JPS6059517A - Recording and reproducing composite head for vertical magnetic recording - Google Patents
Recording and reproducing composite head for vertical magnetic recordingInfo
- Publication number
- JPS6059517A JPS6059517A JP16721283A JP16721283A JPS6059517A JP S6059517 A JPS6059517 A JP S6059517A JP 16721283 A JP16721283 A JP 16721283A JP 16721283 A JP16721283 A JP 16721283A JP S6059517 A JPS6059517 A JP S6059517A
- Authority
- JP
- Japan
- Prior art keywords
- recording
- layer
- magnetic pole
- head
- reproducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
Landscapes
- Magnetic Heads (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Recording Or Reproducing By Magnetic Means (AREA)
Abstract
Description
【発明の詳細な説明】
(al 発明の技術分野
本発明は垂直磁気記録用記録再生複合ヘッドに係り、特
に製造が容易で、垂直磁気記録方式の磁気ディスク装置
、磁気テープ装置の記録・再生用ヘッドに好適な薄膜型
複合ヘッドに関するものである。DETAILED DESCRIPTION OF THE INVENTION (al) Technical Field of the Invention The present invention relates to a recording/reproducing compound head for perpendicular magnetic recording, which is particularly easy to manufacture, and is suitable for recording/reproducing in magnetic disk devices and magnetic tape devices using the perpendicular magnetic recording method. The present invention relates to a thin film type composite head suitable for the head.
(1])技術の背景
従来、磁気ディスク装置、或いは磁気テープ装置等の磁
気記録媒体に高密度で情報を記録・再生ずる薄膜磁気ヘ
ッドとして、補助磁極のない主磁極励磁型の磁気へ・7
ド、主磁極励磁型ヘソ1ことヘッド−媒体間の相対速度
に無関係に一部しヘルの高再生出力が得られる磁束応答
型の磁気抵抗効果ヘッド(MRヘッド)とを一体化した
複合ヘッド等、種々のタイプのものが提案されている。(1) Background of the technology Conventionally, main pole excitation type magnetism without an auxiliary pole has been used as a thin film magnetic head that records and reproduces information at high density on magnetic recording media such as magnetic disk devices or magnetic tape devices.
A composite head that integrates a magnetic flux-responsive magnetoresistive head (MR head) that can obtain a high reproduction output regardless of the relative speed between the head and the medium. , various types have been proposed.
tc+ 従来技術と問題点
上記した従来の垂直磁気記録再生用の複合ヘッドとして
は、第1図の要部平面図、及び第2図の第1図に示ずn
−n ’切断線に沿った要部断面図で示すように、ガラ
ス等からなる非磁性基板1上に、磁気抵抗素子(以下M
l?素子と呼ぶ)用のバーマoイ(Ni−Fe合金)か
らなる第1シールド層3が配設され、その上に”102
1 SiO等からなる第1絶縁層4、非磁性で導電性の
良い銅(Cu) 、アルミニウム(AI)等からなるM
R素子用バイアス導体5、第2絶縁N6、パーマロイ
(Ni Fe合金)からなる諏素子N7、第3絶縁層8
及びMR素子用ノハーマロイ (Ni−Fe合金)から
なる第2シールド層(記録ヘッド用磁極を兼ねる)9が
積層されて再生用磁気抵抗効果型ヘソF部2が構成され
ている。又この再生用磁気抵抗効果型ヘッド部2の旧素
子用の第2シールド層、即ち記録ヘッド用磁極9上に、
更に第4絶縁層11を介して非磁性で導電性の良い銅(
Cu) 、アルミニウム(AI)等からなるコイル導体
[12、第5絶縁層13、パーマロイ(Ni−Fe合金
)からなる上部磁性N14および第6絶縁層15が順に
積層されて記録用単磁極捲線型ヘッド部10が構成され
て複合型に一体化されている。tc+ Prior Art and Problems The conventional composite head for perpendicular magnetic recording and reproducing mentioned above is not shown in the plan view of the main part in FIG. 1 and in FIG.
As shown in the cross-sectional view of the main part along the -n' cutting line, a magnetoresistive element (hereinafter M
l? A first shield layer 3 made of barmai (Ni-Fe alloy) for the device (referred to as element) is disposed, and on top of it
1 First insulating layer 4 made of SiO etc., M made of non-magnetic and highly conductive copper (Cu), aluminum (AI) etc.
Bias conductor 5 for R element, second insulation N6, permalloy
(Ni-Fe alloy) element N7, third insulating layer 8
and a second shield layer 9 (which also serves as a magnetic pole for a recording head) made of Ni-Fe alloy for MR elements are laminated to form a reproducing magnetoresistive type navel F section 2. Also, on the second shield layer for the old element of the magnetoresistive head section 2 for reproduction, that is, on the magnetic pole 9 for the recording head,
Furthermore, non-magnetic and highly conductive copper (
A coil conductor [12] made of Cu), aluminum (AI), etc., a fifth insulating layer 13, an upper magnetic N14 made of permalloy (Ni-Fe alloy), and a sixth insulating layer 15 are laminated in this order to form a single magnetic pole winding type for recording. The head portion 10 is constructed and integrated into a composite type.
そして当該複合ヘッドによって磁気記録媒体17に情報
を記録するには、記録ヘッド用磁極9及びMR素子層7
の先端が露出したヘッド先端部16を磁気記録媒体17
面に対向配置し、前記コイル導体層12に所定の電流を
流すことに、L、り発生ずる磁界によって記録ヘソl°
用磁極9を磁化し、記録を行う。In order to record information on the magnetic recording medium 17 with the composite head, the magnetic pole 9 for the recording head and the MR element layer 7 are required.
The head tip 16 with the exposed tip is attached to the magnetic recording medium 17.
When a predetermined current is passed through the coil conductor layer 12, the magnetic field generated by the coil conductor layer 12 causes a recording heel l°.
The magnetic pole 9 is magnetized and recording is performed.
又再生時にば、前記MR素子層7に一定の電流を流すと
共に、バイアス導体5に所定の電流を流すことにより該
)IR素子層7にバイアス磁界を印加して、磁気記録媒
体17面の磁界の強弱によってMl?素子層7の抵抗が
変化することによって再生を行っている。Also, during reproduction, a bias magnetic field is applied to the IR element layer 7 by passing a constant current through the MR element layer 7 and a predetermined current through the bias conductor 5, thereby changing the magnetic field on the surface of the magnetic recording medium 17. Depending on the strength of Ml? Reproduction is performed by changing the resistance of the element layer 7.
しかしながら上記した従来の垂直磁気記録用記録再生複
合ヘッドにあっては、一枚の基板1」二に複数種の薄膜
を多層に絹み合わせて、再生用磁気抵抗効果型ヘッド部
2と記録用単磁極捲線型ヘッド部10とを積層状に構成
しているので、構造が複雑であり、当該複合ヘッドの製
造工程が煩雑であるばかりでなく、製造工数の増加が避
けられない欠点があった。However, in the above-mentioned conventional recording/reproducing composite head for perpendicular magnetic recording, a plurality of types of thin films are laminated together in multiple layers on a single substrate 1''2, and a magnetoresistive head section 2 for reproduction and a recording head section 2 for recording are used. Since the single magnetic pole winding type head section 10 is constructed in a laminated manner, the structure is complicated, and the manufacturing process of the composite head is not only complicated, but also has the disadvantage that an increase in manufacturing man-hours is unavoidable. .
(d) 発明の目的
本発明は」−記従来の欠点に鑑み、構成が簡単で、製造
工程の簡略化が図られ、且つ磁気記録・再生特性の優れ
た新規な垂直磁気記録用記録再生複合ヘッドを提供する
ことを目的とするものである。(d) Object of the Invention In view of the drawbacks of the conventional art, the present invention provides a novel recording/reproducing composite for perpendicular magnetic recording, which has a simple structure, simplifies the manufacturing process, and has excellent magnetic recording/reproducing characteristics. The purpose is to provide a head.
tel 発明の構成
そして上記目的は本発明によれば、基板上に薄膜によっ
て再生用磁気抵抗効果型ヘッド部と記録用単磁極捲線型
ヘッド部とを一体に構成した複合ヘッドであって、上記
記録用単磁極1@線型ヘツド部の磁極を、400人〜1
000人の厚さの強磁性体層と100人〜500人の厚
さの絶縁層とを交互に、かつ多層に積層した多層構造と
し、該多層構造の磁極を構成した複数の強磁性体層の内
の、何れか一つの強磁性体層を再生用磁気抵抗効果型ヘ
ッド部として機能するように構成したことを特徴とする
垂直磁気記録用記録再生複合ヘッドを提供することによ
って達成される。According to the present invention, the present invention provides a composite head in which a reproducing magnetoresistive head section and a recording single-pole winding head section are integrally formed by a thin film on a substrate. Single magnetic pole 1 @ linear head magnetic pole for 400 to 1
A multilayer structure in which ferromagnetic layers with a thickness of 1,000 μm and insulating layers with a thickness of 100 to 500 μm are alternately laminated in multiple layers, and a plurality of ferromagnetic layers constitute a magnetic pole of the multilayer structure. This is achieved by providing a recording/reproducing composite head for perpendicular magnetic recording, characterized in that any one of the ferromagnetic layers is configured to function as a magnetoresistive head section for reproduction.
(f) 発明の実施例
以下図面を用いて本発明の実施例について詳細に説明す
る。−
第3図は本発明に係る垂直磁気記録用記録再生複合ヘッ
ドの一実施例を概念的に示す一部を切欠いた要部斜視図
、第4図は第3図に示ずIV−IV′切断線に沿った要
部断面図である。これら両図において、21はスライダ
を兼ねたフエライI−等からなる磁性基板であり、該磁
性基板21−ににはSin。(f) Embodiments of the invention Embodiments of the invention will be described in detail below with reference to the drawings. - FIG. 3 is a partially cutaway perspective view of the main parts conceptually showing an embodiment of the recording/reproducing composite head for perpendicular magnetic recording according to the present invention, and FIG. 4 is not shown in FIG. FIG. 3 is a cross-sectional view of main parts taken along a cutting line. In both of these figures, 21 is a magnetic substrate made of Ferrite I- or the like which also serves as a slider, and the magnetic substrate 21- is made of Sin.
5i02からなる第1の絶縁層22を介して非磁性で導
電性の良い銅(Cu) 、アルミニウム(A1)等から
なる第1の渦巻状コイル導体層23が設けられている。A first spiral coil conductor layer 23 made of non-magnetic and highly conductive copper (Cu), aluminum (A1), etc. is provided via a first insulating layer 22 made of 5i02.
又、該第1の渦巻状コイル導体層23を覆うように前記
第1の絶縁層22−ヒに第2の絶縁層24が形成され、
その上面に、400人〜1000人の厚さ、例えば70
0人の厚さのパーマロイ (Ni−Fe合金)等からな
る強磁性体層26と100人〜400人の厚さ、例えば
300人の厚さのSiO,5i02等からなる絶縁層2
7とを交互に、かつ多層に積層された多層構造、本実施
例では4層構造の磁極25が配設されている。Further, a second insulating layer 24 is formed on the first insulating layer 22-H so as to cover the first spiral coil conductor layer 23,
On its upper surface, a thickness of 400 to 1000, e.g. 70
A ferromagnetic layer 26 made of permalloy (Ni-Fe alloy) or the like with a thickness of 0.0 mm and an insulating layer 2 made of SiO, 5i02, etc. with a thickness of 100 to 400, for example 300.
The magnetic pole 25 has a multilayer structure, in which the magnetic poles 7 and 7 are alternately stacked in multiple layers, and has a four-layer structure in this embodiment.
そして該磁極25を構成している複数の強磁性体層26
中の、例えば第1強磁性体層26aは、前記磁極25を
形成する際に、共に設けられた銅(Cu) 、又はアル
ミニウム(AI)等からなる導体端子層28と電気的に
接続されて、磁気抵抗効果型へソド(以下MRヘッドと
呼ぶ)として機能させる。更に前記磁極25を含む第2
の絶縁層24上には、第3の絶縁層29を介して第2の
渦巻状コイル導体層30及び第4の絶縁層31が順に積
層され、」二記磁極25の先端は当該複合ヘッドの磁気
記録媒体32と対向する面に露出している。A plurality of ferromagnetic layers 26 forming the magnetic pole 25
For example, the first ferromagnetic layer 26a therein is electrically connected to a conductive terminal layer 28 made of copper (Cu), aluminum (AI), etc., which is also provided when forming the magnetic pole 25. , to function as a magnetoresistive head (hereinafter referred to as an MR head). Furthermore, a second magnetic pole including the magnetic pole 25
A second spiral coil conductor layer 30 and a fourth insulating layer 31 are laminated in this order on the insulating layer 24 with a third insulating layer 29 interposed therebetween, and the tips of the two magnetic poles 25 are connected to the composite head. The surface facing the magnetic recording medium 32 is exposed.
上記のように構成された薄膜複合ヘッドの構造は従来タ
イプの複合ヘッドに比べて格段に簡単化され、前記第1
、第2の渦巻状コイル導体層23.30に逆方向の電流
を流すことにより磁極25を磁化し、該磁極25先端に
発生ずる磁束によって磁気記録媒体32の表面に対して
垂直な方向に情報の記録が行われる。又、媒体32に記
録された情報の再生は、前記第1強磁性体ti26aか
らなるMRヘッドに導体端子層28を介して所定の電流
を流し、更に前記第1、第2の渦巻状コイル導体層23
.30に電流を流すことによりバイアス磁界を印加して
、対向する磁気記録媒体32面の磁界の強弱により、前
記MR素子26aの抵抗が変化することによって再生を
行うことができる。The structure of the thin film composite head constructed as described above is much simpler than that of conventional type composite heads, and
, the magnetic pole 25 is magnetized by passing a current in the opposite direction through the second spiral coil conductor layer 23, 30, and the magnetic flux generated at the tip of the magnetic pole 25 transfers information in a direction perpendicular to the surface of the magnetic recording medium 32. will be recorded. To reproduce the information recorded on the medium 32, a predetermined current is passed through the MR head made of the first ferromagnetic material ti26a through the conductor terminal layer 28, and then the first and second spiral coil conductors are layer 23
.. By applying a bias magnetic field by passing a current through the MR element 30, reproduction can be performed by changing the resistance of the MR element 26a depending on the strength of the magnetic field on the opposing surface of the magnetic recording medium 32.
Ig))発明の効果
以−1−の説明から明らかなように、本発明に係る垂直
磁気記録用記録再生複合ヘッドによれば、記録用の単磁
極型ヘッド邪の磁極を多層構造とし、かつ該多層構造の
磁極中の1層を再生用の磁気抵抗効果型ヘット部として
複合的に構成しているので、構造が簡単となり製造が容
易となる。又、記録用の単磁極型ヘッドの磁極を多層構
造にすることにより垂直記録効率が高められ、′4膜で
構成された再生用の磁気抵抗効果型ヘッドを線形領域で
動作させることができるので高密度の記録と再生が容易
となる等、実用」二優れた利点を有する。よって垂直磁
気記録再生方式が採用された磁気ディスク装置、磁気テ
ープ装置等の磁気記録・再生ヘッドに適用して極めて有
利である。Ig)) Effects of the Invention As is clear from the explanation in Section 1-1-, according to the perpendicular magnetic recording recording/reproducing composite head of the present invention, the magnetic pole of the single magnetic pole type head for recording has a multilayer structure, and Since one layer of the magnetic pole of the multilayer structure is compositely constructed as a magnetoresistive head section for reproduction, the structure is simple and manufacturing is easy. In addition, by making the magnetic pole of the recording single-pole head multi-layered, the perpendicular recording efficiency is increased, and the reproduction magnetoresistive head composed of the '4 film can be operated in the linear region. It has two excellent practical advantages, such as easy high-density recording and playback. Therefore, it is extremely advantageous to apply it to magnetic recording/reproducing heads of magnetic disk devices, magnetic tape devices, etc. that employ the perpendicular magnetic recording/reproducing method.
第1図は従来の垂直磁気記録再生用の複合ヘッドを説明
するだめの要部平面図、第2図は第1図に示ずn−n’
切断線に沿った要部断面図、第3図は本発明に係る垂直
磁気記録用記録再生複合ヘッドの一実施例を概念的に示
す一部を切欠いた要部斜視図、第4図は第3図に示すI
V−IV ’切断線に沿った要部断面図である。
図面において、21は磁性基板、22は第1の絶縁層、
23は第1の渦巻状コイル導体層、24は第2の絶縁層
、25は磁極、26は強磁性層、26aは第1強磁性層
(Ml?ヘッド)、27は絶縁層、28は導体端子層、
29は第3の絶縁層、30は第2の渦巻状コイル導体層
、31は第4の絶縁層、32は磁気記録媒体を示す。
第1図
π
第2図FIG. 1 is a plan view of the main parts of a conventional composite head for perpendicular magnetic recording and reproducing, and FIG.
FIG. 3 is a cross-sectional view of the main part taken along the cutting line, FIG. I shown in Figure 3
FIG. 2 is a cross-sectional view of the main part taken along the cutting line V-IV'. In the drawing, 21 is a magnetic substrate, 22 is a first insulating layer,
23 is the first spiral coil conductor layer, 24 is the second insulating layer, 25 is the magnetic pole, 26 is the ferromagnetic layer, 26a is the first ferromagnetic layer (Ml? head), 27 is the insulating layer, 28 is the conductor terminal layer,
29 is a third insulating layer, 30 is a second spiral coil conductor layer, 31 is a fourth insulating layer, and 32 is a magnetic recording medium. Figure 1 π Figure 2
Claims (1)
ド部と記録用単磁極I@線型ヘソF部とを一体に構成し
た複合ヘッドであって、」二記記録用単僻極捲線型ヘッ
ド部の磁極を、強磁性体層と絶i+i層とを交互に、か
つ多層に積層した多層構造とし、該多層構造の磁極を構
成した複数の強磁性体層の内の、何れか一つの強磁性体
層を再生用磁気抵抗効果型ヘッド部として機能するよう
に構成したことを特徴とする垂直磁気記録用記録再生複
合ヘッド。 (2)上記磁極を構成する各強磁性体層の厚さが、40
0人〜1000人、絶縁層の厚さが、100人〜500
人であることを特徴とする特許請求の範囲第(1)項に
記載の垂直磁気記録用記録再生複合ヘッド。[Scope of Claims] (11) A composite head in which a reproducing magnetoresistive head section and a recording single magnetic pole I@linear navel F section are integrated by a thin film on a substrate, The magnetic pole of the remote pole winding type head part has a multilayer structure in which ferromagnetic layers and absolute i+i layers are laminated alternately in multiple layers, and among the plurality of ferromagnetic layers that constitute the magnetic pole of the multilayer structure, A recording/reproducing composite head for perpendicular magnetic recording, characterized in that one of the ferromagnetic layers is configured to function as a magnetoresistive head section for reproduction. (2) Each ferromagnetic material forming the magnetic pole. The layer thickness is 40
0 to 1000 people, insulation layer thickness 100 to 500 people
The recording/reproducing composite head for perpendicular magnetic recording according to claim (1), which is a human head.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16721283A JPS6059517A (en) | 1983-09-09 | 1983-09-09 | Recording and reproducing composite head for vertical magnetic recording |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16721283A JPS6059517A (en) | 1983-09-09 | 1983-09-09 | Recording and reproducing composite head for vertical magnetic recording |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6059517A true JPS6059517A (en) | 1985-04-05 |
Family
ID=15845497
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16721283A Pending JPS6059517A (en) | 1983-09-09 | 1983-09-09 | Recording and reproducing composite head for vertical magnetic recording |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6059517A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62262213A (en) * | 1986-05-07 | 1987-11-14 | Alps Electric Co Ltd | Thin film magnetic head for vertical magnetic recording |
JPS63317914A (en) * | 1987-06-19 | 1988-12-26 | Fujitsu Ltd | Thin film magnetic head |
US7296338B2 (en) | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
US7436633B2 (en) | 2004-10-15 | 2008-10-14 | Tdk Corporation | Thin-film magnetic head, head gimbal assembly and hard disk system |
US7588884B2 (en) | 2004-05-28 | 2009-09-15 | Hitachi Global Storage Technologies Netherlands B.V. | Method for enhancing wafer alignment marks |
US8049989B2 (en) | 2007-12-26 | 2011-11-01 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head for perpendicular recording having stepped wrap around shield with independent control of write pole track width and flare point dimensions |
-
1983
- 1983-09-09 JP JP16721283A patent/JPS6059517A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62262213A (en) * | 1986-05-07 | 1987-11-14 | Alps Electric Co Ltd | Thin film magnetic head for vertical magnetic recording |
JPS63317914A (en) * | 1987-06-19 | 1988-12-26 | Fujitsu Ltd | Thin film magnetic head |
US7588884B2 (en) | 2004-05-28 | 2009-09-15 | Hitachi Global Storage Technologies Netherlands B.V. | Method for enhancing wafer alignment marks |
US7296338B2 (en) | 2004-07-30 | 2007-11-20 | Hitachi Global Storage Technologies Netherlands B.V. | Method and apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
US7978430B2 (en) | 2004-07-30 | 2011-07-12 | Hitachi Global Storage Technologies Netherlands B.V. | Apparatus for providing a reverse air bearing surface head with trailing shield design for perpendicular recording |
US7436633B2 (en) | 2004-10-15 | 2008-10-14 | Tdk Corporation | Thin-film magnetic head, head gimbal assembly and hard disk system |
US8049989B2 (en) | 2007-12-26 | 2011-11-01 | Hitachi Global Storage Technologies Netherlands B.V. | Magnetic head for perpendicular recording having stepped wrap around shield with independent control of write pole track width and flare point dimensions |
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