JPH06243431A - Magnetic head slider and magnetic recording and reproducing device - Google Patents

Abstract

PURPOSE:To provide a magnetic recording and reproducing device suitable for high-density magnetic recording by specifying the angle formed by the rear end face and gliding surface of a slider mounted with a magnetic head to a prescribed value. CONSTITUTION:The angle theta formed by the rear end face 12 and gliding surface 11 of the slider 10 mounted with the magnetic head 17 is specified to <=85 deg. or >=95 deg.. The area of the rear end face 12 is increased by shifting the angle formed by the rear end face 12 and gliding surface 11 of the slider 10 from 90 deg. in such a manner, but if the angle is inclined too much, the magnetic head element inclines as well and consequently, the angle formed by the magnetic head 17 and the surface of a magnetic recording medium parts from the optimum conditions for reproducing. Then, the angle theta is preferably set at <=85 deg. or >=95 deg..

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an information storage device, and more particularly to a magnetic disk device capable of high density recording / reproducing of information.

[0002]

2. Description of the Related Art In a magnetic disk device, a magnetic head slider equipped with a magnetic head has been downsized in recent years as the density of magnetic recording has been increased and the device has been downsized. Further, in order to support high density recording, a recording / reproducing separated type magnetic head in which a recording device and a reproducing device are separated has begun to be used.

Conventionally, 4 mm × 4 mm × 3 mm provided on a rectangular parallelepiped block by sliding rails and tapering the tip
A magnetic head was mounted on the rear end of the slider, which is relatively large. However, as the slider has been downsized, the mounting area has been reduced and it has become difficult to form terminals for magnetic head elements and electrodes. Particularly, in the case of the recording / reproducing separated type magnetic head, the number of electrodes is increased as compared with the conventional self-recording / reproducing separated type magnetic head, so that a wider mounting area has been required.

[0004]

SUMMARY OF THE INVENTION The present invention provides a magnetic head slider having a large mounting area even if the magnetic head slider becomes small, and enables a recording / reproducing apparatus suitable for high density magnetic recording. With the goal.

[0005]

When the width and height of the magnetic head slider are constant, the mounting area can be increased by inclining the slider rear end surface from the direction perpendicular to the sliding surface. That is, in the conventional slider, the angle formed between the slider rear end surface and the sliding surface is approximately 90 degrees. By shifting the angle between the slider rear end surface and the sliding surface from 90 degrees, the area of the rear end surface increases. The larger the tilting angle is, the larger the area increases.However, if the tilting angle is too large, the magnetic head element formed on the rear end surface also tilts. Is not desirable.

FIG. 1 is a cross-sectional view of a side surface of a magnetic head slider manufactured by inclining the rear end surface of the slider and a view of the rear end surface seen obliquely from above. The width of the slider 10 is w, the height is d, and the angle between the sliding surface 11 and the rear end surface 12 of the slider is θ.
Then, the size of the portion of the rear end face where the magnetic head is mounted is w in width and d / sin θ in height. sin θ is θ = 90
The maximum value is 1 in degrees, but the value decreases with distance from 90 degrees, for example, becomes 0.5 at θ = 30 degrees or 150 degrees. In this case, the height of the mounting portion of the magnetic head is the height of the slider. And the mounting area is twice as large as that of the conventional slider having θ = 90 degrees. The preferred range of the value of θ is 10
Degrees ≤ θ ≤ 85 degrees or 95 degrees ≤ θ ≤ 175 degrees.

Further, as shown in FIG. 1, by mounting the magnetic head on the inclined rear end surface, the magnetic field distribution in the running direction of the magnetic head generated from the tip of the recording magnetic head is at the center of the gap of the magnetic head. On the other hand, it becomes a non-target before and after. This situation is shown in FIG.

FIG. 1A shows the case where the magnetic field distribution is asymmetric,
FIG. 2B shows a conventional symmetrical case. Magnetic recording medium 2
If the easy axis of magnetization 0 forms an angle with the medium surface,
When the magnetic field distribution 22 of the magnetic head 21 is not symmetrical, the recording efficiency is improved, and the practically desirable effect of improving the linear recording density and the overwrite characteristic is produced. In the actual design of the magnetic head slider, it is necessary to consider at least two factors: the effect of improving the efficiency of the magnetic head for recording and the effect of increasing the mounting area.

In the magnetic head slider having the rear end surface inclined according to the present invention, the slider has a dimension of 3 mm in the running direction.
Below, the width is 2.5 mm or less and the height is 1.5 mm or less, which is particularly effective. In particular, when a recording / reproducing separated type magnetic head having a large number of electrode terminals of 3 or more is mounted, it is desirable that the size of each bonding pad for electrical connection be 300 μm × 100 μm or more per pad. In consideration of the above, the present invention is extremely effective in mounting a magnetic head.

Further, the magnetic head slider handled in the present invention is particularly suitable for high density magnetic recording. Specifically, the linear recording density is several tens of kFCI or more, and the track density is several kT.
It is suitable for magnetic recording of PI or higher. Linear recording density tens of kF
When performing magnetic recording at CI or more, the recording bit length is 0.
Since the thickness is 5 μm or less, it is necessary to set the spacing distance between the magnetic head tip and the medium surface to be 0.1 μm or less in order to effectively perform magnetic recording. In this case, it is necessary to reduce the flying distance of the magnetic head slider from the surface of the magnetic recording medium, but if the small magnetic head slider of the present invention is used, the running followability with respect to micro irregularities on the medium surface is improved, and Stable levitation is possible even when the thickness is less than 05 μm, and it is particularly suitable for use in a spacing range of 0.1 μm or less and 0.02 μm or more.

In the high density magnetic recording apparatus, the track width of magnetic recording is 5 μm or less, preferably 2 μm or less, 0.1.
It is desired that the thickness be at least μm. Track width is 0.1μ
If it is less than m, it becomes difficult to manufacture the magnetic head with good reproducibility.

[0012]

By adopting such a structure, it becomes possible to put a small magnetic head slider into practical use. Further, since this structure is extremely effective in improving the recording density of magnetic recording, the effect of greatly improving the performance of the magnetic recording / reproducing apparatus is brought about.

[0013]

【Example】

Example 1 A magnetic head slider having a structure shown in FIG. 1 was prepared by using a zirconia sintered body as a slider substrate. As the magnetic shield film 13, a CoNbZr amorphous film having a thickness of 2 μm was formed by a sputtering method. After processed into a predetermined shape by photolithography, Al is used as an electrical insulation layer.
_{A 2} O ₃ film was formed to a thickness of 0.3 μm. As a magnetic sensitive film of the magnetoresistive effect element 14 for reproduction, permalloy (Ni—Fe alloy) was formed with a thickness of 15 nm by a sputtering method.

After forming a FeMnRu alloy film for fixing magnetic domains and an Nb film as a shunt bias film, the laminated film of a portion corresponding to the magnetoresistive effect element 14 for reproduction is formed to 1.5 μm × 5 μm by photolithography. C formed with a thickness of 2 μm by sputtering using a mask as an electrode
A u film was formed. At this time, the distance between the Cu electrodes formed on both ends of the permalloy film was specified to be 1.5 μm. Cu electrode is 500μm by patterning Cu film
It was drawn out of the magnetic head as a bonding pad of × 200 μm. After covering the Cu electrode with an Al ₂ O ₃ electric insulating film, a permalloy film 1 was used as a magnetic shield layer and a magnetic pole.
6 was formed by sputtering to a thickness of 2 μm and processed into a predetermined shape by photolithography.

An Al ₂ O ₃ film for electrical insulation is used as a part of 0.3 μm.
After forming a thickness of m 2, a Cu coil 15 having a thickness of 3 μm was formed by a sputtering method and a photolithography method.
The end of the Cu coil is also 500 μm via the Cu lead wire.
It was drawn out of the magnetic head as a bonding pad of × 200 μm. After covering the Cu coil with an Al ₂ O ₃ electric insulating film, a 2 μm permalloy film 16 as a magnetic pole is formed on the Cu coil.
formed to a thickness of m. This permalloy film was defined by photolithography so that the width of the magnetic pole tip was 1.7 μm. After forming a passivation protective film on this,
A magnetic head was cut out from the slider substrate. At this time, it is cut out at an angle of 45 degrees with respect to the substrate surface, and then polished to have three slider rails for gliding and floating. The length in the running direction is 2.8 mm, the width is 2.0 mm, and the height is A magnetic head slider having a thickness of 1.3 mm and an angle between the sliding surface and the rear end surface of the slider of 45 degrees was manufactured.

As a magnetic recording medium, a Cr film having a thickness of 0.2 μm was formed as a base film on a glass substrate having a diameter of 2.5 inches and a CoCrT having a saturation magnetic flux density of 680 emu / cc.
An in-plane magnetic recording medium having an a film of 40 nm and a C film of 15 nm as a protective film was prepared. The magnetron sputtering method was used for film formation. The coercive force of the medium was 2.2 kOe.

A magnetic recording / reproducing apparatus was produced by using this magnetic recording medium and the above-mentioned magnetic head slider. FIG. 3 shows the results of examining the relationship between the spacing, which is the distance between the magnetic head slider and the strong surface of the magnetic recording medium, and the output half recording density (D ₅₀ ). As a comparative example, the characteristics of a magnetic recording / reproducing apparatus which employs a magnetic head slider having the same structure except that a large slider whose rear end surface is 90 degrees with respect to the sliding surface is used. In the case of the comparative example, when the spacing is 0.05 μm or less, stable flying becomes difficult and the characteristics cannot be measured.

As is clear from FIG. 3, as the spacing was reduced, the output half recording density was increased. Particularly, when the magnetic head slider according to the present invention is used in a region where the spacing is 0.08 μm or less, D ₅₀ is 70.
Stable levitation was confirmed even when kFCI was exceeded and the spacing was reduced. As a result, it was confirmed that the magnetic recording device having the configuration of the present invention is desirable for high density magnetic recording.

[0019]

According to the present invention, by tilting the rear end face of the magnetic head slider, it becomes easy to form a magnetic head element and a bonding pad for electrical connection, and a small magnetic head suitable for low flying height. The slider can be easily manufactured. As a result, a magnetic recording / reproducing device suitable for high-density magnetic recording can be realized. In the magnetic head manufacturing process, when a large number of magnetic head elements formed on a large-area slider substrate are cut out from the substrate in units of magnetic head sliders, only one direction is obliquely cut out, and the other manufacturing processes can be followed. Therefore, the performance of the magnetic recording device can be improved with almost no increase in production cost.

[Brief description of drawings]

FIG. 1 is a side sectional view of a magnetic head slider of the present invention (a).
And rear view.

FIG. 2 is an explanatory diagram of a magnetic field distribution emitted from the tip of the magnetic head.

FIG. 3 is a characteristic diagram of spacing and output half recording density of the magnetic recording / reproducing apparatus according to the present invention.

[Explanation of symbols]

10 ... Magnetic head slider, 11 ... Sliding surface, 12 ... Rear end surface, 13 ... Magnetic shield layer, 14 ... Magnetoresistive effect element,
15 ... Cu coil, 16 ... Permalloy film, 17 ... Magnetic head, 18 ... Bonding pad.

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Mikio Suzuki 1-280, Higashi Koikekubo, Kokubunji, Tokyo (Inside Central Research Laboratory, Hitachi, Ltd.) Hitachi, Ltd., Hitachi Research Laboratory

Claims (6)

[Claims] 1. A magnetic head slider, characterized in that an angle formed by a slider rear end surface on which a magnetic head is mounted and a sliding surface is 85 degrees or less or 95 degrees or more. 2. The length in the traveling direction according to claim 1, which is 3 mm.
Below, a magnetic head slider with a width of 2.5 mm or less and a height of 1.5 mm or less. 3. A magnetic head slider according to claim 1, wherein a recording / reproducing separated type magnetic head is mounted as the magnetic head. 4. A magnetic head and thin film magnetic recording according to claim 1, 2 or 3, wherein the magnetic head has the slider shape and the magnetic field generated from the tip of the recording magnetic head is not symmetrical in the running direction distribution of the magnetic head. Magnetic recording / reproducing apparatus using a medium. 5. The distance between the end face of the magnetic head and the surface of the thin film magnetic recording medium according to claim 4, the distance being 0.1 μm or less, 0.02.
A magnetic recording / reproducing apparatus having a size of μm or more. 6. The magnetic recording / reproducing apparatus according to claim 5, wherein the track width of the magnetic head is 2 μm or less and 0.1 μm or more.