for the gimbal material supporting the thin film head.
第１図のII−II断面図である第２図に示すように、ヘッ
ド形成面1cの下部側には膜９に保護された薄膜磁性材料
からなる透磁性コアとしての磁極部７が設けられてい
る。この磁極部７は、第１図中の下部側のリード線5aを
第２図に示すように両面から挾むように形成された上面
部7aと基板１側に接する下面部7bとからなり、上面部7a
と下面部7bとは上部側の接続部7cにて接続されている。
更に、上面部7aの下部側先端は、基板１のスライダ面1a
に対し略直角をなすように湾曲しており、この湾曲した
下端と下面部7bの下端とでギャップ部11を形成してい
る。このギャップ部11での漏洩磁場が図外の記憶媒体に
記録される。As shown in FIG. 2 which is a II-II sectional view of FIG. 1, a magnetic pole portion 7 as a magnetically permeable core made of a thin film magnetic material protected by the film 9 is provided on the lower side of the head forming surface 1c. ing. The magnetic pole portion 7 is composed of an upper surface portion 7a formed so as to sandwich the lower side lead wire 5a in FIG. 1 from both sides as shown in FIG. 2 and a lower surface portion 7b in contact with the substrate 1 side. 7a
The lower surface portion 7b and the lower surface portion 7b are connected to each other by a connection portion 7c on the upper side.
Further, the lower end of the upper surface portion 7a is attached to the slider surface 1a of the substrate 1.
The curved lower end and the lower end of the lower surface portion 7b form a gap portion 11. The leakage magnetic field at the gap 11 is recorded in a storage medium (not shown).
また、薄膜ヘッドの記録効率は、従来例で示した第４図
におけるギャップ部109の深さｉに大きく影響されるこ
とが知られている。（G.Vinson Kelley,Erich P.Valsty
n,“Numerical Analysis of Writing and Reading with
Multiturn Film Heads",IEEE Trans.MAG−16,P.788（1
980）参照）この実施例では、第４図に示した２点鎖線
ａに沿ってギャップ部109近傍を除去したような形状と
した結果、記録効率の向上となって表われている。更
に、第２図のギャップ部11において、磁極部７の下面部
7bの膜厚を厚く、上面部7aの膜厚を薄くして、これら両
膜を十分（数ミクロン）離すことによって、片側アクセ
スの単磁極形垂直記録薄膜ヘッドとして使用できる。Further, it is known that the recording efficiency of the thin film head is greatly affected by the depth i of the gap portion 109 shown in FIG. (G.Vinson Kelley, Erich P. Valsty
n, “Numerical Analysis of Writing and Reading with
Multiturn Film Heads ", IEEE Trans.MAG-16, P.788 (1
980)) In this embodiment, the recording efficiency is improved as a result of removing the vicinity of the gap 109 along the two-dot chain line a shown in FIG. Further, in the gap portion 11 of FIG.
By making the film thickness of 7b thick and the film thickness of the upper surface 7a thin and separating these films sufficiently (several microns), it is possible to use as a single-sided single pole type perpendicular recording thin film head.
上記したような薄膜ヘッドを形成させるに際し、ギャッ
プ部11先端の平坦化については、膜９の部分を研削等に
より除去することで容易に実現できる。また、基板１の
上面1b側の電極部３と、ヘッド形成面1c側の導体部５お
よび電極部3aとは、上面1bに対し垂直となる方向から蒸
着等を行うことにより同時に形成できる。このとき、ヘ
ッド形成面1cに対しては斜め蒸着となるが、このヘッド
形成面1cの面積は広くなっているため、斜め蒸着による
導体部５等の加工精度の低下を招くことはない。また、
基板１の上面1bとヘッド形成面1cとのなす角度は鈍角と
なっているため、上記蒸着により角部1dにおける上面1b
側の電極部３と、ヘッド形成面1c側の電極部3aとの接合
面積が従来例に比べ大きくなって、電気的接触が良好と
なる。In forming the thin film head as described above, flattening of the tip of the gap portion 11 can be easily realized by removing the portion of the film 9 by grinding or the like. Further, the electrode portion 3 on the upper surface 1b side of the substrate 1 and the conductor portion 5 and the electrode portion 3a on the head forming surface 1c side can be simultaneously formed by performing vapor deposition or the like from a direction perpendicular to the upper surface 1b. At this time, the head formation surface 1c is obliquely vapor-deposited, but since the area of the head formation surface 1c is large, the processing accuracy of the conductor portion 5 and the like due to the oblique vapor deposition is not deteriorated. Also,
Since the angle formed by the upper surface 1b of the substrate 1 and the head forming surface 1c is an obtuse angle, the upper surface 1b at the corner 1d is formed by the above vapor deposition.
The contact area between the electrode portion 3 on the side of the head and the electrode portion 3a on the side of the head forming surface 1c is larger than in the conventional example, and good electrical contact is achieved.
［発明の効果］ 以上のようにこの発明によれば、記憶媒体に対向して浮
上するスライダ面と、磁極部が形成された面とのなす角
度を鋭角として、磁極部および導体部が形成されるヘッ
ド形成面の面積を大きくしたため、導体部の専有面積が
大きくなり高い再生出力が得られと共に、基板の高さを
低くできるので、小型軽量化をも同時に図ることができ
る。[Effects of the Invention] As described above, according to the present invention, the magnetic pole portion and the conductor portion are formed with an acute angle formed by the slider surface that faces the storage medium and the surface on which the magnetic pole portion is formed. Since the area of the head forming surface is increased, the occupied area of the conductor portion is increased and a high reproduction output can be obtained, and the height of the substrate can be reduced, so that the size and weight can be reduced at the same time.
第１図はこの発明の一実施例の薄膜ヘッドの斜視図、第
２図は第１図の一部を省略したII−II断面図、第３図は
従来の薄膜ヘッドの斜視図、第４図は第３図の一部を省
略したIV−IV断面図、第５図は他の従来例を示す薄膜ヘ
ッドの斜視図である。 （図面の主要部を表わす符号の説明） １…基板、1a…スライダ面 1c…ヘッド形成面、３…電極部 ５…導体部、７…磁極部（透磁性コア）FIG. 1 is a perspective view of a thin film head according to an embodiment of the present invention, FIG. 2 is a sectional view taken along line II-II in which a part of FIG. 1 is omitted, and FIG. 3 is a perspective view of a conventional thin film head. FIG. 5 is a sectional view taken along line IV-IV in which a part of FIG. 3 is omitted, and FIG. 5 is a perspective view of a thin film head showing another conventional example. (Explanation of Reference Signs Representing Main Part of Drawing) 1 ... Substrate, 1a ... Slider surface 1c ... Head forming surface, 3 ... Electrode part 5 ... Conductor part, 7 ...
Claims (1)
1aを下面に有する基板１と、この基板１の上面1bに形成
された電極部３と、前記基板１のヘツド形成面1cに形成
され、前記電極部３と電気的に接続された導体部５と、
同じく前記導体部５が巻き回された薄膜磁性材料からな
る磁極部７とからなる薄膜ヘッドにおいて、前記基板１
のスライダ面1aと、前記ヘッド形成面1cとのなす角度を
鋭角とし、前記ヘッド形成面1cを傾斜させたことを特徴
とする薄膜ヘッド。1. A slider surface which faces a recording medium surface and floats.
A substrate 1 having a lower surface 1a, an electrode portion 3 formed on an upper surface 1b of the substrate 1, and a conductor portion 5 formed on a head forming surface 1c of the substrate 1 and electrically connected to the electrode portion 3 When,
Similarly, in the thin film head including the magnetic pole portion 7 made of a thin film magnetic material around which the conductor portion 5 is wound, the substrate 1
2. The thin film head, wherein the angle formed between the slider surface 1a and the head forming surface 1c is an acute angle, and the head forming surface 1c is inclined.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59268561A JPH06101099B2 (en) | 1984-12-21 | 1984-12-21 | Thin film heads |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59268561A JPH06101099B2 (en) | 1984-12-21 | 1984-12-21 | Thin film heads |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61148622A JPS61148622A (en) | 1986-07-07 |
| JPH06101099B2 true JPH06101099B2 (en) | 1994-12-12 |
Family
ID=17460235
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59268561A Expired - Lifetime JPH06101099B2 (en) | 1984-12-21 | 1984-12-21 | Thin film heads |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH06101099B2 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63131316A (en) * | 1986-11-21 | 1988-06-03 | Hitachi Ltd | Thin film magnetic head |
| DE69011755T2 (en) * | 1989-06-16 | 1995-05-24 | Matsushita Electric Ind Co Ltd | Manufacturing process of a thin film coil with multi-part winding. |
| US5293288A (en) * | 1990-05-17 | 1994-03-08 | Sony Corporation | Dual thin-film magnetic head with side surface terminals |
| MY121535A (en) * | 1993-01-08 | 2006-02-28 | Hitachi Global Storage Tech Nl | Integral transducer-suspension assemblies for longitudinal recording |
| US5796549A (en) * | 1996-07-03 | 1998-08-18 | Seagate Technology, Inc. | Universal bond pad configuration |
| JPH1064014A (en) * | 1996-08-26 | 1998-03-06 | Nec Corp | Thin film magnetic head device |
| JP5516552B2 (en) | 2011-11-25 | 2014-06-11 | 株式会社村田製作所 | Electronic component and manufacturing method thereof |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5570934A (en) * | 1978-11-21 | 1980-05-28 | Fujitsu Ltd | Manufacture for thin film magnetic head |
| JPS5634121A (en) * | 1979-08-27 | 1981-04-06 | Nec Corp | Thin film magnetic head |
-
1984
- 1984-12-21 JP JP59268561A patent/JPH06101099B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61148622A (en) | 1986-07-07 |
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