JPH1064014A - Thin film magnetic head device - Google Patents
Thin film magnetic head deviceInfo
- Publication number
- JPH1064014A JPH1064014A JP22362196A JP22362196A JPH1064014A JP H1064014 A JPH1064014 A JP H1064014A JP 22362196 A JP22362196 A JP 22362196A JP 22362196 A JP22362196 A JP 22362196A JP H1064014 A JPH1064014 A JP H1064014A
- Authority
- JP
- Japan
- Prior art keywords
- slider
- inclined surface
- magnetic head
- converting element
- head device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
- Adjustment Of The Magnetic Head Position Track Following On Tapes (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、薄膜磁気ヘッド装
置に係り、とくに浮上面を有するスライダの端面に電磁
変換素子を備えてなる薄膜磁気ヘッド装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thin-film magnetic head device, and more particularly to a thin-film magnetic head device having an electromagnetic transducer on an end surface of a slider having a flying surface.
【0002】[0002]
【従来の技術】昨今にあっては、磁気記録の高密度化及
び高速化の為、スライダーサイズがますます小型化され
る傾向にある。これは、小型化すると、磁気記録の高密
度化に必要な低浮上量状態を得ることが可能となり、
又、ジンバルとの組み合わせにおいてクラッシュ事故の
低減に効果的に作用し、更に空気抵抗が少なくなるため
シーク運動の高速化が出来るからである。2. Description of the Related Art In recent years, the slider size has tended to be further reduced in order to increase the density and speed of magnetic recording. This means that when miniaturized, it becomes possible to obtain a low flying height state required for high-density magnetic recording,
Further, in combination with the gimbal, it effectively works to reduce crash accidents, and furthermore, the air resistance is reduced, so that the seek movement can be sped up.
【0003】[0003]
【発明が解決しようとする課題】しかしながら、上記従
来例においてスライダを小型化すると、電磁変換素子に
接続されるターミナルのサイズが従来より小さくなり、
ターミナルとリード線のボンディングポイントの位置だ
し精度が難しくなるという不都合があった。However, when the slider is reduced in size in the above conventional example, the size of the terminal connected to the electromagnetic transducer becomes smaller than in the prior art.
There is an inconvenience that the positioning of the bonding point between the terminal and the lead wire becomes difficult.
【0004】また、スライダの小型化に対応した公知例
として、スライダの側面にターミナルを配置した特開平
02−252112号公報記載のものがある。しかしな
がら、この場合のターミナルは、電磁変換素子を保護し
ている保護膜の厚みの制限を受けるため十分にとること
ができず、その結果、リード線のボンディングの精度を
上げるのに多くの手間がかかるという不都合があった。Further, as a known example corresponding to the miniaturization of the slider, there is one disclosed in Japanese Patent Application Laid-Open No. 02-252112 in which terminals are arranged on the side surfaces of the slider. However, the terminal in this case cannot be sufficiently secured due to the limitation of the thickness of the protective film protecting the electromagnetic transducer, and as a result, much labor is required to increase the accuracy of lead wire bonding. There was such an inconvenience.
【0005】[0005]
【発明の目的】本発明は、かかる従来例の有する不都合
を改善し、とくに従来のターミナルの電極サイズを変更
せずにスライダの厚みを薄くし且つターミナルとリード
線のボンディングポイントの位置出しを容易になし得る
小型化された薄膜磁気ヘッド装置を提供することを、そ
の目的とする。SUMMARY OF THE INVENTION The object of the present invention is to improve the disadvantages of the prior art, and in particular to reduce the thickness of the slider without changing the electrode size of the conventional terminal and to facilitate the positioning of the bonding point between the terminal and the lead wire. It is an object of the present invention to provide a miniaturized thin-film magnetic head device that can be manufactured in a compact manner.
【0006】[0006]
【課題を解決するための手段】上記目的を達成するた
め、請求項1記載の発明では、浮上面を有するスライダ
と、このスライダの端面に装備された電磁変換素子とを
有する薄膜磁気ヘッド装置において、スライダの一端面
で前述した電磁変換素子が付される面を傾斜面とする、
という構成を採っている。According to a first aspect of the present invention, there is provided a thin-film magnetic head device having a slider having an air bearing surface and an electromagnetic transducer mounted on an end surface of the slider. A surface on one end surface of the slider to which the above-described electromagnetic transducer is attached is defined as an inclined surface,
The configuration is adopted.
【0007】このため、この請求項1記載の発明では、
傾斜面の面積を従来例の端面の場合と同一に設定する
と、その時のスライダ全体の厚さは、傾斜面としない場
合に比較して確実に薄くすることができる。このため、
スライダの小型化に伴いスライダの厚みが薄くなって
も、従来からのターミナルサイズは維持されるため、リ
ード線のボンディングポイントの位置出しは従来例の場
合と同様に容易となし得るようになっている。Therefore, according to the first aspect of the present invention,
When the area of the inclined surface is set to be the same as that of the end surface of the conventional example, the thickness of the entire slider at that time can be surely reduced as compared with the case where the inclined surface is not used. For this reason,
Even if the thickness of the slider is reduced with the miniaturization of the slider, the conventional terminal size is maintained, so that the positioning of the bonding point of the lead wire can be easily performed as in the conventional example. I have.
【0008】請求項2記載の発明では、前述したスライ
ダの電磁変換素子が付される面の傾斜面の角度を、磁気
記録媒体と対向する浮上面を基準として鋭角に設定す
る、という構成を採っている。According to the present invention, the angle of the inclined surface of the slider on which the electromagnetic transducer is provided is set to an acute angle with respect to the air bearing surface facing the magnetic recording medium. ing.
【0009】このため、この請求項2記載の発明では、
前述した請求項1記載の発明と同等に機能する。例えば
この場合、傾斜面とスライダの浮上面との成す角度をθ
(図2参照)とすると、厚さの割合は「sinθ」で決
定されるため、傾斜面としない場合に比較して確実に薄
くすることができる。また、図2に示すように加工し易
いという利点がある。Therefore, in the invention according to claim 2,
It functions equivalently to the above-described invention of claim 1. For example, in this case, the angle between the inclined surface and the flying surface of the slider is θ
(See FIG. 2), since the thickness ratio is determined by “sin θ”, the thickness can be reliably reduced as compared with the case where no inclined surface is provided. In addition, there is an advantage that processing is easy as shown in FIG.
【0010】請求項3記載の発明では、前述したスライ
ダの前述した電磁変換素子が付される面の傾斜面は、磁
気記録媒体と対向する浮上面との角度を45°±5°に
設定する、という構成を採っている。このため、この請
求項3記載の発明では、前述した請求項1記載の発明と
同等に機能するほか、例えば約「1/1.4」の厚さに
スライダを形成することができ、厚さを約3割薄くする
ことが可能となる。According to the third aspect of the present invention, the inclined surface of the slider to which the electromagnetic transducer is attached has an angle of 45 ° ± 5 ° between the magnetic recording medium and the air bearing surface facing the magnetic recording medium. , Is adopted. Therefore, according to the third aspect of the invention, in addition to functioning equivalently to the first aspect of the invention, the slider can be formed to have a thickness of, for example, about "1 / 1.4". Can be reduced by about 30%.
【0011】[0011]
【発明の実施の形態】以下、本発明の一実施の形態を図
1乃至図3に基づいて説明する。図1において、符号1
は磁気ヘッド用のスライダを示す。このスライダ1はそ
の一端面が傾斜面をなしている。そして、この傾斜面を
形成するスライダ1の一端面には、電磁変換素子2と、
この電磁変換素子2を保護する保護膜3と、前述した電
磁変換素子2のコイル部分の両端部に個別に連結された
ターミナル電極4,4とを備えている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described below with reference to FIGS. In FIG.
Denotes a slider for a magnetic head. The slider 1 has an inclined surface at one end. An electromagnetic transducer 2 is provided on one end surface of the slider 1 forming the inclined surface.
A protection film 3 for protecting the electromagnetic transducer 2 and terminal electrodes 4 and 4 individually connected to both ends of the coil portion of the electromagnetic transducer 2 are provided.
【0012】ここで、スライダ1の前述した電磁変換素
子2が付される面の傾斜面は、磁気記録媒体に対向する
浮上面との角度を鋭角に設定することによって形成され
ている。この場合、傾斜面とスライダ1の浮上面との成
す角度をθ(図2参照)とすると、厚さの割合は「si
nθ」で決定されるため、傾斜面としない場合に比較し
て確実に薄くすることができる。Here, the inclined surface of the surface of the slider 1 on which the above-mentioned electromagnetic transducer 2 is provided is formed by setting the angle between the slider 1 and the air bearing surface facing the magnetic recording medium at an acute angle. In this case, assuming that the angle between the inclined surface and the flying surface of the slider 1 is θ (see FIG. 2), the thickness ratio is “si
nθ ”, the thickness can be reliably reduced as compared with the case where the surface is not inclined.
【0013】具体的には、この電磁変換素子が付される
面の傾斜面は、磁気記録媒体と対向する浮上面との角度
を、例えば「45°±5°」に設定されている。この場
合、θ=45°とすると、スライダ1の厚さは、従来例
の場合(端面がスライダ浮上面に直交する場合)に比較
して約3割薄くすることができる。Specifically, the angle of the inclined surface on which the electromagnetic transducer is provided is set to, for example, “45 ° ± 5 °” with respect to the air bearing surface facing the magnetic recording medium. In this case, if θ = 45 °, the thickness of the slider 1 can be reduced by about 30% compared to the conventional example (the case where the end face is perpendicular to the slider flying surface).
【0014】図2に、ウェハからロー(RoW)状態に
加工する場合の説明図を示す。この場合、従来例では電
磁変換素子及びターミナル電極が形成された面に対して
ブレードを直角に設定してウェハからRoW状態に切り
出していたのに対し、本実施形態では、ブレードの角度
を電磁変換素子2及びターミナル電極4,4を形成され
た面と、磁気記録媒体に対向する浮上面との角度を鋭角
になるように、例えば上述したようにθ=45°に設定
してRoW状態に切り出す。FIG. 2 is an explanatory view in the case of processing from a wafer to a low (RoW) state. In this case, in the conventional example, the blade is set at a right angle to the surface on which the electromagnetic transducer and the terminal electrode are formed, and the wafer is cut into a RoW state. The angle between the surface on which the element 2 and the terminal electrodes 4 and 4 are formed and the floating surface facing the magnetic recording medium are set to an acute angle, for example, θ = 45 ° as described above, and cut into a RoW state. .
【0015】図3は、切り出したRoWの側面図であっ
て、図3(A)(b)は、切り出したRoWの側面図
で、その後、図3(B)では浮上面に所定間隔をへだて
て二本のレール部5,5を形成し、更に図3(C)では
浮上面の上流側に部分傾斜面(テーパ部)6を設け、最
終的には図1の如くチップ状に形成する。FIG. 3 is a side view of the cut-out RoW, and FIGS. 3A and 3B are side views of the cut-out RoW. In FIG. In FIG. 3C, a partial inclined surface (tapered portion) 6 is provided on the upstream side of the air bearing surface, and finally formed in a chip shape as shown in FIG. .
【0016】このように、本実施形態にあっては、従来
工程と同一のプロセスで製造されたウェハを、RoW状
態に切り出す時に、ブレードの角度を図2に点線で示す
ように変更することによって、スライダの厚みを薄くし
て小型化することが可能となった。As described above, in the present embodiment, when a wafer manufactured by the same process as the conventional process is cut into a RoW state, the angle of the blade is changed as shown by a dotted line in FIG. The thickness of the slider can be reduced to reduce the size.
【0017】同時に、スライダの厚みを薄くして小型化
しても、電磁変換素子2及びターミナル電極4,4の装
着面は従来例と同等の装着面積を確保することが可能と
なり、このため、ターミナルサイズを変更する事無く、
リード線のボンディングポイントの位置出しも容易に成
し得る薄膜磁気ヘッドを得ることができる。At the same time, even if the slider is made thinner and smaller, the mounting surface of the electromagnetic transducer 2 and the terminal electrodes 4 and 4 can have the same mounting area as that of the conventional example. Without changing the size
It is possible to obtain a thin-film magnetic head that can easily position the bonding points of the lead wires.
【0018】[0018]
【発明の効果】本発明は以上のように構成され機能する
ので、これによると、スライダの厚みを薄くして小型化
しても、電磁変換素子及びターミナル電極の装着面は従
来例と同等の装着面積を確保することが可能となり、こ
のため、ターミナルサイズを変更する事無く、リード線
のボンディングポイントの位置出しも容易に成し得ると
いう従来にない優れた薄膜磁気ヘッド装置を提供するこ
とができる。The present invention is constructed and functions as described above. According to this, even if the slider is thinned and downsized, the mounting surfaces of the electromagnetic transducer and the terminal electrode are the same as those of the conventional example. It is possible to secure an area, and therefore, it is possible to provide an unprecedented excellent thin-film magnetic head device in which the position of the bonding point of the lead wire can be easily determined without changing the terminal size. .
【図1】本発明の一実施形態を示す斜視図である。FIG. 1 is a perspective view showing an embodiment of the present invention.
【図2】図1における薄膜磁気ヘッドのスライダ部分を
ウェハから切り出す場合のプロセスを示す説明図であ
る。FIG. 2 is an explanatory view showing a process when a slider portion of the thin-film magnetic head in FIG. 1 is cut out from a wafer.
【図3】図2において切り出したスライダ部分の加工工
程を示す図で、図3(A)は切り出した直後の状態を示
し、図3(B)はレール部を形成した場合を示し、図3
(C)は形成されたレール部の先端部側に更に部分傾斜
面(テーパ部)を付した場合を示す説明図である。3A and 3B are views showing a process of processing a slider portion cut out in FIG. 2; FIG. 3A shows a state immediately after cutting out; FIG. 3B shows a case where a rail portion is formed;
(C) is an explanatory view showing a case where a partially inclined surface (tapered portion) is further provided on the tip end side of the formed rail portion.
1 スライダ 2 保護膜 3 電磁変換素子 4 ターミナル電極 5 レール部 6 部分傾斜面(テーパ部) DESCRIPTION OF SYMBOLS 1 Slider 2 Protective film 3 Electromagnetic transducer 4 Terminal electrode 5 Rail part 6 Partially inclined surface (taper part)
Claims (3)
ダの端面に装備された電磁変換素子とを有する薄膜磁気
ヘッド装置において、 前記スライダの前記電磁変換素子が付される面を傾斜面
としたことを特徴とする薄膜磁気ヘッド装置。1. A thin-film magnetic head device having a slider having a floating surface and an electromagnetic transducer mounted on an end face of the slider, wherein a surface of the slider to which the electromagnetic transducer is attached is an inclined surface. A thin film magnetic head device characterized by the above-mentioned.
れる面の傾斜面は、磁気記録媒体と対向する浮上面との
角度を鋭角に設定して成ることを特徴とした請求項1記
載の薄膜磁気ヘッド装置。2. The slider according to claim 1, wherein an inclined surface of the slider on which the electromagnetic transducer is provided has an acute angle with a floating surface facing a magnetic recording medium. Thin film magnetic head device.
れる面の傾斜面は、磁気記録媒体と対向する浮上面との
角度を45°±5°に設定したことを特徴とする請求項
1記載の薄膜磁気ヘッド装置。3. An inclined surface of the slider to which the electromagnetic transducer is attached has an angle of 45 ° ± 5 ° with respect to a floating surface facing a magnetic recording medium. The thin-film magnetic head device according to the above.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22362196A JPH1064014A (en) | 1996-08-26 | 1996-08-26 | Thin film magnetic head device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22362196A JPH1064014A (en) | 1996-08-26 | 1996-08-26 | Thin film magnetic head device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH1064014A true JPH1064014A (en) | 1998-03-06 |
Family
ID=16801084
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22362196A Pending JPH1064014A (en) | 1996-08-26 | 1996-08-26 | Thin film magnetic head device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH1064014A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7782568B2 (en) | 2005-02-14 | 2010-08-24 | Hitachi Global Storage Technologies Netherlands B.V. | Compact thin-film magnetic head and magnetic disk drive using the same |
JP2013115068A (en) * | 2011-11-25 | 2013-06-10 | Murata Mfg Co Ltd | Electronic part and method for manufacturing the same |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61148622A (en) * | 1984-12-21 | 1986-07-07 | Nippon Telegr & Teleph Corp <Ntt> | Thin film head |
JPH0676243A (en) * | 1992-08-28 | 1994-03-18 | Hitachi Ltd | Thin film magnetic head |
JPH06243431A (en) * | 1993-02-18 | 1994-09-02 | Hitachi Ltd | Magnetic head slider and magnetic recording and reproducing device |
-
1996
- 1996-08-26 JP JP22362196A patent/JPH1064014A/en active Pending
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61148622A (en) * | 1984-12-21 | 1986-07-07 | Nippon Telegr & Teleph Corp <Ntt> | Thin film head |
JPH0676243A (en) * | 1992-08-28 | 1994-03-18 | Hitachi Ltd | Thin film magnetic head |
JPH06243431A (en) * | 1993-02-18 | 1994-09-02 | Hitachi Ltd | Magnetic head slider and magnetic recording and reproducing device |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7782568B2 (en) | 2005-02-14 | 2010-08-24 | Hitachi Global Storage Technologies Netherlands B.V. | Compact thin-film magnetic head and magnetic disk drive using the same |
JP2013115068A (en) * | 2011-11-25 | 2013-06-10 | Murata Mfg Co Ltd | Electronic part and method for manufacturing the same |
US9058923B2 (en) | 2011-11-25 | 2015-06-16 | Murata Manufacturing Co., Ltd. | Electronic component and manufacturing method thereof |
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Legal Events
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A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 19980707 |