JPH058684Y2 - - Google Patents

Info

Publication number
JPH058684Y2
JPH058684Y2 JP3882686U JP3882686U JPH058684Y2 JP H058684 Y2 JPH058684 Y2 JP H058684Y2 JP 3882686 U JP3882686 U JP 3882686U JP 3882686 U JP3882686 U JP 3882686U JP H058684 Y2 JPH058684 Y2 JP H058684Y2
Authority
JP
Japan
Prior art keywords
piezoresistive element
insulating film
conductive part
shows
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP3882686U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62151770U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3882686U priority Critical patent/JPH058684Y2/ja
Publication of JPS62151770U publication Critical patent/JPS62151770U/ja
Application granted granted Critical
Publication of JPH058684Y2 publication Critical patent/JPH058684Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP3882686U 1986-03-17 1986-03-17 Expired - Lifetime JPH058684Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Publications (2)

Publication Number Publication Date
JPS62151770U JPS62151770U (enrdf_load_stackoverflow) 1987-09-26
JPH058684Y2 true JPH058684Y2 (enrdf_load_stackoverflow) 1993-03-04

Family

ID=30851437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3882686U Expired - Lifetime JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Country Status (1)

Country Link
JP (1) JPH058684Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS62151770U (enrdf_load_stackoverflow) 1987-09-26

Similar Documents

Publication Publication Date Title
EP0762096B1 (en) Vertically integrated sensor structure and method for making same
EP0010204B1 (en) Semiconductor absolute pressure transducer assembly
JP2517467B2 (ja) 静電容量式圧力センサ
US4295115A (en) Semiconductor absolute pressure transducer assembly and method
GB2194344A (en) Pressure transducer and method of fabricating same
WO2000022397A1 (fr) Capteur de pression capacitif
US4531267A (en) Method for forming a pressure sensor
JPH0324793B2 (enrdf_load_stackoverflow)
WO2021023251A1 (zh) Mems结构、mems结构的制作方法及胎压传感器
JPH04143627A (ja) 静電容量式圧力センサおよびその製造方法
US6649988B2 (en) Semiconductor pressure sensor decreasing creep stress in <110> crystalline axis direction
JPH058684Y2 (enrdf_load_stackoverflow)
JP2850558B2 (ja) 半導体圧力センサおよびその製造方法
JP6970935B2 (ja) 物理量センサ
KR20050075225A (ko) 단일칩으로 집적되는 ｍｅｍｓ 멀티 센서 및 그 제조방법
JPH0420130B2 (enrdf_load_stackoverflow)
US20250224286A1 (en) Sensor chip, pressure sensor, method of fabricating pressure sensor
JP2694594B2 (ja) 圧力センサ
JP2573535Y2 (ja) 圧力センサ
US20250237566A1 (en) Sensor chip
JPS6325512B2 (enrdf_load_stackoverflow)
JPH06163939A (ja) 半導体圧力センサ及びその製造方法
JPH02116174A (ja) 半導体圧力センサ
JPH07318445A (ja) 静電容量型圧力センサとその製造方法
JPS5848840A (ja) 電気抵抗式湿度センサ及びその製造方法