JPS59227023A - Hall effect type thin film magnetic head - Google Patents

Hall effect type thin film magnetic head

Info

Publication number
JPS59227023A
JPS59227023A JP10129983A JP10129983A JPS59227023A JP S59227023 A JPS59227023 A JP S59227023A JP 10129983 A JP10129983 A JP 10129983A JP 10129983 A JP10129983 A JP 10129983A JP S59227023 A JPS59227023 A JP S59227023A
Authority
JP
Japan
Prior art keywords
head
core
hall effect
effect element
pieces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10129983A
Other languages
Japanese (ja)
Other versions
JPH0459684B2 (en
Inventor
Jiro Torio
鳥生 次郎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP10129983A priority Critical patent/JPS59227023A/en
Publication of JPS59227023A publication Critical patent/JPS59227023A/en
Publication of JPH0459684B2 publication Critical patent/JPH0459684B2/ja
Granted legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G11INFORMATION STORAGE
    • G11BINFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127Structure or manufacture of heads, e.g. inductive
    • G11B5/33Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only
    • G11B5/37Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using galvano-magnetic devices, e.g. Hall-effect devices using Hall or Hall-related effect, e.g. planar-Hall effect or pseudo-Hall effect
    • G11B5/372Structure or manufacture of flux-sensitive heads, i.e. for reproduction only; Combination of such heads with means for recording or erasing only using galvano-magnetic devices, e.g. Hall-effect devices using Hall or Hall-related effect, e.g. planar-Hall effect or pseudo-Hall effect in magnetic thin films
    • G11B5/374Integrated structures

Landscapes

  • Magnetic Heads (AREA)
  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)

Abstract

PURPOSE:To simplify a structure, and also to reduce a distortion of a reproducing waveform by providing an output terminal at a right angle with a bias current direction of a Hall effect element, applying a magnetic flux vertically to the element suface, connecting in common one end of a bias terminal, providing a connecting wire linked with a core, and using a gap in common at the time of recording and reproducing. CONSTITUTION:2, 1, ai and bi, ci and di, (d) and d', and 4 denote a ferrite substrate used as the first core, too, a Hall effect element film for each head of N pieces, N pairs of output terminals, N pieces of bias current terminals, its common terminals, and a connecting wire, respectively. The substrate 2 and the second cores 3 of N pieces form N pieces of head cores having a gap (g), a magnetic flux corresponding to a signal magnetic field is led into the core, and the magnetic flux passes through the Hall effect element film and is shunted. That is to say, a magnetic flux density is applied vertically to the Hall effect element film, and signal voltage corresponding to N pieces of tracks is generated in the terminals ai, bi. In case of recording, a high frequency voltage for bias is applied between the terminals (d), d', and a bias magnetic field is generated in the gap (g). The signal magnetic field applies a signal current to a winding 5 formed on N pieces of core parts. In this regard, a reproducing output is in proportion to a Hall coefficient, a bias current and a magnetic flux density, in inverse proportion to a film thickness, and does not contain the secondary higher harmonic distortion.

Description

【発明の詳細な説明】 この発明はホール効果素子を用いたマルチトラック薄膜
ヘッドの構造に関するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to the structure of a multi-track thin film head using Hall effect elements.

近年、ディジタルオーディオテープ装置用としてマルチ
トラック薄膜ヘッドが開発されている。
In recent years, multi-track thin film heads have been developed for use in digital audio tape devices.

これらの装置では記録ヘッドとしてはインダクテイプ形
薄膜ヘッドが、また再生ヘッドとしてはテープ速度に関
係なく大きな出力が得られる磁気抵抗効果形ヘッド(以
後MRヘッドと呼ぶ)がそれぞれ用いられている。
In these devices, an induct tape type thin film head is used as a recording head, and a magnetoresistive head (hereinafter referred to as MR head), which can obtain a large output regardless of the tape speed, is used as a reproducing head.

このように、従来ヘッドではそれぞれ独立した記録用イ
ンダクテイブヘッドと再生用MRヘッドとを一体化した
いわゆるコンビネーションヘットであるため、それぞれ
のヘッドのギャップの平行性、テープとヘッドとの良好
なコンタクトおよびトラックの相互位置を確保すること
が困難で、構造が複雑となり、生産性も悪かった。また
MRヘッドはその再生原理から、再生波形の2次高調波
歪が存在し、高密度記録・再生を達成する上で障害とな
っていた。
In this way, conventional heads are so-called combination heads that integrate independent recording inductive heads and playback MR heads, so the parallelism of the gaps between the respective heads and good contact between the tape and the head are ensured. Also, it was difficult to ensure the mutual position of the trucks, resulting in a complex structure and poor productivity. Furthermore, due to the reproduction principle of the MR head, second-order harmonic distortion exists in the reproduced waveform, which has been an obstacle to achieving high-density recording and reproduction.

この発明は上記のような従来のものの欠点を除去するだ
めになされたもので、基板上に複数個の磁気ヘッドを構
成する薄膜磁気ヘッド装置において、上記基板又は基板
上に形成された各ヘッド用第1コア、第1コア上にそれ
ぞれ設けた各ヘッド用ホール効果素子、この各ホール効
果素子の一方向両端にそれぞれ設けた各ヘッド相電流端
子、上記各ホール効果素子の上記一方向と直角な方向両
端にそれぞれ設けた各ヘッド用電圧端子、上記一方向と
これに直角な方向のそれぞれに直角な方向に磁束が発生
するように一端部を上記各ホール効果素子上にそれぞれ
設は他端部と第1コアとの間でそれぞれ磁気ギャップを
形成する各ヘッド用第2コア、上記各コアとそれぞれリ
ンクする各ヘッド用捲線、各ヘッドの電流端子の一方を
互いに接続して共通端子とし、各ヘッドの上記コアとリ
ンクする接続線を備えたものにして、記録および再生で
ヘッドギャップを共用できる一体化ヘッド構造とするこ
とで、構造および組立が簡単で、再生波形の歪が少ない
高密度記録・再生に適したホール効果形薄膜磁気ヘッド
を提供することを目的としている。
The present invention has been made to eliminate the drawbacks of the conventional devices as described above, and in a thin film magnetic head device in which a plurality of magnetic heads are configured on a substrate, a magnetic head device for each head formed on the substrate or a substrate is provided. A first core, each head Hall effect element provided on the first core, each head phase current terminal provided at both ends of each Hall effect element in one direction, and a direction perpendicular to the one direction of each Hall effect element. Voltage terminals for each head are provided at both ends of the direction, and one end is provided on each of the Hall effect elements so that magnetic flux is generated in a direction perpendicular to the one direction and a direction perpendicular to this direction. a second core for each head which forms a magnetic gap between each core and the first core, a winding for each head linked to each core, one of the current terminals of each head is connected to each other to form a common terminal, and each The integrated head structure is equipped with a connection line that links with the core of the head, and the head gap can be shared for recording and playback, allowing for high-density recording with simple structure and assembly and low distortion of the playback waveform. - The purpose is to provide a Hall effect type thin film magnetic head suitable for reproduction.

先ず、この発明に係わるホール効果素子の動作を説明す
る。第1図において(1)は厚さ1μm程度に形成され
たIn13b半導体等ホール効果を有する薄膜素子であ
る。(c) 、 (d)は素子のバイアス電流端子。
First, the operation of the Hall effect element according to the present invention will be explained. In FIG. 1, (1) is a thin film element having a Hall effect, such as an In13b semiconductor formed to a thickness of about 1 μm. (c) and (d) are the bias current terminals of the device.

(1)はバイアス電流、 (a) 、 (b)は出力端
子、(B)はこの素子面に垂直に加えられる信号に応じ
た磁束密度を示す。今、素子厚さをδとすると出力電圧
SはE3=RH−r@B/δ・・・+11式で表わされ
る。RHはホール係数と呼ばれ1/n−eにひとしい。
(1) shows the bias current, (a) and (b) show the output terminals, and (B) shows the magnetic flux density according to the signal applied perpendicularly to the element surface. Now, if the element thickness is δ, the output voltage S is expressed by E3=RH-r@B/δ...+11 formula. RH is called the Hall coefficient and is equal to 1/ne.

ここにeは電子の電気量、nはキャリア電子の濃度を表
わす。(1)式にみるようにホール素子の出力電圧は信
号磁束密度Bに比較し、第2高調波歪を有せず、また、
テープ速度に依存しないことがわかる。
Here, e represents the electrical quantity of electrons, and n represents the concentration of carrier electrons. As seen in equation (1), the output voltage of the Hall element has no second harmonic distortion compared to the signal magnetic flux density B, and
It can be seen that it does not depend on tape speed.

以下この発明の実施例を図について説明する。Embodiments of the present invention will be described below with reference to the drawings.

第2図において(2)は第1コアを兼ねるフェライト基
板、(1)はこの上に形成されたN1固の各ヘッド用ホ
ール効果素子膜、 (al)、 (b+)、−−(ay
t)、 (bN)はそれぞれの素子に接続するN対の各
ヘッド用電圧端子、 (c、)、 (dl)、・−−−
−(cN)、 (dN)はそれぞれの素子に接続するN
個の各ヘッド用電流端子で(d)。
In FIG. 2, (2) is a ferrite substrate that also serves as the first core, (1) is an N1-based Hall effect element film for each head formed on this, (al), (b+), --(ay
t), (bN) are N pairs of voltage terminals for each head connected to each element, (c, ), (dl), ...
-(cN), (dN) are N connected to each element
(d) with current terminals for each head.

(d)は(dl)・・・・・・(dN)の共通端子で(
4)はそれぞれの端子(d、)、・−・・・・(dN)
 、θ)、(ci)を接続する接続線、なお(a)。
(d) is the common terminal of (dl)...(dN) (
4) are each terminal (d,), ... (dN)
, θ), (ci), and (a).

(b)、 (c)、 (d)の符号はそれぞれ第1図の
原理図と対応する。(3)は媒体との対向面で第1コア
(2)との間でギャップ(g)を有し、ホール効果素子
膜(1)上でフェライト基板(2)とシャントする第2
コアで、パーマロイ薄膜等のパターニングによって得ら
れる。
The symbols (b), (c), and (d) correspond to the principle diagram in FIG. 1, respectively. (3) has a gap (g) between it and the first core (2) on the surface facing the medium, and the second core shunts with the ferrite substrate (2) on the Hall effect element film (1).
The core is obtained by patterning a permalloy thin film or the like.

(5)は第1コア(2)とそれぞれの第2コア(3)と
リンクする捲線である。また第2コアシャント部とホー
ル効果素子膜(11との間及び捲線(5)及び各端子導
体(al)、 (b、 )−・−−−(aN)、 (b
NNA3間には絶縁層膜が必要であるが図では省略した
。この他ギャップスペーサ膜等実際の薄膜ヘッドプロセ
スで必要な製膜工程があるが、繁雑となるのをさけるだ
め、この発明の詳細な説明するに必要な部分のみについ
て図示した。また、構造に対する理解を容易にするため
、N番目の素子に対応する第2コア(3)は省略した。
(5) is a winding linking the first core (2) and each second core (3). Also, between the second core shunt part and the Hall effect element film (11), the winding (5) and each terminal conductor (al), (b, )---(aN), (b
Although an insulating layer film is required between the NNAs 3, it is omitted in the figure. There are other film forming steps such as gap spacer films that are necessary in the actual thin film head process, but to avoid complication, only the parts necessary for detailed explanation of the present invention are illustrated. Further, in order to facilitate understanding of the structure, the second core (3) corresponding to the Nth element is omitted.

先ず、この実施例によるヘッドの再生過程について説明
する。N個のバイアス電流端子(cl)、(c2)。
First, the reproducing process of the head according to this embodiment will be explained. N bias current terminals (cl), (c2).

・・・(cN)と共通バイアス電流端子(d)、 (a
)との間に。
...(cN) and common bias current terminal (d), (a
) between.

直流電圧を印加し、それぞれの素子にノくイアスミ施工
を流す。フェライト基板(2)とN個の第2コア(3)
はギャップ(g)を有するN個のへラドコアを形成し、
テープ等の媒体からの信号磁界に応じた磁束がコア内に
導びかれ、これらの磁束が、ホール効果素子膜を貫通し
てシャントする。すなわち、信号に応じた磁束密度Bが
ホール効果素子膜に垂直に印加され、出力用電圧端子(
al)、(bl)、・−・・・・(aN)。
Apply DC voltage and apply the insulated aluminum to each element. Ferrite substrate (2) and N second cores (3)
forms N herad cores with a gap (g),
Magnetic flux corresponding to a signal magnetic field from a medium such as a tape is guided into the core, and these fluxes shunt through the Hall effect element membrane. That is, a magnetic flux density B corresponding to the signal is applied perpendicularly to the Hall effect element film, and the output voltage terminal (
al), (bl), ... (aN).

(bN)にそれぞれN個のトラックに応じた信号電圧を
発生することになる。
(bN), a signal voltage corresponding to each of the N tracks is generated.

つぎにこの実施例ヘッドを記録ヘッドとして用いるとき
には、端子(d)、(A)間に、記録電流バイアスのだ
めの高周波電圧を印加し、ヘッドギャップ(g)におい
て、記録電流バイアス磁界を発生する。
Next, when this embodiment head is used as a recording head, a high frequency voltage for recording current bias is applied between terminals (d) and (A) to generate a recording current bias magnetic field in the head gap (g).

さらにこのバイアス記録磁界に重畳させる信号磁界は、
それぞれのN個のコア部に形成された捲線(5)に信号
電流を印加することで達成される。
Furthermore, the signal magnetic field superimposed on this bias recording magnetic field is
This is achieved by applying a signal current to the windings (5) formed in each of the N core parts.

記録信号捲線は端子導体(a) 、 (b) 、 (e
) 、 (d)上に絶縁層を介して形成されだ1ターン
コイル、又は複数のスパイラル状コイル又は積層コイル
とすることができる。
The recording signal winding consists of terminal conductors (a), (b), (e
), (d) can be formed on the coil with an insulating layer interposed therebetween, and can be a one-turn coil, a plurality of spiral coils, or a laminated coil.

なお、上記実施例ではフェライト基板(2)を用い。Note that in the above embodiment, a ferrite substrate (2) is used.

この基板が第1コアを兼用する構造としたが、セラミッ
ク ガラス、サファイア等の非磁性基板を用いて、この
上に先ずパーマロイ、センダスト等の磁性薄膜よりなる
第1コアを形成し、この上に上記の構成の素子を積層し
ても、上記実施例と同様の効果を奏する。
The structure was such that this substrate also served as the first core, but a non-magnetic substrate made of ceramic glass, sapphire, etc. was used, and the first core made of a magnetic thin film of permalloy, sendust, etc. was formed on top of this. Even if elements having the above configuration are stacked, the same effects as in the above embodiment can be obtained.

以上のように、この発明によれば、基板上に複数個の磁
気ヘッドを構成する薄膜磁気ヘッド装置において、上記
基板又は基板上に形成された各ヘッド用第1コア、第1
コア上にそれぞれ設けた各ヘッド用ホール効果素子、こ
の各ホール効果素子の一方向両端にそれぞれ設けた各ヘ
ッド用電流端子、上記各ホール効果素子の上記一方向と
直角な方向両端にそれぞれ設けた各ヘッド用電圧端子。
As described above, according to the present invention, in a thin film magnetic head device comprising a plurality of magnetic heads on a substrate, a first core for each head formed on the substrate or a first
A Hall effect element for each head provided on the core, a current terminal for each head provided at both ends of each Hall effect element in one direction, and a current terminal for each head provided at both ends of each Hall effect element in a direction perpendicular to the one direction. Voltage terminal for each head.

上記一方向とこれに直角な方向のそれぞれに直角な方向
に磁束が発生するように、一端部を上記各ボール効果素
子上にそれぞれ設け、他端部と第1コアとの間でそれぞ
れ磁気ギャップを形成する各ヘッド用第2コア、上記各
コアとそれぞれリンクする各ヘッド用捲線、各ヘッドの
電流端子の一方を互いに接続して共通端子とし、各ヘッ
ドの上記コアとリンクする接続線を備えたものにしてホ
ール効果素子のバイアス電流印加用端子を共通としかつ
、N個のコアを貫通する構造としだので、再生時にはホ
ール効果素子のバイアス印加導体として用いることがで
きる他、記録時には記録バイアス磁界印加用コイルとし
ても用いることができ。
One end is provided on each of the ball effect elements, and a magnetic gap is formed between the other end and the first core so that magnetic flux is generated in a direction perpendicular to the one direction and a direction perpendicular to the one direction. A second core for each head forming a second core, a winding for each head linked to each core, one of the current terminals of each head connected to each other to form a common terminal, and a connecting wire linked to the core of each head. Since the bias current application terminal of the Hall effect element is common and has a structure that passes through N cores, it can be used as a bias application conductor of the Hall effect element during reproduction, and it can also be used as a recording bias conductor during recording. It can also be used as a coil for applying a magnetic field.

N個のヘッドギャップを記録ギャップ、再生用ギャップ
として共用できるので、ヘッド構成が簡単で、かつ、第
2高調波歪のない高密度記録・再生に適したホール効果
形薄膜磁気ヘッドが得られる効果がある。
Since N head gaps can be shared as recording gaps and reproduction gaps, a Hall effect thin film magnetic head with a simple head configuration and free of second harmonic distortion suitable for high-density recording and reproduction can be obtained. There is.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明に係わるホール効果素子の動作原理図
、第2図はこの発明の一実施例を示す斜視図で+11は
ホール効果素子膜、(2)は第1コアを兼ねるフェライ
ト基板、(3)は薄膜磁性体より成る第2コア、 (a
l)、 (b、)、−=−(aN)、 (bN)dN対
の電圧端子、(cl)、””−’(eN)はN個の電流
端子、 (a)、 (a)は共通電流端子、(5)は捲
線である。 なお9図中、同一符号は同−又は相当部分を示すO 代理人大岩増雄 第 1 図 第 2 図 (
Fig. 1 is a diagram of the operating principle of a Hall effect element according to the present invention, and Fig. 2 is a perspective view showing an embodiment of the present invention, in which +11 is a Hall effect element film, (2) is a ferrite substrate that also serves as a first core, (3) is a second core made of a thin film magnetic material, (a
l), (b, ), -=-(aN), (bN) dN pairs of voltage terminals, (cl), ""-' (eN) are N current terminals, (a), (a) are The common current terminal (5) is a winding. In Figure 9, the same reference numerals indicate the same or equivalent parts.

Claims (1)

【特許請求の範囲】 基板上に複数個の磁気ヘッドを構成する薄膜磁気ヘッド
装置において、上記基板又は基板上に形成された各ヘッ
ド用第1コア、第1コア上にそれぞれ設けた各ヘッド用
ホール効果素子、この各ホール効果素子の一方向両端に
それぞれ設けた各ヘッド相電流端子、上記各ホール効果
素子の上記一方向と直角な方向両端にそれぞれ設けた各
ヘッド用型圧端子、上記一方向とこれに直角な方向のそ
れぞれに直角な方向に磁束が発生するように1一端部を
上記各ホール効果素子上にそれぞれ設け。 他端部と第1コアとの間でそれぞれ磁気ギャップを形成
する各ヘッド用第2コア、上記各コアとそれぞれリンク
する各ヘッド用捲線、各ヘッドの電流端子の一方を互い
に接続して共通端子とし各ヘッドの上記コアとリンクす
る接続線を備えたホール効果形薄膜磁気−・ラド。
[Claims] In a thin film magnetic head device comprising a plurality of magnetic heads on a substrate, the substrate or a first core for each head formed on the substrate, and a first core for each head provided on the first core, respectively. A Hall effect element, each head phase current terminal provided at both ends of each Hall effect element in one direction, each head pressure terminal provided at both ends of each Hall effect element in a direction perpendicular to the one direction, each of the above One end portion is provided on each of the Hall effect elements so that magnetic flux is generated in a direction perpendicular to the direction and a direction perpendicular to the direction. A second core for each head forming a magnetic gap between the other end and the first core, a winding for each head linked to each core, and a common terminal by connecting one of the current terminals of each head to each other. and a Hall effect thin film magnetic field with connecting wires linking the core of each head.
JP10129983A 1983-06-07 1983-06-07 Hall effect type thin film magnetic head Granted JPS59227023A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10129983A JPS59227023A (en) 1983-06-07 1983-06-07 Hall effect type thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10129983A JPS59227023A (en) 1983-06-07 1983-06-07 Hall effect type thin film magnetic head

Publications (2)

Publication Number Publication Date
JPS59227023A true JPS59227023A (en) 1984-12-20
JPH0459684B2 JPH0459684B2 (en) 1992-09-24

Family

ID=14296937

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10129983A Granted JPS59227023A (en) 1983-06-07 1983-06-07 Hall effect type thin film magnetic head

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6937434B2 (en) * 2001-08-24 2005-08-30 Hitachi, Ltd. Magnetic field sensor utilizing anomalous hall effect magnetic film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4715960U (en) * 1971-03-23 1972-10-24
JPS5022012U (en) * 1973-06-25 1975-03-12
JPS5224404A (en) * 1975-08-20 1977-02-23 Hitachi Ltd Simple in-coming order response device

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4715960U (en) * 1971-03-23 1972-10-24
JPS5022012U (en) * 1973-06-25 1975-03-12
JPS5224404A (en) * 1975-08-20 1977-02-23 Hitachi Ltd Simple in-coming order response device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6937434B2 (en) * 2001-08-24 2005-08-30 Hitachi, Ltd. Magnetic field sensor utilizing anomalous hall effect magnetic film

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JPH0459684B2 (en) 1992-09-24

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