JPH058684Y2 - - Google Patents

Info

Publication number
JPH058684Y2
JPH058684Y2 JP3882686U JP3882686U JPH058684Y2 JP H058684 Y2 JPH058684 Y2 JP H058684Y2 JP 3882686 U JP3882686 U JP 3882686U JP 3882686 U JP3882686 U JP 3882686U JP H058684 Y2 JPH058684 Y2 JP H058684Y2
Authority
JP
Japan
Prior art keywords
piezoresistive element
insulating film
conductive part
shows
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3882686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62151770U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3882686U priority Critical patent/JPH058684Y2/ja
Publication of JPS62151770U publication Critical patent/JPS62151770U/ja
Application granted granted Critical
Publication of JPH058684Y2 publication Critical patent/JPH058684Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP3882686U 1986-03-17 1986-03-17 Expired - Lifetime JPH058684Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enExample) 1986-03-17 1986-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enExample) 1986-03-17 1986-03-17

Publications (2)

Publication Number Publication Date
JPS62151770U JPS62151770U (enExample) 1987-09-26
JPH058684Y2 true JPH058684Y2 (enExample) 1993-03-04

Family

ID=30851437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3882686U Expired - Lifetime JPH058684Y2 (enExample) 1986-03-17 1986-03-17

Country Status (1)

Country Link
JP (1) JPH058684Y2 (enExample)

Also Published As

Publication number Publication date
JPS62151770U (enExample) 1987-09-26

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