JPS63127408A - Thin film magnetic head - Google Patents

Thin film magnetic head

Info

Publication number
JPS63127408A
JPS63127408A JP27261986A JP27261986A JPS63127408A JP S63127408 A JPS63127408 A JP S63127408A JP 27261986 A JP27261986 A JP 27261986A JP 27261986 A JP27261986 A JP 27261986A JP S63127408 A JPS63127408 A JP S63127408A
Authority
JP
Japan
Prior art keywords
layer
reproducing
gap
recording
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP27261986A
Other languages
Japanese (ja)
Inventor
Hitoshi Kanai
均 金井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP27261986A priority Critical patent/JPS63127408A/en
Publication of JPS63127408A publication Critical patent/JPS63127408A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/39Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects
    • G11B5/3903Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using magneto-resistive devices or effects using magnetic thin film layers or their effects, the films being part of integrated structures

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To make a gap layer flat and eliminate the azimuth loss to improve the reproduced output by connecting leading-out terminals, which are buried in a substrate, in parallel with a bias conductor layer to which an MR element is directly joined. CONSTITUTION:Leading-out terminals 21A-21C through which a sense current is supplied to a reproducing MR element 4 are buried in an insulating magnetic substrate 1, and a bias conductor layer 3 to which the MR element 4 is directly joined is connected in parallel to surfaces of these terminals. A lower magnetic pole layer 7 is laminated on the MR element with a reproducing gap layer 6 between them to form a reproducing function part 2, and a recording function part 11 is formed with the similar constitution. Since the reproducing gap layer 6 and a recording layer 12 which conventionally have stepped and curved surfaces have flat surfaces, the occurrence of gap azimuth loss is eliminated at the time of reproducing to improve the reproduced output.

Description

【発明の詳細な説明】 〔概要〕 本発明は再生用磁気抵抗効果素子を用いた記録・再生分
離型の複合薄膜磁気ヘッドにおいて、該磁気抵抗効果素
子にセンス電流を通電する引き出し端子を、基板面に埋
設した状態で磁気抵抗効果素子が直接接合されたバイア
ス導体層と接続する構成にして、該磁気抵抗効果素子上
に順次積層される再生ギャップ層と記録ギャップ層を平
坦化し、再生時のギャップアジマス損失を解消して再生
出力の向上を図ったものである。
DETAILED DESCRIPTION OF THE INVENTION [Summary] The present invention provides a composite thin film magnetic head of a separate recording/reading type using a magnetoresistive element for reproduction, in which an extraction terminal for supplying a sense current to the magnetoresistive element is connected to a substrate. The structure is such that the magnetoresistive element is buried in the surface and connected to the bias conductor layer to which it is directly bonded, and the read gap layer and the recording gap layer that are successively laminated on the magnetoresistive element are flattened and This is an attempt to improve reproduction output by eliminating gap azimuth loss.

〔産業上の利用分野〕[Industrial application field]

本発明は磁気テープ装置、或いは磁気ディスク装置等に
用いられる薄膜磁気ヘッドの改良に係り、特に再生用磁
気抵抗効果素子を用いた記録・再生分離型の複合薄膜磁
気ヘッドに関するものである。
The present invention relates to improvements in thin-film magnetic heads used in magnetic tape devices, magnetic disk devices, etc., and more particularly to a composite thin-film magnetic head of a separate recording/reading type using a magnetoresistive element for reading.

再生用磁気抵抗効果素子と記録用インダクテイブ磁気ヘ
ッドを一体に構成した記録・再生分離型の複合薄膜磁気
ヘッドは、再生出力が媒体速度に依存せず、比較的大き
な出力が得られることから高記録トラックの再生に極め
て有利である特長を有し、近来、高トラツク密度化の要
求に対して、従来からの記録・再生兼用のインダクティ
ブ薄膜磁気ヘッドに取って代わるヘッドとして期待され
ている。それに伴って再生特性を高めるために、再生ギ
ャップを高精度化することが必要とされる。
A composite thin-film magnetic head with separate recording/reproduction type that integrates a magnetoresistive element for reproduction and an inductive magnetic head for recording has a high recording speed because the reproduction output does not depend on the media speed and a relatively large output can be obtained. It has features that are extremely advantageous for track reproduction, and in recent years, it has been expected to be a head that can replace the conventional inductive thin film magnetic head for both recording and reproduction in response to the demand for higher track densities. Accordingly, in order to improve the reproduction characteristics, it is necessary to increase the precision of the reproduction gap.

〔従来の技術〕[Conventional technology]

従来の磁気抵抗効果素子(以下MR素子と略称する)を
用いた記録・再生分離型の複合薄膜磁気ヘッドは第4図
の要部断面に示すように、例えばNi−Znフェライト
等からなる絶縁磁性基板1上にTiからなるバイアス導
体層3と該バイアス導体層3に直接接合したNi−Fe
合金膜からなるMR素子4、前記素子4及びバイアス導
体層3へのセンス電流通電用引き出し端子5、Al2O
2などからなる再生ギャップ層6及びNi−Fe合金膜
からなる上部シールド層7が順に積層された再生機能部
2と、更に前記上部シールド層7を下部磁極層とし、そ
゛の上面にA 1 zOxなどからなる記録ギャップ層
12を介して熱硬化樹脂からなる層間絶縁層13、Cu
からなる薄膜コイル14及びNi−Fe合金膜からなる
上部磁極層15が順に積層された記録機能部11と、そ
の表面に絶縁保護膜16が被覆された構成から成ってい
る。
A conventional composite thin-film magnetic head using a magnetoresistive element (hereinafter abbreviated as MR element) with separate recording/reproducing type is made of an insulating magnetic head made of, for example, Ni-Zn ferrite, as shown in the cross section of the main part in Fig. 4. A bias conductor layer 3 made of Ti and a Ni-Fe layer directly bonded to the bias conductor layer 3 are formed on the substrate 1.
An MR element 4 made of an alloy film, a lead terminal 5 for supplying sense current to the element 4 and the bias conductor layer 3, and Al2O
A reproducing function section 2 has a reproducing function section 2 in which a reproducing gap layer 6 made of Ni--Fe alloy film, etc., and an upper shield layer 7 consisting of a Ni--Fe alloy film are laminated in this order, and furthermore, the upper shield layer 7 is used as a lower magnetic pole layer, and the upper surface thereof is coated with A 1 zOx. An interlayer insulating layer 13 made of thermosetting resin, Cu
It consists of a recording function section 11 in which a thin film coil 14 consisting of a thin film coil 14 and an upper magnetic pole layer 15 consisting of a Ni--Fe alloy film are laminated in this order, and the surface thereof is coated with an insulating protective film 16.

そして上部、下部両磁極先端とMR素子により対向する
磁気記録媒体17に情報の記録・再生を分離して行える
ようにしている。
Information can be recorded and reproduced separately on the opposing magnetic recording medium 17 by the tips of the upper and lower magnetic poles and the MR element.

前記MR素子4に対するバイアス方法としては、シャン
トバイアス法が採用され、該MR素子4及びバイアス導
°体層3に対するセンス電流通電用の引き出し端子5と
しては、第5図に示すように再生時の雑音を低減する目
的で電気抵抗を小さくした5八、 5B、 5cの3端
子としており、端子5A −5B間と端子5B −5C
間の出力を差動増幅して信号検出を行っている。
A shunt bias method is adopted as a biasing method for the MR element 4, and a lead terminal 5 for supplying a sense current to the MR element 4 and the bias conductor layer 3 is used as shown in FIG. For the purpose of reducing noise, there are three terminals, 58, 5B, and 5c, with low electrical resistance, and between terminals 5A and 5B and between terminals 5B and 5C.
Signal detection is performed by differentially amplifying the output between the two.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

ところで従来のMR素子を用いた複合薄膜磁気ヘッドで
は、MR素子4及びバイアス導体層3に対する電流通電
用の前記引き出し端子5A、5B、5cの電気抵抗を小
さくして再生時の熱雑音を低減するために、その膜厚を
0.5μm以上とし、かつその引き出し端子5A、5B
、5cは、該MR素子4の長さ方向に平行にセンス電流
を流すために、媒体17側から拡大して表した第6図に
示すようにMR素子4上に設けられている。
By the way, in a composite thin film magnetic head using a conventional MR element, the electrical resistance of the lead terminals 5A, 5B, and 5c for supplying current to the MR element 4 and the bias conductor layer 3 is reduced to reduce thermal noise during reproduction. Therefore, the thickness of the film should be 0.5 μm or more, and the lead terminals 5A, 5B
, 5c are provided on the MR element 4, as shown in FIG. 6, enlarged from the medium 17 side, in order to flow a sense current parallel to the length direction of the MR element 4.

従って、その上面に順に積層された1μm程度の厚さの
薄い再生ギャップjLf6(高線記録密度を得るため)
、下部磁極層を兼ねる上部シールド層7及び記録ギャッ
プ層12等が、前記引き出し端子5A、5B、5cの配
設段差を継承した形となり、該再生ギャップ層6及び記
録ギャップ層12が平坦なギャップとならない不都合が
ある。このため、特に再生時においてギャップアジマス
損失が生じ、再生出力が低下する欠点があった。
Therefore, a thin reproduction gap jLf6 of about 1 μm thick is sequentially laminated on the upper surface (in order to obtain a high linear recording density).
, the upper shield layer 7, which also serves as the lower magnetic pole layer, the recording gap layer 12, etc., inherit the level difference in the arrangement of the lead terminals 5A, 5B, and 5c, and the reproduction gap layer 6 and the recording gap layer 12 have a flat gap. There is an inconvenience that this does not happen. For this reason, there is a drawback that gap azimuth loss occurs particularly during reproduction, resulting in a reduction in reproduction output.

本発明は上記従来の欠点に鑑み、MR素子及びバイアス
導体層に対する電流通電用の引き出し端子の配設構成を
改良して、再生ギャップ層及び記録ギャップ層を平坦化
し、もって再生時に発生ずるギャップアジマス損失を解
消した新規な記録・再生分離型の複合薄膜磁気ヘッドを
提供することを目的とするものである。
In view of the above-mentioned conventional drawbacks, the present invention improves the arrangement configuration of the lead-out terminals for current supply to the MR element and the bias conductor layer, flattens the read gap layer and the write gap layer, and thereby reduces the gap azimuth that occurs during playback. The object of the present invention is to provide a novel composite thin-film magnetic head of separate recording/reproducing type that eliminates loss.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は上記目的を達成するため、バイアス導体層と直
接接合した再生用MR素子にセンス電流を通電する引き
出し端子をj絶縁磁性基板のバイアス導体層配設領域に
、上面が露出した形に埋設し、その表面に該MR素子が
直接接合されたバイアス導体層を接続配置し、再生ギャ
ップ層を介して上部シールド層を兼ねる下部磁極層を順
に積層された再生機能部と、該下部磁極層上に記録ギャ
ップ層、層間絶縁層、薄膜コイル及び上部磁極層が順に
積層された記録機能部と、その上面に絶縁保護層を被覆
した構成とする。
In order to achieve the above-mentioned object, the present invention has an extraction terminal for supplying a sense current to the reproducing MR element directly connected to the bias conductor layer, which is buried in the bias conductor layer area of the insulated magnetic substrate with its upper surface exposed. A bias conductor layer to which the MR element is directly bonded is connected to the surface of the reproducing function section, in which a lower magnetic pole layer which also serves as an upper shield layer is laminated in order through a reproducing gap layer, and a lower magnetic pole layer is formed on the lower magnetic pole layer. The structure includes a recording function section in which a recording gap layer, an interlayer insulating layer, a thin film coil, and an upper magnetic pole layer are laminated in this order, and an insulating protective layer is coated on the upper surface of the recording function section.

〔作用〕[Effect]

本発明の複合薄膜磁気ヘッドでは、MR素子が接合され
たバイアス4体層と接続した電流通電用の前記引き出し
端子が絶縁磁性基板のバイアス導体層配設領域に、上面
が露出した形に埋設されているため、その表面に配設さ
れたバイアス導体層及び再生用MR素子は平坦となり、
段差が生じることはない。従って、その上に順に積層さ
れる再生ギヤ・ノブ層、上部シールド層、また該上部シ
ールド層を兼ねる下部磁極層上の記録ギャップ層等も平
坦化され、再生時にギャップアジマス損失が生じる問題
が解消される。
In the composite thin film magnetic head of the present invention, the lead-out terminal for current flow connected to the four-layer bias layer to which the MR element is bonded is buried in the bias conductor layer area of the insulating magnetic substrate with the top surface exposed. Therefore, the bias conductor layer and the reproduction MR element disposed on the surface become flat,
There are no steps. Therefore, the reproduction gear knob layer, the upper shield layer, and the recording gap layer on the lower magnetic pole layer that also serves as the upper shield layer are flattened, and the problem of gap azimuth loss during reproduction is resolved. be done.

〔実施例〕〔Example〕

以下図面を用いて本発明の実施例について詳細に説明す
る。
Embodiments of the present invention will be described in detail below with reference to the drawings.

第1図は本発明に係る薄膜磁気ヘッドの一実施例を示す
要部断面図である。
FIG. 1 is a sectional view of a main part of an embodiment of a thin film magnetic head according to the present invention.

図において、1はNi−Znフェライト等からなる絶縁
磁性基板であり、該基板1上のバイアス導体層配設領域
に、後述するバイアス導体層3と直接接合した再生用M
R素子4にセンス電流を通電するCuなどからなる引き
出し端子21A、21B、21Gが、その上面が露出し
た形に埋設されている。
In the figure, reference numeral 1 denotes an insulated magnetic substrate made of Ni-Zn ferrite or the like, and a reproduction M that is directly bonded to a bias conductor layer 3, which will be described later, is placed on the bias conductor layer area on the substrate 1.
Output terminals 21A, 21B, and 21G made of Cu or the like and which supply a sense current to the R element 4 are buried with their upper surfaces exposed.

該引き出し端子21A、21B、21Cの配設方法は、
前記基板1上の端子形成予定領域に予め、レーザ切削加
工等により溝を形成し、スパッタリング法と研磨加工法
等によって該溝内にCuなどからなる導電膜が埋め込ま
れ、かつその膜面が基板1表面と同一面を成す引き出し
端子21^、21B、21Cを設けることができる。
The method of arranging the extraction terminals 21A, 21B, and 21C is as follows:
A groove is formed in advance in the area where the terminal is to be formed on the substrate 1 by laser cutting, etc., and a conductive film made of Cu or the like is embedded in the groove by sputtering, polishing, etc., and the film surface is aligned with the substrate. Output terminals 21^, 21B, and 21C that are flush with the first surface can be provided.

そして該引き出し端子21A、 21B、 21C:の
上面が露出した基板1上にNi−Fe合金膜からなるM
R素子4が直接接合されたTtからなるバイアス導体層
3が配設され、第2図に示すように該引き出し端子21
八、21B、21Cと接続されている。
The lead terminals 21A, 21B, 21C: M made of a Ni-Fe alloy film are placed on the substrate 1 whose upper surface is exposed.
A bias conductor layer 3 made of Tt to which an R element 4 is directly bonded is provided, and as shown in FIG.
8, 21B, and 21C.

また前記MR素子4上にはAj!zotなどからなる薄
膜状の再生ギャップ層6及びNi−Fe合金膜からなる
上部シールド層7が順に積層されて再生機能部1が構成
されている。
Moreover, on the MR element 4, Aj! The reproduction function section 1 is constructed by laminating a thin film reproduction gap layer 6 made of zot or the like and an upper shield layer 7 made of a Ni--Fe alloy film in this order.

更に該上部シールド層7を下部磁極としてその上面にA
 N 203などからなる記録ギヤツブ層12を介して
熱硬化樹脂からなる層間絶縁層13、Coからなる薄膜
コイル14及びNi−Fe合金膜からなる上部磁極15
が順に積層された記録機能部11と、その表面に絶縁保
護膜12が被覆された複合構成となっている。
Further, the upper shield layer 7 is used as a lower magnetic pole with A on its upper surface.
An interlayer insulating layer 13 made of thermosetting resin, a thin film coil 14 made of Co, and an upper magnetic pole 15 made of a Ni-Fe alloy film are interposed through a recording gear layer 12 made of N203 or the like.
It has a composite structure including a recording function section 11 in which layers are sequentially stacked, and an insulating protective film 12 is coated on the surface thereof.

このように本発明のヘッド構成においては、磁極先端部
を媒体17側から拡大して表した第3図に示すように、
前記引き出し端子21八、21B、21C7り<基板1
上に埋設された状態で前記MR素子4が直接接合された
バイアス導体層3が接続された構成がとられているので
、従来のように再生ギャップ層6の配設面に引き出し端
子により段差が発生する不都合が解消され、前記MR素
子4上に順次設けられる再生ギャップN6及び記録ギャ
ップ層12が平1旦となる。
As described above, in the head configuration of the present invention, as shown in FIG. 3, which shows the magnetic pole tip section enlarged from the medium 17 side,
The lead terminals 218, 21B, 21C7 < board 1
Since the structure is such that the bias conductor layer 3 to which the MR element 4 is directly bonded is connected to the MR element 4 while being buried thereon, a step is not created on the surface where the reproduction gap layer 6 is provided by the lead-out terminal as in the conventional case. The resulting inconvenience is eliminated, and the reproducing gap N6 and recording gap layer 12, which are sequentially provided on the MR element 4, are no longer required.

〔発明の効果〕〔Effect of the invention〕

以上の説明から明らかなように、本発明に係る記録・再
生分離型の複合薄膜磁気ヘッドによれば、再生ギャップ
層の配設面が平坦化され、再生ギャップ層及び記録ギヤ
ツブ層が平坦となるので、再生時にギャップアジマス損
失が発生する問題が解消し、再生出力特性が向上する優
れた効果を奏する。また各記録・再生ギャップ長を狭め
ることが容易となり、高線記録密度化が可能となる等、
この種の薄膜磁気ヘッドに適用して極めて有利である。
As is clear from the above description, according to the separate recording/reading type composite thin-film magnetic head according to the present invention, the surface on which the reading gap layer is provided is flattened, and the reading gap layer and the recording gear layer are flattened. Therefore, the problem of gap azimuth loss occurring during reproduction is resolved, and the excellent effect of improving reproduction output characteristics is achieved. In addition, it becomes easier to narrow each recording/reproducing gap length, making it possible to achieve higher linear recording density, etc.
It is extremely advantageous to apply this type of thin film magnetic head.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明に係る薄膜磁気ヘッドの一実施例を示す
要部断面図、 第2図は本発明に係る薄膜磁気へ・7ドの引き出し端子
を説明するための部分拡大斜視 図、 第3図は本発明に係る薄膜磁気ヘッドの磁極先端部を媒
体側から示す拡大平面図、 第4図は従来の薄膜磁気ヘッドを説明するための要部断
面図、 第5図は従来の薄膜磁気ヘッドの引き出し端子を説明す
るための部分拡大斜視図、 第6図は従来の薄膜磁気ヘッドの磁極先端部を媒体側か
ら示す拡大平面図である。 第1図乃至第3図において、 1は絶縁磁性基板、2は再生機能部、3ハハイアス導体
層、4はMR素子、6は再生ギャップ層、7は上部シー
ルド層 (下部磁極層)、11は記録機能部、12は記録ギャッ
プ層、13は層間絶縁層、14は薄膜コイル、15は上
部磁極層、16は絶縁保護層、17は磁気記録媒体、2
1A、218.21Cは引き出し端子をそれぞれ示す。
FIG. 1 is a cross-sectional view of a main part showing an embodiment of a thin film magnetic head according to the present invention, FIG. Fig. 3 is an enlarged plan view showing the magnetic pole tip of the thin film magnetic head according to the present invention from the medium side, Fig. 4 is a sectional view of a main part for explaining a conventional thin film magnetic head, and Fig. 5 is a conventional thin film magnetic head. FIG. 6 is a partially enlarged perspective view for explaining the lead-out terminal of the head, and FIG. 6 is an enlarged plan view showing the magnetic pole tip of a conventional thin-film magnetic head from the medium side. 1 to 3, 1 is an insulated magnetic substrate, 2 is a reproduction function section, 3 is a high-ass conductor layer, 4 is an MR element, 6 is a reproduction gap layer, 7 is an upper shield layer (lower magnetic pole layer), and 11 is a Recording function section, 12 is a recording gap layer, 13 is an interlayer insulating layer, 14 is a thin film coil, 15 is an upper magnetic pole layer, 16 is an insulating protective layer, 17 is a magnetic recording medium, 2
1A and 218.21C indicate lead terminals, respectively.

Claims (1)

【特許請求の範囲】 絶縁磁性基板(1)上にバイアス導体層(3)と直接接
合した再生用磁気抵抗効果素子(4)と、これらに通電
する引き出し端子(21A、21B、21C)と、再生
ギャップ層(6)を介して下部磁極層を兼ねる上部シー
ルド層(7)が順に積層された再生機能部(2)と、該
下部磁極層(7)上に記録ギャップ層(12)、層間絶
縁層(13)、薄膜コイル(14)及び上部磁極層(1
5)が順に積層された記録機能部(11)から成り、そ
の上面に絶縁保護層(16)が被覆された複合のヘッド
構成において、 上記引き出し端子(21A、21B、21C)は絶縁磁
性基板(1)のバイアス導体層(3)配設領域に埋設さ
れ、該バイアス導体層(3)と接続してなることを特徴
とする薄膜磁気ヘッド。
[Claims] A reproducing magnetoresistive element (4) directly bonded to a bias conductor layer (3) on an insulating magnetic substrate (1), and lead terminals (21A, 21B, 21C) for energizing these elements; A reproducing function section (2) in which an upper shield layer (7) which also serves as a lower magnetic pole layer is laminated in order through a reproducing gap layer (6), a recording gap layer (12) on the lower magnetic pole layer (7), and an interlayer Insulating layer (13), thin film coil (14) and upper magnetic pole layer (1
In the composite head configuration, the lead terminals (21A, 21B, 21C) are formed by an insulating magnetic substrate (21A, 21B, 21C). A thin film magnetic head characterized in that it is embedded in the bias conductor layer (3) arrangement region of (1) and connected to the bias conductor layer (3).
JP27261986A 1986-11-14 1986-11-14 Thin film magnetic head Pending JPS63127408A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27261986A JPS63127408A (en) 1986-11-14 1986-11-14 Thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27261986A JPS63127408A (en) 1986-11-14 1986-11-14 Thin film magnetic head

Publications (1)

Publication Number Publication Date
JPS63127408A true JPS63127408A (en) 1988-05-31

Family

ID=17516455

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27261986A Pending JPS63127408A (en) 1986-11-14 1986-11-14 Thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS63127408A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613120A2 (en) * 1993-02-26 1994-08-31 Sony Corporation Magnetoresistance thin film magnetic head and bias characteristics measuring method
WO1997011458A1 (en) * 1995-09-20 1997-03-27 Hitachi, Ltd. Magnetoresistive head
US8272148B2 (en) 2006-10-19 2012-09-25 Asics Corporation Sports shoes having upper part with improved fitting property

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0613120A2 (en) * 1993-02-26 1994-08-31 Sony Corporation Magnetoresistance thin film magnetic head and bias characteristics measuring method
EP0613120B1 (en) * 1993-02-26 1999-11-10 Sony Corporation Magnetoresistance thin film magnetic head
WO1997011458A1 (en) * 1995-09-20 1997-03-27 Hitachi, Ltd. Magnetoresistive head
US8272148B2 (en) 2006-10-19 2012-09-25 Asics Corporation Sports shoes having upper part with improved fitting property

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