JPS62151770U - - Google Patents

Info

Publication number
JPS62151770U
JPS62151770U JP3882686U JP3882686U JPS62151770U JP S62151770 U JPS62151770 U JP S62151770U JP 3882686 U JP3882686 U JP 3882686U JP 3882686 U JP3882686 U JP 3882686U JP S62151770 U JPS62151770 U JP S62151770U
Authority
JP
Japan
Prior art keywords
piezoresistive element
diaphragm
pressure
semiconductor
insulating film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3882686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH058684Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3882686U priority Critical patent/JPH058684Y2/ja
Publication of JPS62151770U publication Critical patent/JPS62151770U/ja
Application granted granted Critical
Publication of JPH058684Y2 publication Critical patent/JPH058684Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP3882686U 1986-03-17 1986-03-17 Expired - Lifetime JPH058684Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3882686U JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Publications (2)

Publication Number Publication Date
JPS62151770U true JPS62151770U (enrdf_load_stackoverflow) 1987-09-26
JPH058684Y2 JPH058684Y2 (enrdf_load_stackoverflow) 1993-03-04

Family

ID=30851437

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3882686U Expired - Lifetime JPH058684Y2 (enrdf_load_stackoverflow) 1986-03-17 1986-03-17

Country Status (1)

Country Link
JP (1) JPH058684Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH058684Y2 (enrdf_load_stackoverflow) 1993-03-04

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