JPH0673167B2 - Thin film magnetic head - Google Patents
Thin film magnetic headInfo
- Publication number
- JPH0673167B2 JPH0673167B2 JP59189529A JP18952984A JPH0673167B2 JP H0673167 B2 JPH0673167 B2 JP H0673167B2 JP 59189529 A JP59189529 A JP 59189529A JP 18952984 A JP18952984 A JP 18952984A JP H0673167 B2 JPH0673167 B2 JP H0673167B2
- Authority
- JP
- Japan
- Prior art keywords
- magnetic
- film
- converter
- magnetic circuit
- conductor coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Description
【発明の詳細な説明】 〔発明の利用分野〕 本発明は薄膜磁気ヘッドに係り、特に書込みおよび読取
りの両方の変換器を持つ薄膜磁気ヘッドに関する。Description: FIELD OF THE INVENTION The present invention relates to thin film magnetic heads, and more particularly to thin film magnetic heads having both write and read transducers.
第３図に一般的な書込み、読取り兼用の薄膜磁気ヘッド
の構成を示す。第３図（ａ）は外観図、第３図（ｂ）は
第３図（ａ）のＡ−Ａ線断面図である。記録媒体に対し
て浮動体あるいは摺動体となる非磁性体の基体１の一面
に薄膜磁気ヘッド素子2,3が形成される。薄膜磁気ヘッ
ド素子2,3は基体１上に下地絶縁膜４を形成した後下部
磁性膜５が形成され、この上に絶縁膜６を介して導体コ
イル７が形成され、さらに絶縁膜６を介して上部磁性膜
８が形成され、これらの上に絶縁体からなる保護膜９が
形成されて成っている。なお前記上部および下部の磁性
膜は、媒体対向部で開放されており、その反対側におい
て磁気的に結合されている。導体コイル７は下部磁性膜
５と上部磁性膜８とから構成される磁気回路と鎖交して
いる。FIG. 3 shows the structure of a general thin film magnetic head for both writing and reading. 3 (a) is an external view, and FIG. 3 (b) is a sectional view taken along the line AA of FIG. 3 (a). Thin film magnetic head elements 2 and 3 are formed on one surface of a non-magnetic substrate 1 which is a floating body or a sliding body with respect to a recording medium. In the thin film magnetic head elements 2 and 3, a lower magnetic film 5 is formed after a base insulating film 4 is formed on a substrate 1, a conductor coil 7 is formed on the lower magnetic film 5 via an insulating film 6, and further an insulating film 6 is interposed. An upper magnetic film 8 is formed on the upper surface of the upper magnetic film 8, and a protective film 9 made of an insulator is formed on the upper magnetic film 8. The upper and lower magnetic films are open at the medium facing portion and magnetically coupled on the opposite side. The conductor coil 7 is linked to the magnetic circuit composed of the lower magnetic film 5 and the upper magnetic film 8.
このような構成の薄膜磁気ヘッドにおいて、書込効率の
向上のためには上下磁性膜5,8の磁極先端部５′,8′を
厚く、そして磁気ギャップ10を広くするのが望ましい。
一方読取効率特に高密度記録における読取効率を向上さ
せるには、磁極先端部５′,8′を薄く、磁気ギャップ10
を挟くするのが望ましい。このように高密度記録におけ
る書込み、読取りに要求される薄膜磁気ヘッドの構造は
相反するものとなり、一個の薄膜磁気ヘッドで書込みと
読取りを兼用することは困難になってきている。In the thin film magnetic head having such a structure, it is desirable to thicken the magnetic pole tip portions 5 ', 8'of the upper and lower magnetic films 5, 8 and widen the magnetic gap 10 in order to improve the writing efficiency.
On the other hand, in order to improve the reading efficiency especially in high density recording, the magnetic pole tips 5 ′ and 8 ′ should be thin and the magnetic gap 10
It is desirable to sandwich. As described above, the structures of the thin film magnetic head required for writing and reading in high density recording are contradictory, and it is becoming difficult to use both writing and reading by one thin film magnetic head.
そこで第４図に示すような、書込みおよび読取りの両方
の変換器を持つ薄膜磁気ヘッドが特開昭55−84018号で
提案された。これは非磁性体の基体11の上に絶縁体12を
介して第１の変換器13を形成し、この上に絶縁体14を平
坦な面となるように形成した後第２の変換器15を形成す
るもので、これによれば夫々の変換器を書込用と読取用
として形成できるが、基体上に二つの変換器を積み上げ
るため、上部に形成する薄膜の精度が出しずらく、製造
歩留りが悪いという欠点がある。従って工業製品とはな
り難いものである。Therefore, a thin film magnetic head having both write and read converters as shown in FIG. 4 was proposed in Japanese Patent Laid-Open No. 55-84018. This is because a first converter 13 is formed on a non-magnetic substrate 11 via an insulator 12, an insulator 14 is formed on the non-magnetic substrate 11 so as to have a flat surface, and then a second converter 15 is formed. According to this, it is possible to form the respective converters for writing and reading, but since the two converters are stacked on the substrate, the precision of the thin film formed on the top is difficult to obtain, It has the disadvantage of poor yield. Therefore, it is difficult to be an industrial product.
本発明の目的は、書込変換器と読取変換器を有する薄膜
磁気ヘッドにおける他の変換器からの影響を無くした読
取変換器と書込変換器が積層する薄膜磁気ヘッドを提供
することである。It is an object of the present invention to provide a thin film magnetic head in which a read transducer and a write transducer are stacked, in which the influence of other transducers in a thin film magnetic head having a write transducer and a read transducer is eliminated. .
本願の特徴は、媒体対向端が開放し他端が接続するよう
積層された磁性膜からなる第１の磁気回路、および第１
の磁気回路と鎖交する第１の導体コイルから構成される
読取変換器と、この読取変換器の上に形成された磁性膜
と第１の磁気回路を構成する磁性膜の一方とが媒体対向
端で開放し他端で接続して構成され、第１の磁気回路を
構成する磁性膜の一方を兼用する第２の磁気回路、およ
び第２の磁気回路と鎖交する第２の導体コイルとから構
成される書込変換器とからなり、読取変換器を構成する
第１の磁気回路と第１の導体コイルが、書込変換器を構
成する第２の磁気回路の内部に配置されていることを特
徴とする薄膜磁気ヘッドにあり、これによって変換器同
士の影響を無くし、読取変換器と書込変換器が積層する
薄膜磁気ヘッドを提供する。The feature of the present application is that the first magnetic circuit is formed of magnetic films laminated so that the medium facing end is opened and the other end is connected, and the first magnetic circuit.
Of the magnetic field formed on the read converter, and the magnetic film formed on the read converter and one of the magnetic films forming the first magnetic circuit face the medium. A second magnetic circuit that is open at one end and connected at the other end and that also serves as one of the magnetic films that form the first magnetic circuit; and a second conductor coil that links the second magnetic circuit. And a first magnetic circuit forming a read converter and a first conductor coil are arranged inside a second magnetic circuit forming the write converter. There is provided a thin film magnetic head characterized in that the influence of the converters is eliminated, and a thin film magnetic head in which a read converter and a write converter are laminated is provided.
以下本発明の一実施例を第１図および第２図を参照して
詳細に説明する。An embodiment of the present invention will be described in detail below with reference to FIGS. 1 and 2.
第１図は第３図（ｂ）に相当する図であり、薄膜磁気ヘ
ッドの断面を示す。記録媒体に対して浮動体あるいは摺
動体となる基体23の上に、薄膜形成技術により、下地絶
縁膜24を形成し、この上に下部磁性膜25,第１の導体コ
イル27,第１の上部磁性膜29を形成して読取変換器21を
構成している。下部磁性膜25と第１の上部磁性膜29は、
先端部で開放され後端部で磁気的に結合されて磁気回路
を構成し、導体コイル27はこの磁気回路に鎖交してい
る。この読取変換器21の上に絶縁体31を介して第２の導
体コイル32と第２の上部磁性膜34を形成する。第２の上
部磁性膜34は後端部で下部磁性膜25と磁気的に結合され
先端部で開放されて下部磁性膜25とで磁気回路を構成
し、この磁気回路に第２の導体コイル32が鎖交して書込
変換器22を構成している。書込変換器22の上部は絶縁体
からなる保護膜36で覆われている。FIG. 1 is a view corresponding to FIG. 3 (b) and shows a cross section of the thin film magnetic head. A base insulating film 24 is formed by a thin film forming technique on a substrate 23 that is a floating body or a sliding body for a recording medium, and a lower magnetic film 25, a first conductor coil 27, and a first upper portion are formed on the base insulating film 24. The magnetic film 29 is formed to form the reading converter 21. The lower magnetic film 25 and the first upper magnetic film 29 are
The open end is opened and the rear end is magnetically coupled to form a magnetic circuit, and the conductor coil 27 is linked to this magnetic circuit. A second conductor coil 32 and a second upper magnetic film 34 are formed on the read converter 21 via an insulator 31. The second upper magnetic film 34 is magnetically coupled to the lower magnetic film 25 at the rear end and is opened at the front end to form a magnetic circuit with the lower magnetic film 25. The second conductor coil 32 is connected to this magnetic circuit. Constitute a write converter 22 by interlinking with each other. The upper portion of the write converter 22 is covered with a protective film 36 made of an insulator.
次に前述の構成を有する薄膜磁気ヘッドの具体的な製造
方法を説明する。Next, a specific method of manufacturing the thin-film magnetic head having the above-described structure will be described.
基愛23はセラミック材等の非磁性体からなり、この上に
Al2O3（アルミナ）等の絶縁材をスパッタリングして下
地絶縁膜24を形成する。次にメッキあるいはスパタリン
グでFe−Ni（パーマロイ）の下部磁性膜25を形成する。
続いて有機樹脂等の層間絶縁膜26を塗布法により形成
し、この上にメッキあるいはスパッタリングによりCuあ
るいはAl等の第１導体コイル27を形成する。この導体コ
イル27上に再度有機樹脂等の層間絶縁膜28を形成し、続
いてメッキあるいはスパッタリングによりFe−Niの第１
の上部磁性膜29を形成する。第１の上部磁性膜29の先端
部は層間絶縁膜26により下部磁性膜25と離隔されて磁気
ギャップ30を構成し、後端部は下部磁性膜の予め絶縁体
が除去された部分に磁気的に結合される。このようにし
て下部磁性膜25と第１の上部磁性膜29とからなる磁気回
路に第１の導体コイル27が鎖交する読取変換器21を形成
する。読取変換器21を形成する場合、下部磁性膜25と第
１の上部磁性膜29の厚さは薄く形成し、磁気ギャップ30
も狭く形成する。The basic love 23 is made of non-magnetic material such as ceramic material,
The base insulating film 24 is formed by sputtering an insulating material such as Al 2 O 3 (alumina). Next, the lower magnetic film 25 of Fe-Ni (permalloy) is formed by plating or sputtering.
Subsequently, an interlayer insulating film 26 such as an organic resin is formed by a coating method, and a first conductor coil 27 such as Cu or Al is formed thereon by plating or sputtering. An interlayer insulating film 28 of organic resin or the like is formed again on the conductor coil 27, and then the first Fe--Ni first layer is formed by plating or sputtering.
The upper magnetic film 29 of is formed. The front end of the first upper magnetic film 29 is separated from the lower magnetic film 25 by the inter-layer insulating film 26 to form a magnetic gap 30, and the rear end thereof is magnetically formed in a portion of the lower magnetic film from which the insulator has been removed in advance. Be combined with. In this way, the read converter 21 in which the first conductor coil 27 is linked to the magnetic circuit composed of the lower magnetic film 25 and the first upper magnetic film 29 is formed. When forming the read converter 21, the lower magnetic film 25 and the first upper magnetic film 29 are formed thin, and the magnetic gap 30 is formed.
Also formed narrow.
続いて読取変換器21の上に有機樹脂等の絶縁体31を塗布
法により形成し、この上にメッキあるいはスパッタリン
グによりCu,Al等の第２の導体コイル32を形成する。さ
らに有機樹脂による層間絶縁膜33を形成し、この上にFe
−Niをメッキあるいはスパッタリングして第２の上部磁
性膜34を形成する。先端部において第２の上部磁性膜34
は下部磁性膜25,第１の上部磁性膜29と離隔されてお
り、後端部は、下部磁性膜25上の絶縁膜を局部的に除去
して、この部分に磁気的に結合される。従って下部磁性
膜25と第２の上部磁性膜34とで先端部に磁気ギャップ35
を有する磁気回路が構成され、この磁気回路に第２の導
体コイル32が鎖交する書込変換器22が形成される。第２
の上部磁性膜34は書込特性に必要な膜厚で形成される。
さらにこの上にAl2O3等からなる保護膜36をスパッタリ
ング等で形成し、最後に媒体対向面となる磁気ヘッド先
端部37を研磨加工する。Subsequently, an insulator 31 such as an organic resin is formed on the reading converter 21 by a coating method, and a second conductor coil 32 such as Cu or Al is formed on the insulator 31 by plating or sputtering. Further, an interlayer insulating film 33 made of organic resin is formed, and Fe is formed on the interlayer insulating film 33.
-Ni is plated or sputtered to form the second upper magnetic film 34. The second upper magnetic film 34 at the tip
Is separated from the lower magnetic film 25 and the first upper magnetic film 29, and the rear end portion is locally magnetically coupled to this portion by removing the insulating film on the lower magnetic film 25 locally. Therefore, the lower magnetic film 25 and the second upper magnetic film 34 form a magnetic gap 35 at the tip.
Is formed, and the write converter 22 in which the second conductor coil 32 interlinks is formed in this magnetic circuit. Second
The upper magnetic film 34 is formed to have a film thickness necessary for writing characteristics.
Further, a protective film 36 made of Al 2 O 3 or the like is formed thereon by sputtering or the like, and finally the magnetic head tip portion 37 which becomes the medium facing surface is polished.
次に本実施例による薄膜磁気ヘッドの特徴および動作を
説明する。Next, the characteristics and operation of the thin film magnetic head according to this embodiment will be described.
読取変換器21の磁気回路となる下部磁性膜25と第１の上
部磁性膜29は、再生分解能を高めるために極力薄く形成
され、また第１の導体コイル27には励磁電流を流す必要
がないので、エレクトロマイグレーションあるいは発熱
等の問題を考慮する必要がなく、薄く形成することがで
きる。従って読取変換器21の全体の高さは、書込変換器
22のそれと比較すれば、はるかに低いものとなる。読取
変換器21としての動作は、記録媒体に書込まれている情
報すなわち磁化反転信号を磁気ギャップ30で検知し、第
１の導体コイル27の両端に所要の電圧を生じさせる。こ
のとき、第１の導体コイル27は書込変換器22の磁気回路
の内部に配置されており、この磁気回路と鎖交していな
いため、書込変換器22の磁気ギャップ35で検知した位相
のズレた磁化反転信号の影響は無く、信号品質を劣化さ
せることはない。但し、この第１の導体コイル27の引出
し線を外部に引出す際、第２図に示す如く磁気回路の両
側から導体44,45として引出した場合は書込変換器22の
磁気回路に対して１ターン鎖交するため再生信号の品質
をある程度劣化させることになる。この場合は、第２図
の導体44′,45として同一側から引出すことが望まし
い。The lower magnetic film 25 and the first upper magnetic film 29, which are the magnetic circuit of the read converter 21, are formed as thin as possible in order to enhance the reproduction resolution, and it is not necessary to pass an exciting current to the first conductor coil 27. Therefore, it is not necessary to consider the problems such as electromigration and heat generation, and the thin film can be formed. Therefore, the overall height of the read converter 21 is
Much lower than that of 22. The operation as the read converter 21 detects the information written on the recording medium, that is, the magnetization reversal signal at the magnetic gap 30, and generates a required voltage across the first conductor coil 27. At this time, since the first conductor coil 27 is arranged inside the magnetic circuit of the write converter 22 and does not cross the magnetic circuit, the phase detected by the magnetic gap 35 of the write converter 22. There is no influence of the deviated magnetization reversal signal, and the signal quality is not deteriorated. However, when the lead wire of the first conductor coil 27 is drawn out to the outside, if it is drawn out as conductors 44 and 45 from both sides of the magnetic circuit as shown in FIG. Since the turns are interlinked, the quality of the reproduced signal is deteriorated to some extent. In this case, it is desirable that the conductors 44 'and 45 of FIG. 2 are drawn out from the same side.
書込変換器22の磁気回路は、下部磁性膜25と第２の上部
磁性膜34とで構成されているが、前述の如く読取変換器
21の高さが低いため、読取変換器21の磁気回路は書込変
換器22の磁気回路の一部として作用することになる。す
なわち下部磁性膜25と第１の上部磁性膜29が下部磁性膜
となり、書込特性に必要な厚さの磁気回路とするには非
常に都合が良い。書込変換器22の動作としては、第２の
導体コイル32に励磁電流を流すことにより、磁気回路に
磁束が流れ磁気ギャップ35より発生する漏れ磁束により
記録媒体に情報を書込む。このとき、第２の上部磁性膜
34および下部磁性膜25と第１の上部磁性膜29からなる下
部磁性膜には書込効率向上のために必要な多量の磁束を
流すことができる。The magnetic circuit of the write converter 22 is composed of the lower magnetic film 25 and the second upper magnetic film 34.
Due to the low height of 21, the magnetic circuit of the read transducer 21 will act as part of the magnetic circuit of the write transducer 22. That is, the lower magnetic film 25 and the first upper magnetic film 29 serve as a lower magnetic film, which is very convenient for forming a magnetic circuit having a thickness required for writing characteristics. As the operation of the write converter 22, by passing an exciting current through the second conductor coil 32, a magnetic flux flows in the magnetic circuit and information is written in the recording medium by the leakage magnetic flux generated from the magnetic gap 35. At this time, the second upper magnetic film
A large amount of magnetic flux necessary for improving the writing efficiency can be passed through the lower magnetic film including the lower magnetic film 34 and the lower magnetic film 25 and the first upper magnetic film 29.
以上の説明の如く本実施例によれば、読取変換器の磁気
回路を書込変換器の磁気回路の一部としたので薄膜の積
層数を減らすことができる。従って薄膜の形成精度の向
上と製造プロセスの簡略化が計れ、製造歩留りを向上す
ることができる。As described above, according to this embodiment, since the magnetic circuit of the read converter is part of the magnetic circuit of the write converter, the number of laminated thin films can be reduced. Therefore, the accuracy of forming the thin film can be improved, the manufacturing process can be simplified, and the manufacturing yield can be improved.
本発明によれば、磁気回路及び導体コイルからなる読取
変換器を、書込変換器の磁気回路の内部に配置すること
により、変換器同士の影響を無くした、読取変換器と書
込変換器が積層する薄膜磁気ヘッドを得ることができ
る。According to the present invention, the read converter composed of the magnetic circuit and the conductor coil is arranged inside the magnetic circuit of the write converter, thereby eliminating the influence of the converters. It is possible to obtain a thin film magnetic head in which
第１図は本発明の一実施例による薄膜磁気ヘッドの断面
図、第２図は第１図の一部を示す図で読取変換器部分の
平面図、第３図は薄膜磁気ヘッドの一般的な構成を示す
図で（ａ）は斜視図、（ｂ）は（ａ）のＡ−Ａ線断面
図、第４図は従来の書込変換器と読取変換器を有する薄
膜磁気ヘッドの断面図である。 21……読取変換器 22……書込変換器 23……基体 25……下部磁性膜 27……第１の導体コイル 29……第１の上部磁性膜 32……第２の導体コイル 34……第２の上部磁性膜FIG. 1 is a cross-sectional view of a thin film magnetic head according to an embodiment of the present invention, FIG. 2 is a view showing a part of FIG. 1 and is a plan view of a read transducer portion, and FIG. 3 is a general view of a thin film magnetic head. FIG. 4A is a perspective view, FIG. 4B is a sectional view taken along line AA of FIG. 4A, and FIG. 4 is a sectional view of a conventional thin film magnetic head having a write converter and a read converter. Is. 21 …… Read converter 22 …… Write converter 23 …… Base 25 …… Lower magnetic film 27 …… First conductor coil 29 …… First upper magnetic film 32 …… Second conductor coil 34 …… ... Second upper magnetic film
Claims (3)
層された磁性膜からなる第１の磁気回路、および前記第
１の磁気回路と鎖交する第１の導体コイルから構成され
る読取変換器と、 前記読取変換器の上に形成された磁性膜と前記第１の磁
気回路を構成する磁性膜の一方とが媒体対向端で開放し
他端で接続して構成され、前記第１の磁気回路を構成す
る磁性膜の一方を兼用する第２の磁気回路、および前記
第２の磁気回路と鎖交する第２の導体コイルとから構成
される書込変換器とからなり、 前記読取変換器を構成する前記第１の磁気回路と前記第
１の導体コイルが、前記書込変換器を構成する前記第２
の磁気回路の内部に配置されていることを特徴とする薄
膜磁気ヘッド。1. A first magnetic circuit comprising a magnetic film laminated so that the medium facing end is open and the other end is connected, and a first conductor coil interlinking with the first magnetic circuit. The read converter, the magnetic film formed on the read converter, and one of the magnetic films forming the first magnetic circuit are opened at the medium facing end and connected at the other end, and A second magnetic circuit that also serves as one of the magnetic films that configure the first magnetic circuit, and a write converter that includes a second conductor coil that links the second magnetic circuit. The first magnetic circuit and the first conductor coil that form the read converter form the second magnetic circuit that forms the write converter.
A thin-film magnetic head, which is arranged inside the magnetic circuit.
換器の上に形成された磁性膜の媒体対向端の厚さが、前
記第１の磁気回路を構成する磁性膜の媒体対向端の厚さ
よりも大きいことを特徴とする特許請求の範囲第１項記
載の薄膜磁気ヘッド。2. The medium-facing end of the magnetic film forming the first magnetic circuit has a thickness at the medium-facing end of the magnetic film formed on the read converter. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head has a thickness larger than the thickness.
の導体コイルの厚さよりも薄いことを特徴とする特許請
求の範囲第１項または第２項に記載の薄膜磁気ヘッド。3. The thickness of the first conductor coil is equal to that of the second conductor coil.
3. The thin-film magnetic head according to claim 1, wherein the thin-film magnetic head is thinner than the conductor coil.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59189529A JPH0673167B2 (en) | 1984-09-12 | 1984-09-12 | Thin film magnetic head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59189529A JPH0673167B2 (en) | 1984-09-12 | 1984-09-12 | Thin film magnetic head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168713A JPS6168713A (en) | 1986-04-09 |
| JPH0673167B2 true JPH0673167B2 (en) | 1994-09-14 |
Family
ID=16242815
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59189529A Expired - Lifetime JPH0673167B2 (en) | 1984-09-12 | 1984-09-12 | Thin film magnetic head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0673167B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4907113A (en) * | 1987-07-29 | 1990-03-06 | Digital Equipment Corporation | Three-pole magnetic recording head |
| US5103553A (en) * | 1987-07-29 | 1992-04-14 | Digital Equipment Corporation | Method of making a magnetic recording head |
| JP2838456B2 (en) * | 1991-04-22 | 1998-12-16 | シャープ株式会社 | Composite thin-film magnetic head and method of manufacturing the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59117726A (en) * | 1982-12-25 | 1984-07-07 | Fujitsu Ltd | Thin film magnetic head |
-
1984
- 1984-09-12 JP JP59189529A patent/JPH0673167B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6168713A (en) | 1986-04-09 |
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