JPH04119509A - Horizontal type perpendicular magnetic head - Google Patents

Abstract

PURPOSE:To improve the sensitivity of the head by arranging it so that a film surface can be parallel to the recording face of a magnetic recording medium in the film thickness direction of a return path code and a main magnetic pole can be almost vertical to the recording face. CONSTITUTION:A back return path core 4 and front return path cores 2 and 3, which are connected to the both end parts of the back return path core 4 and reveal one part on a sliding surface 6 of the magnetic recording medium at least, are successively laminated and formed. The central part of this back return path core 4 is protruded to the side of the sliding face 6 of the magnetic recording medium, a conductor coil 7 is spirally embedded so as to wind a protruded back return path core 4a and on the protruded back return path core 4a, a main magnetic pole 1 is provided so that it can be almost vertical to the film surface of this back return path core 4 and the top can be exposed on the sliding face 6 of the magnetic recording medium. Thus, since the head is constructed by thin film forming technique to arrange the front return path cores on the both sides of the main magnetic pole, the miniaturization of the entire head can be expected, and the sensitivity can be improved by miniaturizing a magnetic circuit.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention provides a horizontal recording medium suitable for writing or reading information signals to or from a fixed magnetic disk capable of perpendicular magnetization using, for example, a perpendicular magnetic recording method. This invention relates to a perpendicular magnetic head.

[Summary of the invention]

The present invention employs thin film formation technology to construct a perpendicular magnetic head in which return bus cores are arranged on both sides of a main magnetic pole.
By adopting a so-called horizontal structure in which the film surface of the return bus core in the film thickness direction is parallel to the recording surface of the magnetic recording medium, and the main magnetic pole is arranged approximately perpendicular to the recording surface, the head This is an attempt to increase sensitivity.

[Conventional technology]

The perpendicular magnetic recording system, which combines a single-pole perpendicular magnetic head and a double-layer perpendicular medium, is capable of recording and reproducing at ultra-high densities exceeding 600 kFRPI, as reported in Journal of the Japan Society of Applied Magnetics, Vol. 11, No. 2, p. 109 (1987). This method is the most excellent method in terms of recording performance, and is also excellent in off-track and track characteristics, so it is expected to lead to higher track densities. However, in putting this system into practical use, one of the issues is increasing the reproduction output, and to date, efforts have been made to improve the efficiency of the perpendicular magnetic head.

For example, among them, Journal of the Japan Society of Applied Magnetics, Vol. 13, No. 2.
．． 113 (1989), a head having a structure as shown in FIG. 14 is proposed as a single magnetic pole head with high sensitivity, that is, high reproduction efficiency. This head has a main magnetic pole (
Return bus cores (102) on both sides of 101)
, (103), the winding (+04) is placed as close to the main pole (101) as possible, and the entire magnetic circuit is miniaturized.

In other words, in the perpendicular magnetic head described above, the return bus cores (102) and (103) are provided on both sides of the main magnetic pole (101) to form a closed magnetic path structure, and the overall size of the head is miniaturized to facilitate the passage of magnetic flux within the head. At the same time, the winding (10
4) is wound around the tip of the main pole (101) as much as possible to pick up the magnetic flux before it leaks, thereby improving the regeneration efficiency of the helad.

However, since the above-mentioned perpendicular magnetic head does not have sufficient reproduction efficiency, a head with higher output is desired. Therefore, in order to further improve the playback efficiency of such a head, attempts have been made to make the head with the above structure thinner and to make the entire head more compact.

However, if the above-mentioned structure is to be manufactured using thin film formation technology, the number of steps will be increased, which inevitably causes problems in terms of productivity. For this reason, conventionally the main magnetic pole (101)
Generally, a return bus core (102) is placed on one side of the bus, or an asymmetric structure is adopted in which one return bus core (103) is replaced with a magnetic ferrite substrate.

In addition, for high sensitivity, a return bus core (102),
An attempt was made to bring (103) closer to the main pole (+01), but it was not effective because it would cause distortion in the reproduced waveform. As described above, the conventional heads have not been able to provide sufficiently satisfactory sensitivity due to the problems described above.

[Problem to be solved by the invention]

Therefore, the present invention has been proposed in view of the conventional situation, and is a production method that constructs a minute magnetic circuit by thinning the film, improves the sensitivity of the head, and achieves higher linear recording density and track density. The object of the present invention is to provide a horizontal type perpendicular magnetic head with excellent performance.

[Means to solve the problem]

In order to achieve the above-mentioned object, the present invention provides a back return path core, a front return path core connected to both end portions of the back return path core, and a front return path core that is partially exposed to the magnetic recording medium sliding surface. are sequentially laminated, and the central part of the back return path core protrudes toward the surface of the magnetic recording medium, and a conductor coil is embedded in a spiral shape so as to wrap around the protruding back return path core. A main magnetic pole is provided on the return path core, which is substantially perpendicular to the film surface of the back return path core and whose tip is exposed to the sliding surface of the magnetic recording medium.

[Effect]

In the present invention, the head structure in which the front return bass cores are arranged on both sides of the main magnetic pole is constructed using thin film formation technology, so that the entire head can be made smaller, and the magnetic circuit can be miniaturized to achieve higher sensitivity.

Further, in the head according to the present invention, the film surface of the return bus core in the film thickness direction is parallel to the recording surface of the magnetic recording medium, and the main pole is arranged substantially perpendicular to the recording surface. Since it has a so-called horizontal thin film perpendicular magnetic head structure, it has a structure with excellent productivity.

〔Example〕

Hereinafter, specific embodiments to which the present invention is applied will be described with reference to the drawings.

As shown in FIGS. 1 and 2, the horizontal vertical magnetic head of this embodiment includes a main magnetic pole (1) and a pair of front return bus cores (2) disposed on both sides of the main magnetic pole (1). )
, (3) and these front return bus cores (2)
, (3) and a back return path core (4) that magnetically connects them, and each of these elements constitutes a magnetic circuit.

In the above-mentioned perpendicular magnetic head, a main magnetic pole that generates magnetic flux perpendicular to the recording surface of a fixed magnetic disk or the like capable of perpendicular magnetization using a perpendicular magnetic recording method, or that serves to pick up magnetic flux from the recording layer. (1) or is formed on a back return path core (4) formed on a substrate (5) which is the base for constructing the head. In other words,
The main magnetic pole (1) is located at the center of a back return path core (4) formed as a W-shaped cross section on the substrate (5).
In other words, the core portion (
It is provided perpendicularly to the film surface of the core portion (4a) on the flat surface of the core portion (4a), and its tip portion (Ia) is exposed to the magnetic recording medium sliding surface (6). The magnetic recording medium sliding surface (6) has a track width Tw, which is the radius of the tip (la) of the main pole (1).

In this example, the main magnetic pole (1) has a film thickness of 1 μm or less and a length of 1 μm to 5 μm.

Then, around the main magnetic pole (1), there is a nuclear main magnetic pole (1).
A conductor coil (7) is formed in a spiral shape so as to surround the conductor coil (7). In other words, the conductor coil (7) is
Wound around the core portion (4a) of the back return path core (4) protruding toward the magnetic recording medium sliding surface (6),
The recesses (8) and (9) having a rectangular cross section provided on both sides of the core portion (4a) are filled with a non-magnetic insulating material (lO). The conductor coil (7) provides the main magnetic pole (1) with magnetic flux in a direction corresponding to the information signal, and also serves to flow a current in accordance with the direction of the magnetic flux picked up from the main magnetic pole (1). During reproduction, it is used as a bias magnetic field for an MR element (an element having a magnetoresistive effect), which will be described later.

Moreover, on both sides of the main magnetic pole (1), this main magnetic pole (1)
Front return bus cores (2) and (3) are provided in a symmetrical shape for returning the magnetic flux generated from the magnetic pole back to the main magnetic pole (1). These front return bus cores (
2), (3) is one end (2a) on the main pole (1) side,
(3a) is bent upward and the magnetic recording medium sliding surface (6
), and the other end (2b)
, (3b) are laminated on the core portions (4b), (4c) at both ends of the back return pass core (4) and are magnetically connected to the hack return pass core (4). Moreover, the above-mentioned front return bus core (2).

In order to improve the reproduction sensitivity of the head, the return bus core (3) is made of a material with higher magnetic permeability than the return bus core (4). ). Its front return bus core (2), (3)
One end (2a) on the main magnetic pole (1) side.

(3a) is non-parallel to the main magnetic pole (1), that is, has a wave shape, in order to suppress waveform distortion.

In addition, this front return bus core (2), (3)
The shapes of the one end portions (2a) and (3a) can be easily formed into any desired shape during sputtering without adding any special steps. In addition, in a perpendicular magnetic head, side crosstalk hardly depends on the width of the return bus core, so the width of the front return bus cores (2) and (3) is made wider than the width of the main pole (1), which determines the recording track width. I can do it. Therefore, the formation of front return bass cores (2) and (3) becomes easy.

Further, on both sides of the main magnetic pole (1), MR elements (11
), (12) are provided. MR element (11),
(12) detects the resistance change based on the signal magnetic field from the magnetic recording medium picked up by the main magnetic pole (1) as a voltage change, and is symmetrical with respect to the main magnetic pole (1). ) and front return bus core (2), (3
) is placed in such a position as to create a magnetic short circuit between the two.

That is, the MR elements (11) and (+2) are formed in a planar rectangular shape, with one end (
lla), (12a) is the back return pass score (4
) is arranged close to the main magnetic pole (1) so as to overlap with the core part (4a) provided in the center of the front return bus core (llb), (12b). One end (2), which is the tip of (3)
a) and (3a) are arranged so as to overlap with each other. At this time, the MR elements (11), (12) are made of non-magnetic insulating material (13), (IC It is provided through.

In other words, the MR elements (11) and (12) are embedded in the non-magnetic insulating materials (13) and (14) between the core part (4a) of the back return path core (4) and the front return bus. One end of cores (2) and (3) (
2a) and (3a). Furthermore, the facing width of the one end portion (lla), (12a) of the MR element (11), (12) that faces the main magnetic pole (1) is the same as that of the front return bass core (2), (3) described above. For the same reason, the width is made larger than the width of the main pole (1).

In this way, problems such as life span, thermal noise, noise due to magnetic domains, etc. that become noticeable when the MR elements (11) and (12) are miniaturized can be solved.

Then, the MR element (11) arranged as described above
, (12) is for each electrode conductor (1
5), (16), and (17) are connected in series.

That is, these MR elements (11) and (12) have front ends (11c) and (12c) in the track width direction.
or an electrode conductor (1) provided perpendicular to the track width direction.
5) and a rear end (lid);
(12d) with electrode conductors (16) and (+7), respectively.
They are arranged in series extending in the track width direction.

Moreover, in this MR element (+1), (12),
In order to avoid Barkhausen noise caused by the movement of domain walls during reproduction, the axis of easy magnetization or the direction perpendicular to the signal magnetic field Hs from the magnetic recording medium is set, and the sense current 1 is set in the same direction as the signal magnetic field Hs. is energized. Therefore, the aforementioned conductor coil (7
) from this MR element (11), (
+2), these MR elements (11), (
12) The direction of magnetization is the direction of the arrow shown by the solid line in Figure 3,
In other words, it is tilted at 45 degrees with respect to the sense current 1. In this state, the signal magnetic field Hs from the magnetic recording medium or the sense current i
When applied in the direction along the direction, the magnetization rotates and tilts in the direction of the arrow shown by the broken line in FIG. As a result, these resistance changes result in terminals provided at the ends of the electrode conductors (16) and (17) connected to the MR elements (11) and (12), respectively.
+, tx is detected as a voltage change, and the recording on the magnetic recording medium is read out by this.

In the above example, the MR elements (II) and (12) are made of a single layer film, but as shown in FIG. A pair of MR elements (19) and (20) sandwiching the layer (18).
It is also possible to laminate them to form a two-layer film structure. When using a two-layer film configuration, these MR elements (19), (2
The direction of the axis of easy magnetization (0) is set perpendicular to the signal magnetic field, and the sense current i is made to flow in the same direction as the signal magnetic field from the magnetic recording medium.

As a result, the MR elements (19), (20
), as shown in FIG. 5, mutually opposite magnetic fields are generated that are orthogonal to the sense current i, and
is magnetized in the direction of the arrow shown by the solid line, and the other MR element (20) is magnetized in the direction of the arrow shown by the broken line. And these MR elements (19), (20
) is applied with a bias magnetic field Hb from the conductor coil (7) in the same direction as the sense current i, the MR element (
The direction of magnetization in (19) and (20) is tilted at 45 degrees with respect to the sense current 1, as shown in FIG. In this state, when the signal magnetic field Hs from the magnetic recording medium is applied in the same direction as the sense current f, these MR elements (19)
, (20) rotates by an angle θθ2 in the direction indicated by the two-dot chain line as shown in FIG. As a result, each MR element (+9).

A resistance change occurs in (20), and these resistance changes cause terminals t+, which are connected to the MR elements (19) and (20), respectively.
This is detected as a voltage change during t2, and the recording on the magnetic recording medium is read out.

MR element with double layer structure (21), (22)
For example, the connection of each electrode conductor (2
3), (24), and (25) make it series. That is, the electrode conductor (23) has one edge (21a), (22a) of the MR elements (21), (22) on the main magnetic pole (1) side formed into a rectangular pattern excluding the main magnetic pole (1).
and the other edge (21b), (2
1b), electrode conductors (24) and (25) are connected in series so as to extend in a direction perpendicular to the track width direction.

In both of the above examples, the bias magnetic field is applied from the spiral conductor coil (7), so the main magnetic pole (
Check whether the magnetization directions of the MR elements (It), (12) on both sides of 1) and the MR elements (21), (22) are in opposite phases to each other, as shown in Figs. 9 and 10, for example. , each MR element (11), (12) and MR element (21).

Below (22) are dedicated bias electrode conductors (
26), (27) and electrode conductor (28), (29)
By providing these MR elements (11), (1
2) and the MR elements (21) and (22) may be magnetized in the same direction. For example, an MR element (
11), (12) or in the case of a single layer film, as shown in FIG. 9, these MR elements (11), (12) are connected to each electrode conductor (30), (31) as shown in the same figure. , (32
) are connected in series by each of these MR elements (11),
Dedicated bias electrode conductor (26) under (12)
, (27) should be provided. On the other hand, in the case of a two-layer film configuration, as shown in Figure 0, these MR elements (21) and (22) are connected to each electrode conductor (
33), (34), and (35) are connected in series, and dedicated bias electrode conductors (28) and (29) are provided below each of these MR elements (21) and (22). good. In this way, the MR elements (11), (12) and M
Signal outputs having opposite phases to each other can be obtained from the R elements (21) and (22), enabling differential amplification and achieving higher S/N reproduction.

The magnetic circuit consisting of the main magnetic pole (1), front return bus cores (2), (3), back return path core (4), and MR elements (11), (12) configured as described above is as follows: The tip (Ia) of the main magnetic pole (1) and one end (2) of the front return bus core (2), (3)
All except a) and (3a) are filled with non-magnetic magnetic material (36). Note that the upper end surface of this non-magnetic magnetic material (36) is the magnetic recording medium sliding surface (
6).

In the magnetic head configured as described above, the film surfaces of the return bus cores (2), (3), and (4) in the film thickness direction are parallel to the recording surface of the magnetic disk, and the main magnetic pole (1) is parallel to the recording surface of the magnetic disk. ) or perpendicular to the film surface of the back return pass core (4). It has a so-called horizontal structure.

In this way, if a vertical magnetic head is formed into a horizontal structure by employing thin film formation technology, the magnetic circuit can be miniaturized and high sensitivity can be achieved. Therefore, in the head of this example, by increasing the sensitivity of the head, the linear recording density and track density can be increased, and a large-capacity fixed magnetic disk device can be manufactured. Furthermore, since a horizontal structure is adopted, it is possible to provide an inexpensive head with excellent productivity.

In particular, in the perpendicular magnetic head of this example, the front return bass core (2) has a shape that suppresses waveform distortion.

(3) are arranged on both sides of the main magnetic pole (1) to form a closed magnetic circuit, and are combined with MR elements (11) and (12), thereby further increasing the reproduction sensitivity during reproduction. I can do it.

In addition, in the above-mentioned horizontal type perpendicular magnetic head, an MR element (11) is used to further enhance the reproduction sensitivity of the head.

(12) or these MR elements (II), (1
It goes without saying that even if 2) is not provided, a highly sensitive head can be realized with this structure.

By the way, the above magnetic head is manufactured as follows.

First, as shown in FIG. 11A, Si○ is deposited on the substrate (5).
, Ya Ai! A non-magnetic insulating material (36) such as tO3 is formed into a film and etched into an uneven shape corresponding to the shape of the back return path core (4).

The inclination angle θ of the inclined surface (36a) of the non-magnetic insulating material (36) at this time makes good the magnetic properties of the back return path core (4) that will be formed later on the inclined surface (36a). Therefore, it is desirable to set the angle to be relatively gentle, for example, about 30 degrees to 60 degrees.

Next, a magnetic film is deposited on the uneven nonmagnetic insulating material (36) by a dry process method such as sputtering or ion beam sputtering, and is patterned into a back return path core shape.

Next, as shown in FIG. 11B, recesses (8) and (9) each having a rectangular cross section are provided on both sides of the core (4a) so as to wrap around the core (4a) protruding from the center. ) A conductor coil (7) is formed in a spiral shape.

This conductor coil (7) is then covered with a non-magnetic insulating material (10).
Filled with core parts (4a), (4b), respectively at the center and both ends of the back return path core (4),
Planarization is performed until (4C) is exposed.

Next, as shown in FIG. 11C, a pair of MR elements (11) and (12) are placed on the flattened surface (37), including a main magnetic pole (1) and a front return bus core (2), which will be described later. )
.

(3) at a position where they are magnetically short-circuited.

In this example, the MR elements (11) and (12) are formed in a planar rectangular shape, and one end (llb) on the main magnetic pole side
.

(12b) is arranged close to the main magnetic pole (1) so as to overlap the core part (4a) provided at the center of the back return path core (4), and the other end (ll
b), (12b) are the ends of the front return bus cores (2), (3) (2), (3), which will be described later.
It was placed so as to overlap under a).

Next, nonmagnetic insulating materials (13) and (14) are formed to cover the MR elements (11) and (12), and this is used as the MR element (11).

(12) Remove the part except for the part where it will be formed.

That is, the non-magnetic insulating materials (13) and (14) are formed only on the portions where the MR elements (11) and (+2) are formed.

Next, as shown in Figure 11, the MR element (11
), (12) are sputtered onto the flat surface (37), and then patterned into the main magnetic pole shape and front return bus core shape, respectively, to form the main magnetic pole (1).
and front return bus cores (2) and (3).

The main magnetic pole (1) has a film thickness of 1 μm or less and a length of 1 μm or less.
Since it is long (5 μm to 5 μm), it is difficult to manufacture it using only normal photolithography technology using photoresist and ion milling. Therefore, in this example, the magnetic film on the core part (4a) protruding from the center of the back return path core (4) is first processed into a rectangular parallelepiped with a thousand sides having one side equal to the track width, and then this is processed. It is formed by directly performing secondary processing in the film thickness direction using a focused ion beam etching device.

As a result, a main magnetic pole (1) standing perpendicular to the film thickness of the core portion (4a) is formed on the core portion (4a) projecting to the center of the back return path core (4).

On the other hand, in order to form the front return bus cores (2) and (3), photolithography technology is used to form the main magnetic pole (1), taking into consideration the recording magnetic field strength and distribution of the head.
One end portions (2a), (3a) are provided at positions close to the back return path core (4), and the other end portions (2b), (3b) are provided at core portions (4b), (4b) at both ends of the back return path core (4).
4c) Layer on top.

In addition, in this example, one end (2a) of the main magnetic pole (1), (
3a) was provided so as to overlap the other ends (1lb) of the MR elements (11) and (12) and (12b).

Further, the shapes of the ends (2a) and (3a) on the main magnetic pole (1) side were made into a wave shape with respect to the main magnetic pole (1) in order to suppress waveform distortion.

As a result, these main magnetic poles (1) and MR elements (11).

(12), front return bus core (2), (3)
, a magnetic circuit is constructed by the back return path core (4).

Next, in order to avoid exposing the entire surface of the front return bus cores (2) and (3) to the magnetic recording medium sliding surface (6), the front return bus cores (2) and (3) are separated from the main magnetic pole (1). ) and (3) are etched in the film thickness direction to reduce the thickness.

In other words, one end (2a) of the front return bus core (2), (3) exposed to the magnetic recording medium sliding surface (6)
(3a) The core thickness in other parts is made thinner.

Finally, a film of non-magnetic insulating material (36) constituting the magnetic recording medium sliding surface (6) is applied to the main magnetic pole (1), MR elements (11), (12), and MR elements (11), (12) constituting the magnetic circuit. After covering the front return bus cores (2), (3) and the back return bus core (4), apply the non-magnetic insulating material (3).
6) is flattened to form the tip (Ia) of the main magnetic pole (1) and one end (2a) of the front return bus cores (2) and (3).

(3a) is exposed to complete the horizontal type perpendicular magnetic head shown in FIG. 1 described above.

The horizontal perpendicular magnetic head manufactured through the steps described above can be manufactured by laminating films using vacuum thin film formation technology, and therefore can be manufactured with high productivity and at low cost.

Although one embodiment of the horizontal perpendicular magnetic head to which the present invention is applied has been described above, the present invention is not limited to the above-described embodiment and can be modified in various ways.

For example, in the above-mentioned horizontal vertical magnetic head, the main magnetic pole (1
) or perpendicular to the film surface of the back return path core (4), as shown in Figure 12. It may also be slightly inclined. This head has the same structure as the above-mentioned perpendicular magnetic head except that the main magnetic pole (38) is tilted, so the same members are given the same reference numerals and their explanations will be omitted.

To fabricate this horizontal vertical magnetic head, first, follow the procedure for fabricating the vertical magnetic head described above, and place a back return path core (4), a conductor coil (7), and a conductor coil (7) on a substrate (5).
MR elements (11), (12) and front return bus cores (2), (3) are sequentially formed.

Next, as shown in the 13th prisoner, a non-magnetic insulating material is applied on top of the front return bus cores (2) and (3) to form an inclined surface that will incline the main magnetic pole in a later process. A stopper film (39) made of Alx0z or the like is formed to serve as a stopper for the reactive ion etching during etching.

At this time, only the core portion (4a) protruding from the center of the back return path core (4) where the main magnetic pole is formed is removed from the stopper film (39).

Next, as shown in FIG. 13B, a non-magnetic insulating material (4 in.
0) to the front return bus core (2).

(3) After forming a film thereon, this is subjected to reactive ion etching to form an inclined surface (40a) in the center of the back return path core (4).

In this example, the slope angle of the slope (40a) is determined by considering the magnetic properties of the magnetic film deposited on the slope (40a). did.

Next, as shown in FIG. 13C, the inclined surface (40a)
A magnetic film (38) for the main pole is deposited along.

Next, a film of the same non-magnetic insulating material (41) as the non-magnetic insulating material (40) used to tilt the main magnetic pole was applied,
The magnetic film (38) for the main pole, the MR element (11) (I
2), front litter, path score (2), (3)
, covering the back return path score (4).

Finally, surface polishing is applied to the front return bus cores (2), (3) from the non-magnetic insulating material (41), and the front return bus cores (2), (3) are polished.
) and the magnetic film (38) provided at the center of the back return path core (4) are exposed.

As a result, a horizontal perpendicular magnetic head having a main pole (38) inclined with respect to the film surface of the back return path core (4) is completed as shown in FIG.

Note that the use of the stopper film (39) for reactive ion etching and the nonmagnetic insulating material (40) capable of reactive ion etching used in the above process is not essential;
It is used to facilitate the manufacturing process. Therefore, it is also possible to fabricate the head using a material that is difficult to undergo reactive ion etching in the above-described process.

〔Effect of the invention〕

As is clear from the above description, in the present invention,
The head structure, in which front return bus cores are placed on both sides of the main magnetic pole, is constructed using thin film formation technology, making it possible to reduce the overall size of the head and to achieve higher sensitivity by miniaturizing the magnetic circuit.

Therefore, according to the head of the present invention, it is possible to increase the linear recording density and the track density, and to manufacture a large-capacity fixed magnetic disk device.

Further, in the head of the present invention, the film surface of the return bus core in the film thickness direction is parallel to the recording surface of the magnetic recording medium, and the main pole is arranged substantially perpendicular to this recording surface. Since it is a so-called horizontal thin film perpendicular magnetic head structure, it is a structure with excellent productivity and can be expected to be an inexpensive head.

[Brief explanation of the drawing]

1 and 2 show an example of a horizontal perpendicular magnetic head to which the present invention is applied, with FIG. 1 being an enlarged sectional view and FIG. 2 being an enlarged plan view. FIG. 3 is a schematic diagram showing a state in which MR elements having a single layer structure provided in a horizontal perpendicular magnetic head to which the present invention is applied are connected in series. FIG. 4 is an enlarged perspective view of the main parts of an MR element having a two-layer film structure. 5 to 7 are schematic diagrams for explaining the operation of the MR element having a two-layer film structure, and FIG. 5 shows the magnetization state of the MR element before a bias magnetic field is applied, and FIG. 7 shows the magnetization state of the MR element when a bias magnetic field is applied, and FIG. 7 shows the magnetization state of the MR element when a signal magnetic field is applied. FIG. 8 is a schematic diagram showing a state in which MR elements having a two-layer film structure are connected in series. FIG. 9 and FIG. 1O show examples in which electrode conductors for bias magnetic fields are provided in respective MR elements, and FIG. 9 is a schematic diagram showing an example in which electrode conductors for bias magnetic fields are provided in MR elements having a single-layer film structure. 1st
Figure O is a schematic diagram showing an example provided in an MR element having a two-layer film structure. Figures 11 to 11 sequentially show the manufacturing process of a horizontal vertical magnetic head to which the present invention is applied. Figure 11 is an enlarged sectional view showing the back return path core forming process, and Figure 11B is An enlarged sectional view showing the conductor coil forming process,
FIG. 11C is an enlarged cross-sectional view showing the MR element forming process;
Figure 1 is an enlarged sectional view showing the main magnetic pole and front return bus core forming process. FIG. 12 is an enlarged sectional view showing another example of a horizontal perpendicular magnetic head to which the present invention is applied. Figures 13 to 13C sequentially show the manufacturing process of the horizontal perpendicular magnetic head. FIG. 13C is an enlarged cross-sectional view showing the process of forming a non-magnetic insulating material for the magnetic circuit. FIG. 14 is a schematic diagram showing an example of a conventional horizontal type perpendicular magnetic head. l, 3 2.3 4 ・ ・ 5 ・ ・ 6 ・ ・ 7 ・ ・ 11° 8...Main magnetic pole...Front return bus core, back return path core, substrate, magnetic recording medium sliding surface, conductor coil 12...MR element patent applicant Sony Corporation representative Patent attorney Kodo Koike Eido Tamura Masaru Sato Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 Figure 8 Figure 9 Figure 10 Procedural amendment (voluntary) December 3, 1990

Claims (1)

[Claims] A back return path core and a front return path core connected to both end portions of the back return path core and having at least a portion exposed to a sliding surface of a magnetic recording medium are sequentially laminated, and the back return The central part of the pass core protrudes toward the sliding surface of the magnetic recording medium, and a conductor coil is embedded in a spiral shape so as to wrap around the protruding back return pass core. A horizontal perpendicular magnetic head is provided with a main magnetic pole that is substantially perpendicular to the film surface of the path core and whose tip is exposed to the sliding surface of the magnetic recording medium.